CN105422414A - Cryogenic pump - Google Patents
Cryogenic pump Download PDFInfo
- Publication number
- CN105422414A CN105422414A CN201510830421.1A CN201510830421A CN105422414A CN 105422414 A CN105422414 A CN 105422414A CN 201510830421 A CN201510830421 A CN 201510830421A CN 105422414 A CN105422414 A CN 105422414A
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- CN
- China
- Prior art keywords
- cryopump
- transmission shaft
- magneto
- cryogenic pump
- driving shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
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Abstract
The invention provides a cryogenic pump. The cryogenic pump comprises a shell provided with a containing space, a combined rotary member and a power assembly. The combined rotary member is contained in the containing space. The power assembly comprises a permanent magnet motor and a driving shaft. The driving shaft is connected with the permanent magnet motor. The combined rotary member is connected with the driving shaft. The driving shaft drives the combined rotary member to rotate. According to the cryogenic pump, a three-phase asynchronous motor in the prior art is replaced by the permanent magnet motor as the power part, and the good effects of low energy consumption, small size, high power density and low operating speed are achieved. The thrust produced by starting the pump is reduced due to the low operating speed, and the loss of the shell and internal parts is reduced, so that the service life of the cryogenic pump is prolonged.
Description
Technical field
The present invention relates to a kind of vacuum pump technology field, be specifically related to a kind of cryopump.
Background technique
Cryopump is also known as condensate extractionpump, it is the vacuum pump utilizing low-temperature surface condensed gas, cryopump can obtain the clean vacuum that the speed of exhaust is maximum, ultimate pressure is minimum, it is widely used in scientific research and industry, as production and the field such as research and molecular rays research, vacuum coating equipment, vacuum surface analytical instrument, ion implantation apparatus and space simulation facility of semiconductor, intergrated circuit.
The major impetus constituent element of cryopump is motor, and traditional cryopump adopts asynchronous three phase electric machine as driving motive use in production, has and drives high, the bulky shortcoming of energy consumption, can not comply with the main flow of lightweight, energy-conserving and environment-protective.
Therefore, a kind of new cryopump need be provided to solve the problem.
Summary of the invention
The technical issues that need to address of the present invention are to provide that a kind of low energy consumption, volume are little, the cryopump of good energy-conserving effect.
Cryopump provided by the invention, comprise housing, combination turntable and the Power Component with containing space, described combination turntable is contained in described containing space, described Power Component comprises magneto and transmission shaft, described transmission shaft connects described magneto, described combination turntable is connected with described transmission shaft, and described transmission shaft drives described combination turntable to rotate.
Preferably, described magneto comprises rotor, stator, motor shaft and end cap, and described rotor is sheathed on described motor shaft, and described stator is installed on described end cap, and described stator sleeve is located at described rotor.
Preferably, described magneto is permanent magnetic brushless.
Preferably, described cryopump also comprises lip packing, and described housing is connected by described lip packing with described transmission shaft.
Preferably, described cryopump also comprises base, and described housing is fixed on described base, and described base plays a part to support described cryopump.
Compared to prior art, cryopump provided by the invention, its Power Component comprises magneto and transmission shaft, described transmission shaft connects described combination turntable, described transmission shaft is driven by described magneto, and described transmission shaft drives described combination turntable to rotate, and realizes the normal work of described cryopump.Cryopump provided by the invention, its motor replaces to magneto by threephase asynchronous machine of the prior art, described cryopump is had energy consumption is low, volume is little, specific power is high, motion speed is low good result, the low thrust that pump startup is produced of its motion speed reduces, the loss of housing and inner body reduces, thus extends the working life of described cryopump.
Accompanying drawing explanation
Fig. 1 is the structural representation of cryopump of the present invention;
Fig. 2 is the structural representation of magneto in cryopump shown in Fig. 1;
The cross-sectional configuration schematic diagram that Fig. 3 is the magneto shown in Fig. 2.
Embodiment
Below in conjunction with drawings and embodiments, the invention will be further described.
Referring to Fig. 1, is the structural representation of cryopump of the present invention.Described cryopump 1 comprise there is containing space housing 11, combination turntable 12, Power Component 13, base 14 and lip packing 15.Described housing 11 is fixed on described base 14.Described combination turntable 12 is contained in the containing space of described housing 11.Described Power Component 13 drives described combination turntable 12 to rotate.Described lip packing 15 is for sealing the joint of described housing 11 and described Power Component 13.
Described combination turntable 12 comprises impeller 121 and main shaft 122.Described impeller 121 is fixed on the inlet end that described main shaft 122 is positioned at described cryopump 1.The other end of described main shaft 122 is connected with described Power Component 13, and namely described Power Component 13 drives described main shaft 122 to rotate, thus drives described impeller 121 to rotate.
Described Power Component 13 comprises magneto 131 and transmission shaft 132.Described magneto 131 drives described transmission shaft 132 to rotate.
Please refer to Fig. 2 and Fig. 3, wherein, Fig. 2 is the structural representation of magneto in the cryopump shown in Fig. 1, the cross-sectional configuration schematic diagram that Fig. 3 is the magneto shown in Fig. 2.Described magneto 131 comprises rotor 1311, stator 1312, motor shaft 1313 and end cap 1314, and described rotor 1311 is sheathed on described motor shaft 1313, and described stator 1312 is installed on described end cap 1314.It is outside that described stator 1312 is sheathed on described rotor 1311.Described magneto 131, as the driving power of described cryopump 1, has the advantage that energy consumption is low, volume is little, lightweight and working efficiency is high.Described magneto 131 is permanent magnetic brushless, and its effect is better.
Described transmission shaft 132 one end connects described motor shaft 1313, and the other end connects described main shaft 122.Described motor shaft 1313 drives described transmission shaft 132 to rotate.Described transmission shaft 132 drives described main shaft 122 to rotate.Described transmission shaft 132 adopts described lip packing 15 to seal with the joint of described housing 11, good sealing effect, can leakproof dust-proof.
The Power Component of cryopump provided by the invention comprises magneto and transmission shaft, described transmission shaft connects described combination turntable, described transmission shaft is driven by described magneto, and described transmission shaft drives described combination turntable to rotate, and realizes the normal work of described cryopump.The motor of cryopump provided by the invention replaces to magneto by threephase asynchronous machine of the prior art, described cryopump is had energy consumption is low, volume is little, specific power is high, motion speed is low good result, the low thrust that pump startup is produced of its motion speed reduces, the loss of housing and inner body reduces, thus extends the working life of described cryopump.
The foregoing is only embodiments of the invention; not thereby the scope of the claims of the present invention is limited; every utilize specification of the present invention and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical field, be all in like manner included in scope of patent protection of the present invention.
Claims (5)
1. a cryopump, it is characterized in that, comprise housing, combination turntable and the Power Component with containing space, described combination turntable is contained in described containing space, described Power Component comprises magneto and transmission shaft, described transmission shaft connects described magneto, and described combination turntable is connected with described transmission shaft, and described transmission shaft drives described combination turntable to rotate.
2. cryopump according to claim 1, is characterized in that, described magneto comprises rotor, stator, motor shaft and end cap, and described rotor is sheathed on described motor shaft, and described stator is installed on described end cap, and described stator sleeve is located at described rotor.
3. cryopump according to claim 1, is characterized in that, described magneto is permanent magnetic brushless.
4. cryopump according to claim 1, is characterized in that, described cryopump also comprises lip packing, and described housing is connected by described lip packing with described transmission shaft.
5. cryopump according to claim 1, is characterized in that, described cryopump also comprises base, and described housing is fixed on described base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510830421.1A CN105422414A (en) | 2015-11-25 | 2015-11-25 | Cryogenic pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510830421.1A CN105422414A (en) | 2015-11-25 | 2015-11-25 | Cryogenic pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105422414A true CN105422414A (en) | 2016-03-23 |
Family
ID=55500876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510830421.1A Pending CN105422414A (en) | 2015-11-25 | 2015-11-25 | Cryogenic pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105422414A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
| CN107605700A (en) * | 2017-09-26 | 2018-01-19 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump of the high occlusion limit |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1265338A2 (en) * | 2001-06-06 | 2002-12-11 | Ebara Corporation | Vacuum pump |
| JP2006342791A (en) * | 2005-05-13 | 2006-12-21 | Boc Edwards Kk | Vacuum pump |
| CN101039050A (en) * | 2006-03-17 | 2007-09-19 | 印辉 | Permanent magnetic servo-motor |
| CN102953958A (en) * | 2012-12-03 | 2013-03-06 | 上海集成电路研发中心有限公司 | Dual cryogenic pump system and control method thereof |
| CN103269142A (en) * | 2013-05-27 | 2013-08-28 | 浙江建达电器有限公司 | High-speed permanent magnet motor for molecular pump |
-
2015
- 2015-11-25 CN CN201510830421.1A patent/CN105422414A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1265338A2 (en) * | 2001-06-06 | 2002-12-11 | Ebara Corporation | Vacuum pump |
| JP2006342791A (en) * | 2005-05-13 | 2006-12-21 | Boc Edwards Kk | Vacuum pump |
| CN101039050A (en) * | 2006-03-17 | 2007-09-19 | 印辉 | Permanent magnetic servo-motor |
| CN102953958A (en) * | 2012-12-03 | 2013-03-06 | 上海集成电路研发中心有限公司 | Dual cryogenic pump system and control method thereof |
| CN103269142A (en) * | 2013-05-27 | 2013-08-28 | 浙江建达电器有限公司 | High-speed permanent magnet motor for molecular pump |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
| CN107605700A (en) * | 2017-09-26 | 2018-01-19 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump of the high occlusion limit |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160323 |