CN105423922B - A kind of coaxial calibration sensor and its method for carrying out laser calibration - Google Patents

A kind of coaxial calibration sensor and its method for carrying out laser calibration Download PDF

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Publication number
CN105423922B
CN105423922B CN201511008670.9A CN201511008670A CN105423922B CN 105423922 B CN105423922 B CN 105423922B CN 201511008670 A CN201511008670 A CN 201511008670A CN 105423922 B CN105423922 B CN 105423922B
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laser
frequency
optical filter
reflecting mirror
ccd chip
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CN105423922A (en
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向勇
王芳
韩伟
冯斌
李富全
王礼权
李恪宇
敬域堃
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Laser Fusion Research Center China Academy of Engineering Physics
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Laser Fusion Research Center China Academy of Engineering Physics
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Lasers (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The invention discloses a kind of coaxial calibration sensor and its methods for carrying out laser calibration, direction along laser transmission successively includes: to absorb reflecting mirror, optical filter and CCD chip, the reflecting mirror that absorbs is the glass to basic frequency laser and two double-frequency laser hypersorptions, the absorption mirror surface is coated with frequency tripled laser high-reflecting film, the optical filter is the glass partially absorbed to frequency tripled laser, the device and method are simple and easy, easy to operate, a lot of Shu Jiguang target surface especially suitable for large laser driver high-precision laser Knockout technology field is coaxially demarcated.

Description

A kind of coaxial calibration sensor and its method for carrying out laser calibration
Technical field
The present invention relates to inertial confinement fusion (ICF) large laser driver high-precision laser Knockout technology fields, specifically For, a kind of be related to coaxial calibration sensor and its carry out laser calibration method.
Background technique
The thought of inertial confinement fusion is to be compressed to DT target ball often within the time of several nanoseconds using energetic particle beam The high density of several hectograms of cubic centimetre, pressure are several hundred million atmospheric pressure, so that pellet be made to fight burning being partially formed hot spot point.
With the appearance of laser technology, very high power density and fabulous directionality that people begin one's study using light laser Deuterium-tritium target is bombarded, allows them to generate controlled inertial confinement fusion to release fusion energy, here it is " laser-produced fusion ".
In order to which multiple laser to be directed on the target that diameter is millimeter magnitude, special precision instrument is needed to realize beam target coupling Guidance is closed, since incident laser power is higher, energy is stronger after focusing at target spot, can not directly be guided with instrument, therefore need It couples low energy all the way but main laser is coaxially replaced to carry out light beam guidance with the simulated laser on corrugated with incident laser.In view of There are certain system deviations for main laser and simulated laser, it is therefore desirable to it is completely heavy that main laser and simulated laser are adjusted at target spot The error of the two is closed or calibrated to carry out system amendment.
Summary of the invention
For above-mentioned problems of the prior art, the present invention provides a kind of coaxial calibration sensor and its carries out laser The method of calibration, this method is simple and easy, easy to operate, especially suitable for large laser driver high-precision laser Knockout technology The a lot of Shu Jiguang target surface in field is coaxially demarcated.
To achieve the above object, the invention provides the following technical scheme:
A kind of coaxial calibration sensor, the direction along laser transmission successively include: to absorb reflecting mirror, optical filter and CCD core Piece, the reflecting mirror that absorbs is the glass to basic frequency laser and two double-frequency laser hypersorptions, and the absorption mirror surface is coated with Frequency tripled laser high-reflecting film, the optical filter are the glass partially absorbed to frequency tripled laser.
Further, the image planes of the CCD chip and target chamber center are relative to the absorption mirror conjugation.
Further, the optical filter is 50% to the transmitance of frequency tripled laser.
Further, the optical filter with a thickness of 3-4mm.
In addition, the present invention also provides a kind of methods for carrying out laser calibration using above-mentioned coaxial calibration sensor, comprising: warp Be calibrated laser light incident to reflecting mirror is absorbed after over-focusing lens, absorb reflecting mirror to the basic frequency laser that is calibrated in laser and Two double-frequency lasers absorb, and frequency tripled laser is reflexed to optical filter, remaining after optical filter partially absorbs frequency tripled laser Frequency tripled laser be incident to CCD chip, CCD chip acquires the focal spot of frequency tripled laser, then acquire the focal spot of simulated laser, The simulated laser is incident to CCD chip using optical path identical with laser is calibrated, and is calibrated laser and simulation by calculating Position deviation between laser is adjusted simulated laser.
Further, the optical filter is 50% to the transmitance of frequency tripled laser.
Beneficial effects of the present invention are as follows:
1, the present invention is using the fundamental frequency part and two frequency multiplication parts absorbed in the superlaser that mirror absorption is calibrated, only The frequency tripling part demarcated is reflected, eliminates fundamental frequency part and two frequency multiplication parts to the information of CCD chip The interference of acquisition;
2, the present invention partially absorbs frequency tripled laser using optical filter, is incident on swashing in CCD chip to reduce Light energy avoids damage of the superlaser to CCD chip;
3, the image planes of CCD chip and target chamber center are arranged the present invention relative to the absorption mirror conjugation, realize same Axis calibration, the actual conditions of two laser when the spacing and size of two focal spots obtained from CCD chip can reflect target practice.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention;
In figure: 1-projection reflecting mirror, 2-condenser lenses, 3-target chambers, 4- absorb reflecting mirror, 5-optical filters, 6-CCD Chip, 7-are calibrated laser, 8-simulated lasers.
Specific embodiment
It is right below with reference to attached drawing of the invention in order to make those skilled in the art more fully understand technical solution of the present invention Technical solution of the present invention carries out clear, complete description, and based on the embodiment in the application, those of ordinary skill in the art exist Other similar embodiments obtained under the premise of creative work are not made, shall fall within the protection scope of the present application.
Embodiment one:
As shown in Figure 1, a kind of coaxial calibration sensor, successively includes: to absorb reflecting mirror 4, filter along the direction of laser transmission Mating plate 5 and CCD chip 6, before coaxial calibration sensor, laser is also successively by projection reflecting mirror 1 and condenser lens 2.Due to Laser is multi beam, so projection reflecting mirror 1 therein, condenser lens 2 can absorb reflecting mirror 4 and be designed as cavity ring to be multiple Shape, the reflecting mirror 4 that absorbs is the glass to the basic frequency laser being calibrated in laser 7 and two double-frequency laser hypersorptions, the suction 4 surface of reflecting mirror is received to be coated with to the frequency tripled laser high-reflecting film for being calibrated laser 7, the reflectivity to frequency tripled laser be 95% with On, while basic frequency laser and two double-frequency laser reflectivity are about 4%, the optical filter 5 is to swash to the frequency tripling for being calibrated laser 7 The glass that light partially absorbs, the optical filter 5 are 50% to the transmitance of frequency tripled laser, are absorbed the reflection of reflecting mirror 4 on a small quantity To the basic frequency laser and two double-frequency lasers of optical filter 5, filter plate 5 is absorbed again, reaches and filter out basic frequency laser and two completely The purpose of double-frequency laser.If basic frequency laser and two double-frequency lasers not filtered out, can occur fundamental frequency simultaneously in CCD chip 6 and swash The focal spot of light, two double-frequency lasers and frequency tripled laser, only frequency tripled laser are used for the target practice of inertial confinement fusion, therefore, base The focal spot of frequency laser and two double-frequency lasers can seriously affect the testing result of CCD chip 6.Meanwhile it is sharp for being calibrated for target practice 7 energy of light is higher, if being directly used in calibration, may be more than the damage threshold of CCD chip 6, cause the damage of CCD chip 6 It is bad, therefore the present invention absorbs basic frequency laser and two double-frequency lasers using reflecting mirror 4 is absorbed, both removals are to final detection result It influences, partially absorbs frequency tripled laser using optical filter 5, to reduce the energy for being calibrated laser 7, CCD chip 6 is avoided to damage. It is 50% to the transmitance of frequency tripled laser that the present invention, which chooses optical filter 5, that is, focuses on frequency tripled laser energy in CCD chip 6 About 0.5 micro- coke, CCD chip 6 can be handled the laser facula of the energy level.Optical filter 5 is to the saturating of frequency tripled laser Cross rate be 50% be because are as follows: if transmitance is too low, the frequency tripled laser penetrated is less, in CCD chip 6 imaging effect compared with Difference, the problems such as causing hot spot obscure boundary Chu;It, will when the accidental energy of frequency tripled laser appearance is higher if transmitance is excessively high Damage CCD chip 6.It is conjugated using the image planes of the CCD chip 6 and the center of target chamber 3 relative to the absorption reflecting mirror 4, i.e., The image plane center of CCD chip 6 and the line at 3 center of target chamber are perpendicular to absorption reflecting mirror 4, and the midpoint of its line is located at absorption On reflecting mirror 4, the setting of this conjugation can be realized accurate coaxial calibration, the spacing of two focal spots obtained from CCD chip 6 and The actual conditions of two laser when size can reflect target practice simplify adjustment process, avoid the troublesome calculation in adjustment process.
Optical filter 5 is arranged the present invention is absorbing between reflecting mirror 4 and CCD chip 6, and the purpose being arranged in this way is: being marked Laser 7 is determined by after condenser lens 2, beam size is absorbing reflecting mirror 4 and CCD chip from large to small, by the setting of optical filter 5 Between 6, optical filter 5 not only may be implemented to absorb the effect for being calibrated laser 7, additionally it is possible to the bore of optical filter 5 be obviously reduced, drop Low cost simplifies the installation process of optical filter 5.
Optical filter 5 uses ZWB2 material, and with a thickness of 3-4mm, the face depth of parallelism is less than 5 ", the PV value of surface precision is less than λ/5, λ is the wavelength for being calibrated laser 7.On the support by gluing, support is connected optical filter 5 by screw and the shell of CCD chip 6 It connects, convenient for removing and replacing.It absorbs reflecting mirror 4 and selects ZWB2 glass, absorb outer diameter 196mm, the internal diameter 34mm of reflecting mirror 4, it is thick 8mm is spent, the PV value of surface precision is less than λ/5.
In addition, the present invention also provides a kind of methods for carrying out laser calibration using above-mentioned coaxial calibration sensor, comprising: warp The laser 7 that is calibrated after crossing projection reflecting mirror 1 and condenser lens 2 is incident on and absorbs reflecting mirror 4, absorbs reflecting mirror 4 to being calibrated Basic frequency laser and two double-frequency laser hypersorptions in laser 7 are coated with frequency tripled laser high-reflecting film due to absorbing 4 surface of reflecting mirror, Therefore it absorbs reflecting mirror 4 and frequency tripled laser is reflexed into optical filter 5, while a small amount of basic frequency laser and two double-frequency lasers are also reflected To optical filter 5, optical filter 5 partially absorbs frequency tripled laser, remaining after all absorbing to basic frequency laser and two double-frequency lasers Frequency tripled laser be incident to CCD chip 6, CCD chip 6 acquires the focal spot of frequency tripled laser, then acquires the coke of simulated laser 8 Spot, the simulated laser 8 are incident to CCD chip 6 using optical path identical with laser 7 is calibrated, by measuring between the two Position deviation is calibrated the same axis deviation of laser 7 Yu simulated laser 8 to calculate, and adjustment simulated laser 8 is directed toward, makes it and be calibrated 7 focal spot position of laser is overlapped, and is calibrated the accurate coaxial of laser 7 and simulated laser 8 to realize.Meanwhile it being simulated by adjusting Laser source matching lens keep its focal spot size identical as laser 7 is calibrated, to realize and be calibrated the same corrugated of laser 7.
Using sensor of the invention and scaling method, realizes and be calibrated the accurate coaxial and same of laser and simulated laser Corrugated, coaxial precision is in 1 pixel (being equivalent to 4 microns) error range, with corrugated precision in 4 micron ranges.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (3)

1. a kind of coaxial calibration sensor, which is characterized in that the direction along laser transmission successively includes: absorption reflecting mirror, filters Piece and CCD chip, the reflecting mirror that absorbs is the glass to basic frequency laser and two double-frequency laser hypersorptions, the absorption reflecting mirror Surface is coated with frequency tripled laser high-reflecting film, and the optical filter is the glass partially absorbed to frequency tripled laser, the CCD chip Relative to the absorption mirror conjugation, the optical filter is 50% to the transmitance of frequency tripled laser for image planes and target chamber center, The optical filter with a thickness of 3-4mm.
2. a kind of method for carrying out laser calibration using coaxial calibration sensor described in claim 1, which is characterized in that packet It includes: being calibrated laser light incident to reflecting mirror is absorbed after condenser lens, absorb reflecting mirror to the fundamental frequency being calibrated in laser Laser and two double-frequency lasers absorb, and frequency tripled laser is reflexed to optical filter, and optical filter partially absorbs it to frequency tripled laser Afterwards, remaining frequency tripled laser is incident to CCD chip, and CCD chip acquires the focal spot of frequency tripled laser, then acquires simulated laser Focal spot, the simulated laser is incident to CCD chip using optical path identical with laser is calibrated, is calibrated laser by calculating Position deviation between simulated laser is adjusted simulated laser.
3. the method according to claim 2 for carrying out laser calibration, which is characterized in that the optical filter is to frequency tripled laser Transmitance be 50%.
CN201511008670.9A 2015-12-29 2015-12-29 A kind of coaxial calibration sensor and its method for carrying out laser calibration Active CN105423922B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101436753A (en) * 2008-12-26 2009-05-20 北京工业大学 Laser cavity external frequency multiplication system
CN102944302A (en) * 2012-11-12 2013-02-27 中国科学院西安光学精密机械研究所 Laser focal spot light intensity distribution testing device and testing method
CN104121805A (en) * 2014-07-15 2014-10-29 南京理工大学 Target lane space benchmark device and adjusting method thereof
CN104764588A (en) * 2015-03-31 2015-07-08 中国科学院西安光学精密机械研究所 Single-pulse laser dynamic focal spot position measuring device and measuring method
CN205448960U (en) * 2015-12-29 2016-08-10 中国工程物理研究院激光聚变研究中心 Coaxial demarcation sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3587230B2 (en) * 1997-09-18 2004-11-10 財団法人鉄道総合技術研究所 How to measure trolley wire height

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101436753A (en) * 2008-12-26 2009-05-20 北京工业大学 Laser cavity external frequency multiplication system
CN102944302A (en) * 2012-11-12 2013-02-27 中国科学院西安光学精密机械研究所 Laser focal spot light intensity distribution testing device and testing method
CN104121805A (en) * 2014-07-15 2014-10-29 南京理工大学 Target lane space benchmark device and adjusting method thereof
CN104764588A (en) * 2015-03-31 2015-07-08 中国科学院西安光学精密机械研究所 Single-pulse laser dynamic focal spot position measuring device and measuring method
CN205448960U (en) * 2015-12-29 2016-08-10 中国工程物理研究院激光聚变研究中心 Coaxial demarcation sensor

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