CN105352466B - A kind of device for detecting axial displacement, method and magnetic suspension bearing - Google Patents
A kind of device for detecting axial displacement, method and magnetic suspension bearing Download PDFInfo
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- CN105352466B CN105352466B CN201510931176.3A CN201510931176A CN105352466B CN 105352466 B CN105352466 B CN 105352466B CN 201510931176 A CN201510931176 A CN 201510931176A CN 105352466 B CN105352466 B CN 105352466B
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 143
- 239000000725 suspension Substances 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000001514 detection method Methods 0.000 claims abstract description 32
- 239000000523 sample Substances 0.000 claims description 38
- 230000035945 sensitivity Effects 0.000 claims description 19
- 230000004323 axial length Effects 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a kind of device for detecting axial displacement, method and magnetic suspension bearing, it is related to field of measuring technique.The device includes:First sensor, the first electric signal is exported for the radial displacement based on detected element non-inclined face;Second sensor, the second electric signal is exported for the radial displacement based on detected element inclined plane;Axial displacement computing unit, for the inclination angle according to the first electric signal, the second electric signal and detected element inclined plane, calculate the axial displacement of detected element;Wherein, the axial surface of detected element has inclined plane and non-inclined face, and first sensor is arranged on above detected element non-inclined face, and second sensor is arranged on above detected element inclined plane.That is the present invention calculates axial displacement by setting inclined plane, according to the radial displacement of detected element, improves the precision of axial displacement detection.
Description
Technical field
The present invention relates to field of measuring technique, more particularly to a kind of device for detecting axial displacement, method and magnetic suspension bearing.
Background technology
In magnetic suspension bearing control system, axial displacement mainly has two kinds of detection methods.A kind of method as shown in figure 1,
A detection plate 120 is covered on axle 110, axial sensor 130 determines the axial direction of axle by measuring the axial movement of detection plate
Displacement.Due to assembling the out of plumb of center line 140 of the error brought, detection plate and axle, axle is so may result in rotary course
Middle axial displacement has fluctuation, and detection plate is radius the best part on whole rotor, causes assemble flow relatively complicated;It is another
For kind method as shown in Fig. 2 the shaft end 230 of 210 face rotor of displacement transducer 220 is installed, it is applied to most application scenario,
But it is not intended to some particular applications.Such as the rotor of the equipment such as centrifugal water pump, cfentrifugal blower, its functional part
Shaft end is arranged on mostly, and is cantilever design, now because the reasons such as structure cause displacement transducer inconvenience face working rotor
Axial end is installed, while in order to reduce influence of the rotor expanded by heating to functional part position, sensor is needed close proximity to work(
Energy part, and the inoperative shaft end of rotor can not be arranged on.This detection method is unfavorable for axial sensor and radial transducer
Integrated approach, increase structure axial space.In addition, because technique and assembling factor also bring along detection error.
The content of the invention
The invention solves a technical problem be that conventional axial displacement detection precision is not high.
Further technical problems to be solved of the invention include the complicated of rotor, are not easy to install, in rotating machinery
In the case that axial space is limited, the problem of axial space-consuming is big.
According to an aspect of the present invention, there is provided a kind of device for detecting axial displacement, the axial surface of detected element, which has, to be tilted
Face and non-inclined face, the device include:First sensor, for the radial displacement output first based on detected element non-inclined face
Electric signal;Second sensor, the second electric signal is exported for the radial displacement based on detected element inclined plane;Axial displacement calculates
Unit, for the inclination angle according to the first electric signal, the second electric signal and detected element inclined plane, calculate the axial direction of detected element
Displacement;Wherein, first sensor is arranged on above detected element non-inclined face, and second sensor is arranged on detected element inclined plane
Top.
Further, the first electric signal and the second electric signal are voltage signal;Axial displacement computing unit is used for according to public affairs
FormulaCalculate the axial displacement of detected element;Wherein, UrFor the first electric signal, UzFor the second electric signal, φ
For the inclination angle of inclined plane, k1For the sensitivity parameter of first sensor, k2For the sensitivity parameter of second sensor.
Further, first sensor and second sensor are arranged on probe ring, and the probe of first sensor and the
The mounting distance of the probe of two sensors is more than threshold value.
Further, first sensor and second sensor are current vortex sensor.
Further, the probe of first sensor is directed at the circle central axis of probe ring with the probe of second sensor, and
And installation direction is consistent.
Further, the axial length of inclined plane is more than the maximum axial displacement of detected element.
Further, the inclination angle of detected element inclined plane is preset value.
Further, the inclination angle of detected element inclined plane is 0 °~90 °.
Further, detected element is the rotor of magnetic suspension bearing.
According to another aspect of the present invention, a kind of axial displacement detection method, the axial surface tool of detected element are also provided
There are inclined plane and non-inclined face, method includes:Receive radial displacement output of the first sensor based on detected element non-inclined face
The first electric signal;Receive the second electric signal of radial displacement output of the second sensor based on detected element inclined plane;According to
The inclination angle of first electric signal, the second electric signal and detected element inclined plane, calculate the axial displacement of detected element;Wherein,
One sensor is arranged on above detected element non-inclined face, and second sensor is arranged on above detected element inclined plane.
Further, the first electric signal and the second electric signal are voltage signal;Calculate the step of the axial displacement of detected element
Suddenly include:According to formulaCalculate the axial displacement of detected element;Wherein, UrFor the first electric signal, UzFor
Second electric signal, φ be inclined plane inclination angle, k1For the sensitivity parameter of first sensor, k2For the sensitive of second sensor
Spend parameter.
Further, first sensor and second sensor are arranged on probe ring, and the probe of first sensor and the
The mounting distance of the probe of two sensors is more than threshold value.
Further, first sensor and second sensor are current vortex sensor.
Further, the probe of first sensor is directed at the circle central axis of probe ring with the probe of second sensor, and
And installation direction is consistent.
Further, the axial length of inclined plane is more than the maximum axial displacement of detected element.
Further, the inclination angle of detected element inclined plane is preset value.
Further, the inclination angle of detected element inclined plane is 0 °~90 °.
Further, detected element is the rotor of magnetic suspension bearing.
According to another aspect of the present invention, a kind of magnetic suspension bearing is also provided, including:Rotor, the axial surface of rotor are set
It is equipped with inclined plane and non-inclined face.
Further, in addition to any of the above-described device for detecting axial displacement.
Compared with prior art, the axial surface of detected element of the present invention has inclined plane and non-inclined face, and in device
In be provided with least two sensors, radial displacement output first electricity of one of sensor based on detected element non-inclined face
Signal, radial displacement of another sensor based on detected element inclined plane export the second electric signal, further according to the first electric signal,
The inclination angle of second electric signal and detected element inclined plane, calculate the axial displacement of detected element.I.e. by setting inclined plane, root
Axial displacement is calculated according to the radial displacement of detected element, improves the precision of axial displacement detection.
Further, the structure of rotor is simple, is easily installed, in the case of the limited space of rotating machinery axial direction, Neng Goujie
Province part axial space.
By referring to the drawings to the present invention exemplary embodiment detailed description, further feature of the invention and its
Advantage will be made apparent from.
Brief description of the drawings
The accompanying drawing of a part for constitution instruction describes embodiments of the invention, and is used to solve together with the description
Release the principle of the present invention.
Referring to the drawings, according to following detailed description, the present invention can be more clearly understood, wherein:
Fig. 1 is the structural representation of one embodiment that prior art detects axial displacement.
Fig. 2 is the structural representation for another embodiment that prior art detects axial displacement.
Fig. 3 is the structural representation of one embodiment of device for detecting axial displacement of the present invention.
Fig. 4 is sensor mounting location schematic diagram in one embodiment of the invention.
Fig. 5 is the structural representation of another embodiment of device for detecting axial displacement of the present invention.
Fig. 6 is that the operation principle of current vortex sensor detection magnetic suspension bearing rotor displacement in one embodiment of the invention is shown
It is intended to.
Fig. 7 A are device for detecting axial displacement operation principle schematic diagram in one embodiment of the invention.
Fig. 7 B are device for detecting axial displacement operation principle enlarged diagram in one embodiment of the invention.
Fig. 8 is the schematic flow sheet of one embodiment of axial displacement detection method of the present invention.
Fig. 9 is the schematic flow sheet of a specific embodiment of axial displacement detection method of the present invention.
Figure 10 is the structural representation of one embodiment of the rotor of magnetic suspension bearing of the present invention.
Embodiment
The various exemplary embodiments of the present invention are described in detail now with reference to accompanying drawing.It should be noted that:Unless have in addition
Body illustrates that the unlimited system of part and the positioned opposite of step, numerical expression and the numerical value otherwise illustrated in these embodiments is originally
The scope of invention.
Simultaneously, it should be appreciated that for the ease of description, the size of the various pieces shown in accompanying drawing is not according to reality
Proportionate relationship draw.
The description only actually at least one exemplary embodiment is illustrative to be never used as to the present invention below
And its application or any restrictions that use.
It may be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but suitable
In the case of, technology, method and apparatus should be considered as authorizing part for specification.
In shown here and discussion all examples, any occurrence should be construed as merely exemplary, without
It is as limitation.Therefore, the other examples of exemplary embodiment can have different values.
It should be noted that:Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined, then it need not be further discussed in subsequent accompanying drawing in individual accompanying drawing.
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
Fig. 3 is the structural representation of one embodiment of device for detecting axial displacement of the present invention.The present invention is in advance tested
The Surface Machining of element 300 goes out an inclined plane, and wherein detected element can be the rotor of bearing, and bearing is specifically as follows magnetcisuspension
Floating axle is held.Inclined plane can be the inclined plane of depression, or raised inclined plane, enter below by taking the inclined plane of depression as an example
Row explanation.First sensor 311 is set above non-inclined face 310, for the radial displacement based on detected element non-inclined face
Export the first electric signal;Second sensor 321 is set above inclined plane 320, for the radial direction based on detected element inclined plane
Displacement exports the second electric signal;Wherein the first electric signal, the second electric signal can be voltage signal, and first sensor and second pass
Sense can be current vortex sensor.Axial displacement computing unit is used for according to the first electric signal, the second electric signal and detected element
The inclination angle of inclined plane, the axial displacement of detected element is calculated, wherein axial displacement computing unit does not mark in figure 3.
In one embodiment, the axial length L of the inclined plane of detected element is more than the maximum axial displacement of detected element
Zmax, i.e., in detected element in moving process, the sensor of inclined plane is measured all the time in inclined plane axial length range.Quilt
The inclination angle phi for surveying organs incline face is preset value, and it is appropriate to keep, and gradient is small, the displacement that sensor may be caused to measure
Sensitivity is low, and gradient then causes greatly range less than normal, inclination angle for example can be 0 °~90 °, preferred scope be 10 °~80 °,
30 °~60 °, such as can be using value as 30 °, 40 °, 43 °, 45 °, 48 °, 50 °, 55 °, 60 °.
Fig. 4 is sensor mounting location schematic diagram in one embodiment of the invention.In the embodiment, first sensor and
Two sensings can be current vortex sensor, and installation site is shown in Fig. 4, and 410 be the rotating shaft of bearing, and 420 be sensor probe ring,
The probe 430 of first sensor and the center line of probe 440 of second sensor are respectively aligned to the central principal axis of detected element.Probe
The distance on the surface of range measurement rotating shaft is no more than the range of sensor, and the probe and second sensor of first sensor
The mounting distance of probe be more than threshold value, avoid producing interference between two sensors.
In an embodiment of the present invention, the axial surface of detected element of the invention has inclined plane and non-inclined face, and
At least two sensors, radial displacement output of one of sensor based on detected element non-inclined face are provided with a device
First electric signal, radial displacement of another sensor based on detected element inclined plane exports the second electric signal, further according to first
The inclination angle of electric signal, the second electric signal and detected element inclined plane, calculate the axial displacement of detected element.I.e. according to tested member
The radial displacement of part calculates axial displacement, solves conventional axial displacement because technique and assembling factor bring asking for detection error
Topic.In addition, the present invention is because be not provided with detection plate, while do not set sensor in the end face of working shaft, therefore be advantageous to sense
Device integrated approach, structure axial space is increased, is easily installed.
In another embodiment of the present invention, the first current vortex sensor 510 is used for based on magnetic suspension bearing rotor
The radial displacement output first voltage signal U in non-inclined facer.Second current vortex sensor 520 is used to forward based on magnetic suspension shaft
The radial displacement output second voltage signal U of the inclined plane of sonz.Axial displacement computing unit 530 is used for according to formulaCalculate the axial displacement of magnetic suspension bearing rotor.Wherein, k1For the sensitivity of the first current vortex sensor
Parameter, k2For the sensitivity parameter of the second current vortex sensor, φ is the inclination angle of inclined plane.The sensitivity of sensor can pass through
The slope of inclined plane is adjusted.
Current vortex sensor detection magnetic suspension bearing rotor displacement operation principle as shown in fig. 6, when probe coil 610 away from
When being changed from the distance x of detected body surface 620, the equiva lent impedance of coil can be caused to change, utilize measuring circuit
The change of impedance can be changed into voltage signal U, and different displacements corresponds to different voltage signals.
For example, Fig. 7 A are device for detecting axial displacement operation principle schematic diagram in one embodiment of the invention, Fig. 7 B are figure
The enlarged drawing of encircled portion in 7A, if the rotating shaft 710 of magnetic suspension bearing rotor is only axially producing displacement z, the first electric whirlpool
The output of flow sensor 720 will not change, and now, the output voltage of the second current vortex sensor 730 is:Uz=k2X, wherein,
X is the second current vortex sensor 730 and the distance change amount on inclined-plane, unit mm, UzRepresent the defeated of the second current vortex sensor 730
Go out voltage, unit V, k2For the sensitivity parameter of the second current vortex sensor 730, unit V/mm.Rotor as seen from Figure 7
Axial displacement z and x relation be that z=x/tan φ, z unit is mm, φ is the inclination angle of inclined plane.
If the rotating shaft 710 of magnetic suspension bearing rotor is radially also producing movement, the output change of the second current vortex sensor 730
Change is produced by the axial displacement of rotor and radial displacement superposition, now just needs to realize by the first current vortex sensor 720
Axial displacement and the decoupling of radial displacement.The output of second current vortex sensor 730 is:Uz=k2(x+y), y represents that rotor is non-inclines
The radial displacement on inclined-plane, if the sensitivity parameter of the first current vortex sensor 720 is k1, output voltage is:Ur=k1y。
Above simultaneous will be carried out by each formula, it can be deduced that the axial displacement of the rotating shaft 710 of the magnetic suspension bearing rotor of rotor
For
If 710 generation radial displacements of the rotating shaft of magnetic suspension bearing rotor,Still set up, this
Shi YouAxial displacement is 0.
In an embodiment of the present invention, the radial direction position in non-inclined face of the first sensor based on magnetic suspension bearing rotor is passed through
Move output first voltage signal Ur, the electricity of radial displacement output second of inclined plane of the second sensor based on magnetic suspension bearing rotor
Press signal Uz, and using according to formulaCalculate the axial displacement of magnetic suspension bearing rotor.Footpath can be utilized
The calculating of axial displacement is realized to displacement.Also, solves conventional axial displacement because technique and assembling factor bring detection error
The problem of.In addition, the present invention is because be not provided with detection plate, while do not set sensor in the end face of working shaft, therefore be advantageous to
Sensor integrationization processing, also simplify the structure of rotor, is easily installed.In the case of the limited space of rotating machinery axial direction,
A part of space can be saved.
Fig. 8 is the schematic flow sheet of one embodiment of axial displacement detection method of the present invention.
In step 810, the first telecommunications that radial displacement of the first sensor based on detected element non-inclined face exports is received
Number.
In step 820, the second electric signal that radial displacement of the second sensor based on detected element inclined plane exports is received.
Step 810 and step 820 can occur simultaneously in the process of implementation.First electric signal therein, the second electric signal can
Think voltage signal, detected element can be the rotor of bearing, and bearing can be magnetic suspension bearing, and first sensor and second pass
Sensor is current vortex sensor.
In step 830, according to the inclination angle of the first electric signal, the second electric signal and detected element inclined plane, calculate tested
The axial displacement of element.
The present invention in the Surface Machining of detected element 300 as shown in figure 3, go out an inclined plane in advance.Inclined plane can be
The inclined plane of depression, or raised inclined plane, illustrated below by taking the inclined plane of depression as an example.In non-inclined face
310 tops set first sensor 311, and second sensor 321 is set above inclined plane 320.The inclined plane of detected element
Axial length L is more than the maximum axial displacement Zmax of detected element, i.e., in detected element in moving process, measures inclined plane
Sensor is all the time in inclined plane axial length range.The inclination angle phi of detected element inclined plane is preset value, and it is appropriate to keep,
Gradient is small, and the displacement sensitivity that sensor may be caused to measure is low, and gradient then causes greatly that range is less than normal, and inclination angle is for example
Can be 0 °~90 °, preferred scope be 10 °~80 °, 30 °~60 °, such as can using value as 30 °, 40 °, 43 °, 45 °, 48 °,
50°、55°、60°。
Fig. 4 is sensor mounting location schematic diagram in one embodiment of the invention.In the embodiment, first sensor and
Two sensings can be current vortex sensor, and installation site is shown in Fig. 4, and 410 be the rotating shaft of bearing, and 420 be sensor probe ring,
The probe 430 of first sensor and the center line of probe 440 of second sensor are respectively aligned to the central principal axis of detected element.Probe
The distance on the surface of range measurement rotating shaft is no more than the range of sensor, and the probe and second sensor of first sensor
The mounting distance of probe be more than threshold value, avoid producing interference between two sensors.
In an embodiment of the present invention, by setting two sensors, one of sensor is based on that detected element is non-inclines
The radial displacement on inclined-plane exports the first electric signal, radial displacement output second of another sensor based on detected element inclined plane
Electric signal, further according to the inclination angle of the first electric signal, the second electric signal and detected element inclined plane, calculate the axial direction of detected element
Displacement.Axial displacement is calculated according to the radial displacement of detected element, solves conventional axial displacement because of technique and assembling factor
The problem of bringing detection error.In addition, the present invention is because be not provided with detection plate, while do not set sensing in the end face of working shaft
Device, therefore be advantageous to sensor integrationization processing, structure axial space is increased, is easily installed.
Fig. 9 is the schematic flow sheet of a specific embodiment of axial displacement detection method of the present invention.
In step 910, the radial displacement in non-inclined face of first current vortex sensor based on magnetic suspension bearing rotor is received
The first voltage signal U of outputr。
It is defeated in step 920, the radial displacement for receiving inclined plane of second current vortex sensor based on magnetic suspension bearing rotor
The second voltage signal U gone outz。
Step 910 and step 920 can occur simultaneously in the process of implementation.
In step 930, according to formulaCalculate the axial displacement of magnetic suspension bearing rotor.
Wherein, k1For the sensitivity parameter of the first current vortex sensor, k2Join for the sensitivity of the second current vortex sensor
Number, φ are the inclination angle of inclined plane.The sensitivity of sensor can be adjusted by the slope of inclined plane.
Current vortex sensor detection magnetic suspension bearing rotor displacement operation principle as shown in fig. 6, when probe coil 610 away from
When being changed from the distance x of detected body surface 620, the equiva lent impedance of coil can be caused to change, utilize measuring circuit
The change of impedance can be changed into voltage signal U, and different displacements corresponds to different voltage signals.
For example, Fig. 7 A are device for detecting axial displacement operation principle schematic diagram in one embodiment of the invention, Fig. 7 B are figure
The enlarged drawing of encircled portion in 7A, if the rotating shaft 710 of magnetic suspension bearing rotor is only axially producing displacement z, the first electric whirlpool
The output of flow sensor 720 will not change, and now, the output voltage of the second current vortex sensor 730 is:Uz=k2X, wherein,
X is the second current vortex sensor 730 and the distance change amount on inclined-plane, unit mm, UzRepresent the defeated of the second current vortex sensor 730
Go out voltage, unit V, k2For the sensitivity parameter of the second current vortex sensor 730, unit V/mm.Rotor as seen from Figure 7
Axial displacement z and x relation be that z=x/tan φ, z unit is mm, φ is the inclination angle of inclined plane.
If the rotating shaft 710 of magnetic suspension bearing rotor is radially also producing movement, the output change of the second current vortex sensor 730
Change is produced by the axial displacement of rotor and radial displacement superposition, now just needs to realize by the first current vortex sensor 720
Axial displacement and the decoupling of radial displacement.The output of second current vortex sensor 730 is:Uz=k2(x+y), y represents that rotor is non-inclines
The radial displacement on inclined-plane, if the sensitivity parameter of the first current vortex sensor 720 is k1, output voltage is:Ur=k1y。
Above simultaneous will be carried out by each formula, it can be deduced that the axial displacement of the rotating shaft 710 of the magnetic suspension bearing rotor of rotor
For
If 710 generation radial displacements of the rotating shaft of magnetic suspension bearing rotor,Still set up, this
Shi YouAxial displacement is 0.
In an embodiment of the present invention, the radial direction position in non-inclined face of the first sensor based on magnetic suspension bearing rotor is passed through
Move output first voltage signal Ur, the electricity of radial displacement output second of inclined plane of the second sensor based on magnetic suspension bearing rotor
Press signal Uz, and using according to formulaCalculate the axial displacement of magnetic suspension bearing rotor.Footpath can be utilized
The calculating of axial displacement is realized to displacement.Also, solves conventional axial displacement because technique and assembling factor bring detection error
The problem of.In addition, the present invention is because be not provided with detection plate, while do not set sensor in the end face of working shaft, therefore be advantageous to
Sensor integrationization processing, also simplify the structure of rotor, is easily installed.In the case of the limited space of rotating machinery axial direction,
A part of space can be saved.
Figure 10 is the structural representation of one embodiment of the rotor of magnetic suspension bearing of the present invention.
1010 for magnetic suspension bearing rotor inclined plane, 1020 for magnetic suspension bearing rotor non-inclined face, 1030
For the rotating shaft of the rotor of magnetic suspension bearing.Inclined plane can be the inclined plane of depression, or raised inclined plane.At one
In embodiment, the axial length L of the inclined plane of magnetic suspension bearing rotor is more than the maximum axial displacement of magnetic suspension bearing rotor.Incline
The inclination angle phi on inclined-plane is preset value, and it is appropriate to keep, inclination angle for example can be 0 °~90 °, preferred scope be 10 °~80 °,
30 °~60 °, such as can be using value as 30 °, 40 °, 43 °, 45 °, 48 °, 50 °, 55 °, 60 °.
In one embodiment, magnetic suspension bearing of the invention also includes device for detecting axial displacement.Wherein, axial displacement
Detection means is described in detail in the various embodiments described above, is no longer expanded on further herein.
In this embodiment, inclined plane is set on the axial surface of magnetic suspension bearing rotor.Carrying out axial displacement inspection
During survey, it is only necessary to two sensors, the radial displacement output electric signal in one of sensor detection non-inclined face, another sensing
The radial displacement output electric signal of device detection inclined plane, further according to two electric signals and the inclination angle of inclined plane, calculates magnetic suspension
The axial displacement of the rotor of bearing.The structure of rotor is simplified, solves conventional axial displacement because technique and assembling factor are brought
The problem of detection error.In addition, the present invention is not provided with detection plate when detecting axial displacement, while not in the end face of working shaft
Sensor is set, therefore is advantageous to sensor integrationization processing, structure axial space is increased, is easily installed.
So far, the present invention is described in detail.In order to avoid the design of the masking present invention, it is public that this area institute is not described
Some details known.Those skilled in the art as described above, can be appreciated how to implement technology disclosed herein completely
Scheme.
The method and device of the present invention may be achieved in many ways.For example, can by software, hardware, firmware or
Person's software, hardware, firmware any combinations come realize the present invention method and device.The said sequence of the step of for method
Order described in detail above is not limited to merely to illustrate, the step of method of the invention, it is special unless otherwise
Do not mentionlet alone bright.In addition, in certain embodiments, the present invention can be also embodied as recording program in the recording medium, these programs
Including the machine readable instructions for realizing the method according to the invention.Thus, the present invention also covering storage is used to perform basis
The recording medium of the program of the method for the present invention.
Although some specific embodiments of the present invention are described in detail by example, the skill of this area
Art personnel it should be understood that above example merely to illustrating, the scope being not intended to be limiting of the invention.The skill of this area
Art personnel to above example it should be understood that can modify without departing from the scope and spirit of the present invention.This hair
Bright scope is defined by the following claims.
Claims (13)
- A kind of 1. device for detecting axial displacement, it is characterised in that the axial surface of detected element has inclined plane and non-inclined face, Described device includes:First sensor, the first electric signal is exported for the radial displacement based on the detected element non-inclined face;Second sensor, the second electric signal is exported for the radial displacement based on the detected element inclined plane;Axial displacement computing unit, for being tilted according to first electric signal, second electric signal and the detected element The inclination angle in face, calculate the axial displacement of the detected element;Wherein, the first sensor is arranged on above the detected element non-inclined face, and the second sensor is arranged on institute State above detected element inclined plane.
- 2. device according to claim 1, it is characterised in that first electric signal and second electric signal are voltage Signal;The axial displacement computing unit is used for according to formulaCalculate the axial displacement of the detected element;Wherein, UrFor first electric signal, UzFor second electric signal, φ is the inclination angle of the inclined plane, k1To be described The sensitivity parameter of first sensor, k2For the sensitivity parameter of the second sensor.
- 3. device according to claim 1 or 2, it is characterised in that the first sensor is pacified with the second sensor On probe ring, and the mounting distance of the probe and the probe of the second sensor of the first sensor is more than threshold value;And/orThe probe of the first sensor is directed at the circle central axis of probe ring, and installation direction with the probe of second sensor Unanimously.
- 4. device according to claim 1 or 2, it is characterised in that the axial length of the inclined plane is more than described tested The maximum axial displacement of element;And/orThe inclination angle of the detected element inclined plane is preset value.
- 5. device according to claim 4, it is characterised in that the inclination angle of the detected element inclined plane is 0 °~90 °.
- 6. device according to claim 1 or 2, it is characterised in that the detected element is the rotor of magnetic suspension bearing;OrThe first sensor and second sensor are current vortex sensor.
- A kind of 7. axial displacement detection method, it is characterised in that the axial surface of detected element has inclined plane and non-inclined face, Methods described includes:Receive the first electric signal of radial displacement output of the first sensor based on the detected element non-inclined face;Receive the second electric signal of radial displacement output of the second sensor based on the detected element inclined plane;According to the inclination angle of first electric signal, second electric signal and the detected element inclined plane, the quilt is calculated Survey the axial displacement of element;Wherein, the first sensor is arranged on above the detected element non-inclined face, and the second sensor is arranged on institute State above detected element inclined plane.
- 8. according to the method for claim 7, it is characterised in that first electric signal and second electric signal are voltage Signal;The step of axial displacement for calculating the detected element, includes:According to formulaCalculate the axial displacement of the detected element;Wherein, UrFor first electric signal, UzFor second electric signal, φ is the inclination angle of the inclined plane, k1To be described The sensitivity parameter of first sensor, k2For the sensitivity parameter of the second sensor.
- 9. the method according to claim 7 or 8, it is characterised in that the first sensor is pacified with the second sensor On probe ring, and the mounting distance of the probe and the probe of the second sensor of the first sensor is more than threshold value;And/orThe probe of the first sensor is directed at the circle central axis of probe ring, and installation direction with the probe of second sensor Unanimously.
- 10. the method according to claim 7 or 8, it is characterised in that the axial length of the inclined plane is more than described tested The maximum axial displacement of element;And/orThe inclination angle of the detected element inclined plane is preset value.
- 11. according to the method for claim 10, it is characterised in that the inclination angle of the detected element inclined plane be 0 °~ 90°。
- 12. the method according to claim 7 or 8, it is characterised in that the detected element is the rotor of magnetic suspension bearing;OrThe first sensor and second sensor are current vortex sensor.
- A kind of 13. magnetic suspension bearing, it is characterised in that including:Rotor;The axial surface of wherein described rotor is provided with inclined plane and non-inclined face;WithDevice for detecting axial displacement as described in claim 1-6 is any.
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