CN105374929A - Textured lead-free piezoelectric ceramic multilayer driver and preparation method thereof - Google Patents
Textured lead-free piezoelectric ceramic multilayer driver and preparation method thereof Download PDFInfo
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Abstract
The invention relates to a textured lead-free piezoelectric ceramic multilayer driver and a preparation method thereof. The driver comprises a laminated multi-layer textured ceramic thick film, a first through hole, a second through hole, a first connection electrode and a second connection electrode, wherein the laminated multi-layer textured ceramic thick film comprises a ceramic surface layer, at least one ceramic inner layer and a ceramic bottom layer; the ceramic surface layer, the at least one ceramic inner layer and the ceramic bottom layer are respectively printed with laminated electrodes; the first through hole runs through the ceramic surface layer and the ceramic inner layers; the second through hole runs through the ceramic inner layers and the ceramic bottom layer; the first connection electrode is used for filling the first through hole; the second connection electrode is used for filling the second through hole; the first through hole and the second through hole are respectively located at two opposite sides of the textured ceramic thick film; a strip gap is formed in the laminated electrode on each ceramic inner layer, and is located between the first through hole and the second through hole; and the strip gaps in two adjacent ceramic inner layers do not overlap. Due to the electrode structure, an outer terminal electrode is omitted; the preparation technology is simplified; the cost is saved; and meanwhile, the disadvantage that the terminal electrode is liable to failure in the using process of the driver is avoided.
Description
Technical field
The present invention relates to a kind of texturing leadless piezoelectric ceramics multilayer driver and preparation method thereof, belong to electron ceramic material and device arts.
Background technology
The deformation quantity that piezoelectric ceramic produces under electric field action is very little, and based on accurate controlling organization-piezoelectric actuator that this principle makes, the field such as control, microelectric technique, bioengineering for precision instrument and machinery all has extremely important effect.These application require that piezoelectric ceramic actuator volume is little, driving voltage is low, displacement is large, energy is integrated.But the volume of Common piezoelectricity pottery is general larger, and the driving field intensity of piezoelectric ceramic is general also higher (hundreds of V/mm).In order to realize low-voltage driving and reduce the volume of piezoelectric ceramic, there has been proposed the concept of multilayer piezoelectric ceramic driver, namely make the effect that also can reach high drive under low-voltage driving by multi-layer ceramics technology superposition multi-layer ceramics membrane material.Multilayer piezoelectric ceramic driver has very large advantage in placement property and actuating force etc., and the thickness of its size also by regulating and controlling ceramic film controls, thus greatly extends the space of piezoelectric ceramic actuator application development.
At present, what on market, piezoelectric ceramic actuator used is mostly containing lead piezoelectric ceramics.But, in lead base piezoelectric ceramic, lead oxide (PbO) content accounts for about 60 ~ 70%, PbO is volatile noxious substance under high temperature, makes lead base piezoelectric ceramic in preparation, uses and all can bring serious harm to human lives and biological environment in offal treatment process.In order to preserve our planet and socioeconomic sustainable development, various countries day by day pay attention to environmental protection." using some Hazardous Substances Directive about restriction in electronic electric equipment " (RoHS) has been formulated in European Union's legislation, and starts formal enforcement on July 1st, 2006.The developed country such as the U.S., Japan also launches respectively the use that measures and policies forbids leaded electronic material.China also improves the supporting dynamics to lead-free research project year by year.Therefore, the leadless piezoelectric ceramics driver of development environment friendly is trend and the requirement of future development.But the piezoelectric property of leadless piezoelectric ceramics has a certain distance with lead base ceramic phase than still, want to replace lead base piezoelectric ceramic and also must improve its piezoelectric property further.
At present, multilayer piezoelectric ceramic driver comprises ceramic matrix, interior electrode and external electrode, and wherein, electrode combines with external electrode and realizes the electric parallel connection of multilayer ceramic body.A lot of patent all describes the electrode structure of this conventional multilayer piezoelectric actuator in detail, such as Chinese patent CN101552318A " manufacture method of multilayer piezoelectric acutator and multilayer piezoelectric acutator ", US Patent No. 7429817B2 " MultilayerPiezoelectricElement ".Owing to there is external electrode, must external electrode be prepared after interior electrode and ceramic thick film burn altogether, make preparation technology's more complicated.And the people such as Uchino mentions in paper " MultilayerCeramicActuators ", stress can be larger under the effect applying electric field for the inactive region at interior electrode two ends, easily causes the generation of crackle, thus affect the life-span of multilayerceramic device.In addition, external electrode makes disabler because continuous deformation also easily causes cracking in the use procedure of driver.Due to these shortcomings, the electrode structure that interior electrode combines with external electrode is not the desirable electrode structure of multilayerceramic device.
Summary of the invention
For above-mentioned problems faced, the object of this invention is to provide a kind of texturing leadless piezoelectric ceramics multilayer driver and preparation method thereof, to improve performance and the life-span of leadless piezoelectric ceramics multilayer driver.Because grain orientation textured is the important method improving leadless piezoelectric ceramics performance, the texturing of leadless piezoelectric ceramics is combined with multi-layer ceramics technique the piezoelectric property improving multilayer driver by the present invention.In addition, the present invention devises the electrode structure of new multi-layer ceramics driver, avoids the defect of legacy drive structure China and foreign countries end-electrode structure.
At this, the invention provides a kind of texturing leadless piezoelectric ceramics multilayer driver, comprising: the multilayer textured ceramics thick film that lamination is arranged, comprise the ceramic topcoats, at least one deck ceramic inner layer and the ceramic bottom that are printed with layered electrode respectively; Run through the first through hole of described ceramic topcoats and ceramic inner layer; Run through the second through hole of described ceramic inner layer and ceramic bottom; Fill the first connecting electrode of described first through hole; And fill the second connecting electrode of described second through hole; Wherein the first through hole and the second through hole lay respectively at the relative both sides of described textured ceramics thick film, layered electrode in described ceramic inner layer has strip slot, described strip slot is between the first through hole and the second through hole, and strip slot in adjacent two layers ceramic inner layer is not overlapping.
Leadless piezoelectric ceramics texturing combines with multi-layer ceramics technique by the present invention; Adopt the electrode connecting structure that in through hole, electrode connecting structure replacement external electrode combines with interior electrode.Texturing leadless piezoelectric ceramics multilayer driver of the present invention adopts leadless piezoelectric ceramics as the ceramic matrix of driver, is conducive to environmental protection; The texturing of leadless piezoelectric ceramics is combined with multi-layer ceramics technique, improves the performance of leadless piezoelectric ceramics multilayer driver; Devise electrode connecting structure in through hole, eliminate external electrode, simplify preparation technology and be conducive to improving life-span of multilayer driver.
In the present invention, between described ceramic topcoats and ceramic inner layer, between adjacent ceramic internal layer or between ceramic inner layer and ceramic bottom, be also provided with the blank ceramic thick film do not printed electrode.
In the present invention, the distance between abutting lamellar electrode can design according to actual needs.
The present invention also provides a kind of preparation method of texturing leadless piezoelectric ceramics multilayer driver, and described preparation method comprises: step 1): prepare lead-free piezoelectric ceramic powder and texturing template grains; Step 2): ceramic powder and the organic substance such as texturing template grains and solvent, binding agent, dispersant and plasticizer are mixed and made into casting slurry, obtain ceramic thick film by flow casting molding; Step 3): ceramic thick film is cut into slices, gets through hole, by the filling through hole connecting electrode accomplished fluently, at ceramic thick film surface printing stratiform electrode; Step 4): be fired into integrated, multi-level piezoelectric ceramic devices after multiple ceramic thick film being carried out lamination, isostatic pressed according to the number of plies of design; Step 5): the integrated, multi-level pottery baked is polarized, obtains texturing leadless piezoelectric ceramics multilayer driver.
Preferably, step 1) in, the piezoelectric ceramic preparing lead-free piezoelectric ceramic powder use is perovskite structure leadless piezoelectric ceramics, preferred barium titanate-based lead-free piezoelectric ceramic, bismuth-sodium titanate base lead-free piezoelectric ceramic or potassium niobate sodium-based leadless piezoelectric ceramic.
Preferably, step 1) in, described lead-free piezoelectric ceramic powder size should be less than 400 nanometers.
Preferably, step 1) in, adopt topological crystallite conversion method to prepare texturing template grains, the pattern of described texturing template grains has anisotropy, and the aspect ratio of the size of described texturing template grains is greater than 10.
Preferably, step 1) in, described texturing template grains is of a size of more than 5 times of described lead-free piezoelectric ceramic powder size, and the mol ratio of described texturing template grains accounts for 5% ~ 15% of ceramic powder.
Preferably, step 2) in, solvent is mass ratio is the ethanol of 1:1 and the mixed solution of ethyl acetate, and mixed solution (i.e. solvent) is 0.36 ~ 0.45:1 with the mass ratio of ceramic powder; Binding agent is polyvinyl butyral fat, and with solvent with the mass ratio mixing wiring solution-forming of 1:2, the mass ratio of binder solution and ceramic powder is 0.27 ~ 0.32:1; Dispersant is olein, and the mass ratio of described dispersant and ceramic powder is 0.02 ~ 0.05:1; Plasticizer is polyethylene glycol and BBP(Butyl Benzyl Phthalate, and both (i.e. polyethylene glycol and BBP(Butyl Benzyl Phthalate) are 0.07 ~ 0.10:1 with the mass ratio of binder solution.
Preferably, step 2) in the ceramic thick film thickness that obtains of flow casting molding be 20 ~ 80 microns.
Preferably, step 4) in the temperature of isostatic pressed be 60 ~ 70 DEG C, pressure is 40 ~ 55MPa.
Accompanying drawing explanation
Fig. 1 is electrode connecting structure schematic diagram in through hole;
Fig. 2 is multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver preparation flow schematic diagram and each step sample object photo;
Fig. 3 is multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver section SEM photo;
Under Fig. 4 room temperature under different measuring voltage the length travel of multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver with execute alive curve.
Embodiment
Further illustrate the present invention below in conjunction with accompanying drawing and following execution mode, should be understood that following execution mode is only for illustration of the present invention, and unrestricted the present invention.
The invention provides a kind of new electrode structure, be called electrode connecting structure in through hole, as shown in Figure 1.In Da Liangge hole, surperficial two-layer ceramic thick film 1 one end 2, in inside, four through holes 2 are made a call at every one deck ceramic thick film two ends altogether, fill electrode in through hole 2, utilize the electrode in through hole 2 to realize electric interconnection between different layered electrode 3.In addition, a gap 4 (namely, not printing electrode in this gap) is stayed at every shape electrode 3 from level to level end that keeps to the side, gap 4 to be positioned at inside through hole 2, the gap position of adjacent two layers is not overlapping, such as be disposed alternately at two-layer side, prevent the electric short circuit between adjacent two layers electrode 3, thus realize the electric parallel connection of total.This electrode structure eliminates external electrode, simplifies preparation technology and can be cost-saving, also avoid the drawback that termination electrode easily lost efficacy in driver use procedure simultaneously.In addition, in through hole, electrode connecting structure can also reduce the stress of layered electrode inactive region under electric field action, is conducive to the life-span of improving multilayerceramic device.
The invention provides a kind of multilayer leadless piezoelectric ceramics driver and preparation method thereof, the texturing of leadless piezoelectric ceramics is combined with multi-layer ceramics technique, under the material used has the prerequisite of environment friendly, improve the performance of multi-layer ceramics driver; Devise electrode connecting structure in through hole simultaneously, eliminate external electrode, simplify preparation technology and be conducive to improving useful life of multi-layer ceramics driver.
Technology of preparing and the technique of the present invention's employing are as follows.
What a) leadless piezoelectric ceramics texturing method adopted is template grain growth or reaction template grain growth method.In these two kinds of methods, need pattern to have anisotropic crystal grain as textured template.Therefore, first the present invention utilizes the method synthesis patterns such as topological crystallite conversion method, hydro thermal method and molten salt growth method to have anisotropic template grains, such as sheet, bar-shaped, needle-like etc.
B) by conventional solid-state method synthesis leadless piezoelectric ceramics matrix powder, and the powder of particle diameter at below 400nm is obtained by high-energy ball milling.
C) the leadless piezoelectric ceramics matrix powder obtained after texturing template grains and high-energy ball milling is mixed with organic substances such as solvent, binding agent, dispersant and plasticizer, obtain uniform slurry through ball milling.Slurry obtains the ceramic thick film of design thickness through flow casting molding.Wherein, solvent is the mixed solution (ethanol and ethyl acetate mass ratio are 1:1) of ethanol and ethyl acetate, binding agent is polyvinyl butyral fat (PVB), and with solvent with the mass ratio mixing wiring solution-forming of 1:2, dispersant is olein, and plasticizer is polyethylene glycol (PEG400) and BBP(Butyl Benzyl Phthalate (BBP).
D) ceramic thick film slicing machine is cut into certain size size, then utilizes puncher to get through hole on ceramic thick film according to electrode structural designs.Connecting electrode is filled in the through hole accomplished fluently.Utilize screen printer to be screen-printed on ceramic thick film according to the pattern of design by layered electrode and to leave gap after drying, be placed in dust free room and dry, wherein, layered electrode is printed on a side surface of ceramic thick film.The dried ceramic thick film being printed on electrode is carried out lamination, and laminating method is: the thick film direction being printed on electrode during lamination is consistent, and be namely printed on electrode one faces up.Build up the biscuit of the design number of plies according to the method described above.The biscuit folded is carried out isostatic pressed in warm water isostatic pressing machine, makes to combine closely between each thickness film, be then cut into design size size, and be placed in Muffle furnace and carry out plastic removal, burn altogether, obtain the sample of densified sintering product.
E) firing sample is placed in insulation silicone oil to polarize, obtains final multilayer piezoelectric ceramic driver.
As a kind of preferred version, described piezoelectric ceramic is perovskite structure leadless piezoelectric ceramics, such as barium titanate (BaTiO
3) based leadless piezoelectric ceramics, bismuth-sodium titanate (Na
0.5bi
0.5tiO
3) based leadless piezoelectric ceramics, potassium-sodium niobate (K
0.5na
0.5nbO
3) based leadless piezoelectric ceramics etc.
As a kind of preferred version, described leadless piezoelectric ceramics size of matrix grains is at below 400nm.
As a kind of preferred version, the pattern of described template grains must have larger anisotropy, and such as sheet is bar-shaped, needle-like etc., and the aspect ratio of its size must be greater than 10.
As a kind of preferred version, the size of described template grains at least will reach 5 times of size of matrix grains.
As a kind of preferred version, described template grains accounts for the 5%-15% (mol ratio) of total ceramic powder.
As a kind of preferred version, solvent is the mixed solution (ethanol and ethyl acetate mass ratio are 1:1) of ethanol and ethyl acetate, and the mass ratio of itself and ceramic powder is (0.36 ~ 0.45): 1; Binding agent is polyvinyl butyral fat (PVB), and with solvent with the mass ratio mixing wiring solution-forming of 1:2, the ratio of binder solution and ceramic powder is (0.27 ~ 0.32): 1; Dispersant is olein, and the ratio of itself and ceramic powder is (0.02 ~ 0.05): 1; Plasticizer is polyethylene glycol (PEG400) and BBP(Butyl Benzyl Phthalate (BBP), and the ratio of both and binder solution is all (0.07 ~ 0.10): 1.
As a kind of preferred version, the ceramic thick film thickness that described flow casting molding obtains is 20-80 μm.
As a kind of preferred version, the temperature of described isostatic pressed is 60-70 DEG C, and pressure is 40-55MPa.
The texturing of leadless piezoelectric ceramics combines with multi-layer ceramics technique by the present invention, and the matrix of final multi-layer ceramics driver is textured leadless piezoelectric ceramics, improves the piezoelectric property of multilayer driver.
Present invention uses electrode connecting structure in through hole, eliminate external electrode, simplify preparation technology and be conducive to improving useful life of multilayer driver.
Exemplify embodiment below further to describe the present invention in detail.Should understand equally; following examples are only used to further illustrate the present invention; can not be interpreted as limiting the scope of the invention, some nonessential improvement that those skilled in the art's foregoing according to the present invention is made and adjustment all belong to protection scope of the present invention.The technological parameter etc. that following example is concrete is also only an example in OK range, and namely those skilled in the art can be done in suitable scope by explanation herein and select, and do not really want the concrete numerical value being defined in Examples below.
Prepare texturing multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver for potassium niobate sodium-based leadless piezoelectric ceramic, ceramic matrix molecular formula is (K
0.504na
0.496)
0.933li
0.067nbO
3(KNLN), the grain orientation textured method wherein used is reaction template grain growth method, specifically comprises the steps, preparation flow schematic diagram and each step sample object photo are as shown in Figure 2.
1) topological crystallite conversion method is utilized to prepare sheet NaNbO
3template grains.Sheet NaNbO is prepared according to topological crystallite conversion method
3the synthesis equation of crystal grain is as follows:
2.5Bi
2O
3+5Nb
2O
5+3.5NaCO
3＝2Bi
2.5Na
3.5Nb
5O
18+3.5CO
2(1)
4Bi
2.5Na
3.5Nb
5O
18+3NaCO
3＝20NaNbO
3+5Bi
2O
3+3CO
2(2)
First the BiNN5 powder of synthesizing flaky.According to formula (1), be Bi according to mol ratio
2o
3: Nb
2o
5: NaCO
3=2.5:5:3.5 takes raw material, adds appropriate ethanol mixing and ball milling 6h, according to raw material: the mass ratio of salt=1:1 adds NaCl and continues ball milling 2h.Powder after ball milling, in an oven in 90 DEG C of oven dry, crosses 80 mesh sieves.Powder after sieving is contained into Al
2o
3crucible, after adding a cover in Muffle furnace at 1100 DEG C, insulation 3h, heating rate is 15 DEG C/min.Product after synthesis soaks through the deionized water of heat, ultrasonic disperse, and repeatedly with the deionized water washing of heat, to remove NaCl salt wherein.Therebetween, available AgNO
3cl in solution testing filtrate
-ion concentration, if do not have white precipitate to occur, illustrates in product not containing Cl
-ion.The powder obtained after washes clean puts into baking oven in 90 DEG C of oven dry, and crosses 80 mesh sieves, and finally obtain sheet BiNN5 powder, its length of side is 10-20 μm, and thickness is 1-2 μm.
Then sheet BiNN5 powder synthesizing flaky NaNbO is utilized
3powder.By reactant NaCO
3mix with the ratio of NaCl salt according to mass ratio 1:1, add appropriate ethanol mixing and ball milling 2h, then add BiNN5 according to the ratio of mol ratio BiNN5:BiNN5=4:3.6, continue ball milling 0.5h.Powder after ball milling, in an oven in 90 DEG C of oven dry, crosses 80 mesh sieves.Powder after sieving is contained into Al
2o
3crucible, after adding a cover in Muffle furnace at 950 DEG C, insulation 4h, heating rate is 1 DEG C/min.Product after synthesis dissolving with hydrochloric acid Bi
2o
3and soak with the deionized water of heat, repeatedly clean repeatedly until not containing Cl
-till ion.The powder obtained after washes clean puts into baking oven in 90 DEG C of oven dry, and crosses 80 mesh sieves.Powder after sieving, 1000 DEG C of insulation 1h annealing in process, obtains final sheet NaNbO after 80 mesh sieves
3powder, its length of side is 10-20 μm, and thickness is 1-2 μm.
2) by conventional solid-state method synthesis (K
0.504na
0.496)
0.933li
0.067nbO
3(KNLN) powder, step is as follows: according to molecular formula (K
0.504na
0.496)
0.933li
0.067nbO
3stoichiometric proportion raw materials weighing: K
2cO
3(99%), Na
2cO
3(99.8%), Li
2cO
3(98%), Nb
2o
5(99.5%) and be placed in nylon ball grinder, absolute ethyl alcohol and ZrO is added
2ball, planetary ball mill 6h, puts into crucible after dried 80 mesh sieves, at 850 DEG C of pre-burning 5h, obtains KNLN powder.KNLN powder to be crossed after 80 mesh sieves ball milling 1h in high energy ball mill, cross 200 mesh sieves after drying, obtain final KNLN powder, diameter of particle is about 340nm.
3) flow casting molding prepares ceramic thick film.The KNLN powder obtained after high-energy ball milling is mixed with organic substances such as solvent, binding agent, dispersant and plasticizer, within 3 days, after (or planetary ball mill 12h), obtains uniform slurry through roller ball mill.Wherein, solvent is the mixed solution (ethanol and ethyl acetate mass ratio are 1:1) of ethanol and ethyl acetate, and the ratio of itself and ceramic powder is (0.36 ~ 0.45): 1; Binding agent is polyvinyl butyral fat (PVB), and with solvent with the mass ratio mixing wiring solution-forming of 1:2, the ratio of binder solution and ceramic powder is (0.27 ~ 0.32): 1; Dispersant is olein, and the ratio of itself and ceramic powder is (0.02 ~ 0.05): 1; Plasticizer is polyethylene glycol (PEG400) and BBP(Butyl Benzyl Phthalate (BBP), and the ratio of both and binder solution is all (0.07 ~ 0.10): 1.Sheet NaNbO is added in the slurry according to the mol ratio of (blapharoplast: template grains)=0.9:0.1
3crystal grain continues ball milling 3h and obtains final casting slurry.The final nominal component of pottery is (K
0.45na
0.55)
0.94li
0.06nbO
3.Final slurry obtains through flow casting molding the ceramic thick film that thickness is about 25 μm.
4) filling perforation printing lamination.The ceramic thick film slicing machine prepared by flow casting molding is cut into certain size size, then utilizes puncher to get through hole on ceramic thick film according to electrode structural designs.Electrode is filled up, i.e. filling perforation in the through hole accomplished fluently.Utilize after drying screen printer by electrode according to the pattern silk-screen of design on ceramic thick film, and be placed in dust free room and dry.The dried thick film being printed on electrode is carried out lamination with the thick film not printing electrode, and laminating method is: the thick film direction being printed on electrode during lamination is consistent, and be namely printed on electrode one faces up; Often insert the two-layer thick film not printing electrode between the two-layer thick film being printed on electrode.Build up the biscuit that inside has 7 layers of electrode according to the method described above, between every two-layer electrode, thickness is about 66 μm.The biscuit folded is carried out in warm water isostatic pressing machine isostatic pressed to make to combine closely between each thickness film, the temperature of isostatic pressed is 60-70 DEG C, and pressure is 40-55MPa.Biscuit after isostatic pressed is cut into small pieces (size is about 3mm × 3mm × 0.58mm) in Muffle furnace, to carry out plastic removal, burn altogether.The temperature of plastic removal is 600 DEG C, and temperature retention time is 30min, and heating rate is 1.5 DEG C/min; The temperature of burning altogether is 1130 DEG C, and temperature retention time is 1h, and heating rate is 10 DEG C/min.Because common burning temperature is more than 1100 DEG C, Ag-Pd (70/30) electrode of selecting used is as multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver.After burning altogether, the gross thickness of sample is about 0.39mm.
5) the insulation silicone oil polarization common burning sample being placed in 120 DEG C obtains final multilayer piezoelectric acutator, and wherein polarized electric field is 3kV/mm, and the polarization time is 30min.
Fig. 3 is multilayer potassium niobate sodium-based leadless piezoelectric ceramic driver section SEM photo.7 layers of complete as we can see from the figure layered electrode, layered electrode is combined closely with potassium niobate sodium-based leadless piezoelectric ceramic matrix.And potassium niobate sodium-based leadless piezoelectric ceramic matrix densified sintering product, crystal grain is grown up completely, does not have blapharoplast to remain, and shows that ceramic matrix completes texturing in common burning process.
Fig. 4 is the length travel of multilayer piezoelectric acutator provided by the invention and executes alive curve chart.As we can see from the figure, along with the rising of measuring voltage, the length travel of multilayer KNN base ceramic driver increases gradually.When measuring voltage is 350V, the length travel of driver is maximum reaches 440nm, and corresponding strain is about 0.11%.
Claims (10)
1. a texturing leadless piezoelectric ceramics multilayer driver, is characterized in that, comprising:
The multilayer textured ceramics thick film that lamination is arranged, comprises the ceramic topcoats, at least one deck ceramic inner layer and the ceramic bottom that are printed with layered electrode respectively;
Run through the first through hole of described ceramic topcoats and ceramic inner layer;
Run through the second through hole of described ceramic inner layer and ceramic bottom;
Fill the first connecting electrode of described first through hole; And
Fill the second connecting electrode of described second through hole;
Wherein the first through hole and the second through hole lay respectively at the relative both sides of described textured ceramics thick film, layered electrode in described ceramic inner layer has strip slot, described strip slot is between the first through hole and the second through hole, and strip slot in adjacent two layers ceramic inner layer is not overlapping.
2. texturing leadless piezoelectric ceramics multilayer driver according to claim 1, it is characterized in that, between described ceramic topcoats and ceramic inner layer, between adjacent ceramic internal layer or between ceramic inner layer and ceramic bottom, be also provided with the blank ceramic thick film do not printed electrode.
3. a preparation method for the texturing leadless piezoelectric ceramics multilayer driver described in claim 1 or 2, it is characterized in that, described preparation method comprises:
Step 1): prepare lead-free piezoelectric ceramic powder and texturing template grains;
Step 2): ceramic powder and the organic substance such as texturing template grains and solvent, binding agent, dispersant and plasticizer are mixed and made into casting slurry, obtain ceramic thick film by flow casting molding;
Step 3): cut into slices by ceramic thick film, get through hole, by the filling through hole connecting electrode accomplished fluently, leaves described strip slot at ceramic thick film surface printing stratiform electrode;
Step 4): be fired into integrated, multi-level piezoelectric ceramic devices after multiple ceramic thick film being carried out lamination, isostatic pressed according to the number of plies of design;
Step 5): polarized by the integrated, multi-level pottery baked, obtains texturing leadless piezoelectric ceramics multilayer driver.
4. preparation method according to claim 3, it is characterized in that, in step 1), the piezoelectric ceramic preparing lead-free piezoelectric ceramic powder use is perovskite structure leadless piezoelectric ceramics, preferred barium titanate-based lead-free piezoelectric ceramic, bismuth-sodium titanate base lead-free piezoelectric ceramic or potassium niobate sodium-based leadless piezoelectric ceramic.
5. the preparation method according to claim 3 or 4, is characterized in that, in step 1), described lead-free piezoelectric ceramic powder size is less than 400 nanometers.
6. the preparation method according to any one of claim 3 to 5, it is characterized in that, in step 1), adopt topological crystallite conversion method to prepare texturing template grains, the pattern of described texturing template grains has anisotropy, and the aspect ratio of the size of described texturing template grains is greater than 10.
7. the preparation method according to any one of claim 3 to 6, it is characterized in that, in step 1), described texturing template grains is of a size of more than 5 times of described lead-free piezoelectric ceramic powder size, and the mol ratio of described texturing template grains accounts for 5% ~ 15% of ceramic powder.
8. the preparation method according to any one of claim 3 to 7, is characterized in that, step 2) in, solvent is mass ratio is the ethanol of 1:1 and the mixed solution of ethyl acetate, and the mass ratio of mixed solution and ceramic powder is 0.36 ~ 0.45:1; Binding agent is polyvinyl butyral fat, and with solvent with the mass ratio mixing wiring solution-forming of 1:2, the ratio of binder solution and ceramic powder is 0.27 ~ 0.32:1; Dispersant is olein, and the ratio of described dispersant and ceramic powder is 0.02 ~ 0.05:1; Plasticizer is polyethylene glycol and BBP(Butyl Benzyl Phthalate, and the ratio of both and binder solution is 0.07 ~ 0.10:1.
9. the preparation method according to any one of claim 3 to 8, is characterized in that, step 2) in the ceramic thick film thickness that obtains of flow casting molding be 20 ~ 80 microns.
10. the preparation method according to any one of claim 3 to 9, is characterized in that, in step 4), the temperature of isostatic pressed is 60 ~ 70 DEG C, and pressure is 40 ~ 55MPa.
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