CN105424077A - Illumination and imaging system for optical detection and measurement - Google Patents
Illumination and imaging system for optical detection and measurement Download PDFInfo
- Publication number
- CN105424077A CN105424077A CN201510839207.2A CN201510839207A CN105424077A CN 105424077 A CN105424077 A CN 105424077A CN 201510839207 A CN201510839207 A CN 201510839207A CN 105424077 A CN105424077 A CN 105424077A
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- Prior art keywords
- light source
- linear
- optical module
- telecentric lens
- determinand
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/28—Structurally-combined illuminating devices
Abstract
The invention relates to an illumination and imaging system for optical detection and measurement. The system is composed of a light source, a third light source, a first optical assembly, a second optical assembly, a linear telecentric lens, a linear scanning imaging sensor, and a to-be-measured object. The linear scanning imaging sensor is arranged on the linear telecentric lens and is connected with the linear telecentric lens, wherein the central lines of the linear scanning imaging sensor and the linear telecentric lens are superposed and are perpendicular to the to-be-measured object. The second optical assembly is arranged under the linear telecentric lens, and the central point of the second optical assembly is superposed with that of the linear telecentric lens and is perpendicular to the to-be-measured object. The output terminal of the light source points at the to-be-measured object. According to the invention, the linear fiber, the linear telecentric lens, and the high-photosensitive linear scanning imaging sensor are combined into one, so that light falls down uniformly to eliminate a shadow. The characteristic is reflected, is amplified by the linear telecentric lens a and is imaged clearly by the linear scanning imaging sensor, so that the imaging quality is improved, the scanning speed is enhanced, the wrong judgment of a flaw and distortion are reduced, and the measurement precision is improved.
Description
Technical field
The present invention relates to a kind of optical detection and measure illumination and imaging system thereof, particularly a kind of light-source system of throw light on inspected object surface and pit-holes.
Background technology
Optical detection measurement is the manufacture control quality method of mobile phone display screen glass, semiconductor die and circuit board, because speed of production is fast, product size is not of uniform size, proposes requirements at the higher level to optical detection measuring speed and convenience.
Usual use linear optical fiber or linear LED array light throw light on, because light and linear sweep imaging sensor level cause that non-horizontal directions sense brightness is low effectively cannot shoot picture rich in detail, Fig. 1,2 uses illumination and imaging system images schematic diagram usually, the printing of determinand glass ink, circuit board line be clear, No. 12 positions display difference of height non-horizontal directions imaging shadow blurs in the difference of height non-horizontal directions shade reveal competence direction such as No. 11 positions in the images, there is shade in the inherent No. 13 position blind holes of Fig. 2 determinand circuit board through-hole, hole.
Above-mentioned prior art light-source angle need be adjusted to appropriate location, because of light emitting anger restriction, radiation direction forces determinand to produce shade, cannot present clear for feature and cause detection erroneous judgement, and sweep velocity is slow and camera lens causes pattern distortion field range need be reduced and increase scanning times, this system is applicable to image application checkout equipment cannot be applicable to measurement equipment.
Summary of the invention
The present invention is the problem in order to solve shade in the difference of height non-horizontal directions shades such as glass ink printing, circuit board line and blind holes of circuit board hole, provides a kind of optical detection and measures illumination and imaging system thereof.
For achieving the above object, the present invention adopts following technical scheme:
Illumination and imaging system thereof are measured in a kind of optical detection, it is characterized in that: comprise light source, the 3rd light source, the first optical module, the second optical module, linear telecentric lens, linear sweep imaging sensor, determinand;
Described linear sweep imaging sensor is placed in the top of linear telecentric lens and connects, and both center line overlaps and perpendicular to determinand; Described second optical module is placed in the below of linear telecentric lens, and its central point overlaps with the center line of linear telecentric lens and perpendicular to determinand; Described 3rd light source is positioned at surface level one end of the second optical module, and existence can by the first optical module of the center of light-resource fousing to the second optical module between the two; The below of described second optical module is provided with light source; The output terminal of described light source points to determinand.
Explanation and the further scheme of such scheme are as follows:
In such scheme, described light source comprises the first light source and secondary light source, and all symmetrical sensing determinand of output terminal.
In such scheme, described second optical module tilts 45 ° and places.
In such scheme, described second optical module is spectroscope.
In such scheme, the output terminal of described first light source and secondary light source and 5 °, the second optical module central point angle of inclination.
In such scheme, the output terminal of described first light source and secondary light source and 0 °, the second optical module central point angle of inclination, all perpendicular to determinand.
In such scheme, the output of described first light source, secondary light source is provided with the 3rd optical module that the diffusion light constriction bundle of the first light source, secondary light source can be become parallel beam, and the 3rd optical module is cylindrical lens.
Because technique scheme is used, the present invention compared with prior art has following advantages:
The present invention is fine with linear light, linearly telecentric lens and high photosensitive linear sweep imaging sensor are combination, uniform light is made to fall elimination shade, the reflection of its feature is known imaging via linear telecentric lens amplification and linear sweep imaging sensor, improves image quality, sweep velocity, the erroneous judgement of minimizing flaw and reduce distortion raising measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the difference of height non-horizontal directions shades such as the printing of determinand glass ink, circuit board line;
Fig. 2 is shade in determinand circuit board through-hole or hole;
Fig. 3 is the first light source in the present invention, secondary light source output terminal tilts 5 ° time structural representation;
Fig. 4 is the first light source in the present invention, secondary light source output terminal tilts 0 ° time structural representation;
Fig. 5 is the first light source in the present invention, secondary light source schematic diagram.
In above accompanying drawing: 1, the first light source; 2, secondary light source; 3, the 3rd light source; 4, the first optical module; 5, the second optical module; 6, linear telecentric lens; 7, linear sweep imaging sensor; 8, determinand; 9, the fine delivery outlet of linear light; 10, the 3rd optical module; 11, No. 11 positions; 12, No. 12 positions; 13, No. 13 positions.
Embodiment
The technical scheme provided for a more clear understanding of the present invention, is described further below in conjunction with the drawings and specific embodiments.
Illumination and imaging system thereof are measured in a kind of optical detection, comprise light source, the 3rd light source 3, first optical module 4, second optical module 5, linear telecentric lens 6, linear sweep imaging sensor 7, determinand 8;
Linear sweep imaging sensor 7 is placed in the top of linear telecentric lens 6 and connects, and both center line overlaps and perpendicular to determinand 8; Second optical module 5 is placed in the below of linear telecentric lens 6, and its central point overlaps with the center line of linear telecentric lens 6 and perpendicular to determinand 8; 3rd light source 3 is positioned at surface level one end of the second optical module 5, and existence can by the first optical module 4 of the center of light-resource fousing to the second optical module 5 between the two; The below of the second optical module 5 is provided with light source; The output terminal of described light source points to determinand 8.
Preferably, light source comprises the first light source 1 and secondary light source 2, and all symmetrical sensing determinand 8 of output terminal.
Preferably, the second optical module 5 tilts 45 ° to place.
Preferably, the second optical module 5 is spectroscope.
Preferably, the output terminal of the first light source 1 and secondary light source 2 and 5 °, the second optical module 5 central point angle of inclination.
Preferably, the output terminal of the first light source 1 and secondary light source 2 and 0 °, the second optical module 5 central point angle of inclination, all perpendicular to determinand 8.
Preferably, the output of the first light source 1, secondary light source 2 is provided with the 3rd optical module 10 that the diffusion light constriction bundle of the first light source 1, secondary light source 2 can be become parallel beam, and the 3rd optical module 10 is cylindrical lens.
As shown in Figure 3: linear telecentric lens 6 and linear sweep imaging sensor 7 adjust height of focusing to imaging clearly, second optical module 5 is placed in all vertical and determinand 8 in linear its center of telecentric lens 6, first light source 1, secondary light source 2 to be positioned over below the second optical module 5 with linear telecentric lens 6 center and symmetrical adjustment the first light source 1, secondary light source 2, the height and position of the 3rd optical module 10, by the first light source 1, secondary light source 2 spreads light beam and becomes parallel beam through the 3rd optical module 10 boundling, first light source 1, secondary light source 2 symmetry points to determinand, 3rd optical module 10 is cylindrical lens again, adjust the 3rd light source 3, first optical module 4 focal position makes light focusing be in line light, this straight line optical registration second optical module 5 center, make straight line anaclasis in determinand 8, this second optical module 5 is spectroscope again, first light source 1, secondary light source 2 adjusts 5 °, angle of inclination, thus two bundle light are overlapped in straight line light, make the clear shadow-free of determinand 8 feature, reflected light is through linear telecentric lens 6 amplification characteristic, reflect and form image in this linear sweep imaging sensor 7 that arrives.
As shown in Figure 4: linear telecentric lens 6 and linear sweep imaging sensor 7 adjust height of focusing to imaging clearly, second optical module 5 is placed in linear its center of telecentric lens 6 all perpendicular to determinand 8, first light source 1, secondary light source 2 to be positioned over below the second optical module 5 with linear telecentric lens 6 center and symmetrical adjustment the first light source 1, secondary light source 2 height and position makes light Vertical Uniform fall to penetrating and the symmetrical sensing determinand 8 that overlaps, adjust the 3rd light source 3, first optical module 4 focal position makes light focusing straight line light, straight line optical registration second optical module 5 center, make straight line anaclasis in determinand 8, this second optical module 5 is spectroscope again, first light source 1, secondary light source 2 adjusts each light source position and two bundle light is overlapped in straight line light, make determinand 8 feature clear shadow-free reflected light through linear telecentric lens 6 amplification characteristic, reflect and form image in this linear sweep imaging sensor 7 that arrives.
As shown in Figure 5: the first light source 1, secondary light source 2 are line fiber optic line delivery outlet.The fine delivery outlet of general linear light is thickness of slab center, exports that light angle is excessive causes shade, must by close for two fibre optic plates for eliminating shade.Because delivery outlet position shade cannot be eliminated, the present invention uses the first light source 1, secondary light source 2 designs delivery outlet near edges of boards, effectively reduces the excessive impact of angle and causes shade and increase brightness.
Above-described embodiment, only for technical conceive of the present invention and feature are described, its object is to person skilled in the art can be understood content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences done according to the present invention change or modify, and all should be encompassed within protection scope of the present invention.
Claims (7)
1. illumination and an imaging system thereof are measured in optical detection, it is characterized in that: comprise light source, the 3rd light source (3), the first optical module (4), the second optical module (5), linear telecentric lens (6), linear sweep imaging sensor (7), determinand (8);
Described linear sweep imaging sensor (7) is placed in the top of linear telecentric lens (6) and connects, and both center line overlaps and perpendicular to determinand (8); Described second optical module (5) is placed in the below of linear telecentric lens (6), and its central point overlaps with the center line of linear telecentric lens (6) and perpendicular to determinand (8); Described 3rd light source (3) is positioned at surface level one end of the second optical module (5), and existence can by first optical module (4) of the center of light-resource fousing to the second optical module (5) between the two; The below of described second optical module (5) is provided with light source; The output terminal of described light source points to determinand (8).
2. illumination and imaging system thereof are measured in a kind of optical detection according to claim 1, it is characterized in that: described light source comprises the first light source (1) and secondary light source (2), and all symmetrical sensing determinand (8) of output terminal.
3. illumination and imaging system thereof are measured in a kind of optical detection according to claim 1, it is characterized in that: described second optical module (5) inclination 45 ° of placements.
4. illumination and imaging system thereof are measured in a kind of optical detection according to claim 1, it is characterized in that: described second optical module (5) is spectroscope.
5. illumination and imaging system thereof are measured in a kind of optical detection according to claim 2, it is characterized in that: the output terminal of described first light source (1) and secondary light source (2) and 5 °, the second optical module (5) central point angle of inclination.
6. illumination and imaging system thereof are measured in a kind of optical detection according to claim 2, it is characterized in that: the output terminal of described first light source (1) and secondary light source (2) and 0 °, the second optical module (5) central point angle of inclination, all perpendicular to determinand (8).
7. illumination and imaging system thereof are measured in a kind of optical detection according to claim 5, it is characterized in that: the output of described first light source (1), secondary light source (2) is provided with the 3rd optical module (10) that the diffusion light constriction bundle of the first light source (1), secondary light source (2) can be become parallel beam, and the 3rd optical module (10) is cylindrical lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510839207.2A CN105424077A (en) | 2015-11-27 | 2015-11-27 | Illumination and imaging system for optical detection and measurement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510839207.2A CN105424077A (en) | 2015-11-27 | 2015-11-27 | Illumination and imaging system for optical detection and measurement |
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| CN105424077A true CN105424077A (en) | 2016-03-23 |
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| CN201510839207.2A Pending CN105424077A (en) | 2015-11-27 | 2015-11-27 | Illumination and imaging system for optical detection and measurement |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107468234A (en) * | 2017-08-28 | 2017-12-15 | 佛山科学技术学院 | A kind of vascular flow projection chromatography 3-D imaging system and imaging method |
| CN107797116A (en) * | 2016-08-31 | 2018-03-13 | 通用汽车环球科技运作有限责任公司 | Optical sensor |
| CN107895134A (en) * | 2016-10-04 | 2018-04-10 | 讯宝科技有限责任公司 | For aiming pattern to be directed to in the target for treating to be read by image capture electric light and irradiated the module and system and method for the target |
| CN109765234A (en) * | 2019-03-01 | 2019-05-17 | 泉州师范学院 | Two surfaces positive and negative to object carry out the device and method of optical detection simultaneously |
| CN111521614A (en) * | 2019-02-01 | 2020-08-11 | 由田新技股份有限公司 | Automatic optical detection system for measuring porous structure |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2800304Y (en) * | 2005-04-06 | 2006-07-26 | 北京航空航天大学 | Composite lighting system for mini size on-line high precision vision measure |
| JP2006243433A (en) * | 2005-03-04 | 2006-09-14 | Seiko Epson Corp | Lighting system and image display device |
| US20070211259A1 (en) * | 2006-03-11 | 2007-09-13 | Moon Young Jeon | Three-dimensional shape measuring apparatus using shadow moire |
| CN102454923A (en) * | 2010-10-29 | 2012-05-16 | 牧德科技股份有限公司 | Lighting system for automatic optic inspection and combination of lighting system and image system |
| CN202563223U (en) * | 2012-03-14 | 2012-11-28 | 廖怀宝 | Optical detection device and color mapping light source device thereof |
| CN103903999A (en) * | 2012-12-27 | 2014-07-02 | 三星电机株式会社 | Semiconductor package inspection equipment |
-
2015
- 2015-11-27 CN CN201510839207.2A patent/CN105424077A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006243433A (en) * | 2005-03-04 | 2006-09-14 | Seiko Epson Corp | Lighting system and image display device |
| CN2800304Y (en) * | 2005-04-06 | 2006-07-26 | 北京航空航天大学 | Composite lighting system for mini size on-line high precision vision measure |
| US20070211259A1 (en) * | 2006-03-11 | 2007-09-13 | Moon Young Jeon | Three-dimensional shape measuring apparatus using shadow moire |
| CN102454923A (en) * | 2010-10-29 | 2012-05-16 | 牧德科技股份有限公司 | Lighting system for automatic optic inspection and combination of lighting system and image system |
| CN202563223U (en) * | 2012-03-14 | 2012-11-28 | 廖怀宝 | Optical detection device and color mapping light source device thereof |
| CN103903999A (en) * | 2012-12-27 | 2014-07-02 | 三星电机株式会社 | Semiconductor package inspection equipment |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107797116A (en) * | 2016-08-31 | 2018-03-13 | 通用汽车环球科技运作有限责任公司 | Optical sensor |
| CN107895134A (en) * | 2016-10-04 | 2018-04-10 | 讯宝科技有限责任公司 | For aiming pattern to be directed to in the target for treating to be read by image capture electric light and irradiated the module and system and method for the target |
| CN107468234A (en) * | 2017-08-28 | 2017-12-15 | 佛山科学技术学院 | A kind of vascular flow projection chromatography 3-D imaging system and imaging method |
| CN107468234B (en) * | 2017-08-28 | 2023-08-08 | 佛山科学技术学院 | Three-dimensional imaging system and imaging method for blood vessel blood flow projection chromatography |
| CN111521614A (en) * | 2019-02-01 | 2020-08-11 | 由田新技股份有限公司 | Automatic optical detection system for measuring porous structure |
| CN111521614B (en) * | 2019-02-01 | 2023-10-17 | 由田新技股份有限公司 | Automatic optical detection system for measuring hole-shaped structure |
| CN109765234A (en) * | 2019-03-01 | 2019-05-17 | 泉州师范学院 | Two surfaces positive and negative to object carry out the device and method of optical detection simultaneously |
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Application publication date: 20160323 |