CN105444893A - Self-testing and self-calibrating system of infrared thermopile temperature sensor - Google Patents
Self-testing and self-calibrating system of infrared thermopile temperature sensor Download PDFInfo
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
The invention discloses a self-testing and self-calibrating system of an infrared thermopile temperature sensor, and realizes the self-testing and self-calibrating function of the infrared thermopile temperature sensor under the effect of on-chip electric excitation. The system is characterized in that the on-chip excitation is conducted to realize the signal amplification, the analog-to-digital/ digital-to-analog conversion and the digital processing for the output signal of a thermopile while the electric excitation is provided for the infrared thermopile temperature sensor at the same time based on the conventional MEMS process. Therefore, the self-testing and self-calibrating function for the on-chip response ratio of the infrared thermopile temperature sensor can be realized. Meanwhile, the influence of the external environment on the response ratio of the infrared thermopile temperature sensor is optimized. The testing and calibrating cost caused by adopting off-chip high-precision equipment is reduced.
Description
Technical field
The present invention relates to a kind of self-test for infrared thermopile temperature sensor and self-calibration system, can be applicable in infrared thermopile temperature-sensing system internal circuit design.
Background technology
All objects of occurring in nature, as long as its temperature just exists molecule and the random motion of atom higher than absolute temperature (-273 DEG C), its surface will constantly emitting infrared radiation.And the infrared energy radiation power that the object of different temperatures discharges is different, therefore by the ir radiant power that inspected object is outwards launched, detector cells can obtain the temperature of object.Incident radiation signal can be transformed into the device that electric signal exports by infrared eye, makes the imperceptible thermal imagery of many script human eyes be transformed into other physical quantitys that can discover and measure, thus has deepened the understanding to nature essence.Thermopile IR detector is a kind of infrared eye of contactless and non-refrigeration type, have and can mainly detect constant radiant amount relative to other infrared eyes, detection output signal can be carried out to stationary body, without the need to bias voltage, the advantages such as the simple and preparation cost of test amplifying circuit is low, therefore obtain in military domain and civil area and apply comparatively widely.
Along with the development of semiconductor fabrication process, microelectronics manufacture basis absorbs MEMS (Micro-Electro-Mechanical-System) technology merging other technology and grows up gradually.Obtain the today developed rapidly in device technology, MEMS technology has almost been applied to every field simultaneously, especially requires the high-tech area of small size, high precision, high reliability and low-power consumption, creates huge change to the life of the mankind.Simultaneously after MEMS technology introduces infrared eye making, infrared eye shows larger advantage.
But on the one hand the parameter value of MEMS may change because of the change of environmental variance (temperature and pressure) and manufacturing process variable, the sensitivity of MEMS sensor equipment is with the larger parameter of the variable effect of environment temperature simultaneously, therefore present MEMS chip all will utilize large-scale correcting device to carry out factory calibration before applying to corresponding field, thereby produces the calibration expense of great number; On the other hand along with the development of MEMS technology, highly integrated circuit is widely used, MEMS is except electric excitation, also need the input and output of measurement sound, light, vibration, fluid, pressure, temperature or chemical equal excitation, therefore test these circuit and become more and more difficult, the testing cost simultaneously produced also remains high.
Summary of the invention
For effectively reducing the calibration of MEMS infrared eye and testing cost and reducing its difficulty of test, the present invention proposes a kind of self-test and the self-calibration system that are applicable to infrared thermopile temperature sensor, carry out analyzing to the test response of sensor in systems in which to realize electric signal in employing system as test and excitation and differentiate, thus self-test and self calibration on the sheet realizing sensing system.
In order to realize above object, system proposed by the invention mainly comprises: the thermoelectric pile of (1) perception infrared radiation and for providing the heating resistor of pyrotoxin, the voltage value of heating resistor is exported by digital signal processing module on sheet, the Digital self-test examination supply voltage signal digital to analog converter on sheet exported is converted to analog voltage and is connected to heating resistor one end, the other end ground connection of heating resistor, electromotive force is 0; (2) voltage difference at heating resistor two ends is connected to the input end of digital signal processing module by analog to digital converter; (3) the response output voltage signal of thermoelectric pile after amplifier and analog to digital converter as the input end of digital signal processing module; (4) the local temperature signal detected is connected to the input end of digital signal processing module by local temperature measuring circuit by analog to digital converter; (5) digital signal processing module receives the output signal of each analog to digital converter ADC, exports digital power system voltage to digital to analog converter DAC or immediate data output after internal analysis and judgement.
Self-test and the self-calibration process of said system are respectively: under self-testing mode, digital signal processing module produces the self-test supply voltage being greater than 0 and is sent to heating resistor, thus make it generate heat for thermoelectric pile provides hot irradiation, thermoelectric pile absorbs the hot irradiation that heating resistor produces, thus the voltage difference Δ V that meets with a response
1, in conjunction with the voltage difference Vr at the heating resistor two ends obtained
1thus calculate the responsiveness R of now device
1and preserve, then repeat the hot irradiation power changing heating resistor, obtain the voltage difference Vr of heating resistor two ends change
2with the change voltage difference Δ V that thermoelectric pile exports
2, calculate responsiveness R when changing hot irradiation power each time
2and preserve, the responsiveness R that twice is obtained
1and R
2carry out difference, and difference operation result is analyzed and obtains test result after judging, thus self-test on the sheet realizing infrared thermopile temperature sensor response rate, under self-calibration mode, on sheet, self-test supply voltage signal exports is 0, digital signal processing module is by inner counting, self calibration signal is activated, thus the self calibration supply voltage making to be greater than 0 is sent to heating resistor, it is made to generate heat for thermoelectric pile provides hot irradiation, thermoelectric pile absorbs the hot irradiation that heating resistor produces, obtain the voltage difference Vr at response voltage difference DELTA V now and heating resistor two ends, thus calculate the responsiveness R of now device and preserve, then on sheet, self calibration supply voltage signal exports is 0, heating resistor does not generate heat, thermoelectric pile normally works by absorbing infrared radiation, the responsiveness R calculated under now utilizing self calibration supply voltage and infrared radiation efficiency, estimate actual infrared response rate, thus self calibration on the sheet realizing infrared thermopile temperature sensor response rate.
The self-test method of above-mentioned thermoelectric pile is specially: be under given irradiation power P according to the responsiveness R of thermopile IR detector, and the output voltage Δ V of thermoelectric pile and the ratio of incident irradiance power, be expressed as:
The irradiation power P that wherein heating resistor produces is:
V in formula (1-3)
rfor the voltage at heating resistor two ends, r is heating resistor resistance, and ε is the radiation coefficient of heating resistor; Formula (1-3) is substituted into formula (1-2) to obtain:
Formula (1-4) is utilized to obtain responsiveness R respective under twice different heat radiation condition
1and R
2for:
Thus calculate R
1and R
2the two value of delta:
δ＝|R
1-R
2|(1-6)
According to formula (1-6) specification error threshold value δ in digital signal processing module
t, as δ≤δ
ttime, illustrate that thermoelectric pile normally works, test is passed through; Otherwise thermoelectric pile operation irregularity is described, test is not passed through.
The method for self-calibrating of the responsiveness of detector is specially: the expression formula absorbing the efficiency eta of infrared radiation according to thermoelectric pile
Wherein R
ofor the infrared response rate of detector, R
efor the electrical response rate of detector, counted by internal system, self calibration signal is activated, and produces a self calibration supply voltage signal, utilizes the voltage V at the heating resistor two ends obtained under the effect of this voltage signal
routput voltage Δ V with the thermoelectric pile of response, can obtain the electrical response rate R of now detector
e, finally in conjunction with the responsiveness R that formula (1-7) obtains under current environmental temperature
ofor:
Wherein k=η/ε, be constant, r is heating resistor resistance, utilizes the self calibration carrying out responsiveness that formula (1-8) can be real-time.
Wherein, the defining method of the resistance r of described heating resistor is: disconnected by that one end connected with ground by thermoelectric pile and drawn, the node of drawing is connected with a fixed resistance afterwards ground connection, under the condition initially powered on, measure the voltage at fixed resistance two ends, then passing ratio converts and obtains the resistance of heating resistor.
The present invention is compared with the output system of existing infrared thermopile temperature sensor, its advantage is: the present invention is under the condition without the need to additional criteria signal source, can encourage for infrared thermopile temperature sensor provides on sheet, and then adopt an orderly design cycle to realize real-time infrared thermopile temperature sensor self-test and self calibration.Save test and the calibration expense of infrared thermopile temperature sensor, there is structure simple, easy to operate, the features such as cost is low.
Accompanying drawing explanation
Fig. 1 is infrared thermopile temperature sensor exemplary block diagram.
Fig. 2 is of the present invention upper self-test and self-calibration system circuit diagram.
Fig. 3 is self-test workflow diagram on infrared thermopile temperature sensor sheet of the present invention.
Fig. 4 is self calibration workflow diagram on infrared thermopile temperature sensor sheet of the present invention.
Fig. 5 is the operative relationship on infrared thermopile temperature sensor sheet of the present invention between self-test and self calibration.
Embodiment
Describe the present invention below with reference to accompanying drawings with in conjunction with principle of work.
Fig. 1 is infrared thermopile temperature sensor exemplary block diagram.Mainly comprise thermoelectric pile 1, amplifier 2, local temperature measuring circuit 3 and temperature calculation circuit 4 etc.Principle of work is: according to Si Difen-Boltzmann law, (radiation power of a black-body surface is directly proportional to the biquadratic of the thermodynamic temperature of black matrix itself, also be directly proportional from the surface area of black matrix) and Seebeck effect (closed-loop path is made up of two kinds of conductor materials that work function is different, bi-material produces voltage difference due to temperature difference), thermoelectric pile 1 is by being converted into voltage differential signal △ V by the infrared radiation of perception object under test, this voltage differential signal is by being input in temperature calculation circuit 4 after amplifier 2, simultaneously, the local temperature T that local temperature measuring circuit 3 represents with magnitude of voltage by measuring acquisition
0, this magnitude of voltage is sent in temperature calculation circuit 4.Temperature calculation circuit 4 obtains the voltage differential signal △ V at thermoelectric pile two ends and local temperature signal T
0after, utilize responsiveness R and formula (1-1) that the temperature T of object under test can be obtained
1.
Wherein A
sfor thermoelectric pile absorption area, a is respectively the radiation coefficient dependent constant of object under test and thermoelectric pile, and σ is Si Difen-Boltzmann constant.
In order to realize self-test and the self calibration of thermoelectric pile responsiveness on sheet, present invention utilizes a heating resistor, the effect of this heating resistor produces test and calibration excitation, physical circuit is as shown in Figure 2: the voltage value of heating resistor 1 is provided by digital signal processing module on sheet 7, Digital self-test examination supply voltage signal digital to analog converter 5 on sheet that described digital signal processing module 7 exports is converted to analog voltage and is connected to heating resistor 1 one end (p end), the other end (q end) ground connection of heating resistor 1; The voltage difference at heating resistor 1 two ends is connected to the input end of digital signal processing module 7 by analog to digital converter 6; The response output voltage signal of thermoelectric pile is connected the input end of digital signal processing module 7 successively after analog to digital converter 6 through amplifier 2; The local temperature signal detected is connected to the input end of digital signal processing module 7 by local temperature measuring circuit 3 by analog to digital converter 6; Described digital signal processing module 7 receives the output signal of each analog to digital converter 6, analyzes and judges that the rear digital power system voltage that exports exports to digital to analog converter 5 or immediate data.Under self-testing mode, the digital voltage signal being greater than 0 that digital signal processing module 7 produces is converted to the supply voltage 8 of heating resistor through DAC (Digital/AnalogConverter: digital to analog converter) 5, thus heating resistor generates heat for thermoelectric pile provides heat radiation, thermoelectric pile produces a voltage difference by Si Difen-Boltzmann law and Seebeck effect after perceiving the heat radiation of heating resistor generation.Under self-calibration mode, first digital signal processing module 7 produces the digital voltage signal that is greater than 0, this voltage signal makes heating resistor generate heat and produces heat radiation, thus make thermoelectric pile produce corresponding voltage difference, then digital signal processing module 7 is produced as the digital voltage signal of 0, now heating resistor does not generate heat, and thermoelectric pile is in normal mode of operation.One end (p end) of heating resistor is connected with the self-test supply voltage signal that DAC5 on sheet exports, and this voltage signal is produced by digital signal processing module 7, is formed after DAC digital to analog converter 5.
Present invention utilizes voltage excitation signals in a sheet as input, heating resistor is generated heat, thermoelectric pile produces the voltage signal of a representation temperature, then a voltage amplifier is used to amplify the voltage signal exported, an ADC (Analog/DigitalConverter: analog to digital converter) is used to change the digital signal of a rear formation representation temperature to the signal after amplification, responsiveness is now obtained after the voltage signal at this digital signal and heating resistor two ends is carried out logical operation, then input voltage is adjusted, difference is carried out to the responsiveness of 2 different radiation parameters, then to test result analysis and judgement, if mistake appears in test result, stop the operation of chip, if also do not find mistake at the end of test, test and pass through, then input voltage is adjusted, utilize the magnitude of voltage at thermoelectric pile response voltage value and the heating resistor two ends produced by resistance heating, thermoelectric pile is carried out to the calibration of responsiveness.Thus achieve self-test and the self calibration of thermoelectric pile.
The voltage signal at the pumping signal utilizing heating resistor to produce, heating resistor two ends, analog component and digital processing circuit obtain the self-test shown in Fig. 2 and self-calibration system structural drawing.Under the system architecture shown in Fig. 2, first digital signal processing module 7 produces and is connected to self-test on heating resistor or self calibration supply voltage, then receive the voltage being responded output voltage and heating resistor two ends by the thermoelectric pile of resistance heating, export after finally self-test or self calibration logical operation being carried out to the voltage signal received.Wherein the self-test of whole infrared thermopile temperature sensor and self calibration are implemented as: be under given irradiation power P according to the responsiveness R of thermopile IR detector, and the output voltage Δ V of thermoelectric pile and the ratio of incident irradiance power, be expressed as:
The irradiation power P that wherein heating resistor produces is:
V in formula (1-3)
rfor the voltage at heating resistor two ends, r is heating resistor resistance, and ε is the radiation coefficient of heating resistor.Formula (1-3) is substituted into formula (1-2) to obtain:
Utilize formula (1-4) that responsiveness R respective under twice different heat radiation condition can be obtained
1and R
2for:
Thus calculate R
1and R
2the two difference:
δ＝|R
1-R
2|(1-6)
According to formula (1-6) specification error threshold value δ in digital signal processing module
t, as δ≤δ
ttime, illustrate that thermoelectric pile normally works, test is passed through; Otherwise thermoelectric pile operation irregularity is described, test is not passed through; Realize the self-test of thermoelectric pile thus.
Due under different environment temperatures, the responsiveness of thermoelectric pile can change along with the change of environment temperature, so under the condition passed through at the self test results of thermoelectric pile, utilizing the response data of thermoelectric pile to carry out temperature computation also needs to carry out real time calibration to the responsiveness of thermoelectric pile.
Absorb the expression formula of the efficiency eta of infrared radiation according to thermoelectric pile when self calibration:
Wherein R
ofor the infrared response rate (absorbing the output voltage of thermoelectric pile and the ratio of this radiation power during specific ir radiant power) of detector, R
efor the electrical response rate (absorbing the output voltage of thermoelectric pile and the ratio of this heating power during the heating power of specific resistance) of detector, counted by internal system, self calibration signal is activated, produce a self calibration supply voltage signal, utilize the voltage V at the heating resistor two ends obtained under the effect of this voltage signal
routput voltage Δ V with the thermoelectric pile of response, can obtain the electrical response rate R of now detector
e, finally in conjunction with the responsiveness R that formula (1-7) can obtain under current environmental temperature
ofor:
Wherein k=η/ε, for constant, the defining method of the resistance r of heating resistor is: disconnected by that one end (q holds) connected with ground by thermoelectric pile and drawn, the node of drawing is connected with a fixed resistance afterwards ground connection, under the condition initially powered on, measure the voltage (voltage of q end) at fixed resistance two ends, then passing ratio converts and obtains the resistance of heating resistor.Utilize the self calibration carrying out responsiveness that formula (1-8) can be real-time, the responsiveness after calibration can calculate actual temperature according to formula (1-1), thus makes the temperature of output more accurate.
Self-test workflow diagram on the infrared thermopile temperature sensor sheet of Fig. 3 designed by the present invention.After device powers on, first digital signal processing module reads the bias voltage (zero-point voltage) because fabrication error produces, and then the inner self-test voltage value producing heating resistor, and the response of reading now exports △ V
1and Vr
1value, then calculates responsiveness R now
1and determine whether 0, if so, illustrate that thermoelectric pile to hot irradiation normal response, then cannot be tested and do not pass through, stop chip running simultaneously, otherwise preserve responsiveness R
1and proceed self-test operation.The voltage value of adjustment heating resistor is continued in digital signal processing module inside, and reads △ V now
2and Vr
2value, calculates responsiveness R now simultaneously
2and preserve, then to responsiveness R
1and R
2carry out difference, by comparing response error δ and error threshold δ
tsize test result is analyzed and judges.If test result is errorless, then again test, repeat appeal step till meeting test mass requirement; If there is once mistake in test process, then stop the operation of whole chip, represent that test is not passed through, otherwise then test is passed through, carry out next step self calibration operation.
Based on self-alignment workflow on infrared thermopile temperature sensor sheet as shown in Figure 4.First digital signal processing module reads the bias voltage (zero-point voltage) because fabrication error produces, then inside starts counting, the self calibration voltage value of self calibration signal and heating resistor is one by one produced when count value reaches preset value, resistance heating is made to produce heat radiation, then the response by reading now thermoelectric pile exports △ V and Vr, thus carries out responsiveness R
ecalculating and preserve, finally utilize formula (1-9) to the responsiveness R under current environment
ocarry out real time calibration and export, repeating this process until device power-off.
Operative relationship on the infrared thermopile temperature sensor sheet that can obtain designed by the present invention by the workflow diagram of Fig. 3 and Fig. 4 between self-test and self calibration, physical relationship as shown in Figure 5.First heating resistor produces heat radiation under the effect of self-test or self calibration supply voltage, then thermoelectric pile absorbing resistor heat radiation thus produce response output voltage, then carry out the calculating of responsiveness according to the voltage at heating resistor two ends and the output voltage of thermoelectric pile, finally carry out test result under self-test judge or self-test complete after responsiveness calibration computing and result export.Relation in whole operating process between self-test and self calibration comprise following some: (1) self-test and self-calibration process are all based on the responsiveness of device; (2) self-test and self-alignment operation are all carry out under the condition of resistance heating; (3) self test results of whole chip is errorless just can carry out self calibration computing afterwards; (4) self-test and self-calibration process all need the supply voltage providing heating resistor; (5) need in self-test process to adjust voltage value, in self-calibration process, can not voltage value be adjusted.
The present invention is on analyzing responding rate R basis, and the output according to the hot irradiation power P under different condition and thermoelectric pile responds △ V, proposes the self-test to thermoelectric pile responsiveness and self calibration.Use this system, self-test and self calibration speed fast, relative to using outside expensive test and correcting device, not only solve self-test and self-alignment problem in sheet, reduce the volume of test and calibration system, shorten test and alignment time to a great extent, and test and calibration cost.
The present invention mainly comprises: supply voltage in the thermoelectric pile of perception infrared radiation, heating resistor and sheet; Under self-testing mode, arrange supply voltage in sheet, the circuit turn-on that heating resistor connects, resistance heating, the heat radiation that heating resistor produces is absorbed by thermoelectric pile, and the heat radiation of absorption finally exports with the form of voltage signal; Under self-calibration mode, thermoelectric pile normally works by absorbing infrared light supply.By the change in voltage that produces in heating resistor after filtering with amplifying circuit process, an output voltage values be directly proportional to the variable quantity of voltage can be obtained.
The present invention devises a kind of infrared thermopile temperature sensor under electric excitation, and electricity consumption motivation substitution physical stimulus realizes the detection to temperature, makes simple operation to a great extent.
The present invention devises 1 DAC digital to analog converter, realizes carrying out D/A conversion to the digital power system voltage in sheet, thus is converted to the analog input voltage being sent to heating resistor.Have also been devised 2 ADC analog to digital converters, respectively the local temperature voltage of the output voltage signal of thermoelectric pile is carried out to the conversion of analog to digital, and then realize digital processing function.
Principle of design of the present invention is: at test phase, self-test digital voltage signal is produced in digital signal processing module, this voltage signal after DAC digital-to-analog conversion as the simulation supply voltage of heating resistor, heating resistor produces hot irradiation power and carries out hot irradiation to thermoelectric pile, and digital signal processing module calculates the responsiveness R of thermoelectric pile to the data read
1, adjust the hot irradiation power of heating resistor afterwards and the responsiveness R calculated now
2, according to responsiveness R
1and R
2difference judge test result, to realize the object of infrared thermopile temperature sensor being carried out to self-test on sheet; At calibration phase, digital signal processing module inside counting, produce self calibration signal and self calibration supply voltage, to utilize and its connecting circuit of heating resistor provides standard pyrotoxin for infrared thermopile temperature sensor, with digital signal processing module, the response signal of thermoelectric pile is carried out to the calibration of responsiveness R, to realize self calibration on the sheet to infrared thermopile temperature sensor.
The present invention is according to traditional MEMS technology, while infrared thermopile temperature sensor provides electric excitation, can utilize on sheet and encourage, the signal that thermoelectric pile exports is amplified, modulus/digital-to-analog conversion and digital processing, thus the self-test realized responsiveness on infrared thermopile temperature sensor sheet and self calibration.Optimize the impact of external environment condition on thermopile temperature sensor responsiveness, decrease the test and calibration expense that use the outer high-precision equipment of sheet to produce.
Above theoretical analysis can be used for circuit structure of the present invention and idiographic flow are described.In the scope not departing from the present invention and appended claim, various replacement, change and amendment are all possible.Therefore, protection scope of the present invention is not limited to the content disclosed in above theoretical analysis and accompanying drawing.
Claims (4)
1. the self-test of infrared thermopile temperature sensor and self-calibration system, it is characterized in that, comprise: the thermoelectric pile of perception infrared radiation and for providing the heating resistor (1) of pyrotoxin, the voltage value of heating resistor (1) is provided by digital signal processing module on sheet (7), Digital self-test examination supply voltage signal digital to analog converter (5) on sheet that described digital signal processing module (7) exports is converted to analog voltage and is connected to heating resistor (1) one end, the other end ground connection of heating resistor (1); The voltage difference at heating resistor (1) two ends is connected to the input end of digital signal processing module (7) by analog to digital converter (6); The response output voltage signal of thermoelectric pile is connected the input end of digital signal processing module (7) successively after analog to digital converter (6) through amplifier (2); The local temperature signal detected is connected to the input end of digital signal processing module (7) by local temperature measuring circuit (3) by analog to digital converter (6); Described digital signal processing module (7) receives the output signal of each analog to digital converter (6), analyzes and judges that the rear digital power system voltage that exports exports to digital to analog converter (5) or immediate data;
Under self-testing mode, digital signal processing module (7) produces the self-test supply voltage being greater than 0 and is sent to heating resistor (1), it is made to generate heat for thermoelectric pile provides hot irradiation, thermoelectric pile absorbs the hot irradiation that heating resistor (1) produces, thus the voltage difference Δ V that meets with a response
1, in conjunction with the voltage difference Vr at heating resistor (1) two ends obtained
1thus calculate the responsiveness R of now device
1and preserve, then repeat the hot irradiation power changing heating resistor (1), obtain the voltage difference Vr of heating resistor (1) two ends change
2with the change voltage difference Δ V that thermoelectric pile exports
2, calculate responsiveness R when changing hot irradiation power each time
2and preserve, the responsiveness R that twice is obtained
1and R
2carry out difference operation, and difference operation result is analyzed and obtains test result after judging, thus self-test on the sheet realizing infrared thermopile temperature sensor response rate, under self-calibration mode, on sheet, self-test supply voltage signal exports is 0, digital signal processing module (7) is by inner counting, self calibration signal is activated, thus the self calibration supply voltage making to be greater than 0 is sent to heating resistor (1), it is made to generate heat for thermoelectric pile provides hot irradiation, thermoelectric pile absorbs the hot irradiation that heating resistor (1) produces, obtain the voltage difference Vr at response voltage difference DELTA V now and heating resistor (1) two ends, thus calculate the responsiveness R of now device and preserve, then on sheet, self calibration supply voltage signal exports is 0, heating resistor (1) does not generate heat, thermoelectric pile normally works by absorbing infrared radiation, the responsiveness R calculated under now utilizing self calibration supply voltage and infrared radiation efficiency, estimate actual infrared response rate, thus self calibration on the sheet realizing infrared thermopile temperature sensor response rate.
2. the self-test of infrared thermopile temperature sensor as claimed in claim 1 and self-calibration system, it is characterized in that, the self-test method of thermoelectric pile is specially: be under given irradiation power P according to the responsiveness R of thermopile IR detector, the output voltage Δ V of thermoelectric pile and the ratio of incident irradiance power, be expressed as:
The irradiation power P that wherein heating resistor produces is:
V in formula (1-3)
rfor the voltage at heating resistor two ends, r is heating resistor resistance, and ε is the radiation coefficient of heating resistor; Formula (1-3) is substituted into formula (1-2) to obtain:
Formula (1-4) is utilized to obtain responsiveness R respective under twice different heat radiation condition
1and R
2for:
Thus calculate R
1and R
2the two value of delta:
δ＝|R
1-R
2|(1-6)
According to formula (1-6) specification error threshold value δ in digital signal processing module
t, as δ≤δ
ttime, illustrate that thermoelectric pile normally works, test is passed through; Otherwise thermoelectric pile operation irregularity is described, test is not passed through.
3. the self-test of infrared thermopile temperature sensor as claimed in claim 1 and self-calibration system, it is characterized in that, the method for self-calibrating of the responsiveness of detector is specially: the expression formula absorbing the efficiency eta of infrared radiation according to thermoelectric pile
Wherein R
ofor the infrared response rate of detector, R
efor the electrical response rate of detector, counted by internal system, self calibration signal is activated, and produces a self calibration supply voltage signal, utilizes the voltage V at the heating resistor two ends obtained under the effect of this voltage signal
routput voltage Δ V with the thermoelectric pile of response, can obtain the electrical response rate R of now detector
e, finally in conjunction with the responsiveness R that formula (1-7) obtains under current environmental temperature
ofor:
Wherein k=η/ε, be constant, r is heating resistor resistance, utilizes the self calibration carrying out responsiveness that formula (1-8) can be real-time.
4. as claim 2, the self-test of the infrared thermopile temperature sensor described in 3 and self-calibration system, it is characterized in that, the defining method of the resistance r of described heating resistor is: disconnected by that one end connected with ground by thermoelectric pile and drawn, the node of drawing is connected with a fixed resistance afterwards ground connection, under the condition initially powered on, measure the voltage at fixed resistance two ends, then passing ratio converts and obtains the resistance of heating resistor.
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