CN105375327B - Four-cavity structure radio frequency laser - Google Patents
Four-cavity structure radio frequency laser Download PDFInfo
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- CN105375327B CN105375327B CN201510735977.2A CN201510735977A CN105375327B CN 105375327 B CN105375327 B CN 105375327B CN 201510735977 A CN201510735977 A CN 201510735977A CN 105375327 B CN105375327 B CN 105375327B
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Abstract
The invention provides a radio frequency laser, a radio frequency laser with a four-chamber structure; the four chambers include: the laser comprises a central airtight laser cavity, and a beam shaping cavity, a low-power radio-frequency cavity and a high-power radio-frequency cavity which surround the airtight laser cavity; the four-chamber structure radio frequency laser mainly comprises four chambers and functional accessories attached to the four chambers; the radio frequency laser with the four-chamber structure is of an integrated structure in which an airtight laser cavity is integrally adopted, and a beam shaping cavity, a low-power radio frequency cavity and a high-power radio frequency cavity are distributed around the airtight laser cavity.
Description
Technical Field
The invention relates to a laser, in particular to a radio frequency laser with a four-cavity structure.
Background
The traditional radio frequency lasers on the market at present do not have a four-chamber structure.
The radio frequency lasers with the power larger than hundred watt are all of single-cavity structures, and comprise airtight laser cavities and functional accessories attached to the outside of the laser cavities, and some radio frequency lasers can only be split without installation positions, such as a high-power radio frequency unit and a direct-current power supply are separated; the drawbacks of this single-chamber structure are: the structure is complex, the assembly is difficult, the shielding is poor, the adjustment is difficult, and the laser work efficiency is low.
Disclosure of Invention
In view of the above background, the present invention provides a four-cavity rf laser with simple and compact structure, easy assembly, no leakage, low radiation, high power and good effect.
According to an aspect of the present invention, there is provided a four-chamber structure radio frequency laser, the four-chamber including: the laser comprises a central airtight laser cavity, and a beam shaping cavity, a low-power radio-frequency cavity and a high-power radio-frequency cavity which surround the airtight laser cavity; the four-chamber structure radio frequency laser mainly comprises four chambers and functional accessories attached to the four chambers; the four-chamber structure radio frequency laser adopts an integral structure that an airtight laser cavity, a light beam shaping cavity, a low-power radio frequency cavity and a high-power radio frequency cavity are distributed around the airtight laser cavity.
In an exemplary embodiment, a four-chamber structure radio frequency laser is provided, wherein an airtight laser cavity is processed at the center of an aluminum material, and a beam shaping cavity, a low-power radio frequency cavity and a high-power radio frequency cavity are processed around the airtight laser cavity. Processing a hole position for installing a pre-ionization electrode between the low-power radio-frequency cavity and the airtight laser cavity; and processing a hole position for installing the radio-frequency electrode between the high-power radio-frequency cavity and the airtight laser cavity. Finally, chamber cover plate positions are respectively processed at the beam shaping cavity, the low-power radio-frequency cavity and the high-power radio-frequency cavity.
The airtight laser cavity is internally provided with a positive electrode plate and a negative electrode plate, and the radio-frequency electrode penetrates through the cavity shell and is connected with the positive electrode plate. One end of the airtight laser cavity is provided with a total reflector, the other end of the airtight laser cavity is provided with a partial reflector, the outer side of the partial reflector is provided with a turn-back mirror seat, the turn-back mirror seat is provided with two reflectors, and laser beams output by a window of the partial reflector are reflected into a beam shaping cavity. The laser beam is shaped into a parallel output beam close to a circular beam by a beam shaping mirror in a beam shaping cavity.
The high-power radio frequency cavity consists of a control unit and a high-power radio frequency unit, a high-power core-through capacitor is arranged in the high-power radio frequency cavity and used for introducing current, and a negative wire connecting hole is arranged beside the high-power radio frequency cavity.
The low-power radio frequency cavity consists of three parts, namely a driving distribution unit, a driving unit and a pre-ionization unit, wherein the units are independent from one another, and wires among the units are arranged in the wire grooves, so that the circuit signals are not interfered. The control signal enters the low-power radio-frequency cavity from the control unit through a coaxial pair of through-core capacitors, so that the interference of radio-frequency current in the high-power radio-frequency unit on the control signal is prevented.
And a beam shaping mirror and a direct current power supply are arranged in the beam shaping cavity.
Preferably, the four-chamber structure radio frequency laser has a rectangular parallelepiped shape as a whole.
Preferably, the gas-tight laser cavity is located at the center of the four-cavity structure radio frequency laser.
Preferably, the beam shaping cavity, the low power rf cavity and the high power rf cavity are distributed at the periphery of the gas-tight laser cavity.
Preferably, the airtight laser cavity, the beam shaping cavity, the low power RF cavity and the high power RF cavity are machined on an aluminum material and are integrated.
Preferably, cover plates are arranged outside the beam shaping cavity, the low-power radio-frequency cavity and the high-power radio-frequency cavity to seal the respective cavities.
Preferably, a pre-ionization electrode is mounted between the low power radio frequency cavity and the gas-tight laser cavity.
Preferably, radio frequency electrodes are mounted between the high power radio frequency cavity and the gas-tight laser cavity.
Preferably, a beam shaping mirror and a direct current power supply are installed in the beam shaping cavity.
Preferably, a positive electrode plate and a negative electrode plate are arranged in the airtight laser cavity, and the radio-frequency electrode penetrates through the cavity shell and is connected with the positive electrode plate.
Preferably, the high-power radio-frequency cavity consists of a control unit and a high-power radio-frequency unit, a high-power feed-through capacitor is arranged in the cavity and used for introducing current, and a negative wire connecting hole is arranged beside the high-power feed-through capacitor
Preferably, the low-power radio frequency cavity is composed of a driving distribution unit, a driving unit and a pre-ionization unit.
Preferably, each unit in the low-power radio frequency cavity is independent, and the wires between the units are arranged in the wire slots, so that the line signals are ensured not to be interfered. The control signal enters the low-power radio-frequency cavity from the control unit through a coaxial pair of through-core capacitors, so that the interference of radio-frequency current in the high-power radio-frequency unit on the control signal is prevented.
Preferably, a total reflection mirror is installed at one end of the airtight laser cavity, a partial reflection mirror is installed at the other end of the airtight laser cavity, a folding mirror seat is installed at the outer side of the partial reflection mirror, two reflection mirrors are installed on the folding mirror seat, and laser beams output by a window of the partial reflection mirror are folded and reflected into the beam shaping cavity. The laser beam is shaped into a parallel output beam close to a circular beam by a beam shaping mirror in a beam shaping cavity.
Compared with the traditional radio frequency laser, the four-cavity structure radio frequency laser has the advantages of simple and compact structure, easiness in assembly, no leakage, low radiation, high power, good effect and the like.
Drawings
Exemplary embodiments of the invention are described in detail in connection with the following drawings, wherein:
fig. 1 shows a cross-sectional view of a four-cavity structure radio frequency laser according to an exemplary embodiment of the present invention.
FIG. 2 shows a right side view of a four-chamber structure radio frequency laser, i.e., a low power radio frequency cavity site, according to an example embodiment of the present invention;
fig. 3 shows a left side view of a four-chamber structure radio frequency laser, i.e. a beam shaping cavity location, according to an exemplary embodiment of the present invention;
fig. 4 shows a top view of a four-cavity structure rf laser, i.e. a high power rf cavity site, according to an exemplary embodiment of the present invention;
in the drawings, the same or similar components are denoted by the same or similar reference numerals.
Detailed Description
The four-cavity structure radio frequency laser according to the exemplary embodiment of the present invention is described in detail below with reference to the accompanying drawings.
Fig. 1 shows a cross-sectional view of a four-cavity structure radio frequency laser according to an exemplary embodiment of the present invention.
As shown in fig. 1, the four-chamber structure rf laser is a rectangular parallelepiped, and adopts a four-chamber structure, the four-chamber structure rf laser includes a central airtight laser cavity 2, and a beam shaping cavity 5, a low-power rf cavity 4, and a high-power rf cavity 3 surrounding the airtight laser cavity 2, and the four-chamber structure rf laser mainly includes four chambers and functional accessories attached to the four chambers.
As shown in figure 1, a four-chamber structure radio frequency laser is characterized in that a gas-tight laser cavity 2 is machined in the center of an aluminum material, and a beam shaping cavity 5, a low-power radio frequency cavity 4 and a high-power radio frequency cavity 3 are machined around the laser cavity. A hole site for installing a preionization electrode 10 is processed between the low-power radio-frequency cavity 4 and the airtight laser cavity 2, and a hole site for installing a radio-frequency electrode (positive electrode) 8 is processed between the high-power radio-frequency cavity 3 and the airtight laser cavity 2.
As shown in fig. 1, a positive electrode plate 6 and a negative electrode plate 7 are installed in the airtight laser cavity 2, and a radio frequency electrode 8 is connected to the positive electrode plate 6 through the laser housing 1.
As shown in fig. 2/3/4, a total reflection mirror is attached to one end of the airtight laser cavity 2, the total reflection mirror is attached to a total reflection flange 15, a partial reflection mirror is attached to a half reflection flange 16, and a folding mirror mount 17 is attached to the outer side of the half reflection flange 16.
As shown in fig. 3, two mirrors 33 are mounted on the mirror-folding base 17 to fold the laser beam 30 outputted from the mirror window into the beam-shaping cavity 5. Laser beam 31 is shaped by beam shaping mirror 34 in beam shaping cavity 5 to output approximately parallel circular laser beam 32.
As shown in fig. 4, the high power rf cavity 3 is composed of a control unit 29 and a high power rf unit, and a high power feedthrough capacitor is installed inside for introducing current, and a negative wire connection hole is provided beside.
As shown in fig. 2, the low-power rf cavity 4 is composed of three parts, i.e., a driving distribution unit 18, a driving unit 19 and a pre-ionization unit 20, each of the units is independent, and the wires between the units are installed in the wire slot 22/23/24/25/26/27, so as to ensure that the line signals are not interfered. The control signal from the control unit 29 into the low power rf cavity 4 is realized by a coaxial pair of feedthrough capacitors, thus preventing the interference of rf current in the high power rf unit with the control signal.
As shown in fig. 3, a beam shaping mirror 34 and a dc power supply 35 are installed in the beam shaping cavity 5.
Claims (16)
1. A four-chamber structure radio frequency laser; wherein the four chambers comprise: the laser comprises a central airtight laser cavity, and a beam shaping cavity, a low-power radio-frequency cavity and a high-power radio-frequency cavity which surround the airtight laser cavity; the radio frequency laser with the four-cavity structure mainly comprises four cavities and functional accessories attached to the four cavities; the four-chamber RF laser adopts an integral structure that an airtight laser cavity is arranged inside the whole body, and a beam shaping cavity, a low-power RF cavity and a high-power RF cavity are distributed around the airtight laser cavity, wherein the airtight laser cavity, the beam shaping cavity, the low-power RF cavity and the high-power RF cavity are formed by processing aluminum materials and are integrated, and an RF electrode is arranged between the high-power RF cavity and the airtight laser cavity.
2. The four-chamber structure rf laser of claim 1, wherein:
the four-chamber structure radio frequency laser is in a cuboid shape as a whole.
3. The four-chamber structure rf laser of claim 1, wherein:
the airtight laser cavity is positioned at the center of the four-cavity structure radio frequency laser.
4. The four-cavity structure radio frequency laser according to claim 1,
the beam shaping cavity, the low-power radio-frequency cavity and the high-power radio-frequency cavity are distributed at the periphery of the airtight laser cavity.
5. The four-chamber structure rf laser of claim 1, wherein:
further comprising: and cover plates are arranged outside the beam shaping cavity, the low-power radio-frequency cavity and the high-power radio-frequency cavity to seal the respective cavities.
6. The four-chamber structure rf laser of claim 5, wherein:
and a cover plate for sealing and preventing dust is arranged outside the beam shaping cavity.
7. The four-chamber structure rf laser of claim 5, wherein:
a cover plate is provided outside the low power rf cavity for sealing against dust and shielding.
8. The four-chamber structure rf laser of claim 5, wherein:
and a cover plate for sealing, dust prevention and shielding is arranged outside the high-power radio frequency cavity.
9. The four-chamber structure rf laser of claim 1, wherein:
between the low power rf cavity and the gas-tight laser cavity a pre-ionization electrode is mounted.
10. The four-chamber structure rf laser of claim 1, wherein:
and a beam shaping mirror and a direct current power supply are arranged in the beam shaping cavity.
11. The four-chamber structure rf laser of claim 1, wherein:
a positive electrode plate and a negative electrode plate are arranged in the airtight laser cavity, and the radio-frequency electrode penetrates through the cavity shell to be connected with the positive electrode plate.
12. The four-chamber structure rf laser of claim 1, wherein:
one end of the airtight laser cavity is provided with a total reflection mirror, the other end of the airtight laser cavity is provided with a partial reflection mirror, the outer side of the partial reflection mirror is provided with a turn-back mirror seat, the turn-back mirror seat is provided with two reflection mirrors, laser beams output by windows of the partial reflection mirrors are reflected into a beam shaping cavity, and the laser beams are shaped into parallel output beams close to circular beams through the beam shaping mirror in the beam shaping cavity.
13. The four-chamber structure rf laser of claim 1, wherein:
the high-power radio frequency cavity consists of a control unit and a high-power radio frequency unit, a high-power feed-through capacitor is installed in the cavity and used for introducing current, and a negative wire connecting hole is formed beside the high-power feed-through capacitor.
14. The four-chamber structure rf laser of claim 1, wherein:
the low-power radio frequency cavity consists of a driving distribution unit, a driving unit and a pre-ionization unit.
15. The four-chamber structure rf laser of claim 14, wherein: the units in the low-power radio frequency cavity are independent from each other, and wires among the units are arranged in the wire grooves, so that the circuit signals are not interfered; the control signal enters the low-power radio-frequency cavity from the control unit through a coaxial pair of through-core capacitors, so that the interference of radio-frequency current in the high-power radio-frequency unit on the control signal is prevented.
16. The four-chamber structure rf laser of claim 1, wherein: the four-chamber structure radio frequency laser mainly comprises an integrated airtight laser cavity, a beam shaping cavity, a low-power radio frequency cavity, a high-power radio frequency cavity, and a positive plate, a negative plate, a radio frequency electrode, a preionization electrode, a total reflection mirror, a partial reflection mirror, a total reflection flange, a semi-reflection flange, a turn-back mirror, a beam shaping mirror, a direct current power supply, a control unit, a high-power radio frequency unit, a driving distribution unit, a driving unit, a preionization unit and a cooling system which are attached to the high-power radio frequency cavity.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510735977.2A CN105375327B (en) | 2015-11-03 | 2015-11-03 | Four-cavity structure radio frequency laser |
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| CN201510735977.2A CN105375327B (en) | 2015-11-03 | 2015-11-03 | Four-cavity structure radio frequency laser |
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| CN105375327A CN105375327A (en) | 2016-03-02 |
| CN105375327B true CN105375327B (en) | 2020-09-22 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2017075731A1 (en) * | 2015-11-03 | 2017-05-11 | 徐海军 | Radio frequency laser with four chamber structure |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2145274A (en) * | 1983-07-27 | 1985-03-20 | Hitachi Ltd | Gas laser system |
| CN202206025U (en) * | 2011-06-27 | 2012-04-25 | 武汉晶石光电技术有限公司 | Pipe cavity structure of slip type carbon dioxide laser |
| CN103151679A (en) * | 2012-03-02 | 2013-06-12 | 中国科学院光电研究院 | Single-cavity dual-electrode discharge cavity based on improved cross-flow fan impellers |
| CN205122989U (en) * | 2015-11-03 | 2016-03-30 | 北京热刺激光技术有限责任公司 | Four chamber arrangement radio frequency laser instruments |
-
2015
- 2015-11-03 CN CN201510735977.2A patent/CN105375327B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2145274A (en) * | 1983-07-27 | 1985-03-20 | Hitachi Ltd | Gas laser system |
| CN202206025U (en) * | 2011-06-27 | 2012-04-25 | 武汉晶石光电技术有限公司 | Pipe cavity structure of slip type carbon dioxide laser |
| CN103151679A (en) * | 2012-03-02 | 2013-06-12 | 中国科学院光电研究院 | Single-cavity dual-electrode discharge cavity based on improved cross-flow fan impellers |
| CN205122989U (en) * | 2015-11-03 | 2016-03-30 | 北京热刺激光技术有限责任公司 | Four chamber arrangement radio frequency laser instruments |
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Effective date of registration: 20210513 Address after: 317500 No.2 scientific research plant, area B, SME Incubation Park, No.2 Jintang North Road, Wenling East New District, Taizhou City, Zhejiang Province Patentee after: Zhejiang Thermal Stimulation Optical Technology Co.,Ltd. Address before: 100016 5th floor, M8a, yard 1, Jiuxianqiao East Road, Chaoyang District, Beijing Patentee before: BEIJING RECI LASER TECHNOLOGY Co.,Ltd. |