CN105405900A - Cadmium telluride solar cell and preparation method thereof - Google Patents

Cadmium telluride solar cell and preparation method thereof Download PDF

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CN105405900A
CN105405900A CN201510724289.6A CN201510724289A CN105405900A CN 105405900 A CN105405900 A CN 105405900A CN 201510724289 A CN201510724289 A CN 201510724289A CN 105405900 A CN105405900 A CN 105405900A
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cadmium telluride
solar cell
cadmium
layer
film layer
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CN105405900B (en
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范智勇
何进
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Peking University Shenzhen Graduate School
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/162Photovoltaic cells having only PN heterojunction potential barriers comprising only Group II-VI materials, e.g. CdS/CdTe photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/125The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/30Coatings
    • H10F77/306Coatings for devices having potential barriers
    • H10F77/311Coatings for devices having potential barriers for photovoltaic cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/543Solar cells from Group II-VI materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Photovoltaic Devices (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a cadmium telluride solar cell, and a titanium oxide film buffer layer is deposited on a surface of the substrate. A titanium oxide (TiO<2>) film contained in the cadmium telluride solar cell as a buffer layer solves a shunting problem, the yield rate and repeatability of a cadmium telluride/cadmium sulfide photovoltaic device are improved, and performance of the a cadmium sulfide/cadmium telluride device is effectively improved. The invention further discloses a preparation method of the cadmium telluride solar cell. Cadmium sulfide and cadmium telluride are obtained through chemical bath deposition (CBD) and electrochemical deposition (ED), and 6.1% conversion efficiency is obtained through FTO/CdS/CdTe/Au structure without any back contact resistance optimization condition.

Description

A kind of cadmium telluride solar cell and preparation method thereof
Technical field
The present invention relates to film photovoltaic technology, especially relate to a kind of cadmium telluride solar cell containing thin film of titanium oxide resilient coating and preparation method thereof.
Background technology
Polycrystalline cadmium sulfide/cadmium telluride (CdS/CdTe) is one of most important film photovoltaic material system.2014, cadmium telluride solar cell energy conversion efficiency through certification has reached 21.5% (first Sunpower Corp.), the record of this single-unit solar cell 21.7% closely created by Copper Indium Gallium Selenide (CIGS) thin-film solar cells.In addition, as binary compound, Cadimium telluride thin film has the simpler and better feature of repeatability of preparation.The potentiality of the Cadimium telluride thin film photovoltaic technology that these facts all show.
At present, the cadmium telluride deposition process of main flow needs high temperature and low vacuum equipment, not only increases production cost, is simultaneously difficult to compatibility with the flexibility in future and nanostructure photovoltaic device technique.Traditional device architecture, it is generally glass/TCO (a kind of transparency conducting layer)/cadmium sulfide/cadmium telluride/back electrode, a large amount of discussions that is operated in (refers to J.Li with p-type cadmium telluride ohmic contact problem, et.al., " RapidthermalprocessingofZnTe:CucontactedCdTesolarcells, " inPhotovoltaicSpecialistConference (PVSC), 2014IEEE40th, 2014, pp.2360-2365.).But the incomplete problem of covering of the shunting problems that cadmium sulfide Hole causes and TCO surface sulfide cadmium is also badly in need of solving, and these problems have impact on yield and the repeatability of device all largely.
In general, there are two kinds of solutions for the problems referred to above: (1) uses the TCO of high resistivity and the TCO mixing of low-resistivity, and such as unadulterated tin oxide (TO) or zinc oxide add fluorine-doped tin oxide (FTO); (2) use thick cadmium sulfide evenly and intactly cover TCO surface.But these two kinds of methods add the optical absorption loss in cadmium sulfide layer simultaneously.
Summary of the invention
For overcoming above-mentioned technological deficiency, the invention discloses a kind of cadmium telluride solar cell containing thin film of titanium oxide resilient coating, titanium oxide resilient coating can be utilized to improve cadmium telluride solar cell device performance.
The invention also discloses the preparation method of above-mentioned cadmium telluride solar cell.
The technical solution used in the present invention is as follows:
A kind of cadmium telluride solar cell, deposits thin film of titanium oxide resilient coating at substrate surface.
Above-mentioned cadmium telluride solar cell is successively containing substrate layer, thin film of titanium oxide resilient coating, cadmium sulphide membrane layer and Cadimium telluride thin film layer and back electrode.
Described substrate is soda-lime glass.
Described substrate layer surface has fluorine-doped tin oxide transparent conductive layer.
The invention also discloses a kind of preparation method of cadmium telluride solar cell, comprise following steps:
(1) by magnetically controlled DC sputtering at substrate layer deposited oxide ti thin film layer;
(2) utilize chemical baths to deposit cadmium sulphide membrane layer on thin film of titanium oxide layer surface;
(3) electrochemical deposition method is utilized to deposit Cadimium telluride thin film layer at cadmium sulphide membrane layer;
(4) use chromium chloride to processing at cadmium sulphide membrane layer and making back electrode.
Thin film of titanium oxide layer described in described step (1), by Deposited By Dc Magnetron Sputtering, after sputtering, is annealed to thin film of titanium oxide layer.
In described step (2), chemical bath deposition solution is any one or a few in chromic acetate, thiocarbamide, ammonium acetate and ammonium hydroxide, is preferably the mixed solution of chromic acetate, thiocarbamide, ammonium acetate and ammonium hydroxide.
In described step (3), electrochemical deposition solution is for mix for sulfuric acid, chromium sulfate, chromium chloride and tellurium dioxide.
In described step (4), after Cadimium telluride thin film layer deposition, deionized water is used to clean the sample obtained, then sample is immersed in supersaturation methanol solution of chromium chloride, then use methyl alcohol to sample wash, dry up again, sample is annealed under argon gas and compressed air atmosphere, finally, by hot vapor deposition gold dot matrixes as back electrode.
Beneficial effect of the present invention is:
(1) titanium oxide (TiO of densification that contains of cadmium telluride solar cell of the present invention 2) film solves the problem of shunting as resilient coating and improve yield and the repeatability of cadmium telluride/cadmium sulfide photovoltaic device, effectively improving cadmium sulfide/cadmium telluride solar cell device performance, work as TiO 2thickness when being applicable to, the yield of device rises 20% to 80%, and maximum conversion rate reaches 8.0%, and the stability of device also improves significantly.
(2) the present invention uses solution methods, and temperature is lower, reduces production cost, simultaneously with flexibility and the nanostructure photovoltaic device process compatible in future, and does not rely on vacuum equipment, effectively reduces production cost.
(3) cadmium sulfide and cadmium telluride is obtained in the present invention by chemical bath deposition (CBD) and electrochemical deposition (ED), without any under back contacts resistance optimal conditions, obtain 6.1% transformation efficiency by FTO/CdS/CdTe/Au structure.
Accompanying drawing explanation
Fig. 1 is cadmium telluride solar cell device structural representation of the present invention;
Fig. 2 is cross-sectional scanning electron microscope (SEM) picture of cadmium telluride solar cell of the present invention;
Fig. 3 is Current density-voltage (J-V) curve;
Fig. 4 is (a) cadmium telluride CdTe, (b) cadmium sulfide CdS and (c) titanium oxide TiO 2surface Scanning Electron microscope (SEM) picture.Illustration is the X ray diffracting spectrum (XRD) of respective material.
Fig. 5 is the yield of devices that different titanium oxide thickness is corresponding;
Fig. 6 is with reference to battery (darker curve) and has the aerial efficiency attenuation curve of 20 nano oxidized titanium layer battery (lighter curve).
Embodiment
Below by way of specific instantiation, embodiments of the present invention are described, those skilled in the art the content disclosed by this specification can understand other advantages of the present invention and effect easily.The present invention can also be implemented by embodiments different in addition and be applied, and the every details in this specification also based on the application of different viewpoints, can carry out various modification or change under not deviating from spirit of the present invention.
Cadmium telluride solar cell device structural representation of the present invention as shown in Figure 1, successively containing substrate layer 1, thin film of titanium oxide resilient coating 3, cadmium sulphide membrane layer 4 and Cadimium telluride thin film layer 5 and back electrode 6, described substrate is soda-lime glass, and described substrate surface has fluorine-doped tin oxide transparent conductive layer 2.
The invention also discloses a kind of preparation method of cadmium telluride solar cell, comprise following steps:
(1) by magnetically controlled DC sputtering at substrate layer deposited oxide ti thin film layer: air-flow is 4 standard atmospheric pressure cubic decimeter oxygen mix per minute 25 standard atmospheric pressure cubic decimeter argon gas per minute; Chamber pressure is 0.6 handkerchief; Target is titanium.The TiO of 20 nanometers to 100 nanometer different-thickness is obtained by different sputtering time 2film.After sputtering, TiO 2sample is annealed 30 minutes in 500 degrees Celsius of cavitys, and gas flow is 300 standard atmospheric pressure cubic decimeters compressed air per minute.
(2) chemical baths is utilized to deposit cadmium sulphide membrane layer on thin film of titanium oxide layer surface: cadmium sulfide CdS layer deposits acquisition in 30 minutes by chemical bath deposition processes in 90 degrees celsius, and chemical bath deposition solution is 5 × 10 -4mole/L chromic acetate (Cd (CH 3cOO) 2), 5 × 10 -4mole/L thiocarbamide (CH 4n 2s), 3 × 10 -2mole/L ammonium acetate (CH 3cOONH 4) and 0.5 mole/L ammonium hydroxide (NH 4oH).
(3) electrochemical deposition method is utilized to deposit Cadimium telluride thin film layer at cadmium sulphide membrane layer: under 85 degrees celsius, cadmium sulfide CdS to use electrochemical deposition method deposit one deck cadmium telluride CdTe.Employing three-electrode system deposits, and wherein sample, carbon-point and Ag/AgCl electrode are respectively as work electrode, to electrode and reference electrode.By barostat CHI1000C, provide with reference to Ag/AgCl-610 millivolt electromotive force.Solution is the sulfuric acid (H of pH value 1.8 2sO 4), the chromium sulfate (CdSO of 0.7 mole/L 4), 3.56 × 10 -4mole/L chromium chloride (CdCl2) and tellurium dioxide (TeO 2) mix.
(4) use chromium chloride to processing at cadmium sulphide membrane layer and making back electrode: to use chromium chloride CdCl 2back electrode 6 makes to sample treatment.After CdTe deposition, use deionized water to sample clean, be then immersed in the supersaturation chromium chloride CdCl of 60 degrees Celsius 2in methanol solution 20 minutes.Next, use methyl alcohol to sample wash, re-use compressed air and dry up.Sample is under argon gas (200 standard atmospheric pressure cubic decimeters are per minute) and compressed air (200 standard atmospheric pressure cubic decimeters are per minute) atmosphere, use 370 degrees Celsius of annealing, finally, by golden round dot (0.0314 square centimeter) array of hot vapor deposition 12 50 nanometer thickness as back electrode.
Before preparing cadmium telluride solar cell, first clean soda-lime glass substrate 1, use cleaning agent, acetone, isopropyl alcohol and deionized water to clean substrate successively in ultrasonic cleaners.
In step 2 of the present invention) in, the present invention is based on film photovoltaic technology, use solution methods to prepare cadmium telluride/cadmium sulfide solar cell, effectively reduce preparation problem, avoid the use of vacuum equipment simultaneously.Meanwhile, adding of titanium oxide resilient coating, improve the performance of solar cell device.
In sum; although the specific embodiment of the present invention is to invention has been detailed description; but persons skilled in the art should be understood that; above-described embodiment is only the description to the preferred embodiments of the present invention; but not limiting the scope of the invention; persons skilled in the art are in the technical scope disclosed by the present invention, and the change that can expect easily, all within protection scope of the present invention.

Claims (9)

1.一种碲化镉太阳能电池,含有衬底层,其特征在于:在衬底层表面沉积有氧化钛薄膜缓冲层。1. A cadmium telluride solar cell, containing a substrate layer, is characterized in that: a titanium oxide film buffer layer is deposited on the surface of the substrate layer. 2.如权利要求1所述的碲化镉太阳能电池,其特征在于:所述电池依次含有衬底层、氧化钛薄膜缓冲层、硫化镉薄膜层和碲化镉薄膜层以及背电极。2 . The cadmium telluride solar cell according to claim 1 , wherein the cell comprises a substrate layer, a titanium oxide thin film buffer layer, a cadmium sulfide thin film layer, a cadmium telluride thin film layer and a back electrode in sequence. 3.如权利要求1所述的碲化镉太阳能电池,其特征在于:所述衬底为钠钙玻璃。3. The cadmium telluride solar cell according to claim 1, wherein the substrate is soda lime glass. 4.如权利要求1所述的碲化镉太阳能电池,其特征在于:在所述衬底表面具有氟掺杂氧化锡透明导电层,所述衬底和氟掺杂氧化锡透明导电层构成衬底层。4. The cadmium telluride solar cell as claimed in claim 1, characterized in that: there is a fluorine-doped tin oxide transparent conductive layer on the surface of the substrate, and the substrate and the fluorine-doped tin oxide transparent conductive layer constitute a lining bottom layer. 5.如权利要求2所述的碲化镉太阳能电池的制备方法,其特征在于包含如下步骤:5. The preparation method of cadmium telluride solar cell as claimed in claim 2, is characterized in that comprising the steps: (1)通过直流磁控溅射在衬底层沉积氧化钛薄膜层;(1) Depositing a titanium oxide film layer on the substrate layer by DC magnetron sputtering; (2)在氧化钛薄膜层表面利用化学浴法沉积硫化镉薄膜层;(2) Utilize chemical bath method to deposit cadmium sulfide film layer on the titanium oxide film layer surface; (3)在硫化镉薄膜层表面利用电化学沉积法沉积碲化镉薄膜层;(3) Depositing a cadmium telluride film layer on the surface of the cadmium sulfide film layer by electrochemical deposition; (4)使用氯化铬对硫化镉薄膜层进行处理并制作背电极。(4) Treat the cadmium sulfide film layer with chromium chloride and make a back electrode. 6.如权利要求5所述的碲化镉太阳能电池的制备方法,其特征在于:所述步骤(1)中所述氧化钛薄膜层通过直流磁控溅射沉积,溅射后,对氧化钛薄膜层进行退火。6. the preparation method of cadmium telluride solar cell as claimed in claim 5 is characterized in that: described step (1) titanium oxide film layer is deposited by direct current magnetron sputtering, after sputtering, to titanium oxide The thin film layer is annealed. 7.如权利要求5所述的碲化镉太阳能电池的制备方法,其特征在于:所述步骤(2)中化学浴沉积溶液为醋酸铬、硫脲、醋酸铵和氢氧化铵中的任意一种或几种。7. the preparation method of cadmium telluride solar cell as claimed in claim 5 is characterized in that: in described step (2), chemical bath deposition solution is any one in chromium acetate, thiourea, ammonium acetate and ammonium hydroxide species or several. 8.如权利要求5所述的碲化镉太阳能电池的制备方法,其特征在于:所述步骤(3)中电化学沉积溶液为为硫酸、硫酸铬、氯化铬和二氧化碲混合而成。8. the preparation method of cadmium telluride solar cell as claimed in claim 5 is characterized in that: in described step (3), electrochemical deposition solution is to be that sulfuric acid, chromium sulfate, chromium chloride and tellurium dioxide mix form . 9.如权利要求5所述的碲化镉太阳能电池的制备方法,其特征在于:所述步骤(4)中,碲化镉薄膜层沉积之后,使用去离子水对得到的样品进行清洗,然后将样品浸泡在过饱和氯化铬甲醇溶液中,然后使用甲醇对样品冲洗、再吹干,样品在氩气和压缩空气氛围下退火,最后,通过热蒸镀沉积金圆点阵列作为背电极。9. the preparation method of cadmium telluride solar cell as claimed in claim 5 is characterized in that: in described step (4), after cadmium telluride film layer deposition, use deionized water to clean the sample obtained, then The sample was soaked in a supersaturated chromium chloride methanol solution, and then the sample was rinsed with methanol, then dried, and the sample was annealed under the atmosphere of argon and compressed air. Finally, an array of gold dots was deposited by thermal evaporation as the back electrode.
CN201510724289.6A 2015-10-29 2015-10-29 A kind of cadmium telluride solar battery and preparation method thereof Active CN105405900B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108183141A (en) * 2017-12-28 2018-06-19 成都中建材光电材料有限公司 A kind of cadmium telluride thin-film battery of new structure and preparation method thereof
CN114664952A (en) * 2022-03-15 2022-06-24 北京大学深圳研究生院 Thin-film solar cell back contact structure and preparation method and application thereof

Citations (3)

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Publication number Priority date Publication date Assignee Title
CN103165695A (en) * 2011-12-09 2013-06-19 龙焱能源科技(杭州)有限公司 Cadmium telluride (CdTe) thin film solar battery
CN103210498A (en) * 2010-08-13 2013-07-17 第一太阳能有限公司 Photovoltaic device
CN104241439A (en) * 2013-06-09 2014-12-24 北京恒基伟业投资发展有限公司 Method for preparing cadmium telluride thin-film solar cell

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Publication number Priority date Publication date Assignee Title
CN103210498A (en) * 2010-08-13 2013-07-17 第一太阳能有限公司 Photovoltaic device
CN103165695A (en) * 2011-12-09 2013-06-19 龙焱能源科技(杭州)有限公司 Cadmium telluride (CdTe) thin film solar battery
CN104241439A (en) * 2013-06-09 2014-12-24 北京恒基伟业投资发展有限公司 Method for preparing cadmium telluride thin-film solar cell

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108183141A (en) * 2017-12-28 2018-06-19 成都中建材光电材料有限公司 A kind of cadmium telluride thin-film battery of new structure and preparation method thereof
CN114664952A (en) * 2022-03-15 2022-06-24 北京大学深圳研究生院 Thin-film solar cell back contact structure and preparation method and application thereof
CN114664952B (en) * 2022-03-15 2024-06-18 北京大学深圳研究生院 Back contact structure of thin film solar cell and preparation method and application thereof

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