CN105444646B - A kind of device for being used to measure height and the method for measuring developer solution nozzle height - Google Patents
A kind of device for being used to measure height and the method for measuring developer solution nozzle height Download PDFInfo
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- CN105444646B CN105444646B CN201510765774.8A CN201510765774A CN105444646B CN 105444646 B CN105444646 B CN 105444646B CN 201510765774 A CN201510765774 A CN 201510765774A CN 105444646 B CN105444646 B CN 105444646B
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- height
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- syringe
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
- G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
- G01B5/061—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness height gauges
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- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The present invention relates to a kind of device for being used to measure height and the method for measuring developer solution nozzle height, this device is positioned over to the upper surface of wafer, and the lower surface of bottom plate is close to the upper surface of wafer；Development nozzle for liquid is moved to and shoots out position；Second piston is promoted, the upper surface of measuring plate is close to the lower end of development nozzle for liquid；And the difference in height between the upper surface of measuring plate and the lower surface of bottom plate is read from scale, and height of the nozzle for liquid with respect to wafer of as developing, make development nozzle for liquid with respect to the measurement of wafer height, it is easy to operate, as a result accurately.
Description
Technical field
The present invention relates to technical field of semiconductor lithography, more particularly to a kind of device for being used to measure height and measurement development
The method of nozzle for liquid height.
Background technology
In semiconductor lithography processing procedure, development nozzle for liquid is a crucial ginseng during board is safeguarded with respect to the height of wafer
Number.Developer solution nozzle height is too high or too low, or levelness is not up to standard, can not only influence the uniformity of graphics critical dimension, also
Processing procedure defect can be caused.
Because developer solution nozzle form is irregular, its height of usual manner direct measurement can not be used.At present, developer solution is measured
Nozzle height generally uses feeler gauge, i.e., the feeler gauge of specific thicknesses whether can by the gap between nozzle for liquid and wafer of developing,
To judge developer solution nozzle height whether within specification.However, feeler gauge can only determine an altitude range, can not accurately survey
Amount, in the case where critical size is gradually reduced, can not meet technological requirement sometimes.Moreover, the abrasion and deformation of feeler gauge in itself
Also have an impact to measurement result.
The content of the invention
It is an object of the present invention to provide a kind of device for being used to measure height and the method for measuring developer solution nozzle height, solve
The above-mentioned problems in the prior art.
The technical scheme that the present invention solves above-mentioned technical problem is as follows：
A kind of device for being used to measure height, including bottom plate, one end of the bottom plate are vertically installed with hydraulic cylinder, the liquid
Connecting rod is provided with the top of the first piston of cylinder pressure；The other end of the bottom plate is vertically installed with linear guides, the linear guides
On be provided with the sliding block that can vertically move；Also include the measuring plate parallel with the bottom plate；One end of the measuring plate
It is fixed on the connecting rod, the other end is fixed on the sliding block；The hydraulic cylinder is connected by communicating pipe with syringe, described
Hydraulic oil is full of in the connected space of hydraulic cylinder, communicating pipe and syringe；The syringe is provided with for reading the measurement
The scale of difference in height between the upper surface of plate and the lower surface of the bottom plate.
The beneficial effects of the invention are as follows：Because the volume of hydraulic oil keeps constant, measuring plate is moved up and down to drive and injected
The piston movement of device；When measuring plate is in into diverse location, the difference in height between the upper surface of measuring plate and the lower surface of bottom plate
Numerical value be converted to scale on syringe, so as to be directly read from syringe；Convenient reading, accurate data.
On the basis of above-mentioned technical proposal, the present invention can also do following improvement.
Further, the internal cross-sectional area of the hydraulic cylinder is more than the internal cross-sectional area of the syringe.
Beneficial effect using above-mentioned further scheme is that the minute movement of measuring plate is converted to the piston of syringe
Larger movement, improve measurement accuracy.
Further, the scale is arranged in the side wall of the second piston of the syringe.
Beneficial effect using above-mentioned further scheme is to avoid scale from being worn due to the contact with the external world, causes to count
It is worth unclear.
Further, the port of the empty cylinder of the syringe is as pointer, for indicating to represent the measurement in the scale
The numerical value of difference in height between the upper surface of plate and the lower surface of the bottom plate.
Beneficial effect using above-mentioned further scheme is directly to use the port of empty cylinder as pointer, easy to make, and
It is not easily damaged.
Further, multiple scales are provided with the side wall of the second piston.
Beneficial effect using above-mentioned further scheme is to facilitate reading, and avoids bringing error because rotating syringe.
Further, the connecting rod is L-type structure；One end of the connecting rod be arranged in parallel with the bottom plate, and with described
One piston is fixedly connected；The other end of the connecting rod is vertical downwardly directed to the bottom plate, and is fixed with one end of the measuring plate
Connection.
Beneficial effect using above-mentioned further scheme is that, when L-type structure Sizes design, measuring plate can infinite approach
Bottom plate, realize that low clearance measures.
Another technical scheme of the present invention is as follows：
A kind of method for measuring developer solution nozzle height, comprises the following steps：
Step 1, wafer is loaded on the vacuum cup in developing cell；
Step 2, a kind of any device for being used to measure height of claim 1 to 6 is positioned over the wafer
Surface, and the lower surface of the bottom plate is close to the upper surface of the wafer；
Step 3, development nozzle for liquid is moved to and shoots out position；
Step 4, the second piston is promoted, the upper surface of the measuring plate is close under the development nozzle for liquid
End, and the difference in height between the upper surface of the measuring plate and the lower surface of the bottom plate, the height are read from the scale
Difference is the height of the development relatively described wafer of nozzle for liquid.
The beneficial effects of the invention are as follows：Difference in height between the upper surface of measuring plate and the lower surface of bottom plate, as develops
Nozzle for liquid makes development nozzle for liquid with respect to the measurement of wafer height with respect to the height of wafer, easy to operate, as a result accurately.
On the basis of above-mentioned technical proposal, the present invention can also do following improvement.
Further, between the step 2 and step 3, in addition to step 23；
The step 23, the first piston is pressed, the measuring plate is displaced downwardly to the bottom of its mobile range.
Beneficial effect using above-mentioned further scheme is to avoid measuring plate too high, in the process of mobile development nozzle for liquid
In, measuring plate is touched with development nozzle for liquid, damage development nozzle for liquid, and influences measurement accuracy.
Brief description of the drawings
Fig. 1 is a kind of device front view for being used to measure the device of height of the present invention；
Fig. 2 is a kind of device top view for being used to measure the device of height of the present invention；
Fig. 3 is a kind of first schematic diagram of the method for measuring developer solution nozzle height of the present invention；
Fig. 4 is a kind of second schematic diagram of the method for measuring developer solution nozzle height of the present invention；
Fig. 5 is a kind of 3rd schematic diagram of the method for measuring developer solution nozzle height of the present invention.
In accompanying drawing, the list of parts representated by each label is as follows：
1st, bottom plate, 2, hydraulic cylinder, 21, first piston, 22, connecting rod, 23, hydraulic oil, 3, linear guides, 31, sliding block, 4, two
Drafting board, 5, communicating pipe, 6, syringe, 61, scale, 62, second piston, 63, empty cylinder, 631, port, 7, wafer, 8, vacuum inhales
Disk, 9, development nozzle for liquid.
Embodiment
The principle and feature of the present invention are described below in conjunction with accompanying drawing, the given examples are served only to explain the present invention, and
It is non-to be used to limit the scope of the present invention.
As depicted in figs. 1 and 2, a kind of device for being used to measure height, including bottom plate 1, one end of the bottom plate 1 are vertically pacified
Equipped with hydraulic cylinder 2, the top of first piston 21 of the hydraulic cylinder 2 is provided with connecting rod 22；The other end right angle setting of the bottom plate 1
Linear guide rail 3, the sliding block 31 that can vertically move is provided with the linear guides 3；Also include flat with the bottom plate 1
Capable measuring plate 4；One end of the measuring plate 4 is fixed on the connecting rod 22, and the other end is fixed on the sliding block 31；It is described
Hydraulic cylinder 2 is connected by communicating pipe 5 with syringe 6, is full of in the connected space of the hydraulic cylinder 2, communicating pipe 5 and syringe 6
Hydraulic oil 23；The syringe 6 is provided with for reading between the upper surface of the measuring plate 4 and the lower surface of the bottom plate 1
Difference in height scale 61.
Because the volume of hydraulic oil 23 keeps constant, measuring plate 4, which moves up and down, transports the second piston 62 for driving syringe 6
Dynamic, both displacements meet equation below：
S*L=s*l
Wherein, S is the internal cross-sectional area of hydraulic cylinder 2, and L is the displacement of first piston 21, and s is the inside of syringe 6
Cross-sectional area, l are the displacement of second piston 62；The displacement of known first piston 21 and the upper surface of measuring plate and bottom plate
Difference in height between lower surface, you can solve the difference in height between the upper surface of measuring plate and the lower surface of bottom plate.By measuring plate
During in diverse location, the numerical value of the difference in height between the upper surface of measuring plate and the lower surface of bottom plate is converted on syringe
Scale, the difference in height between the upper surface of measuring plate and the lower surface of bottom plate this moment can be directly read from syringe.
It is preferred that the internal cross-sectional area of the hydraulic cylinder 2 is more than the internal cross-sectional area of the syringe 6.
It is preferred that the scale 61 is arranged in the side wall of the second piston 62 of the syringe 6.
It is preferred that the port 631 of the empty cylinder 63 of the syringe 6 is used as pointer, for indicating to represent institute in the scale 61
State the numerical value of the difference in height between the upper surface of measuring plate (4) and the lower surface of the bottom plate (1).
It is preferred that multiple scales 61 are provided with the side wall of the second piston 62.
It is preferred that the connecting rod 22 is L-type structure；One end of the connecting rod 22 be arranged in parallel with the bottom plate 1, and with it is described
First piston 21 is fixedly connected；The other end of the connecting rod 22 is vertical downwardly directed to the bottom plate 1, and with the measuring plate 4
One end is fixedly connected.
As shown in Fig. 3, Fig. 4 and Fig. 5, a kind of method for measuring developer solution nozzle height, comprise the following steps：
Step 1, wafer 7 is loaded on the vacuum cup 8 in developing cell；
Step 2, a kind of any device for being used to measure height of claim 1 to 6 is positioned over the wafer 7
Surface, and the lower surface of the bottom plate 1 is close to the upper surface of the wafer 7；
Step 3, development nozzle for liquid 9 is moved to and shoots out position；
Step 4, the second piston 62 is promoted, the upper surface of the measuring plate 4 is close to the development nozzle for liquid 9
Lower end, and the difference in height between the upper surface of the measuring plate 4 and the lower surface of the bottom plate 1, institute are read from the scale 61
State the height that difference in height is the development relatively described wafer 7 of nozzle for liquid 9.
It is preferred that between the step 2 and step 3, in addition to step 23；
The step 23, the first piston 21 is pressed, the measuring plate 4 is displaced downwardly to the most lower of its mobile range
Side.
The foregoing is only presently preferred embodiments of the present invention, be not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent substitution and improvements made etc., it should be included in the scope of the protection.
Claims (8)
- A kind of 1. device for being used to measure height, it is characterised in that including bottom plate (1), one end right angle setting of the bottom plate (1) There is hydraulic cylinder (2), connecting rod (22) is provided with the top of the first piston (21) of the hydraulic cylinder (2)；The other end of the bottom plate (1) Linear guides (3) are vertically installed with, the sliding block (31) that can vertically move is provided with the linear guides (3)；Also wrap Include the measuring plate (4) parallel with the bottom plate (1)；One end of the measuring plate (4) is fixed on the connecting rod (22), the other end It is fixed on the sliding block (31)；The hydraulic cylinder (2) is connected by communicating pipe (5) with syringe (6), the hydraulic cylinder (2), Hydraulic oil (23) is full of in the connected space of communicating pipe (5) and syringe (6)；The syringe (6) is provided with for reading institute State the scale (61) of the difference in height between the upper surface of measuring plate (4) and the lower surface of the bottom plate (1).
- A kind of 2. device for being used to measure height according to claim 1, it is characterised in that the inside of the hydraulic cylinder (2) Cross-sectional area is more than the internal cross-sectional area of the syringe (6).
- 3. a kind of device for being used to measure height according to claim 1, it is characterised in that the scale (61) is arranged at institute State in the side wall of second piston (62) of syringe (6).
- A kind of 4. device for being used to measure height according to claim 3, it is characterised in that the empty cylinder of the syringe (6) (63) port (631) is used as pointer, for indicate to represent in the scale (61) upper surface of the measuring plate (4) with it is described The numerical value of difference in height between the lower surface of bottom plate (1).
- A kind of 5. device for being used to measure height according to claim 3, it is characterised in that the side of the second piston (62) Multiple scales (61) are provided with wall.
- 6. a kind of device for being used to measure height according to claim 1, it is characterised in that the connecting rod (22) is L-type knot Structure；One end of the connecting rod (22) be arranged in parallel with the bottom plate (1), and is fixedly connected with the first piston (21)；It is described The other end of connecting rod (22) is vertical downwardly directed to the bottom plate (1), and is fixedly connected with one end of the measuring plate (4).
- A kind of 7. method for measuring developer solution nozzle height, it is characterised in that comprise the following steps：Step 1, on the vacuum cup (8) wafer (7) being loaded into developing cell；Step 2, a kind of any device for measuring height of claim 3 to 5 is positioned over to the upper table of the wafer (7) Face, and the lower surface of the bottom plate (1) is close to the upper surface of the wafer (7)；Step 3, development nozzle for liquid (9) is moved to and shoots out position；Step 4, the second piston (62) is promoted, the upper surface of the measuring plate (4) is close to the development nozzle for liquid (9) Lower end, and the height between the upper surface of the measuring plate (4) and the lower surface of the bottom plate (1) is read from the scale (61) Degree is poor, and the difference in height is the height of described development nozzle for liquid (9) relatively described wafer (7).
- 8. a kind of method for measuring developer solution nozzle height according to claim 7, it is characterised in that the step 2 and step Between rapid 3, in addition to step 23；The step 23, the first piston (21) is pressed, the measuring plate (4) is displaced downwardly to the most lower of its mobile range Side.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510765774.8A CN105444646B (en) | 2015-11-11 | 2015-11-11 | A kind of device for being used to measure height and the method for measuring developer solution nozzle height |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510765774.8A CN105444646B (en) | 2015-11-11 | 2015-11-11 | A kind of device for being used to measure height and the method for measuring developer solution nozzle height |
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| Publication Number | Publication Date |
|---|---|
| CN105444646A CN105444646A (en) | 2016-03-30 |
| CN105444646B true CN105444646B (en) | 2018-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510765774.8A Active CN105444646B (en) | 2015-11-11 | 2015-11-11 | A kind of device for being used to measure height and the method for measuring developer solution nozzle height |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107702625A (en) * | 2017-10-18 | 2018-02-16 | 吴振明 | A kind of measurer for being easy to detect housing wall thickness |
| CN108592761A (en) * | 2018-04-27 | 2018-09-28 | 北京汽车股份有限公司 | Gap measuring apparatus |
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| CN201697616U (en) * | 2010-06-12 | 2011-01-05 | 西安昆仑汽车电子有限公司 | Pneumatic measuring device of measuring size of oil pump shell of electronic fuel injection system |
| CN102128604A (en) * | 2010-01-14 | 2011-07-20 | 王艺霖 | Displacement measuring method |
| CN204117436U (en) * | 2014-10-21 | 2015-01-21 | 深圳科学高中 | A kind of for observing the experimental demonstration device of flat-objects miniature deformation |
| CN204165530U (en) * | 2014-06-05 | 2015-02-18 | 石家庄经济学院 | Syringe type measuring instrument of microdisplacement |
| CN104973277A (en) * | 2015-06-30 | 2015-10-14 | 重庆市凯福食品有限公司 | Quantitative vinegar filling device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102012199A (en) * | 2010-11-30 | 2011-04-13 | 周泉清 | Method and device for accurately measuring and metering variable of liquid level of hydraulic container or oil cylinder |
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2015
- 2015-11-11 CN CN201510765774.8A patent/CN105444646B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102128604A (en) * | 2010-01-14 | 2011-07-20 | 王艺霖 | Displacement measuring method |
| CN201697616U (en) * | 2010-06-12 | 2011-01-05 | 西安昆仑汽车电子有限公司 | Pneumatic measuring device of measuring size of oil pump shell of electronic fuel injection system |
| CN204165530U (en) * | 2014-06-05 | 2015-02-18 | 石家庄经济学院 | Syringe type measuring instrument of microdisplacement |
| CN204117436U (en) * | 2014-10-21 | 2015-01-21 | 深圳科学高中 | A kind of for observing the experimental demonstration device of flat-objects miniature deformation |
| CN104973277A (en) * | 2015-06-30 | 2015-10-14 | 重庆市凯福食品有限公司 | Quantitative vinegar filling device |
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