CN105387816A - Micro-displacement measuring device, based on S-shaped fiber, for intensity demodulation type long-period grating - Google Patents
Micro-displacement measuring device, based on S-shaped fiber, for intensity demodulation type long-period grating Download PDFInfo
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- CN105387816A CN105387816A CN201510989915.4A CN201510989915A CN105387816A CN 105387816 A CN105387816 A CN 105387816A CN 201510989915 A CN201510989915 A CN 201510989915A CN 105387816 A CN105387816 A CN 105387816A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The invention discloses a micro-displacement measuring device, based on an S-shaped fiber, for an intensity demodulation type long-period grating. The micro-displacement measuring device includes a broadband light source, an incident single-mode fiber, an S-shaped fiber, a long-period grating, an emitting single-mode fiber and an optical power meter. The long-period grating is formed on the S-shaped fiber through carving. When a sensing structure is fixed to a micro-displacement platform that needs to be measured and to-be-measured micro-displacement changes, the S-shaped fiber changes in flexibility due to axial stress, that is to say, vertical distances on the two sides of the S-shaped fiber decrease along with the increase of the to-be-measured micro-displacement, the light intensity of output resonance peaks of the measuring device changes since the distribution of energy of a fiber core and a cladding layer of the S-shaped fiber changes, and the amount of change of the micro-displacement can be obtained by monitoring the above change. The device avoids using a complex and expensive detection and demodulation system, and can be widely applied to measuring environmental parameters.
Description
Technical field
The invention belongs to micrometric displacement parameter measurement field, be specially a kind of measurement mechanism can measuring micron dimension micrometric displacement.
Technical background
Such as micro Process in optical device and some commercial Application, Robotics, atomic force microscope and MEMS (micro electro mechanical system) etc. need accurate operation to control application aspect, and microdisplacement measurement is a key factor, is subject to showing great attention to of domestic and international researcher for a long time.Common fiber optics microdisplacement measurement has following structure, bragg grating, long period fiber grating, optical taper, dislocation optical fiber.These structures are all fairly simple, easily manufacture, but the above-mentioned structure of major part is all Wavelength demodulation type, so inevitably use complicated and expensive detection and demodulating system.The fiber grating micro-displacement sensor of nearest novel intensity demodulation type causes to be paid close attention to widely.As utilized single mode and photonic crystal fiber to form Mach-Zehnder interferometers, structure is simple, micro-displacement resolution, but the manufacture of this sensor needs expensive photonic crystal fiber; Utilize bowknot to bore optical fiber and dislocation optical fiber formation Mach-Zehnder interferometers, also there is very high micro-displacement resolution, but this complex structure, fragile different disconnected, and easily by the impact of external environment.
A kind of intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber disclosed by the invention, centre wavelength is adopted to be that the wide spectral of 1550nm is as measurement light source, utilize heat sealing machine on general single mode fiber, form S type structure, inscribe long-period gratings thereon and form micro-displacement sensing head, by this measurement mechanism is fixed on micro-displacement platform to be measured, utilize the variation characteristic of the tested micrometric displacement of intensity at measurement mechanism export resonance peak, reach the object measuring micrometric displacement.The invention has the advantages that: inscribe long-period gratings by means of only on S type optical fiber, just can realize the high-precision sensing of micrometric displacement, the change by means of only monitoring output intensity can realize the measurement of micrometric displacement.Owing to being intensity demodulation type measurement mechanism, the detection and the demodulating system that use complex and expensive can be avoided, can widely use in various environmental parameters is measured.
Summary of the invention
The object of the invention is to propose the optical fiber micro-displacement measuring device that a kind of structure is simple, measuring accuracy is high.
The technical solution used in the present invention is:
Based on an intensity demodulation type long-period gratings micro-displacement measuring device for S type optical fiber, comprise wideband light source (1), incident single-mode fiber (2), S type optical fiber (3), long-period gratings (4), outgoing single-mode fiber (5), light power meter (6).The output terminal of wideband light source (1) is connected with one end of incident single-mode fiber (2), the other end of incident single-mode fiber (2) is connected with one end of long-period gratings (4), the other end of long-period gratings (4) is connected with one end of outgoing single-mode fiber (5), the other end of outgoing single-mode fiber (5) is connected with light power meter (6), and S type optical fiber (3) is positioned at the centre of long-period gratings (4).
Described a kind of intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber, is characterized in that the operation wavelength of wideband light source (1) is 1520nm-1570nm.
Described a kind of intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber, it is characterized in that S type optical fiber (3) is positioned at the centre of long-period gratings (4), wherein the dislocation width of S type optical fiber (3) and length are respectively 35.478um and 686um.
Described a kind of intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber, it is characterized in that long-period gratings (4) is engraved on S type optical fiber (3), its cycle and length are respectively 600um and 24mm.
Principle of work of the present invention is: the light that wideband light source 1 sends is by after entering long-period gratings 4 after one section of incident single-mode fiber 2, and except the light of loss in covering, its remaining light is exported by outgoing single-mode fiber 5.When micrometric displacement to be measured changes, the cycle of long-period gratings 4 and the flexibility of S type optical fiber 3 all change, and are changed to master with the flexibility of S type optical fiber 3.The flexibility change of S type optical fiber 3 causes fibre core energy I in S type optical fiber
corewith covering energy I
cladboth distribution change, and cause the fringe visibility k of measurement mechanism output spectrum to change, its expression formula is expressed as follows:
I in formula
corefor the light intensity in fibre core, I
cladfor the light intensity in covering.Known to formula (1) differentiate, work as I
coreand I
cladin energy equal, i.e. I
corewith I
cladratio when being 1, it is the strongest that measurement mechanism exports fringe visibility.
The invention has the beneficial effects as follows: intensity demodulation type micro-displacement measuring device can be formed only by long-period gratings inscribed by the S type optical fiber that general single mode fiber is formed, do not depend on traditional spectrometer, only utilize light power meter can realize the measurement of micrometric displacement.In addition, described measurement mechanism has higher sensitivity, and within the scope of 0-50um, sensitivity is up to 0.172dB/um.The method can be widely used in the measurement of other similar parameters.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of the intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber;
Fig. 2 is the relation schematic diagram of tested micrometric displacement and harmonic peak intensity.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described:
Shown in Figure 1, based on an intensity demodulation type long-period gratings micro-displacement measuring device for S type optical fiber, comprise wideband light source (1), incident single-mode fiber (2), S type optical fiber (3), long-period gratings (4), outgoing single-mode fiber (5), light power meter (6); The output terminal of wideband light source (1) is connected with one end of incident single-mode fiber (2), the other end of incident single-mode fiber (2) is connected with one end of long-period gratings (4), the other end of long-period gratings (4) is connected with one end of outgoing single-mode fiber (5), the other end of outgoing single-mode fiber (5) is connected with light power meter (6), and S type optical fiber (3) is positioned in the middle of long-period gratings (4).
Above-mentioned a kind of intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber, the operation wavelength of its wideband light source (1) is 1520nm-1570nm; Described S type optical fiber (3) is positioned at the centre of long-period gratings (4), and its length is respectively 35.478um and 686um; Cycle and the length of described long-period gratings (4) are respectively 600um and 24mm.
A kind of intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber, its working method is: the centre wavelength of wideband light source 1 is 1550 nanometers, when its light sent is by entering long-period gratings 4 after incident single-mode fiber 2, part light enters the covering of long-period gratings 4 and S type optical fiber 3, another part light remains in fibre core and transmits, when the optical transport in fibre core and covering is to outgoing single mode 5, two-beam meets and produces the harmonic peak of specific wavelength.When extraneous micrometric displacement changes, the flexibility of S type optical fiber reduces along with the increase of micrometric displacement, thus causes harmonic peak intensity to change, and the mechanical periodicity of long-period gratings changes much smaller than the flexibility of S type optical fiber, can ignore.Fig. 2 is the relation schematic diagram of tested micrometric displacement and harmonic peak intensity, and when microdisplacement measurement scope is 0-50um, measurement sensistivity is up to 0.172dB/um.
Claims (4)
1., based on an intensity demodulation type long-period gratings micro-displacement measuring device for S type optical fiber, comprise wideband light source (1), incident single-mode fiber (2), S type optical fiber (3), long-period gratings (4), outgoing single-mode fiber (5) light power meter (6).The output terminal of wideband light source (1) is connected with one end of incident single-mode fiber (2), the other end of incident single-mode fiber (2) is connected with one end of long-period gratings (4), the other end of long-period gratings (4) is connected with one end of outgoing single-mode fiber (5), the other end of outgoing single-mode fiber (5) is connected with light power meter (6), and S type optical fiber (3) is positioned in the middle of long-period gratings (4).
2. a kind of intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber according to claims 1, is characterized in that the operation wavelength of wide spectrum light source (1) is 1520nm-1570nm.
3. a kind of intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber according to claims 1, it is characterized in that S type optical fiber (3) is positioned at the centre of long-period gratings (4), wherein the dislocation width of S type optical fiber (3) and length are respectively 35.478um and 686um.
4. a kind of intensity demodulation type long-period gratings micro-displacement measuring device based on S type optical fiber according to claims 1, it is characterized in that long-period gratings (4) is engraved on S type optical fiber (3), its cycle and length are respectively 600um and 24mm.
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CN102997849A (en) * | 2012-11-16 | 2013-03-27 | 中国计量学院 | Micro-displacement sensing method and device based on photonic crystal fiber long period grating |
CN203908582U (en) * | 2014-02-19 | 2014-10-29 | 南开大学 | S-type taper embedded fiber Bragg grating two-parameter sensor |
CN104390594A (en) * | 2014-11-10 | 2015-03-04 | 西北大学 | Optic fiber micro-structure displacement sensor |
CN104864999A (en) * | 2015-06-11 | 2015-08-26 | 毛嘉 | Tension sensor based on kagome fiber bragg grating |
CN104880435A (en) * | 2015-05-25 | 2015-09-02 | 重庆理工大学 | Sensing device for measuring TNT explosives |
CN205448974U (en) * | 2015-12-23 | 2016-08-10 | 中国计量学院 | Little displacement measurement device of intensity demodulation type long period grating based on S type optic fibre |
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2015
- 2015-12-23 CN CN201510989915.4A patent/CN105387816A/en active Pending
Patent Citations (7)
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US20050018199A1 (en) * | 2003-07-24 | 2005-01-27 | Leblanc Philip R. | Fiber array interferometer for inspecting glass sheets |
CN102997849A (en) * | 2012-11-16 | 2013-03-27 | 中国计量学院 | Micro-displacement sensing method and device based on photonic crystal fiber long period grating |
CN203908582U (en) * | 2014-02-19 | 2014-10-29 | 南开大学 | S-type taper embedded fiber Bragg grating two-parameter sensor |
CN104390594A (en) * | 2014-11-10 | 2015-03-04 | 西北大学 | Optic fiber micro-structure displacement sensor |
CN104880435A (en) * | 2015-05-25 | 2015-09-02 | 重庆理工大学 | Sensing device for measuring TNT explosives |
CN104864999A (en) * | 2015-06-11 | 2015-08-26 | 毛嘉 | Tension sensor based on kagome fiber bragg grating |
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