CN105405792B - A kind of diode rinse bath - Google Patents
A kind of diode rinse bath Download PDFInfo
- Publication number
- CN105405792B CN105405792B CN201510817770.XA CN201510817770A CN105405792B CN 105405792 B CN105405792 B CN 105405792B CN 201510817770 A CN201510817770 A CN 201510817770A CN 105405792 B CN105405792 B CN 105405792B
- Authority
- CN
- China
- Prior art keywords
- double flute
- flute body
- diode
- groove
- rinse bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Abstract
The present invention relates to a kind of diode rinse bath, which includes double flute body, damping partition board, noise control layer, assembling bolt, cleaning mesh basket and groove body dispenser；The noise control plate of pyramid concave hole is evenly distributed on the rinse bath noise control layer, sound wave is propagated by constantly being hit in the pyramid concave hole of noise control plate, loss of energy, is reduced sound wave and is spread out of out of rinse bath, to reduce noise；The diode ultrasonic cleaner, by the way of installation, do not use integral type, damping partition board can be added between the second groove body and cleaning machine, when cleaning diode, damping partition board absorbs a small amount of vibrational energy, reduces the vibration of diode supersonic wave cleaning machine, extends the service life of diode supersonic wave cleaning machine.
Description
Technical field
The present invention relates to a kind of cleaning device more particularly to a kind of diode rinse baths.
Background technology
Diode can be stained with the dirts such as dust, sweat mark, greasy dirt, fiber, this is just when production and processing above diode
It needs to use diode ultrasonic cleaning equipment, rinse bath and the cleaning machine of general diode ultrasonic cleaning equipment are one
Structure, and only single layer rinse bath, such rinse bath will produce when carrying out diode cleaning using ultrasonic unit
Huge drone the sound generates noise pollution, and can cause the huge vibrations of cleaning machine, reduces the stability of cleaning machine and makes
Use the service life.
Invention content
The technical problem to be solved in the present invention is to provide a kind of diode rinse bath, which can reduce by two
Noise when pole pipe ultrasonic cleaning, and the vibration of cleaning machine can be reduced
In order to solve the above technical problems, the technical scheme is that：
A kind of diode rinse bath, the rinse bath include double flute body, damping partition board, noise control layer, assembling bolt, cleaning mesh basket
With groove body dispenser；
Double flute body includes the first double flute body, the second double flute body；Double flute body is in the U-shaped groove structure of groove body, and groove is in circle
The top right end of column structure, the first double flute body is equipped with a pair of of otic placode, and the top of the otic placode is provided with a pair of of assembling bolt peace
Fill hole；The top left hand of second double flute body is equipped with a pair of of otic placode, and the top of the otic placode is provided with a pair of of assembling bolt mounting hole,
And second double flute body right side top and the first double flute body left side top, be connected with each other；It is equipped in the groove of double flute body
Clean mesh basket；
It is in cylindrical structure to clean mesh basket, is placed in the groove of double flute body, the top for cleaning mesh basket is connected to double flute body
Medial surface；
Damping partition board is placed between double flute body and groove body dispenser, and damping partition board is respectively placed in the side and bottom of double flute body
Face；Damping partition board is tightly attached between double flute body and groove body dispenser；
Noise control is placed on the side and bottom surface of double flute body；And noise control layer is tightly attached between double flute body and groove body dispenser.
Assembling bolt passes through the assembling bolt mounting hole of double flute body, is fixed on groove body dispenser.
The inner wall of double flute body is coated with acid-proof, the coating of alkali prevention, the cleaning solution that acid-base value can be coordinated different to diode into
Row cleaning.
The shrinkage pool of Pyramid is evenly distributed with above noise control layer, shrinkage pool has the function of absorbing sound wave, can reduce and make an uproar
Sound.
The advantage of the invention is that：The diode ultrasonic cleaner uses double flute body, is accompanied between two groove bodies uniformly
The noise control plate of pyramid concave hole is distributed with, sound wave is propagated by constantly being hit in the pyramid concave hole of noise control plate,
Loss of energy reduces sound wave and is spread out of out of rinse bath, to reduce noise；The diode ultrasonic cleaner, using installation
Mode, do not use integral type, can add damping partition board between double flute body and groove body dispenser, cleaning diode
When, damping partition board absorbs a small amount of vibrational energy, reduces the vibration of diode supersonic wave cleaning machine, and it is clear to extend diode ultrasonic wave
The service life of washing machine.
Description of the drawings
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Fig. 1 is the sectional view of diode rinse bath.
As shown in Figure 1：1, the first double flute body；2, the second double flute body；3, damping partition board；4, noise control layer；5, assembling bolt；6、
Otic placode；7, assembling bolt mounting hole；8, mesh basket is cleaned；9, groove body dispenser.
Specific implementation mode
The following examples can make professional and technical personnel that the present invention be more fully understood, but therefore not send out this
It is bright to be limited among the embodiment described range.
A kind of diode rinse bath, the rinse bath include double flute body, damping partition board 3, noise control layer 4, assembling bolt 5, cleaning
Mesh basket 8 and groove body dispenser 9；
Double flute body includes the first double flute body 1, the second double flute body 2；Double flute body is in the U-shaped groove structure of groove body, and groove is in
The top right end of cylindrical structure, the first double flute body 1 is equipped with a pair of of otic placode 6, and the top of the otic placode 6 is provided with a pair of of combination spiral shell
Bolt mounting hole 7；The top left hand of second double flute body 2 is equipped with a pair of of otic placode 6, and the top of the otic placode 6 is provided with a pair of of combination spiral shell
Bolt mounting hole 7, and the left side top on the right side top of the second double flute body 2 and the first double flute body are connected with each other；In the recessed of double flute body
Cleaning mesh basket 8 is installed in slot；
It is in cylindrical structure to clean mesh basket 8, is placed in the groove of double flute body, and the top of cleaning mesh basket 8 is connected to double flute body
Medial surface；
Damping partition board 3 is placed between double flute body and groove body dispenser 9, damping partition board 3 be respectively placed in double flute body side and
Bottom surface；Damping partition board 3 is tightly attached between double flute body and groove body dispenser 9；
Noise control layer 4 is placed in the side and bottom surface of double flute body；And noise control layer 4 is tightly attached between double flute body and groove body dispenser 9.
Assembling bolt 5 passes through the assembling bolt mounting hole 7 of double flute body, is fixed on groove body dispenser 9.
The inner wall of double flute body is coated with acid-proof, the coating of alkali prevention, the cleaning solution that acid-base value can be coordinated different to diode into
Row cleaning.
Noise control layer 4 is evenly distributed with the shrinkage pool of Pyramid above, and shrinkage pool has the function of absorbing sound wave, can reduce and make an uproar
Sound.
The operation principle of the diode rinse bath is：When ultrasonic transmitter sends out ultrasonic wave, Ultrasonic Radiation
To the cleaning solution in trough.Due to being radiated by ultrasonic wave, enable the microbubble in tank liquid under the action of sound wave
To keep vibrating.The absorption for destroying dirt and cleaning parts surface, causes the fatigue rupture of crud layer and is refuted from gaseous type gas
The surface of solids is cleaned in the vibration of bubble, due to that cleaning solution can be made to generate huge drone the sound in scouring process ultrasonic wave,
Pyramid concave hole is evenly distributed on noise control layer 4, sound wave in the pyramid concave hole of noise control layer 4 by constantly hitting
It propagates, loss of energy, reduces sound wave and spread out of out of rinse bath, to reduce noise；The diode rinse bath, using installation
Mode does not use integral type, damping partition board 3 can be added between double flute body and groove body dispenser, in cleaning diode
When, damping partition board 3 absorbs a small amount of vibrational energy, reduces the vibration of diode cleaning machine, extends the use of diode cleaning machine
Service life.
Claims (3)
1. a kind of diode rinse bath, it is characterised in that：The rinse bath includes double flute body, damping partition board, noise control layer, combination spiral shell
Bolt, cleaning mesh basket and groove body dispenser；The double flute body includes the first double flute body, the second double flute body；The groove body of double flute body is in U
Type groove structure, groove are in cylindrical structure, and the top right end of the first double flute body is equipped with a pair of of otic placode, the top of the otic placode
It is provided with a pair of of assembling bolt mounting hole；The top left hand of second double flute body is equipped with a pair of of otic placode, and the top of the otic placode is provided with
A pair of of assembling bolt mounting hole, and the right side top of the second double flute body and the left side top of the first double flute body are connected with each other；Double
Cleaning mesh basket is installed in the groove of groove body；
The cleaning mesh basket is in cylindrical structure, is placed in the groove of double flute body, the top for cleaning mesh basket is connected to double flute body
Medial surface；The damping partition board is placed between double flute body and groove body dispenser, damping partition board be respectively placed in double flute body side and
Bottom surface；Damping partition board is tightly attached between double flute body and groove body dispenser；The noise control is placed on the side and bottom surface of double flute body；And
Noise control layer is tightly attached between two groove bodies of double flute body;The assembling bolt passes through the assembling bolt mounting hole of double flute body, fixed
On groove body dispenser.
2. diode rinse bath according to claim 1, it is characterised in that：The inner wall of the double flute body is coated with acid-proof, alkali prevention
Coating.
3. diode rinse bath according to claim 1, it is characterised in that：It is evenly distributed with pyramid above the noise control layer
The shrinkage pool of shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510817770.XA CN105405792B (en) | 2015-11-24 | 2015-11-24 | A kind of diode rinse bath |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510817770.XA CN105405792B (en) | 2015-11-24 | 2015-11-24 | A kind of diode rinse bath |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105405792A CN105405792A (en) | 2016-03-16 |
| CN105405792B true CN105405792B (en) | 2018-08-03 |
Family
ID=55471195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510817770.XA Active CN105405792B (en) | 2015-11-24 | 2015-11-24 | A kind of diode rinse bath |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105405792B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106040665A (en) * | 2016-07-19 | 2016-10-26 | 如皋市大昌电子有限公司 | Heatable ultrasonic cleaning tank for diode |
| CN106128981B (en) * | 2016-08-29 | 2019-01-29 | 天津汉德威药业有限公司 | A kind of axial diode acid dip pickle |
| CN108550540B (en) * | 2018-05-21 | 2020-11-20 | 泗县田原秸秆回收再利用有限责任公司 | Diode pickling processing system |
| CN113814237B (en) * | 2021-08-19 | 2023-04-18 | 江苏海创微电子有限公司 | High-efficiency cleaning machine for diode production and operation method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1321198A2 (en) * | 1999-03-10 | 2003-06-25 | Alps Electric Co., Ltd. | Ultrasonic cleaner and wet treatment nozzle comprising the same |
| CN101121170A (en) * | 2007-09-10 | 2008-02-13 | 张家港市超声电气有限公司 | Ultrasonic cleaning groove and its processing method |
| CN202277985U (en) * | 2011-10-27 | 2012-06-20 | 成都恒瑞制药有限公司 | Ultrasonic cleaning device |
| CN104511447A (en) * | 2013-09-30 | 2015-04-15 | 西安敏海电子科技有限公司 | Ultrasonic cleaning machine for decreasing vibration and reducing noise |
| CN104841664A (en) * | 2015-04-18 | 2015-08-19 | 成都菲斯普科技有限公司 | Medical ultrasonic cleaning device |
| CN205217492U (en) * | 2015-11-24 | 2016-05-11 | 如皋市大昌电子有限公司 | Diode washing tank |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08281226A (en) * | 1995-04-13 | 1996-10-29 | Shimada Phys & Chem Ind Co Ltd | Ultrasonic washer |
-
2015
- 2015-11-24 CN CN201510817770.XA patent/CN105405792B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1321198A2 (en) * | 1999-03-10 | 2003-06-25 | Alps Electric Co., Ltd. | Ultrasonic cleaner and wet treatment nozzle comprising the same |
| CN101121170A (en) * | 2007-09-10 | 2008-02-13 | 张家港市超声电气有限公司 | Ultrasonic cleaning groove and its processing method |
| CN202277985U (en) * | 2011-10-27 | 2012-06-20 | 成都恒瑞制药有限公司 | Ultrasonic cleaning device |
| CN104511447A (en) * | 2013-09-30 | 2015-04-15 | 西安敏海电子科技有限公司 | Ultrasonic cleaning machine for decreasing vibration and reducing noise |
| CN104841664A (en) * | 2015-04-18 | 2015-08-19 | 成都菲斯普科技有限公司 | Medical ultrasonic cleaning device |
| CN205217492U (en) * | 2015-11-24 | 2016-05-11 | 如皋市大昌电子有限公司 | Diode washing tank |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105405792A (en) | 2016-03-16 |
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