CN204402964U - Vacuum turbomolecular pump - Google Patents
Vacuum turbomolecular pump Download PDFInfo
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- CN204402964U CN204402964U CN201420826949.2U CN201420826949U CN204402964U CN 204402964 U CN204402964 U CN 204402964U CN 201420826949 U CN201420826949 U CN 201420826949U CN 204402964 U CN204402964 U CN 204402964U
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- molecular pump
- vacuum
- pump
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- vacuum turbomolecular
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Abstract
The utility model relates to a kind of vacuum turbomolecular pump, for in strong radiation environment, it comprises molecular pump shell (1), the rotor (2) be alternately arranged and stator (3) is provided with in described molecular pump shell (1), described stator (3) is fixed on molecular pump shell (1), described rotor (2) is driven by molecular pump motor (5), the top and bottom of described molecular pump shell (1) are respectively equipped with seal ring (6), described molecular pump adopts all metal construction, and described seal ring (6) adopts metal sealing.This vacuum turbomolecular pump, because adopting unique structure and material, the damage of molecular pump because intense radiation causes and the generation of radioactive waste can be greatly reduced, improve equipment reliability of operation and operational efficiency, thus produce good Social benefit and economic benefit.
Description
Technical field
The utility model belongs to vacuum molecular pump field, is specifically related to a kind of vacuum turbomolecular pump used in strong x radiation x environment.
Background technique
In high intensity proton beam and other high energy high intensity proton cyclotron device, ion needs just can be transmitted in vacuum environment, and thus, it is essential that vacuum obtains equipment, but be not also specifically designed to the vacuum pump in strong x ray irradiation x environment both at home and abroad.If adopt conventional vacuum pump to there is serious life problems, need regularly to change, cause waste, secondly, the vacuum pump worked under strong x radiation x environment all can cause the activation of pump body structure material, the vacuum pump changed is a radioactive source inherently, and need to process according to radioactive waste, processing cost is very high.
Model utility content
For the defect existed in prior art, the utility model provides a kind of vacuum turbomolecular pump, and this vacuum turbomolecular pump to vacuum system extracting vacuum under strong radiation environment, can ensure that vacuum system high vacuum or ultrahigh vacuum obtain; There is resistance to irradiation, the feature of low activation.
For reaching above object, the technical solution adopted in the utility model is: provide a kind of vacuum turbomolecular pump, for in strong radiation environment, it comprises molecular pump shell, the rotor and stator that are alternately arranged is provided with in described molecular pump shell, described stator is fixed on molecular pump shell, described rotor is driven by molecular pump motor, the top and bottom of described molecular pump shell are respectively equipped with seal ring, described molecular pump shell, rotor and stator all adopt Structural Hardware, and described seal ring adopts metal sealing.
Further, the lower end of described molecular pump shell is provided with relief opening.
Further, the lower end of described molecular pump shell is also provided with fan.
Further, described molecular pump shell, rotor and stator all adopt 6061 aluminum alloy material.
Further, described seal ring adopts indium metal silk or metal filamentary silver.
Further, the enameled cable of described molecular pump motor adopts polyimide enameled wire.
Further, described fan adopts full aluminium material to make.
Further, described vacuum turbomolecular pump is connected with the molecular pump power source be arranged on outside radioactive environment by radiation-resistant elastic cable paper.
Further, described fan is driven by fan electromotor, and described fan electromotor adopts the polyimide enameled wire that resistance to irradiation is strong.
Advantageous Effects of the present utility model is:
(1) vacuum turbomolecular pump of the present utility model, by adopting metallic material and metal sealing, can use under the environment of intense radiation, there is the feature of resistance to irradiation, low activation, solve the common molecular pump problem that cisco unity malfunction even damages under strong radiation environment;
(2) vacuum turbomolecular pump of the present utility model, its power supply connected is arranged in radiationless environment, fundamentally solves the problem of the resistance to irradiation difference of semiconductor components and devices in molecular pump power source.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model vacuum turbomolecular pump.
In figure:
1-molecular pump shell 2-rotor 3-stator 4-bearing
5-molecular pump motor 6-seal ring 7-cable adapter 8-relief opening
9-fan 10-elastic cable paper 11-molecular pump power source
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is described in further detail.
As shown in Figure 1, it is the vacuum turbomolecular pump that the utility model provides, under this molecular pump is used for strong radiation environment, to the acquisition of vacuum system high vacuum or ultrahigh vacuum, it comprises molecular pump shell 1, is provided with the rotor 2 and stator 3 that are alternately arranged in molecular pump shell 1, wherein, stator 3 is fixed on molecular pump shell 1, and rotor 2 is driven by molecular pump motor 5, and rotor 2 with the coupling shaft of molecular pump motor 5 are provided with bearing 4.The top and bottom of molecular pump shell 1 are equipped with seal ring 6.
In order to ensure that this vacuum turbomolecular pump uses under strong radiation environment, all component on molecular pump and molecular pump shell 1, rotor 2, stator 3, bearing 4 and molecular pump motor 5 all adopt Structural Hardware, and seal ring 6 adopts metal sealing.
The lower end of molecular pump shell 1 is provided with relief opening 8 and fan 9.Relief opening 8 is for discharging the gas in molecular pump; Fan 9 adopts forced air cooling structure, is convenient to cool this molecular pump, thus avoids water being introduced the activation that strong radiation area causes water.Fan 9 is driven by fan electromotor, and fan electromotor adopts the polyimide enameled wire that resistance to irradiation is strong, and radiation resistance is strong; Fan adopts full aluminium material to make, and improves radiation resistance.
Vacuum turbomolecular pump system is by the molecular pump pump housing and molecular pump power source 11 two-part composition, molecular pump power source 11 is the driver of molecular pump, be made up of electronic components such as frequency variators, but the electronic devices such as the resistance of routine, electric capacity, particularly semiconductor devices radiation-resistant property is poor especially, generally 1 × 10
4with regard to cisco unity malfunction after the irradiation metering irradiation of rad.Molecular pump power source 11 is arranged on by the utility model not to be had in the room of x ray irradiation x, adopts a longer radiation resistant cable line 10 to be connected with molecular pump by cable adapter 7.Thus, completely avoid the problem of the damage that molecular pump power source 11 causes because of x ray irradiation x, improve the working life of molecular pump power source 11.
The utility model vacuum turbomolecular pump is that high vacuum obtains conventional vacuum pump, and it can start to vacuumize under 10Pa condition, and limiting vacuum can reach 1 × 10
- 6pa, meets the requirement of most of high-vacuum apparatus.Secondly, molecular pump discharges the gas in vacuum equipment cavity by blade High Rotation Speed, and itself can not carry out physical absorption as the high vacuum pump such as iron pump or adsorption pump to gas, and the radioactive emission of discharging in vacuum cavity can not cause the pollution of the pump housing itself.
The molecular pump worked under strong neutron, γ radiation environment needs to consider the damage of strong irradiation to this pump housing, simultaneously, also need the activation considering the pump housing itself, so the utility model adopts the material of low activation, in order to reduce material activation, the material of molecular pump shell 1, rotor 2, stator 3 all adopts 6061 aluminum alloys.
Vacuum pump body needs vacuum seal, and the pump housing adopts aluminum alloy, and material is softer, can not adopt copper washer, and the conventional RUBBER O circle radiation-resistant property adopted is poor, and thus, the seal ring of this molecular pump adopts indium metal silk or metal filamentary silver.
The driving arrangement that molecular pump motor 5 rotates for molecular pump rotor, this molecular pump motor 5 adopts the good polyimide enameled wire of radiation-resistant property, and resistance to irradiation metering is better than 1 × 10
8rad.
In sum, adopt above unique design, this molecular pump may be used for the acquisition of high vacuum under strong x ray irradiation x condition, and resistance to irradiation metering is better than 1 × 10
8rad.It can be used for high intensity proton beam, the vacuum system of the strong x ray irradiation x condition such as radioactive nuclear beam generation device.The molecular pump caused because of x radiation x can be reduced damage and the generation of radioactive waste, greatly improve equipment reliability of operation and operational efficiency, thus produce good social benefit and economic benefit.
The utility model adopts 5 vacuum eddy current molecular pumps to run more than 3000 hours under normal conditions, and molecular pump is working properly, without any exception.
Vacuum turbomolecular pump of the present utility model is not limited to above-mentioned embodiment, and those skilled in the art draw other mode of execution according to the technical solution of the utility model, belongs to technological innovation scope of the present utility model equally.
Claims (9)
1. a vacuum turbomolecular pump, for in strong radiation environment, it comprises molecular pump shell (1), it is characterized in that: in described molecular pump shell (1), be provided with the rotor (2) be alternately arranged and stator (3), described stator (3) is fixed on molecular pump shell (1), described rotor (2) is driven by molecular pump motor (5), the top and bottom of described molecular pump shell (1) are equipped with seal ring (6), described molecular pump shell (1), rotor (2), stator (3) all adopts Structural Hardware, described seal ring (6) adopts metal sealing.
2. vacuum turbomolecular pump as claimed in claim 1, is characterized in that: the lower end of described molecular pump shell (1) is provided with relief opening (8).
3. vacuum turbomolecular pump as claimed in claim 2, is characterized in that: the lower end of described molecular pump shell (1) is also provided with fan (9).
4. the vacuum turbomolecular pump as described in any one of claim 1-3, is characterized in that: described molecular pump shell (1), rotor (2) and stator (3) all adopt 6061 aluminum alloy material.
5. vacuum turbomolecular pump as claimed in claim 4, is characterized in that: described seal ring (6) adopts indium metal silk or metal filamentary silver.
6. vacuum turbomolecular pump as claimed in claim 5, is characterized in that: the enameled cable of described molecular pump motor (5) adopts polyimide enameled wire.
7. vacuum turbomolecular pump as claimed in claim 3, is characterized in that: described fan (9) adopts full aluminium material to make.
8. vacuum turbomolecular pump as claimed in claim 7, is characterized in that: described vacuum turbomolecular pump is connected with the molecular pump power source be arranged on outside radioactive environment (11) by radiation-resistant elastic cable paper (10).
9. vacuum turbomolecular pump as claimed in claim 8, is characterized in that: described fan (9) is driven by fan electromotor, and described fan electromotor adopts the polyimide enameled wire that radiation-resistant property is strong.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420826949.2U CN204402964U (en) | 2014-12-23 | 2014-12-23 | Vacuum turbomolecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420826949.2U CN204402964U (en) | 2014-12-23 | 2014-12-23 | Vacuum turbomolecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204402964U true CN204402964U (en) | 2015-06-17 |
Family
ID=53426829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420826949.2U Active CN204402964U (en) | 2014-12-23 | 2014-12-23 | Vacuum turbomolecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204402964U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104564786A (en) * | 2014-12-23 | 2015-04-29 | 中国原子能科学研究院 | Vacuum turbo molecular pump |
-
2014
- 2014-12-23 CN CN201420826949.2U patent/CN204402964U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104564786A (en) * | 2014-12-23 | 2015-04-29 | 中国原子能科学研究院 | Vacuum turbo molecular pump |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |