CN105425245B - A kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection - Google Patents

A kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection Download PDF

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CN105425245B
CN105425245B CN201510752209.8A CN201510752209A CN105425245B CN 105425245 B CN105425245 B CN 105425245B CN 201510752209 A CN201510752209 A CN 201510752209A CN 105425245 B CN105425245 B CN 105425245B
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laser
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frequency
distance
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CN105425245A (en
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才长帅
李光伟
闫海
王晓莉
高其嘉
曹原
陈京平
李建勋
冀鑫炜
石海天
刘建平
李静
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INSTITUTE OF RADAR AND ELECTRONIC COUNTERMEASURE OF CHINESE PLA AIR FORCE EQUIPM
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/89Lidar systems specially adapted for specific applications for mapping or imaging

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  • Computer Networks & Wireless Communication (AREA)
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  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

A kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection, including FM signal generator (1), narrow linewidth laser (2), acousto-optic modulator (3), optical mixer unit (4), balanced detector (5), low pass filter (6), scanning mirror (7), angular encoder (8), coding count circuit (9), distance calculation module (10) and three-dimensional data processing module (11).The present invention to laser frequency by carrying out linear modulation, the return laser beam of reception obtains the difference frequency signal of echo light and reference light with reference light phase dry doubling after opto-electronic conversion, in the scanning of every circle, the scanning target point for having echo to first can calculate the absolute distance by difference frequency, the distance change speed of scanning element below is integrated with reference to the absolute distance, the line-of-sight distance and coordinate of target surface scanning track can be calculated.The present invention accurately calculates the distance change of target using frequency measurement, and measurement repetition rate is not limited by fuzzy distance.

Description

A kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection
Technical field
The present invention relates to a kind of laser three-dimensional imaging device, can realize the remote height not limited by ranging fuzzy distance Repetition Frequency Laser three-dimensional imaging.
Background technology
In laser radar and laser 3 d scanner field, currently used laser ranging mode mainly has phase measurement With the direct telemetry of pulse based on the flight time.
Phase measurement mainly by comparing the phase difference of target echo and reference signal realizes range measurement, generally away from From scope in 100m.Pulse time-of-flight distance-finding method can realize more than km using the higher laser burst pulse of peak power Ranging and scanning, still, because the two-way time limitation of stimulated light pulse flight, distance limits the repetition of measurement.To survey Exemplified by span is from 1500m, laser time of flight needs 10 μ s, which limits measurement repetition rate no more than 100kHz.Though Fuzzy distance so can be lifted using technologies such as coding, multi-wavelengths, so as to reach the effect for improving measurement repetition rate, but surveyed Amount frequency is still limited by fuzzy distance, and is typically only capable to the frequency of enough several times of liftings, it is difficult to realizes that higher measurement repeats Frequency.In addition, with the lifting of laser repetition, laser pulse peaks power can be reduced accordingly, it is difficult to meet that telemeasurement will Ask.
At present, laser 3 d scanner measurement range of the in the market based on pulse time-of-flight laser ranging technique reaches km Level, measurement repetition rate generally limits laser 3 d scanner for remote in 100kHz, measurement sensitivity and fuzzy distance The data acquisition rate of distance objective scanning, in the case of being required for sweep speed, the frequency of scanning can be improved further, mesh Target point resolution can be reduced further.Therefore, in order to realize remote Gao Zhongying laser three-dimensional scanning, it is necessary to which one kind can be simultaneously Lifting detectivity and the ranging technology for overcoming fuzzy distance to limit.
The content of the invention
The technology of the present invention solves problem:The problem of repetition is low is measured for current long distance laser spatial digitizer, A kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection is provided, the device can have highly sensitive simultaneously Degree and high measurement repetition characteristic, it is possible to achieve the remote Gao Zhongying laser three-dimensional imaging not limited by fuzzy distance.
The present invention technical solution be:A kind of remote Gao Zhongying laser three-dimensional scanning dress based on coherent detection Put, including FM signal generator, narrow linewidth laser, acousto-optic modulator, optical mixer unit, balanced detector, low pass filter, Scanning mirror, angular encoder, coding count circuit, distance calculation module and three-dimensional data processing module, wherein:
FM signal generator:Frequency is produced as f linear FM signal according to linear frequency setting signal and delivers to sound Optical modulator;
Narrow linewidth laser:Output single mode narrow linewidth continuous laser simultaneously delivers to acousto-optic modulator;
Acousto-optic modulator:Using linear FM signal by the modulation of single mode narrow linewidth continuous laser as frequency chirp Continuous laser, a continuous laser part for described frequency chirp are input to optical mixer unit, another part as reference light Scanning mirror is input to as flashlight;
Optical mixer unit:The relevant of signal optical echo and reference light is completed, coherent light signal is formed and simultaneously delivers to balanced detector;
Balanced detector:Described coherent light signal is converted into the electric signal of same frequency and delivers to low pass filter;
Low pass filter:LPF is carried out to described electric signal, eliminate signal optical echo and reference light and frequency, protect Stay the difference frequency f of signal optical echo and reference lights-rAfterwards distance calculation module is delivered to as echo interference signal;
Scanning mirror:It is placed on turntable, circular-rotation is carried out under the drive of turntable, while itself carries out vertical direction Scanning, the flashlight of input is reflexed in target, while the flashlight echo reflection that target reflects is input into optical mixer unit;
Angular encoder:In the rotary shaft of scanning mirror, the rotational angle of scanning mirror is formed into coded pulse and defeated Enter to coding count circuit;
Coding count circuit:Coded pulse to input is counted, and count value is input into three-dimensional data processing mould Block;
Distance calculation module:During scanning mirror per revolution, there is the scanning target point of echo to first, lead to Cross formula d1=(fs-r/ k/c+d0)/2 be calculated first have echo scanning target point distance, pass through formulaFollow up scan on target surface scanning pattern is calculated The distance of target point, the line-of-sight distance that track is scanned using d as target surface deliver to three-dimensional data processing module, and wherein k is sound The modulation rate of optical modulator, c are the light velocity, and d0 is that reference light passes to acousto-optic modulator generation to the light transmitted to optical mixer unit Defeated distance, fv are the frequency of signal optical echo corresponding to follow up scan point, and t1 is to determine first scanning target for having echo At the time of point, t2 is at the time of determining follow up scan point;
Three-dimensional data processing module:Produce linear frequency setting signal and deliver to FM signal generator;Synchronous receive regards Linear distance and encoder to count value, the scanning angle of scanning mirror is calculated according to encoder to count value, finally with line-of-sight distance and Scanning angle changes out the three-dimensional rectangular coordinate (x, y, z) of scanning element in target, wherein x=d cos β cos α, y=d cos β Sin α, z=d sin β, α are the angle that scanning mirror rotates in vertical direction, and β is the angle that turntable rotates in the horizontal direction.
Described narrow linewidth laser is wavelength 1550nm single mode narrow linewidth laser.Described acousto-optic modulator is light Fibre coupling acousto-optic modulator.Described optical mixer unit is 2 × 2 single-mode optical-fibre coupler.Described balanced detector is snowslide Photodiode balanced detector.Described angular encoder is photoelectric encoder.
The present invention compared with prior art the advantages of be:
(1) apparatus of the present invention use optical coherence frequency measurement method, can be real by the analysis to interference signal frequency When obtain target range change, overcome in pulse flight measuring method for laser pulse come and go stand-by period, so as to Effectively improve fuzzy distance.Laser emission frequency is modulated using acousto-optic modulation technology, modulating frequency can generally reach To hundreds of MHz, i.e. signal frequency after optical interference reaches hundreds of MHz, and the output speed of signal frequency analysis result can reach To tens MHz, i.e. measuring point frequency can reach tens MHz, be swept far above existing remote pulse time-of-flight laser three-D Retouch instrument;
(2) scan period and linear frequency modulation bandwidth are associated by apparatus of the present invention, are adjusted by lifting linear frequency The bandwidth of system, the rate of change of linear frequency in unit scanning angle can be kept constant, not increase laser power and transmitting frequency In the case of rate, identical site density can be realized under different sweep speeds, it is not necessary to (sacrificial by reducing sweep speed Domestic animal time of measuring) lift dot density;
(3) apparatus of the present invention use continuous modulation coherent detection, and echo is amplified using reference light, can reach spy The shot noise limit of device is surveyed, signal detection sensitivity can reach 10-10W, far above conventional avalanche photodide 10-8W is detected Sensitivity, hundred mW luminous power are that the measurement of km distances can be achieved, and meet remote Gao Zhongying laser three-dimensional imaging requirement.
Brief description of the drawings
Fig. 1 is the structural representation of apparatus of the present invention;
Fig. 2 is the detection principle schematic diagram of apparatus of the present invention.
In figure:1-FM signal generator, 2-narrow linewidth laser, 3-acousto-optic modulator, 4-optical mixer unit, 5- Balanced detector, 6-low pass filter, 7-scanning mirror, 8-angular encoder, 9-coding count circuit, 10-distance calculate Module, 11-three-dimensional data processing module.
Embodiment
As shown in figure 1, it is that the structure of the remote Gao Zhongying laser three-dimensional scanning device based on coherent detection of the invention is shown It is intended to, as seen from the figure, apparatus of the present invention mainly include FM signal generator 1, narrow linewidth laser 2, acousto-optic modulator 3, light Frequency mixer 4, balanced detector 5, low pass filter 6, scanning mirror 7, angular encoder 8, coding count circuit 9, distance calculate mould Block 10 and three-dimensional data processing module 11, the annexation of above-mentioned component are as follows:
Three-dimensional data processing module 11 produces linear frequency setting signal, is output to described FM signal generator 1, institute The FM signal generator 1 stated is input to described acousto-optic modulator 3 according to setting frequency to produce linear FM signal.It is described Narrow linewidth laser 2 export single mode narrow linewidth continuous laser, become frequency chirp after described acousto-optic modulator 3 Continuous laser, a part is input to described optical mixer unit 4 as reference light, a part as flashlight be input to described in Scanning mirror 7, described scanning mirror 7, which reflects flashlight, to be exported.It is anti-that echo of the flashlight in target passes through described scanning mirror 7 Penetrate and be input to described optical mixer unit 4, described optical mixer unit 4 completes the relevant of echo-signal light and reference light.Described is flat Weighing apparatus detector 5 is converted to coherent light signal the electric signal of same frequency, is eliminated through described low pass filter 6 and frequency, reservation include The difference frequency of the flashlight and reference light of initial distance and distance change rate information.Described distance calculation module 10 receives difference frequency Signal, to first in each scan period scanning target point for having echo, by the phase modulation for comparing echo interference signal The absolute distance is obtained with the phase of original modulated signal, the distance change with reference to the absolute distance to scanning element below Speed is integrated, and calculates the line-of-sight distance of target surface scanning track, line-of-sight distance is output to described three-dimensional data Processing module 11.Described angular encoder 8 is arranged in the rotary shaft of scanning mirror 7, and coded pulse caused by rotation is inputted To described coding count circuit 9, count value is input to institute by described coding count circuit 9 after being counted to coded pulse The three-dimensional data processing module 11 stated.Three-dimensional data processing module 11 is synchronous to receive line-of-sight distance and encoder to count, according to volume Code device calculates the pitching scanning angle α and horizontal scan angle β of scanning mirror 7, according to polar coordinates to rectangular coordinates transformation Formula, angle [alpha], β and line-of-sight distance d are subjected to coordinate transform:X=d × cos (β) × cos (α), y=d × cos (β) × sin (α) and z=d × sin (β), the three-dimensional rectangular coordinate x, y, z of arbitrfary point on target surface scanning pattern can be obtained.
Described FM signal generator 1 is FM signal generator, output linearity frequency modulated signal, and bandwidth reaches hundred MHz。
Described narrow linewidth laser 2 be wavelength 1550nm single mode narrow linewidth optical fiber laser, laser linewidth 10kHz, Output laser power is 100mW.
Described acousto-optic modulator 3 is fiber coupling acousto-optic modulator, and frequency modulation rate reaches hundred MHz, and transmitance is 70%.
Described optical mixer unit 4 be 2 × 2 single-mode optical-fibre coupler, ratio 99:1, realize flashlight and reference light Optical coherence.
Described balanced detector 5 is avalanche photodide (APD) balanced detector, and detective bandwidth reaches 300MHz, With higher detectivity, the photomixing signal of two-way opposite in phase can be converted into electric signal simultaneously, and by interior The balancing circuitry in portion offsets direct current background, improves the signal to noise ratio of differential signal output.
Described low pass filter 6 is passive filter, filters out high-frequency signal, cut-off frequency 200MHz.
Described scanning mirror 7 is one-dimensional scanning mirror, and scan frequency reaches 30 lines/s, and laser is swept along vertical movement direction Retouch.Bottom of device has turntable that whole device can be made to carry out horizontal sweep, and laser distance measuring is realized to be surveyed to the third dimension of target Amount.
Described angular encoder 8 is photoelectric encoder, 2 rads of angular resolution.
Described coding count circuit 9 is difference count circuit, and coding count is realized by rising edge and trailing edge, maximum Counting rate 100MHz.
Described distance calculation module 10 is by calculating first scanning element echo interference signal and original modulated signal Difference frequency obtains the absolute distance of the point, by calculated for subsequent scanning element echo interference signal and the difference frequency of original modulated signal come The distance change speed of follow up scan point is obtained, the distance change speed of scanning element below is accumulated with reference to the absolute distance Point, calculate the line-of-sight distance that target surface scans track.
The described synchronous acquisition encoder to count of three-dimensional data processing module 11 and range data, according to encoder resolution Angle is calculated, after angle and distance data are transformed into rectangular coordinate system, obtains the three-dimensional right angle of target surface scanning track Coordinate.
As shown in Fig. 2 in apparatus of the present invention, the laser of transmitting is single mode narrow linewidth continuous laser, in a mechanical scanning Linear modulation is carried out to the frequency f for launching laser by acousto-optic modulator 3 in cycle:When f=k* (t-t0)+f0, t0 are initial Carve, f0 is initial laser frequency, and k is modulation rate.The laser of transmitting is divided into flashlight and reference light, and reference light passes through internal roll over Turn light path and reach optical mixer unit 4, the length of internal light path of turning back is d0, and flashlight is launched.The return laser beam of reception reaches For optical mixer unit 4 with the reference interference of light and after opto-electronic conversion, the frequency of output signal includes the difference frequency f of two signalss-r.When When target range is constant, the difference frequency f of two signalss-rThere is following relation with target range d:fs-r=k*c* (2*d-d0), c are light Speed, can be by measuring echo light and the difference frequency f with reference to optical interference signalss-rTo calculate target range d.
During being scanned to target, the line-of-sight distance of target surface to scanning means can produce consecutive variations, The speed v of the distance change can project into the speed of target relative laser sight, and the speed can introduce Doppler frequency shift Δ f= Fv-f, f are the frequencies for launching laser, and fv is the frequency of echo laser, and the relational expression of Doppler frequency shift and target speed is: Δ f=2*v*f/c.With the reference interference of light and after opto-electronic conversion, frequency fv can be delivered on electric signal return laser beam. Measure electric signal output frequency fv, it is possible to calculate target range rate of change v=(fv-f) * c/2/f.According to this principle, Target surface relatively can be obtained to scanner by the frequency f to return laser beam interference signal fv and original modulated signal Line-of-sight distance rate of change v.
In the scanning of every circle, there is the scanning target point (distance d1, moment t1) of echo to first, detection can be passed through The frequency f of device output signals-rTo calculate target range d1=(fs-r/ k/c+d0)/2, with reference to this absolute distance d1 to rear The distance change speed v of Surface scan point is integrated, the sight of target surface scanning track when can calculate any time t2 Distance d.Relation is as follows:
In Fig. 2, acousto-optic of the continuous laser signal caused by the first behavior narrow linewidth laser 2 by linear frequency modulation is adjusted After device 3 processed, for the laser frequency of output by linear modulation within a scan period, abscissa is the time, and ordinate is laser frequency Rate.The line-of-sight distance of target surface on second behavior laser beam scan path, abscissa are scan position, and ordinate is line-of-sight distance From.The third line is the frequency for the laser echo signal that optical mixer unit 4 receives, and initial echo-signal is due in the presence of reason Between postpone, follow-up echo also accordingly increases and reduced due to scanning line-of-sight distance change, the frequency of laser echo signal.4th Row is that the optical signal that optical mixer unit 4 exports is converted to electric signal by balanced detector 5, by low pass filter 6 filter out with after frequency Difference frequency signal, abscissa is sweep time corresponding with scan position, and ordinate is the difference frequency of echo-signal and reference signal, It can be seen that when apart from it is constant when, difference frequency and distance dependent, when distance change, the rate of change of difference frequency and target surface distance into Linear relationship.Fifth line is to calculate initial distance according to initial difference frequency, and follow-up difference frequency calculates range rate, is entering Succeeding target surface line-of-sight distance is obtained after row integration, the line-of-sight distance of original object scanning pattern can be restored, then and is swept Retouch angle and synchronously carry out coordinate transform, the three-dimensional rectangular coordinate of arbitrfary point on target surface scanning pattern can be measured.
The course of work of the present apparatus is:
1. apparatus of the present invention are arranged in the fixed tripod of ground, described scanning mirror 7 carries out laser vertical one-dimensional Scanning, bottom of device have turntable that whole device can be made to carry out horizontal sweep, and laser distance measuring realizes the third dimension to target Measurement;
2. starting apparatus of the present invention, carried out in the scanning mirror 7 in a scan period, described narrow linewidth laser 2 Launch continuous laser signal, become the continuous laser signal of linear frequency modulation through described acousto-optic modulator 3, described light mixes Frequency device 4 completes relevant, the described completion opto-electronic conversion of balanced detector 5 of echo-signal and reference signal, described distance meter Calculate module 10 and distance is calculated according to requency sampling fjlter;
3. described angular encoder 8 and coding count circuit 9 measure the accumulated counts in the rotation process of scanning mirror 7, meter Calculate the angle of the rotation of scanning mirror 7.Described three-dimensional data processing module 11 synchronous receiving angle α, β and distance d, by angle [alpha], β and line-of-sight distance d carries out coordinate transform:X=d × cos (β) × cos (α), y=d × cos (β) × sin (α) and z=d × sin (β), the three-dimensional rectangular coordinate (x, y, z) of arbitrfary point on target surface scanning pattern can be obtained.
The content not being described in detail in description of the invention belongs to the known technology of those skilled in the art.

Claims (6)

  1. A kind of 1. remote Gao Zhongying laser three-dimensional scanning device based on coherent detection, it is characterised in that:Including FM signal Generator (1), narrow linewidth laser (2), acousto-optic modulator (3), optical mixer unit (4), balanced detector (5), low pass filter (6), scanning mirror (7), angular encoder (8), coding count circuit (9), distance calculation module (10) and three-dimensional data processing mould Block (11), wherein:
    FM signal generator (1):Frequency is produced as f linear FM signal according to linear frequency setting signal and delivers to acousto-optic Modulator (3);
    Narrow linewidth laser (2):Output single mode narrow linewidth continuous laser simultaneously delivers to acousto-optic modulator (3);
    Acousto-optic modulator (3):Using linear FM signal by the modulation of single mode narrow linewidth continuous laser as frequency chirp Continuous laser, a continuous laser part for described frequency chirp are input to optical mixer unit (4), another portion as reference light It is allocated as being input to scanning mirror (7) for flashlight;
    Optical mixer unit (4):The relevant of signal optical echo and reference light is completed, coherent light signal is formed and simultaneously delivers to balanced detector (5);
    Balanced detector (5):Described coherent light signal is converted into the electric signal of same frequency and delivers to low pass filter (6);
    Low pass filter (6):LPF is carried out to described electric signal, eliminate signal optical echo and reference light and frequency, protect Stay the difference frequency f of signal optical echo and reference lights-rAfterwards distance calculation module (10) is delivered to as echo interference signal;
    Scanning mirror (7):It is placed on turntable, circular-rotation is carried out under the drive of turntable, while itself carries out vertical direction Scanning, the flashlight of input is reflexed in target, while the flashlight echo reflection that target reflects is input into optical mixer unit (4);
    Angular encoder (8):In the rotary shaft of scanning mirror (7), the rotational angle of scanning mirror (7) is formed into coded pulse And it is input to coding count circuit (9);
    Coding count circuit (9):Coded pulse to input is counted, and count value is input into three-dimensional data processing module (11);
    Distance calculation module (10):During scanning mirror (7) per revolution, there is the scanning target of echo to first Point, pass through formula d1=(fs-r/ k/c+d0)/2 be calculated first have echo scanning target point distance, pass through formula <mrow> <mi>d</mi> <mo>=</mo> <mi>d</mi> <mn>1</mn> <mo>+</mo> <mrow> <msubsup> <mo>&amp;Integral;</mo> <mrow> <mi>t</mi> <mn>1</mn> </mrow> <mrow> <mi>t</mi> <mn>2</mn> </mrow> </msubsup> <mrow> <mi>v</mi> <mi>d</mi> <mi>t</mi> </mrow> </mrow> <mo>=</mo> <mi>d</mi> <mn>1</mn> <mo>+</mo> <msubsup> <mo>&amp;Integral;</mo> <mrow> <mi>t</mi> <mn>1</mn> </mrow> <mrow> <mi>t</mi> <mn>2</mn> </mrow> </msubsup> <mo>&amp;lsqb;</mo> <mrow> <mo>(</mo> <mi>f</mi> <mi>v</mi> <mo>-</mo> <mi>f</mi> <mo>)</mo> </mrow> <mo>*</mo> <mi>c</mi> <mo>/</mo> <mn>2</mn> <mo>/</mo> <mi>f</mi> <mo>&amp;rsqb;</mo> <mi>d</mi> <mi>t</mi> </mrow> Follow up scan on target surface scanning pattern is calculated The distance of target point, the line-of-sight distance that track is scanned using d as target surface deliver to three-dimensional data processing module (11), wherein k For the modulation rate of acousto-optic modulator (3), c is the light velocity, and d0, which is reference light, to be mixed from being produced to acousto-optic modulator (3) to transmitting to light The optical transmission distance of frequency device (4), fv are the frequency of signal optical echo corresponding to follow up scan point, and t1 is to determine that first has back At the time of the scanning target point of ripple, t2 is at the time of determining follow up scan point;
    Three-dimensional data processing module (11):Produce linear frequency setting signal and deliver to FM signal generator (1);It is synchronous to receive Line-of-sight distance and encoder to count value, the scanning angle of scanning mirror (7) is calculated according to encoder to count value, finally uses line-of-sight distance From the three-dimensional rectangular coordinate (x, y, z) that scanning element in target is changed out with scanning angle, wherein x=d cos β cos α, y=d Cos β sin α, z=d sin β, α are the angle that scanning mirror (7) rotates in vertical direction, and β is the angle that turntable rotates in the horizontal direction Degree.
  2. 2. a kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection according to claim 1, it is special Sign is:Described narrow linewidth laser (2) is wavelength 1550nm single mode narrow linewidth laser.
  3. 3. a kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection according to claim 1, it is special Sign is:Described acousto-optic modulator (3) is fiber coupling acousto-optic modulator.
  4. 4. a kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection according to claim 1, it is special Sign is:Described optical mixer unit (4) is 2 × 2 single-mode optical-fibre coupler.
  5. 5. a kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection according to claim 1, it is special Sign is:Described balanced detector (5) is avalanche photodide balanced detector.
  6. 6. a kind of remote Gao Zhongying laser three-dimensional scanning device based on coherent detection according to claim 1, it is special Sign is:Described angular encoder (8) is photoelectric encoder.
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