CN105374718A - Dicing saw sucker circumference flatness adjusting apparatus - Google Patents
Dicing saw sucker circumference flatness adjusting apparatus Download PDFInfo
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- CN105374718A CN105374718A CN201510880367.1A CN201510880367A CN105374718A CN 105374718 A CN105374718 A CN 105374718A CN 201510880367 A CN201510880367 A CN 201510880367A CN 105374718 A CN105374718 A CN 105374718A
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- steel plate
- lining steel
- platform
- adjustment
- inner liner
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Disclosed is a dicing saw sucker circumference flatness adjusting apparatus. The dicing saw sucker circumference flatness adjusting apparatus comprises an adjustment base, an adjustment platform and an inner liner steel plate, wherein the inner liner steel plate is arranged between the circular adjustment platform and the adjustment base, three radially sliding abutting blocks are uniformly distributed between the inner liner steel plate and the adjustment base, each abutting block is connected with precision screw thread pairs at the outer side of the circular adjustment platform successively through a spring and a slide block; and the abutting blocks are attached to the inclined surface of the correspondingly arranged inner liner steel plate, and the inclination angle of the inclined surface of the inner liner steel plate is 3 to 8 degrees. According to the invention, the slide block is driven to move through adjusting the precision screw thread pairs, movement of the slide block can help to realize microscale abutting of the platform, and the work of adjusting the circumferential plane flatness can be realized through adjusting the three circumferentially distributed precision screw thread pairs. The apparatus provided by the invention is reasonable in structural design and solves the defects of time-consuming and labor-consuming work, high requirement for work experience of personnel and the like in the prior art. The operation is easy, the adjustment is convenient, the work efficiency is remarkably improved, and the labor intensity of operation personnel is reduced.
Description
Technical field
The present invention relates to a kind of mechanical circumferential evenness adjustment technology field, specifically a kind of mechanical structure and machine driving are in one, are mounted in the scribing machine sucker circumference evenness adjusting device in scribing machine sucker.This invention degree of regulation is within 0.003mm, and it is applicable to the trim process of the flatness of suction cup of scribing machine platform, also can be used for the adjustment process of other same category of device.
Background technology
Sand-wheel slice cutting machine is the special cutting device of the brilliant substrates of circle such as the various semiconductors of processing and other similar substrates, it is an important equipment in semiconductor production process, is mainly used in the processing of the products such as semiconductor chip, thermistor, B ultrasonic transducing head, solar cell.Sand-wheel slice cutting machine is the minimum disc wheel cutter for 0.02mm of the thickness that utilizes subparticle diamond dust to make, under the cutting speed of 0.1 ~ 400m/s, make emery wheel blade along cut by the cut-off rule of cut piece into.The half of only cutting into silicon wafer thickness had, and then employing manually breaks disconnected method separately, also has and adopts the method for cutting whole silicon wafer thickness to separate.Under the precision actuation of X, Y, Z, θ four direction electrical micro-machine under industrial computer controls, by the reciprocating motion of X, Y, Z-direction and θ to rotation, according to the size preset, megacryst garden is split, thus obtains single little tube core.Need in cutting process by cooling fluid take away emery wheel and the indirect contact area of workpiece frictional heat, clear up emery wheel, wash away abrasive dust and lubrication grinding position.During scribing work, emery wheel blade outer, relative to the height of workbench, is a very important positioning index.If the error of this index is excessive, the crudy of scribing can be affected, not only can reduce production efficiency, also can increase the labour intensity of manufacturing cost and operating personnel.
At present, the adjustment of the scribing machine sucker circumference evenness of home and abroad generally makes with the following methods: one places an annular holder below sucker, both played to fix and also played regulating action.When adjusting circumference evenness, outer ring jerk value when rotating by measuring sucker, tests out the orientation highly exceeded standard, and by grinding the annular holder under this orientation, plays the effect reducing height.And then the installation of annular holder is fixed, remeasure jerk value, if the jerk value of sucker cylindrical meets the requirements, then stop debug process.If jerk value is undesirable, then continue grinding step, until jerk value meets the requirements according to the position measured.Such regulative mode principle is simple, easy to operate, but higher to the skill requirement of operating personnel.If the part that annular holder grinds off is excessive, then this annulus is scrapped.
It is exactly more than the adjustment mode of sucker circumference jerk value, be all that adjusting device of being beated by sucker circumference is installed in advance and fixed, then sucker placed steadily, measure circumference jerk value when sucker rotates, regulate respective regions according to display result, obtain qualified circumference jerk value.Such regulative mode utilizes to grind away part unnecessary on holder, the relative level degree of sucker is made to reach ideal standard, such control method, although principle is simple, the requirement for operating personnel is too high, once grind excessive, parts just can not continue to use, and grinding after annular holder there is no interchangeability, can not replace by the parts on other machines and also maintenance dismounting after need to readjust, waste time and energy.After each grinding, cannot ensure the accuracy reinstalling position and original position, precision is not high yet.
Summary of the invention
The object of this invention is to provide a kind of mechanical structure and machine driving in one, be mounted in the scribing machine sucker circumference evenness adjusting device in scribing machine sucker.Its reasonable in design, solve the operating personnel existed in prior art require high, degree of regulation is low, wearing and tearing easily scrap, regulates expend time in grow etc. defect.
The object of the present invention is achieved like this: a kind of scribing machine sucker circumference flatness adjusting device, it includes adjusting base, regulate platform, lining steel plate, it is characterized in that: described lining steel plate is arranged between circular adjustment platform and adjusting base, between lining steel plate and adjusting base, be evenly distributed with three jacking blocks radially slided, each jacking block is successively by spring, slide block and be arranged on and circular regulate the accurate thread parafacies outside platform to be connected; The lining steel plate inclined-plane of jacking block and corresponding setting fits, and the angle of inclination on lining steel plate inclined-plane is 3-8 °.
The present invention is corresponding with the angle of inclination on the jacking block angle of inclination that lining steel plate inclined-plane fits and lining steel plate inclined-plane.
Lining steel plate and adjusting base are connected by vertically disposed pin for suppressing metal.
Circular adjusting base is symmetrically arranged with three chutes radially distributed, and the angle namely between each chute is 120 °, and jacking block is arranged in chute.
Its technical characteristics: the present invention will change the regulative mode of original circumference evenness, utilize three uniform jacking blocks of circumference equal dividing, accurate thread pair is furnished with outside jacking block, by adjustment precision screw thread pair, slide block slide anteroposterior can be made, when jacking block slides in the chute of adjusting base, 3-8 ° of inclined-plane of jacking block combines with 3-8 ° of inclined-plane of lining steel plate, when jacking block slides forward or backward, can at jack-up lining steel plate to a certain degree related adjustment platform above this, make to regulate platform to tilt by trace in one direction, a plane is determined according to 3, in conjunction with three jacking block conbined usage, the effect of regulating circumferential evenness can be played.The features such as the present invention compares former regulative mode, more simple and efficient, easy operation.
This device processing ease, easy to adjust, the adjustment that can not only realize scribing machine sucker circumference jerk value is fixed, there is provided reliable quality assurance to the cutting operation of scribing machine, can also maintenance cost be reduced, obviously improve the operating efficiency of scribing machine and reduce the labour intensity of operating personnel.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the invention will be further described.
Fig. 1 is structural representation sketch of the present invention.
In figure, critical piece sequence number illustrates: 1 is that accurate thread is secondary, and 2 is slide block, and 3 is spring, and 4 is jacking block, and 5 is circular adjustment platform, and 6 is pin for suppressing metal, and 7 is lining steel plate, and 8 is circular adjusting base.
Be described in further detail the present invention by example below in conjunction with accompanying drawing, but following example is only example of the present invention, do not represent the rights protection scope that the present invention limits, the scope of the present invention is as the criterion with claims.
Embodiment
As shown in Figure 1, in figure 8 is circular adjusting base, 5 is circular adjustment platform, 7 is lining steel plate, described lining steel plate 7 is arranged on circular adjustment between platform 5 and circular adjusting base 8, is evenly distributed with three jacking blocks radially slided 4, circular adjusting base 8 is symmetrically arranged with three chutes radially distributed between lining steel plate 7 and circular adjusting base 8, namely the angle between each chute is 120 °, and described jacking block 4 is arranged in chute; Each jacking block 4 is successively by spring 3, slide block 2 and be arranged on and circular regulate the accurate thread pair 1 outside platform to be connected; Jacking block 4 fits with lining steel plate 7 inclined-plane of corresponding setting, and the angle of inclination on lining steel plate 7 inclined-plane is 3-8 °, and corresponding with the angle of inclination on jacking block 4 angle of inclination that lining steel plate inclined-plane fits and lining steel plate 7 inclined-plane.
Described circle regulates platform 5, and lining steel plate 7 and circular adjusting base 8 are connected by vertically disposed pin for suppressing metal 6.
Describe structure of the present invention composition in detail: this device is regulate platform 5, lining steel plate 7, circular adjusting base 8 to arrange according to installing hole by circle from top to bottom, and the parts such as slide block 2, spring 3, jacking block 4 are placed on design attitude in advance, accurate thread secondary 1 is connected with regulating platform 5, and check the reliability of its work, finally by pin for suppressing metal 6, device integrated connection is fixed.
The present invention is the jacking block 4 utilizing three circumference equal dividings uniform, by spring 3 outside jacking block, slide block 2 is furnished with accurate thread pair 1, by adjustment precision screw thread pair 1, make slide block slide anteroposterior, when jacking block 4 slides in the chute of adjusting base, 3-8 ° of inclined-plane of jacking block combines with 3-8 ° of inclined-plane of lining steel plate, when jacking block slides forward or backward, can at jack-up lining steel plate to a certain degree related adjustment platform above this, make to regulate platform to tilt by trace in one direction, after accurate thread pair is screwed out, slide block moves under the action of the spring backward, then jack-up amount reverts to 0, the evenness of platform is regulated with this process, a plane is determined according to 3, and according to " determining plane at 3 " principle, in conjunction with three jacking block conbined usage, the effect of regulating circumferential evenness of the present invention can be played.
Claims (4)
1. a scribing machine sucker circumference flatness adjusting device, it includes adjusting base, regulate platform, lining steel plate, it is characterized in that: described lining steel plate is arranged between circular adjustment platform and adjusting base, between lining steel plate and adjusting base, be evenly distributed with three jacking blocks radially slided, each jacking block is successively by spring, slide block and be arranged on and circular regulate the accurate thread parafacies outside platform to be connected; The lining steel plate inclined-plane of jacking block and corresponding setting fits, and the angle of inclination on lining steel plate inclined-plane is 3-8 °.
2. scribing machine sucker circumference flatness adjusting device according to claim 1, is characterized in that: corresponding with the angle of inclination on the slider tilt angle that lining steel plate inclined-plane fits and lining steel plate inclined-plane.
3. scribing machine sucker circumference flatness adjusting device according to claim 1, it is characterized in that: described adjustment platform, lining steel plate and adjusting base are connected by vertically disposed pin for suppressing metal.
4. scribing machine sucker circumference flatness adjusting device according to claim 1, is characterized in that: on circular adjusting base, be symmetrically arranged with three chutes radially distributed, jacking block is arranged in chute.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510880367.1A CN105374718A (en) | 2015-12-04 | 2015-12-04 | Dicing saw sucker circumference flatness adjusting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510880367.1A CN105374718A (en) | 2015-12-04 | 2015-12-04 | Dicing saw sucker circumference flatness adjusting apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105374718A true CN105374718A (en) | 2016-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510880367.1A Pending CN105374718A (en) | 2015-12-04 | 2015-12-04 | Dicing saw sucker circumference flatness adjusting apparatus |
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| CN (1) | CN105374718A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117565246A (en) * | 2024-01-15 | 2024-02-20 | 沈阳汉为科技有限公司 | Scribing machine with contact height measuring device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201077075Y (en) * | 2007-09-27 | 2008-06-25 | 天津市天发重型水电设备制造有限公司 | Layout block leveling device |
| CN101241307A (en) * | 2007-12-21 | 2008-08-13 | 上海微电子装备有限公司 | Levelling focusing mechanism possessing great stroke control function |
| CN201142318Y (en) * | 2007-11-13 | 2008-10-29 | 上海微电子装备有限公司 | High-precision fast leveling mechanism |
| CN205264679U (en) * | 2015-12-04 | 2016-05-25 | 沈阳仪表科学研究院有限公司 | Scriber sucking disc circumference roughness adjusting device |
-
2015
- 2015-12-04 CN CN201510880367.1A patent/CN105374718A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201077075Y (en) * | 2007-09-27 | 2008-06-25 | 天津市天发重型水电设备制造有限公司 | Layout block leveling device |
| CN201142318Y (en) * | 2007-11-13 | 2008-10-29 | 上海微电子装备有限公司 | High-precision fast leveling mechanism |
| CN101241307A (en) * | 2007-12-21 | 2008-08-13 | 上海微电子装备有限公司 | Levelling focusing mechanism possessing great stroke control function |
| CN205264679U (en) * | 2015-12-04 | 2016-05-25 | 沈阳仪表科学研究院有限公司 | Scriber sucking disc circumference roughness adjusting device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117565246A (en) * | 2024-01-15 | 2024-02-20 | 沈阳汉为科技有限公司 | Scribing machine with contact height measuring device |
| CN117565246B (en) * | 2024-01-15 | 2024-03-15 | 沈阳汉为科技有限公司 | Scribing machine with contact height measuring device |
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Application publication date: 20160302 |