CN105374929B - A kind of texturing leadless piezoelectric ceramics multilayer driver and preparation method thereof - Google Patents
A kind of texturing leadless piezoelectric ceramics multilayer driver and preparation method thereof Download PDFInfo
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Abstract
The present invention relates to a kind of texturing leadless piezoelectric ceramics multilayer drivers and preparation method thereof, which includes：The multilayer textured ceramics thick film of lamination setting, including it is printed with the ceramic topcoats, at least one layer of ceramic inner layer and ceramic bottom of layered electrode respectively；Through the first through hole of the ceramic topcoats and ceramic inner layer；Through the second through-hole of the ceramic inner layer and ceramic bottom；Fill the first connection electrode of the first through hole；And the second connection electrode of filling second through-hole；Wherein first through hole and the second through-hole are located at the opposite sides of the textured ceramics thick film, layered electrode in the ceramic inner layer has strip slot, the strip slot is between first through hole and the second through-hole, and the strip slot in adjacent two layers ceramic inner layer is not overlapped.This electrode structure saves external electrode, simplifies preparation process, cost-effective, while avoiding the drawbacks of termination electrode is easy failure during driver use.
Description
Technical field
The present invention relates to a kind of texturing leadless piezoelectric ceramics multilayer drivers and preparation method thereof, belong to electronic ceramics material
Material and device arts.
Background technology
The deformation quantity very little that piezoelectric ceramics generates under electric field action accurately controls mechanism-based on what this principle made
Piezoelectric actuator all has the fields such as control, microelectric technique, the bioengineering of precision instrument and machinery extremely important
Effect.These application requirement piezoelectric ceramic actuators are small, driving voltage is low, displacement is big, energy is integrated.However, common
The volume of piezoelectric ceramics is generally bigger, and the driving field strength of piezoelectric ceramics is generally also relatively high (hundreds of V/mm).It is low in order to realize
Pressure drives and reduces the volume of piezoelectric ceramics, and there has been proposed the concepts of multilayer piezoelectric ceramic driver, i.e., are made pottery by multilayer
Porcelain technology superposition multi-layer ceramics membrane material also achieve the effect that high drive under low-voltage driving.Multilayer piezoelectric ceramic drives
Dynamic device has very big advantage, size that can also be controlled by regulating and controlling the thickness of ceramic film in placement property and driving force etc.
System, to greatly expand the space of piezoelectric ceramic actuator application development.
Currently, what piezoelectric ceramic actuator used in the market is mostly lead piezoelectric ceramics.But in lead base piezoelectric ceramics
Lead oxide (PbO) content accounts for about the noxious material that 60~70% or so, PbO is volatile under high temperature so that lead base piezoelectric ceramics
All serious harm can be brought during preparation, use and offal treatment to human lives and ecological environment.In order to protect
The sustainable development of the earth and social economy, various countries increasingly pay attention to environmental protection.European Union's legislation is formulated《About in electronics
Limitation uses certain Hazardous Substances Directives in electrical equipment》(RoHS), and start formal implement on July 1st, 2006.It is beautiful
The developed countries such as state, Japan also launch respectively measure and policy forbids the use of leaded electronic material.China also improves year by year
To the supporting dynamics of lead-free research project.Therefore, the leadless piezoelectric ceramics driver of development environment friendly is the following hair
The trend of exhibition and requirement.However, the piezoelectric property of leadless piezoelectric ceramics still has a certain distance with lead base ceramic phase ratio, to
Substitution lead base piezoelectric ceramics must also further increase its piezoelectric property.
Currently, multilayer piezoelectric ceramic driver includes ceramic matrix, interior electrode and external electrode, wherein interior electrode and outer end
Electrode is combined the electrical parallel connection for realizing multilayer ceramic body.Many patents all describe this conventional multilayer piezoelectric actuator in detail
Electrode structure, such as Chinese patent CN101552318A《The manufacturing method and multi-layer piezoelectric of multilayer piezoelectric acutator drive
Device》, United States Patent (USP) US7429817B2《Multilayer Piezoelectric Element》.Due to there are external electrode,
External electrode must be prepared after interior electrode and ceramic thick film cofiring so that preparation process is more complicated.And Uchino et al.
In paper《Multilayer Ceramic Actuators》In mention, the inactive region at interior electrode both ends is applying electric field
The lower stress of effect can be bigger, the generation of crackle is easy to cause, to influence the service life of multilayerceramic device.In addition, outer end is electric
Pole makes disabler during the use of driver since continuous deformation is also easy to cause cracking.Due to these disadvantages,
Interior electrode not is the ideal electrode structure of multilayerceramic device with the electrode structure that external electrode is combined.
Invention content
For above-mentioned problems faced, the object of the present invention is to provide a kind of texturing leadless piezoelectric ceramics multilayer drivers
And preparation method thereof, to improve performance and the service life of leadless piezoelectric ceramics multilayer driver.Since grain orientation textured is to improve nothing
The texturing of leadless piezoelectric ceramics is combined with multi-layer ceramics technique to carry by the important method of lead piezoelectric ceramics performance, the present invention
The piezoelectric property of high multilayer driver.In addition, the present invention devises the electrode structure of new multi-layer ceramics driver, biography is avoided
The defect of system activation configuration China and foreign countries end-electrode structure.
Here, the present invention provides a kind of texturing leadless piezoelectric ceramics multilayer driver, including：The multilayer of lamination setting is knitted
Structure ceramic thick film, including it is printed with the ceramic topcoats, at least one layer of ceramic inner layer and ceramic bottom of layered electrode respectively；Run through
The first through hole of the ceramic topcoats and ceramic inner layer；Through the second through-hole of the ceramic inner layer and ceramic bottom；Filling institute
State the first connection electrode of first through hole；And the second connection electrode of filling second through-hole；Wherein first through hole and
Two through-holes are located at the opposite sides of the textured ceramics thick film, and the layered electrode in the ceramic inner layer is stitched with strip
Gap, the strip slot is between first through hole and the second through-hole, and the strip slot in adjacent two layers ceramic inner layer does not weigh
It is folded.
Leadless piezoelectric ceramics texturing is combined by the present invention with multi-layer ceramics technique；Using electrode connecting structure in through-hole
The electrode connecting structure that substitution external electrode is combined with interior electrode.The texturing leadless piezoelectric ceramics multilayer driver of the present invention
Ceramic matrix using leadless piezoelectric ceramics as driver, is conducive to environmental protection；By the texturing of leadless piezoelectric ceramics with
Multi-layer ceramics technique is combined, and improves the performance of leadless piezoelectric ceramics multilayer driver；Devise electrode connection knot in through-hole
Structure eliminates external electrode, simplifies preparation process and is conducive to improve the service life of multilayer driver.
In the present invention, between the ceramic topcoats and ceramic inner layer, between adjacent ceramic internal layer or ceramic inner layer and pottery
The blank ceramic thick film not printed electrode is additionally provided between porcelain bottom.
In the present invention, the distance between abutting lamellar electrode can be designed according to actual needs.
The present invention also provides a kind of preparation method of texturing leadless piezoelectric ceramics multilayer driver, the preparation method packets
It includes：Step 1)：Prepare lead-free piezoelectric ceramic powder and texturing template grains；Step 2)：By ceramic powder and texturing template
The organic matters such as crystal grain and solvent, binder, dispersant and plasticizer are mixed and made into casting slurry, and ceramics are obtained by tape casting
Thick film；Step 3)：Ceramic thick film is sliced, hole is got through, the through-hole accomplished fluently is filled into connection electrode, in ceramic thick film surface printing
Layered electrode；Step 4)：It is fired into integrated, multi-level after multiple ceramic thick films are carried out lamination, isostatic pressed according to the number of plies of design
Piezoelectric ceramic devices；Step 5)：The integrated, multi-level ceramics baked are polarized, it is more to obtain texturing leadless piezoelectric ceramics
Layer driver.
Preferably, in step 1), it is the unleaded pressure of perovskite structure to prepare the piezoelectric ceramics that lead-free piezoelectric ceramic powder uses
Electroceramics, preferably barium titanate-based lead-free piezoelectric ceramics, bismuth-sodium titanate base lead-free piezoelectric ceramic or potassium niobate sodium base leadless piezoelectricity pottery
Porcelain.
Preferably, in step 1), the lead-free piezoelectric ceramic powder size should be less than 400 nanometers.
Preferably, in step 1), texturing template grains are prepared using topological crystallite conversion method, the texturing template is brilliant
There is the pattern of grain anisotropy, the aspect ratio of the size of the texturing template grains to be more than 10.
Preferably, in step 1), the size of the texturing template grains is the 5 of the lead-free piezoelectric ceramic powder size
Times or more, the molar ratio of the texturing template grains accounts for the 5%~15% of ceramic powder.
Preferably, in step 2), solvent is that mass ratio is 1:1 ethyl alcohol and the mixed solution of ethyl acetate, mixed solution
The mass ratio of (i.e. solvent) and ceramic powder is 0.36~0.45:1；Binder is polyvinyl butyral fat, and with solvent with 1:2
Mass ratio mixing wiring solution-forming, the mass ratio of binder solution and ceramic powder is 0.27~0.32:1；Dispersant is three oil
The mass ratio of acid glyceride, the dispersant and ceramic powder is 0.02~0.05:1；Plasticizer is polyethylene glycol and adjacent benzene two
Formic acid butyl benzyl, the mass ratio of the two (i.e. polyethylene glycol and BBP(Butyl Benzyl Phthalate) and binder solution is 0.07~
0.10:1。
Preferably, the ceramic thick film thickness that tape casting obtains in step 2) is 20~80 microns.
Preferably, the temperature of isostatic pressed is 60~70 DEG C in step 4), pressure is 40~55MPa.
Description of the drawings
Fig. 1 is electrode connecting structure schematic diagram in through-hole；
Fig. 2 is that multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver preparation flow schematic diagram and each step sample object shine
Piece；
Fig. 3 is multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver section SEM photograph；
Fig. 4 is different at room temperature to measure multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver length travel and application under voltage
The curve of voltage.
Specific implementation mode
It is further illustrated the present invention below in conjunction with attached drawing and following embodiments, it should be appreciated that following embodiments are only used for
Illustrate the present invention, is not intended to limit the present invention.
The present invention provides a kind of new electrode structure, referred to as electrode connecting structure in through-hole, as shown in Figure 1.On surface two
1 one end holes Da Liangge 2 of layer ceramic thick film make a call to four through-holes 2 at each layer of ceramic thick film both ends in inside, electricity are filled in through-hole 2 altogether
Electric interconnection is realized between different layered electrodes 3 in pole using the electrode in through-hole 2.In addition, being leaned on per shape electrode 3 from level to level
Side end stays a gap 4 (i.e., not printing electrode on the gap), gap 4 to be located at 2 on the inside of through-hole, the gap position of adjacent two layers
It is not overlapped, such as is disposed alternately at two layers of side, prevent the electric short circuit between adjacent two layers electrode 3, to realize total
Electrical parallel connection.This electrode structure eliminates external electrode, simplifies preparation process and energy is cost-effective, while also avoiding
Termination electrode is easy the drawbacks of failure the driver use during.In addition, electrode connecting structure can also reduce layer in through-hole
Stress of the shape electrode inactive region under electric field action is conducive to the service life for improving multilayerceramic device.
The present invention provides a kind of multilayer leadless piezoelectric ceramics drivers and preparation method thereof, by knitting for leadless piezoelectric ceramics
Structureization is combined with multi-layer ceramics technique, and multi-layer ceramics driving is improved under the premise of the material used has environment friendly
The performance of device；Electrode connecting structure in through-hole is devised simultaneously, external electrode is eliminated, simplifies preparation process and be conducive to carry
The service life of high multi-layer ceramics driver.
The technology of preparing and technique that the present invention uses are as follows.
A) leadless piezoelectric ceramics texturing method is using template grain growth or reaction template grain growth method.
Pattern is needed to have anisotropic crystal grain as textured template in both methods.Therefore, the invention firstly uses
The methods of topological crystallite conversion method, hydro-thermal method and molten-salt growth method, which synthesize pattern, has anisotropic template grains, such as sheet, stick
Shape, it is needle-shaped etc..
B) leadless piezoelectric ceramics matrix powder is synthesized by conventional solid-state method, and grain size is obtained by high-energy ball milling and is existed
400nm powders below.
C) by the leadless piezoelectric ceramics matrix powder obtained after texturing template grains and high-energy ball milling and solvent, bonding
The organic matters such as agent, dispersant and plasticizer mix, and uniform slurry is obtained through ball milling.Slurry obtains design thickness through tape casting
Ceramic thick film.Wherein, solvent is that (ethyl alcohol and ethyl acetate mass ratio are 1 for the mixed solution of ethyl alcohol and ethyl acetate:1) it, glues
Knot agent is polyvinyl butyral fat (PVB), and with solvent with 1:2 mass ratio mixing wiring solution-forming, dispersant are that three oleic acid are sweet
Grease, plasticizer are polyethylene glycol (PEG400) and BBP(Butyl Benzyl Phthalate (BBP).
D) ceramic thick film is cut into certain size size with slicer, is then existed using puncher according to electrode structural designs
Hole is got through on ceramic thick film.Connection electrode is filled in the through-hole accomplished fluently.After drying using screen printer by layered electrode according to setting
The pattern of meter is screen-printed on ceramic thick film and there are gaps, is placed in dust free room and is dried, wherein layered electrode is printed on
One side surface of ceramic thick film.The ceramic thick film for being printed on electrode after drying is subjected to lamination, laminating method is：It is printed on when lamination
The thick film direction of electrode is consistent, that is, is printed on the one side of electrode upward.The biscuit of the design number of plies is built up according to the method described above.It will fold
Biscuit isostatic pressed is carried out in warm water isostatic pressing machine so that be tightly combined between each thickness film, it is big to be then cut into design size
It is small, and be placed in Muffle furnace and carry out plastic removal, cofiring, obtain the sample of densified sintering product.
E) firing sample is placed in insulation silicone oil and is polarized, obtain final multilayer piezoelectric ceramic driver.
As a preferred embodiment, the piezoelectric ceramics is perovskite structure leadless piezoelectric ceramics, such as barium titanate
(BaTiO3) based leadless piezoelectric ceramics, bismuth-sodium titanate (Na0.5Bi0.5TiO3) based leadless piezoelectric ceramics, potassium-sodium niobate
(K0.5Na0.5NbO3) based leadless piezoelectric ceramics etc..
As a preferred embodiment, the leadless piezoelectric ceramics size of matrix grains is in 400nm or less.
As a preferred embodiment, the pattern of the template grains must have larger anisotropy, such as sheet,
Rodlike, needle-shaped etc., the aspect ratio of size must be more than 10.
As a preferred embodiment, the size of the template grains will at least reach 5 times of size of matrix grains.
As a preferred embodiment, the template grains account for the 5%-15% (molar ratio) of total ceramic powder.
As a preferred embodiment, solvent is mixed solution (ethyl alcohol and the ethyl acetate mass ratio of ethyl alcohol and ethyl acetate
It is 1:1) it is, (0.36~0.45) with the mass ratio of ceramic powder:1；Binder is polyvinyl butyral fat (PVB), and with
Solvent is with 1:The ratio of 2 mass ratio mixing wiring solution-forming, binder solution and ceramic powder is (0.27~0.32):1；Dispersant
For olein, the ratio with ceramic powder is (0.02~0.05):1；Plasticizer be polyethylene glycol (PEG400) and
The ratio of BBP(Butyl Benzyl Phthalate (BBP), the two and binder solution is all (0.07~0.10):1.
As a preferred embodiment, the ceramic thick film thickness that the tape casting obtains is 20-80 μm.
As a preferred embodiment, the temperature of the isostatic pressed is 60-70 DEG C, pressure 40-55MPa.
The texturing of leadless piezoelectric ceramics is combined by the present invention with multi-layer ceramics technique, final multi-layer ceramics driver
Matrix is textured leadless piezoelectric ceramics, improves the piezoelectric property of multilayer driver.
Present invention uses electrode connecting structures in through-hole, eliminate external electrode, simplify preparation process and are conducive to
Improve the service life of multilayer driver.
Embodiment is enumerated further below so that the present invention will be described in detail.It will similarly be understood that following embodiment is served only for this
Invention is further described, and should not be understood as limiting the scope of the invention, those skilled in the art is according to this hair
Some nonessential modifications and adaptations that bright the above is made all belong to the scope of protection of the present invention.Following examples are specific
Technological parameter etc. is also only an example in OK range, i.e. those skilled in the art can be done properly by the explanation of this paper
In the range of select, and do not really want to be defined in hereafter exemplary concrete numerical value.
The driving of texturing multilayer potassium niobate sodium-based leadless piezoelectric ceramic is prepared by taking potassium niobate sodium-based leadless piezoelectric ceramic as an example
Device, ceramic matrix molecular formula are (K0.504Na0.496)0.933Li0.067NbO3(KNLN), wherein the grain orientation textured method used is
Reaction template grain growth method, specifically comprises the following steps, preparation flow schematic diagram and each step sample object photo such as Fig. 2 institutes
Show.
1) sheet NaNbO is prepared using topological crystallite conversion method3Template grains.Sheet is prepared according to topological crystallite conversion method
NaNbO3The synthesis equation of crystal grain is as follows：
2.5Bi2O3+5Nb2O5+3.5NaCO3=2Bi2.5Na3.5Nb5O18+3.5CO2 (1)
4Bi2.5Na3.5Nb5O18+3NaCO3=20NaNbO3+5Bi2O3+3CO2 (2)
The BiNN5 powders of synthesizing flaky first.It is Bi according to molar ratio according to formula (1)2O3:Nb2O5:NaCO3=2.5:5:
3.5 weigh raw material, suitable ethyl alcohol mixing and ball milling 6h are added, according to raw material:Salt=1:1 mass ratio is added NaCl and continues ball milling
2h.Powder after ball milling crosses 80 mesh sieve in an oven in 90 DEG C of drying.Powder after sieving is contained into Al2O3Crucible, after capping
At 1100 DEG C in Muffle furnace, 3h is kept the temperature, heating rate is 15 DEG C/min.Deionized water of the product through heat after synthesis is impregnated,
Ultrasonic disperse, and repeatedly washed with the deionized water of heat, to remove NaCl salt therein.Therebetween, AgNO can be used3Solution testing is filtered
Cl in liquid-Ion concentration illustrates not contained Cl in product if without white precipitate occurring-Ion.After washes clean
To powder be put into baking oven in 90 DEG C drying, and cross 80 mesh sieve, finally obtain sheet BiNN5 powders, its side length is 10-20 μ
M, thickness are 1-2 μm.
Then sheet BiNN5 powder synthesizing flakies NaNbO is utilized3Powder.By reactant NaCO3With NaCl salt according to quality
Than 1:1 ratio mixing, is added suitable ethyl alcohol mixing and ball milling 2h, according still further to molar ratio BiNN5:BiNN5=4:3.6 ratio
BiNN5 is added, continues ball milling 0.5h.Powder after ball milling crosses 80 mesh sieve in an oven in 90 DEG C of drying.By the powder after sieving
It contains into Al2O3Crucible keeps the temperature 4h at 950 DEG C in Muffle furnace after capping, and heating rate is 1 DEG C/min.Product after synthesis is used
Dissolving with hydrochloric acid Bi2O3It is used in combination the deionized water of heat to impregnate, cleaning is not repeatedly until contain Cl repeatedly-Until ion.After washes clean
Obtained powder is put into baking oven in 90 DEG C of drying, and crosses 80 mesh sieve.Powder after sieving keeps the temperature 1h annealings at 1000 DEG C,
Final sheet NaNbO is obtained after 80 mesh sieve3Powder, its side length is 10-20 μm, thickness is 1-2 μm.
2) (K is synthesized by conventional solid-state method0.504Na0.496)0.933Li0.067NbO3(KNLN) powder, steps are as follows：According to
Molecular formula (K0.504Na0.496)0.933Li0.067NbO3Stoichiometric ratio weigh raw material：K2CO3(99%), Na2CO3(99.8%),
Li2CO3(98%), Nb2O5(99.5%) it is placed in nylon ball grinder, absolute ethyl alcohol and ZrO is added2Ball, planetary ball mill 6h are done
It is put into crucible after 80 mesh of dry mistake sieve, in 850 DEG C of pre-burning 5h, obtains KNLN powders.KNLN powders are crossed after 80 mesh sieve in high energy ball
Ball milling 1h in grinding machine crosses 200 mesh sieve, obtains final KNLN powders, diameter of particle is about 340nm after drying.
3) tape casting prepares ceramic thick film.By the KNLN powders obtained after high-energy ball milling and solvent, binder, dispersant
It is mixed with organic matters such as plasticizer, uniform slurry is obtained after roller ball mill 3 days (or planetary ball mill 12h).Wherein, solvent
For the mixed solution of ethyl alcohol and ethyl acetate, (ethyl alcohol and ethyl acetate mass ratio are 1:1), it is with the ratio of ceramic powder
(0.36~0.45):1；Binder is polyvinyl butyral fat (PVB), and with solvent with 1:2 mass ratio mixing wiring solution-forming,
The ratio of binder solution and ceramic powder is (0.27~0.32):1；Dispersant is olein, with ceramic powder
Ratio is (0.02~0.05):1；Plasticizer be polyethylene glycol (PEG400) and BBP(Butyl Benzyl Phthalate (BBP), the two with glue
The ratio for tying agent solution is all (0.07~0.10):1.In the slurry according to (blapharoplast:Template grains)=0.9:0.1 rubs
You are than being added sheet NaNbO3Crystal grain continues ball milling 3h and obtains final casting slurry.The final nominal group of ceramics is divided into
(K0.45Na0.55)0.94Li0.06NbO3.Final slurry obtains the ceramic thick film that thickness is about 25 μm through tape casting.
4) lamination is printed in filling perforation.Ceramic thick film prepared by tape casting is cut into certain size size with slicer, then
Hole is got through on ceramic thick film using puncher according to electrode structural designs.Electrode, i.e. filling perforation are filled up in the through-hole accomplished fluently.It is dry
After dry using screen printer by electrode according on the pattern silk-screen to ceramic thick film of design, and be placed in dust free room and dry.It will do
The thick film for being printed on electrode and the thick film for not printing electrode after dry carry out lamination, and laminating method is：The thick film of electrode is printed on when lamination
Direction is consistent, that is, is printed on the one side of electrode upward；It is printed on for every two layers between the thick film of electrode and is inserted into two layers of thick film for not printing electrode.
The internal biscuit for sharing 7 layers of electrode is built up according to the method described above, and thickness is about 66 μm between every two layers of electrode.The biscuit that will be folded
It carries out isostatic pressed in warm water isostatic pressing machine to be tightly combined between each thickness film, the temperature of isostatic pressed is 60-70 DEG C, pressure
For 40-55MPa.Biscuit after isostatic pressed is cut into small pieces (size is about 3mm × 3mm × 0.58mm) to arrange in Muffle furnace
Modeling, cofiring.The temperature of plastic removal is 600 DEG C, soaking time 30min, and heating rate is 1.5 DEG C/min；The temperature of cofiring is
1130 DEG C, soaking time 1h, heating rate is 10 DEG C/min.Since co-fired temperature is at 1100 DEG C or more, selection Ag-Pd used
(70/30) electrode is as multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver.The overall thickness of sample is about 0.39mm after cofiring.
5) cofiring sample is placed in polarization in 120 DEG C of insulation silicone oil and obtains final multilayer piezoelectric acutator, wherein pole
Change electric field is 3kV/mm, polarization time 30min.
Fig. 3 is multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver section SEM photograph.It is complete as we can see from the figure
7 layers of layered electrode, layered electrode are tightly combined with potassium niobate sodium-based leadless piezoelectric ceramic matrix.And potassium niobate sodium base leadless pressure
Electroceramics matrix densified sintering product, crystal grain are grown up completely, without blapharoplast residue, show that ceramic matrix is completed during cofiring
Texturing.
Fig. 4 is the length travel of multilayer piezoelectric acutator provided by the invention and applies alive curve graph.It can from figure
To see, with the raising for measuring voltage, the length travel of multilayer KNN base ceramic drivers gradually increases.It is when measuring voltage
When 350V, the length travel of driver has been up to 440nm, corresponding strain about 0.11%.
Claims (11)
1. a kind of texturing leadless piezoelectric ceramics multilayer driver, which is characterized in that including：
The multilayer textured ceramics thick film of lamination setting, including it is printed with the ceramic topcoats of layered electrode respectively, in multi-layer ceramics
Layer and ceramic bottom；
Through the first through hole of the ceramic topcoats and all ceramic inner layers；
Through the second through-hole of all ceramic inner layers and ceramic bottom；
Fill the first connection electrode of the first through hole；And
Fill the second connection electrode of second through-hole；
Wherein first through hole and the second through-hole is located at the opposite sides of the textured ceramics thick film, in the ceramic inner layer
Layered electrode there is strip slot, the strip slot is positioned at first through hole and the second through-hole between, and adjacent two layers are ceramic
Strip slot on internal layer is not overlapped,
Between the texturing leadless piezoelectric ceramics multilayer internal drive, abutting lamellar electrode using the first through hole and
First connection electrode and the second connection electrode in second through-hole realize electric interconnection,
The texturing leadless piezoelectric ceramics multilayer driver is without external electrode.
2. texturing leadless piezoelectric ceramics multilayer driver according to claim 1, which is characterized in that the ceramic topcoats
Between ceramic inner layer, it is additionally provided between adjacent ceramic internal layer or between ceramic inner layer and ceramic bottom and does not print electrode
Blank ceramic thick film.
3. a kind of preparation method of texturing leadless piezoelectric ceramics multilayer driver as claimed in claim 1 or 2, feature exist
In the preparation method includes：
Step 1）：Prepare lead-free piezoelectric ceramic powder and texturing template grains；
Step 2）：Ceramic powder and texturing template grains are mixed with organic matters such as solvent, binder, dispersant and plasticizer
Casting slurry is made, ceramic thick film is obtained by tape casting；
Step 3）：Ceramic thick film is sliced, hole is got through, the through-hole accomplished fluently is filled into connection electrode, in ceramic thick film surface printing
Layered electrode and there are the strip slots；
Step 4）：It is fired into integrated, multi-level piezoelectricity after multiple ceramic thick films are carried out lamination, isostatic pressed according to the number of plies of design
Ceramic component；
Step 5）：The integrated, multi-level ceramics baked are polarized, texturing leadless piezoelectric ceramics multilayer driver is obtained.
4. preparation method according to claim 3, which is characterized in that step 1）In, preparing lead-free piezoelectric ceramic powder makes
Piezoelectric ceramics is perovskite structure leadless piezoelectric ceramics.
5. preparation method according to claim 4, which is characterized in that step 1）In, preparing lead-free piezoelectric ceramic powder makes
Piezoelectric ceramics is barium titanate-based lead-free piezoelectric ceramics, bismuth-sodium titanate base lead-free piezoelectric ceramic or potassium niobate sodium base leadless piezoelectricity
Ceramics.
6. preparation method according to claim 4, which is characterized in that step 1）In, the lead-free piezoelectric ceramic powder ruler
It is very little to be less than 400 nanometers.
7. preparation method according to claim 4, which is characterized in that step 1）In, it is prepared using topological crystallite conversion method
The pattern of texturing template grains, the texturing template grains has anisotropy, the size of the texturing template grains
Aspect ratio be more than 10.
8. preparation method according to claim 4, which is characterized in that step 1）In, the ruler of the texturing template grains
Very little 5 times or more for the lead-free piezoelectric ceramic powder size, the molar ratio of the texturing template grains accounts for ceramic powder
5%~15%.
9. preparation method according to claim 4, which is characterized in that step 2）In, solvent is that mass ratio is 1:1 ethyl alcohol
With the mixed solution of ethyl acetate, the mass ratio of mixed solution and ceramic powder is 0.36~0.45:1；Binder is polyethylene
Butyral fat, and with solvent with 1:The ratio of 2 mass ratio mixing wiring solution-forming, binder solution and ceramic powder is 0.27
~0.32:1；Dispersant is olein, and the ratio of the dispersant and ceramic powder is 0.02~0.05:1；Plasticising
Agent is polyethylene glycol and BBP(Butyl Benzyl Phthalate, and the ratio of the two and binder solution is 0.07~0.10:1.
10. preparation method according to claim 4, which is characterized in that step 2）The ceramic thick film that middle tape casting obtains
Thickness is 20~80 microns.
11. the preparation method according to any one of claim 4 to 10, which is characterized in that step 4）The temperature of middle isostatic pressed
Degree is 60~70 DEG C, and pressure is 40~55 MPa.
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| CN106910819B (en) * | 2017-04-20 | 2019-02-19 | 宝鸡文理学院 | A kind of nano combined piezo-electric generator preparation method with stratiform stacking provisions suitable for wearable device |
| JP7367290B2 (en) * | 2018-03-06 | 2023-10-24 | 太陽誘電株式会社 | Laminated piezoelectric element |
| CN113013321B (en) * | 2021-02-07 | 2023-05-12 | 西安交通大学 | Preparation method of piezoelectric single crystal lamination driver |
| CN113904585B (en) * | 2021-08-27 | 2022-10-14 | 成都汇通西电电子有限公司 | Array actuator structure and preparation method thereof |
| CN114315346A (en) * | 2021-12-10 | 2022-04-12 | 广东华中科技大学工业技术研究院 | Preparation method of large-strain lead-free piezoelectric textured ceramic with double-template texture |
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