CN105424220B - A kind of temperature sensor based on surface phasmon - Google Patents
A kind of temperature sensor based on surface phasmon Download PDFInfo
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- CN105424220B CN105424220B CN201610049206.2A CN201610049206A CN105424220B CN 105424220 B CN105424220 B CN 105424220B CN 201610049206 A CN201610049206 A CN 201610049206A CN 105424220 B CN105424220 B CN 105424220B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
Abstract
A kind of temperature sensor based on surface phasmon, belongs to temperature sensing arts.It solves the problems, such as that existing temperature sensor sensitivity is low, difficult integrated.It includes white light source, No.1 single-mode fiber, grating, metal medium metal resonance structure, No. two single-mode fibers and spectrometer；The white light projected from white light source is injected metal medium metal resonance structure after No.1 single-mode fiber and grating coupling successively, and resonance and interference occur wherein, the light wave of fanno line type and injection are formed, is entered the entrance slit of spectrometer after No. two Single-Mode Fiber Couplings by the fanno line type light wave that metal medium metal resonance structure projects.The waveform of the light wave of fanno line type changes with the change of ambient temperature, and the detailed data of its waveform change can be learnt by spectrometer.A kind of surface phasmon that is based on of the present invention is especially suitable for TEMP.
Description
Technical field
The present invention relates to a kind of temperature sensor, belong to temperature sensing arts.
Background technology
Temperature sensor is widely used in the fields such as electric power, chemical industry, medical treatment, Aero-Space and ocean development, existing
Temperature sensor be divided into thermal resistance and the class of thermocouple two, the spirit of the temperature sensor of both types according to electron component characteristic
Sensitivity is relatively low, and is difficult to integrate because size is big；
In recent years, as the development of nanometer technology, surface phasmon have also obtained swift and violent development, surface phasmon
It is the important component of nanophotonics, is that resonance occurs for the free electron based on electromagnetic wave and conductive surface collective oscillation simultaneously
Caused by intercoupling.Due to high field intensity and the characteristic of low latitudes, surface phasmon can be greatly enhanced light-use
Efficiency, realize that the collection of nano-scale helps light circuit.
The content of the invention
The invention aims to solve the problems, such as that existing temperature sensor sensitivity is low, difficult integrated, it is proposed that one
Temperature sensor of the kind based on surface phasmon.
A kind of temperature sensor based on surface phasmon of the present invention, it includes white light source 1, No.1 single mode
Optical fiber 2, grating 3,4, No. two single-mode fibers 5 of metal-dielectric-metal resonance structure and spectrometer 6；
Metal-dielectric-metal resonance structure 4 is rectangle golden plate, and two adjacent sides of rectangle golden plate are put down with X-axis and Y-axis respectively
OK, the disk of No.1 rectangular channel, No. two rectangular channels and depression, the long side of No.1 rectangular channel are provided with the surface of rectangle golden plate
It is parallel with X-axis, and the length of No.1 rectangular channel is equal to the length on the rectangle golden plate side parallel with X-axis, the long side of No. two rectangular channels
Parallel with Y-axis, the width of No.1 rectangular channel is equal to the width of No. two rectangular channels, and No. two rectangular channels and disk are located at No.1 rectangular channel
The same side, the both ends of No.1 rectangular channel are respectively left end and right-hand member, and No. two rectangular channels are located at the left side of disk, No.1 rectangular channel
Minimum range to No. two rectangular channels is equal to No.1 rectangular channel to the minimum range of disk, in No.1 rectangular channel, No. two rectangular channels
With in disk fill same media after respectively constitute 7, No. two rectangular waveguides 8 of No.1 rectangular waveguide and disk resonator 9, it is described
Medium is nonmetallic for non-gain；
The white light projected from white light source 1 is coupled by No.1 single-mode fiber 2 and grating 3 successively, white after being coupled by grating 3
Left end of the light through No.1 rectangular waveguide 7 is incided in metal-dielectric-metal resonance structure 4, and waveform passes through for the light wave of fanno line type
The right-hand member of No.1 rectangular waveguide 7 projects metal-dielectric-metal resonance structure 4, the ripple that the right-hand member through No.1 rectangular waveguide 7 projects
Shape enters the entrance slit of spectrometer 6 for the light wave of fanno line type after No. two single-mode fibers 5 couple.
The white light of metal-dielectric-metal resonance structure 4 is injected when by No.1 rectangular waveguide 7, in No.1 rectangular waveguide
7 occur surface phasmon phenomenon with the interface of rectangle golden plate, and resonance occurs at No. two rectangular waveguides 8 for subsequent white light and shape
Into the bright mould of continuous state, resonance does not occur at disk resonator 9 and forms the dark mould of discrete, white light bright mould and dark mould it
Between interfere, form the light wave that waveform is fanno line type, and right-hand member through No.1 rectangular waveguide 7 projects metal-dielectric-metal
Resonance structure 4.
A kind of temperature sensor based on surface phasmon of the present invention, the white light coupled by grating 3 inject gold
Resonance and interference can occur after category-dielectric-metal resonance structure 4, form the light wave that waveform is fanno line type, the light of fanno line type
The waveform of ripple can change with the change of the ambient temperature of metal-dielectric-metal resonance structure 4, pass through the method for acquiring of spectrometer 6
The transmission spectrum of the light wave of promise line style, by the transmission spectrum of the light wave of fanno line type, the red shift of its waveform can be learnt.Institute of the present invention
A kind of temperature sensor based on surface phasmon stated has：The advantages of size is small, easy of integration and high sensitivity.
Brief description of the drawings
Fig. 1 is a kind of structural representation of temperature sensor based on surface phasmon described in embodiment one.
Embodiment
Embodiment one：Illustrate present embodiment with reference to Fig. 1, one kind described in present embodiment be based on surface etc. from
The temperature sensor of excimer, it include white light source 1, No.1 single-mode fiber 2, grating 3, metal-dielectric-metal resonance structure 4,
No. two single-mode fibers 5 and spectrometer 6；
Metal-dielectric-metal resonance structure 4 is rectangle golden plate, and two adjacent sides of rectangle golden plate are put down with X-axis and Y-axis respectively
OK, the disk of No.1 rectangular channel, No. two rectangular channels and depression, the long side of No.1 rectangular channel are provided with the surface of rectangle golden plate
It is parallel with X-axis, and the length of No.1 rectangular channel is equal to the length on the rectangle golden plate side parallel with X-axis, the long side of No. two rectangular channels
Parallel with Y-axis, the width of No.1 rectangular channel is equal to the width of No. two rectangular channels, and No. two rectangular channels and disk are located at No.1 rectangular channel
The same side, the both ends of No.1 rectangular channel are respectively left end and right-hand member, and No. two rectangular channels are located at the left side of disk, No.1 rectangular channel
Minimum range to No. two rectangular channels is equal to No.1 rectangular channel to the minimum range of disk, in No.1 rectangular channel, No. two rectangular channels
With in disk fill same media after respectively constitute 7, No. two rectangular waveguides 8 of No.1 rectangular waveguide and disk resonator 9, it is described
Medium is nonmetallic for non-gain；
The white light projected from white light source 1 is coupled by No.1 single-mode fiber 2 and grating 3 successively, white after being coupled by grating 3
Left end of the light through No.1 rectangular waveguide 7 is incided in metal-dielectric-metal resonance structure 4, and waveform passes through for the light wave of fanno line type
The right-hand member of No.1 rectangular waveguide 7 projects metal-dielectric-metal resonance structure 4, the ripple that the right-hand member through No.1 rectangular waveguide 7 projects
Shape enters the entrance slit of spectrometer 6 for the light wave of fanno line type after No. two single-mode fibers 5 couple.
Embodiment two：Present embodiment is to a kind of temperature based on surface phasmon described in embodiment one
The further restriction of sensor is spent, described medium is air.
Embodiment three：Illustrate present embodiment with reference to Fig. 1, present embodiment is to one described in embodiment two
The further restriction of temperature sensor of the kind based on surface phasmon, the length of No.1 rectangular waveguide 7 is 4mm, and width is
50nm, the length of No. two rectangular waveguides 8 are 460nm, width 50nm, a diameter of 300nm of disk resonator 9, No.1 rectangle
The minimum range of 7 to No. two rectangular waveguides of waveguide 8 is 20nm；Under normal temperature, the transmission of the light wave of the method for acquiring promise line style of spectrometer 6
Spectrum, the trough of the light wave of fanno line type is at 945nm, when ambient temperature raises 0.01 DEG C, the waveform of the light wave of fanno line type
Generation red shift, its trough is at 960nm.
Embodiment four：Present embodiment is to a kind of temperature based on surface phasmon described in embodiment one
The further restriction of sensor is spent, described medium is silica.
Embodiment five：Present embodiment is to a kind of temperature based on surface phasmon described in embodiment one
The further restriction of sensor is spent, described medium is polymethyl methacrylate.
Claims (1)
- A kind of 1. temperature sensor based on surface phasmon, it is characterised in that：It includes white light source (1), No.1 single mode Optical fiber (2), grating (3), metal-dielectric-metal resonance structure (4), No. two single-mode fibers (5) and spectrometer (6)；Metal-dielectric-metal resonance structure (4) is rectangle golden plate, and two adjacent sides of rectangle golden plate are parallel with X-axis and Y-axis respectively, The disk of No.1 rectangular channel, No. two rectangular channels and depression, the long side and X of No.1 rectangular channel are provided with the surface of rectangle golden plate Axle is parallel, and the length of No.1 rectangular channel is equal to the length on the rectangle golden plate side parallel with X-axis, the long side and Y of No. two rectangular channels Axle is parallel, and the width of No.1 rectangular channel is equal to the width of No. two rectangular channels, and No. two rectangular channels and disk are located at No.1 rectangular channel The same side, the both ends of No.1 rectangular channel are respectively left end and right-hand member, and No. two rectangular channels are located at the left side of disk, and No.1 rectangular channel arrives The minimum range of No. two rectangular channels be equal to No.1 rectangular channel to disk minimum range, No.1 rectangular channel, No. two rectangular channels and No.1 rectangular waveguide (7), No. two rectangular waveguides (8) and disk resonator (9), institute are respectively constituted after filling same media in disk The medium stated is nonmetallic for non-gain；The white light projected from white light source (1) is coupled by No.1 single-mode fiber (2) and grating (3) successively, after being coupled by grating (3) Left end of the white light through No.1 rectangular waveguide (7) incide in metal-dielectric-metal resonance structure (4), waveform is fanno line type Right-hand member of the light wave through No.1 rectangular waveguide (7) project metal-dielectric-metal resonance structure (4), through No.1 rectangular waveguide (7) The waveform that projects of right-hand member enter the incident narrow of spectrometer (6) after No. two single-mode fibers (5) couple for the light wave of fanno line type Seam.
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| CN107255532B (en) * | 2017-05-08 | 2019-04-30 | 东南大学 | A kind of metal phasmon patch type luminance temperature and infrared sensor |
| CN109524790B (en) * | 2018-11-06 | 2020-05-05 | 北京大学 | Artificial surface plasmon radiator based on F-P cavity loading and control method |
| CN112414582B (en) * | 2020-12-02 | 2023-04-21 | 黑龙江科技大学 | Micro-nano temperature sensor based on rare earth nano particles and surface plasmon |
| CN114034404B (en) * | 2021-11-05 | 2022-11-22 | 北京大学 | Electrical nano thermometer for measuring local temperature of surface plasmon nano structure and temperature measuring method |
| CN114509845B (en) * | 2022-04-21 | 2022-07-12 | 苏州熹联光芯微电子科技有限公司 | Micro-ring resonator and electronic device |
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| CN102338940A (en) * | 2011-08-31 | 2012-02-01 | 清华大学 | Electric absorption modulator based on ring cavity |
| CN102928912A (en) * | 2012-11-14 | 2013-02-13 | 北京邮电大学 | Metal-medium coupling resonance cavity for generating Vaino resonance phenomenon |
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| US9557223B2 (en) * | 2010-07-23 | 2017-01-31 | The Regents Of The University Of Michigan | Mach-Zehnder interferometer having a doubly-corrugated spoofed surface plasmon polariton waveguide |
| US20130294722A1 (en) * | 2012-04-05 | 2013-11-07 | The Board of Trustees of the Leland Stanford Junior University | Practical multiply resonant photonic crystal nanocavity |
| US9310352B2 (en) * | 2012-12-14 | 2016-04-12 | The Board Of Trustees Of The Leland Stanford Junior University | Biological cell nanocavity probes |
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| CN102338940A (en) * | 2011-08-31 | 2012-02-01 | 清华大学 | Electric absorption modulator based on ring cavity |
| CN102928912A (en) * | 2012-11-14 | 2013-02-13 | 北京邮电大学 | Metal-medium coupling resonance cavity for generating Vaino resonance phenomenon |
| CN104979603A (en) * | 2014-04-02 | 2015-10-14 | 同济大学 | Microwave bistable switch based on nonlinear electromagnetic induction transparency |
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