CN105444708B - 用于在位置测量装置中修正误差的方法 - Google Patents
用于在位置测量装置中修正误差的方法 Download PDFInfo
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- CN105444708B CN105444708B CN201510614273.XA CN201510614273A CN105444708B CN 105444708 B CN105444708 B CN 105444708B CN 201510614273 A CN201510614273 A CN 201510614273A CN 105444708 B CN105444708 B CN 105444708B
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- 238000000034 method Methods 0.000 title claims abstract description 63
- 238000005259 measurement Methods 0.000 title claims description 47
- 238000012937 correction Methods 0.000 claims abstract description 345
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- 230000003287 optical effect Effects 0.000 description 4
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- 230000008901 benefit Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
- G01D18/008—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00 with calibration coefficients stored in memory
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014219188.2 | 2014-09-23 | ||
| DE102014219188.2A DE102014219188A1 (de) | 2014-09-23 | 2014-09-23 | Verfahren zur Fehlerkorrektur in Positionsmesseinrichtungen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105444708A CN105444708A (zh) | 2016-03-30 |
| CN105444708B true CN105444708B (zh) | 2018-02-13 |
Family
ID=54072722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510614273.XA Active CN105444708B (zh) | 2014-09-23 | 2015-09-23 | 用于在位置测量装置中修正误差的方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10060772B2 (enExample) |
| EP (1) | EP3001151B1 (enExample) |
| JP (1) | JP6487302B2 (enExample) |
| CN (1) | CN105444708B (enExample) |
| DE (1) | DE102014219188A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016222275A1 (de) * | 2016-11-14 | 2018-05-17 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung |
| CN108038331B (zh) * | 2017-12-27 | 2022-11-11 | 重庆工商职业学院 | 一种基于云计算的高精度温度数据校正方法 |
| CN112697186B (zh) * | 2019-10-23 | 2022-03-25 | 上海微电子装备（集团）股份有限公司 | 测量校正装置和测量校正方法 |
| WO2022107421A1 (ja) * | 2020-11-20 | 2022-05-27 | パナソニックＩｐマネジメント株式会社 | エンコーダ及び情報処理方法 |
| DE102021121869A1 (de) | 2021-08-24 | 2023-03-02 | Schaeffler Technologies AG & Co. KG | Verfahren zur Kalibrierung und/oder Linearisierung eines Positionssensors; Positionssensor; Hinterachslenkung; Fahrzeug; Computerprogramm |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4462083A (en) * | 1980-06-30 | 1984-07-24 | Dr. Johannes Heidenhain Gmbh | Method of interval interpolation |
| EP1403625A1 (de) * | 2002-09-25 | 2004-03-31 | Siemens Aktiengesellschaft | Kalibriergenerator mit Speicher ( Schwingungsmessung ) |
| CN1894557A (zh) * | 2003-12-16 | 2007-01-10 | 特里伯耶拿有限公司 | 探测仪器的校准 |
| CN1947062A (zh) * | 2004-02-23 | 2007-04-11 | Asml荷兰有限公司 | 基于散射测量数据确定工艺参数值的方法 |
| US8064974B2 (en) * | 2000-08-31 | 2011-11-22 | Tyco Healthcare Group Lp | Method and circuit for storing and providing historical physiological data |
| CN103365246A (zh) * | 2012-04-05 | 2013-10-23 | 菲迪亚股份公司 | 用于数控机床的误差校正的装置 |
| CN103591913A (zh) * | 2013-11-18 | 2014-02-19 | 沈阳黎明航空发动机(集团)有限责任公司 | 一种五坐标测量机综合误差校准方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE58904087D1 (de) * | 1989-07-21 | 1993-05-19 | Heidenhain Gmbh Dr Johannes | Verfahren zum interpolieren von positionsmesssignalen. |
| JPH08201110A (ja) * | 1995-01-30 | 1996-08-09 | Sony Magnescale Inc | 内挿装置 |
| DE102005043569A1 (de) * | 2005-09-12 | 2007-03-22 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| US7619207B2 (en) | 2006-11-08 | 2009-11-17 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
2014
- 2014-09-23 DE DE102014219188.2A patent/DE102014219188A1/de not_active Withdrawn
-
2015
- 2015-09-09 EP EP15184368.7A patent/EP3001151B1/de active Active
- 2015-09-14 US US14/852,650 patent/US10060772B2/en active Active
- 2015-09-17 JP JP2015184244A patent/JP6487302B2/ja active Active
- 2015-09-23 CN CN201510614273.XA patent/CN105444708B/zh active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4462083A (en) * | 1980-06-30 | 1984-07-24 | Dr. Johannes Heidenhain Gmbh | Method of interval interpolation |
| US8064974B2 (en) * | 2000-08-31 | 2011-11-22 | Tyco Healthcare Group Lp | Method and circuit for storing and providing historical physiological data |
| EP1403625A1 (de) * | 2002-09-25 | 2004-03-31 | Siemens Aktiengesellschaft | Kalibriergenerator mit Speicher ( Schwingungsmessung ) |
| CN1894557A (zh) * | 2003-12-16 | 2007-01-10 | 特里伯耶拿有限公司 | 探测仪器的校准 |
| CN1947062A (zh) * | 2004-02-23 | 2007-04-11 | Asml荷兰有限公司 | 基于散射测量数据确定工艺参数值的方法 |
| CN103365246A (zh) * | 2012-04-05 | 2013-10-23 | 菲迪亚股份公司 | 用于数控机床的误差校正的装置 |
| CN103591913A (zh) * | 2013-11-18 | 2014-02-19 | 沈阳黎明航空发动机(集团)有限责任公司 | 一种五坐标测量机综合误差校准方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6487302B2 (ja) | 2019-03-20 |
| EP3001151A1 (de) | 2016-03-30 |
| US10060772B2 (en) | 2018-08-28 |
| CN105444708A (zh) | 2016-03-30 |
| JP2016070930A (ja) | 2016-05-09 |
| US20160084685A1 (en) | 2016-03-24 |
| EP3001151B1 (de) | 2017-06-14 |
| DE102014219188A1 (de) | 2016-03-24 |
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