CN105385998A - Self-lubricating metal material - Google Patents
Self-lubricating metal material Download PDFInfo
- Publication number
- CN105385998A CN105385998A CN201510883984.7A CN201510883984A CN105385998A CN 105385998 A CN105385998 A CN 105385998A CN 201510883984 A CN201510883984 A CN 201510883984A CN 105385998 A CN105385998 A CN 105385998A
- Authority
- CN
- China
- Prior art keywords
- metal material
- steel
- self
- layer
- lubricating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a self-lubricating metal material. According to the self-lubricating metal material, the surface of the metal material is coated with a basal layer through the metal vapor vacuum arc (MEVVA) source ion implantation technique; and then, the surface of the processed metal material is coated with a tungsten disulfide (WS2) lubricating layer through the radio frequency (RF) sputtering process in the physical vapor deposition (PVD). The self-lubricating metal material is resistant to load, corrosion, abrasion and high temperature and suitable for manufacturing of parts moving in various common and extreme environments.
Description
Technical field
The invention belongs to metal material field, particularly relate to a kind of self-lubricating metal material.
Background technology
Industrially at present generally use liquid lubricant, be coated in the metallic surface of apparatus for lubrication.Along with the development of science and technology and the increase of kinds of machine, lipid lubricant is usually difficult to reach requirement, main because lipid lubricant is difficult to play a role enduringly in the event of high temperatures, even loses effect.
Summary of the invention
For providing a kind of novel self-lubricating metal material, in order to make withstand load, wear-resistant, corrosion-resistant, high temperature resistant, and the apparatus work parts that production cost is low, the present invention is achieved through the following technical solutions:
A kind of self-lubricating metal material, be made up of solid lubricating film and metal base, it is characterized in that, described solid lubricating film main component is WS
2; In the radio-frequency sputtering mode in physical gas phase deposition technology, by WS
2solid lubricant is deposited on described metallic surface, forms coating layer (1); Described solid lubricating film also comprises TiN layer or DLC layer, is positioned at WS
2between lubricant film layer and metal base; Described TiN layer, with MEVVA source ion implantttion technique, is attached to metal base surface, forms lubricant film stratum basale (2); Described WS
2coating layer (1) thickness is 2.1 μm; Described stratum basale (2) thickness is 0.015 μm; Described metal base is aluminium, steel or copper; Described steel can be 45# steel, die steel, stainless steel or steel alloy.
Behind the material modified surface of employing MEVVA source ion implantttion technique provided by the invention, re-use the RF radio-frequency sputtering manufacture technics WS2 self-lubricating metal material in PVD, solve WS2 lubricant film that U.S. doctor Robert.D.Nelson and MSC company run into and basal body binding force low, easy to wear, corrosion-resistant not strong defect.This solid lubricant film is at the high temperature of 650 DEG C and the equal lubricant effect that can keep excellence under the low temperature of-273 degree.WS2 film also has low-down frictional coefficient (0.03).Therefore in conjunction with the self-lubricating metal material of this solid lubricant film, there is withstand load, and wear-resistant, corrosion-resistant, resistant to elevated temperatures excellent properties; Be suitable for the various making with moving parts in extreme environment of commonly using.
Accompanying drawing explanation
Fig. 1: self-lubricating metal material surface section figure
Embodiment
A kind of self-lubricating metal material, be made up of solid lubricating film and metal base, it is characterized in that, described solid lubricating film main component is WS
2; In the radio-frequency sputtering mode in physical gas phase deposition technology, by WS
2solid lubricant is deposited on described metallic surface, forms coating layer (1); Described solid lubricating film also comprises TiN layer or DLC layer, is positioned at WS
2between lubricant film layer and metal base; Described TiN layer, with MEVVA source ion implantttion technique, is attached to metal base surface, forms lubricant film stratum basale (2); Described WS
2coating layer (1) thickness is 2.1 μm; Described stratum basale (2) thickness is 0.015 μm; Described metal base is aluminium, steel or copper; Described steel can be 45# steel, die steel, stainless steel or steel alloy.
Claims (1)
1. a self-lubricating metal material, is made up of solid lubricating film and metal base, it is characterized in that, described solid lubricating film main component is WS
2; In the radio-frequency sputtering mode in physical gas phase deposition technology, by WS
2solid lubricant is deposited on described metallic surface, forms coating layer (1); Described solid lubricating film also comprises TiN layer or DLC layer, is positioned at WS
2between lubricant film layer and metal base; Described TiN layer, with MEVVA source ion implantttion technique, is attached to metal base surface, forms lubricant film stratum basale (2); Described WS
2coating layer (1) thickness is 2.1 μm; Described stratum basale (2) thickness is 0.015 μm; Described metal base is aluminium, steel or copper; Described steel can be 45# steel, die steel, stainless steel or steel alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510883984.7A CN105385998A (en) | 2015-12-03 | 2015-12-03 | Self-lubricating metal material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510883984.7A CN105385998A (en) | 2015-12-03 | 2015-12-03 | Self-lubricating metal material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105385998A true CN105385998A (en) | 2016-03-09 |
Family
ID=55418762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510883984.7A Pending CN105385998A (en) | 2015-12-03 | 2015-12-03 | Self-lubricating metal material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105385998A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107237821A (en) * | 2017-06-27 | 2017-10-10 | 江苏大学 | A kind of self-lubrication treatment method of Aero-engine Bearing |
| CN112323035A (en) * | 2020-08-24 | 2021-02-05 | 机械科学研究总院集团有限公司 | Preparation method of self-lubricating wear-resistant film for gear surface |
-
2015
- 2015-12-03 CN CN201510883984.7A patent/CN105385998A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107237821A (en) * | 2017-06-27 | 2017-10-10 | 江苏大学 | A kind of self-lubrication treatment method of Aero-engine Bearing |
| CN112323035A (en) * | 2020-08-24 | 2021-02-05 | 机械科学研究总院集团有限公司 | Preparation method of self-lubricating wear-resistant film for gear surface |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160309 |
|
| WD01 | Invention patent application deemed withdrawn after publication |