CN105334572A - Silicon-based horizontal groove type minicircle polarization multiplexing and demultiplexing device - Google Patents
Silicon-based horizontal groove type minicircle polarization multiplexing and demultiplexing device Download PDFInfo
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- CN105334572A CN105334572A CN201510941274.5A CN201510941274A CN105334572A CN 105334572 A CN105334572 A CN 105334572A CN 201510941274 A CN201510941274 A CN 201510941274A CN 105334572 A CN105334572 A CN 105334572A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/105—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type having optical polarisation effects
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Abstract
The invention discloses a silicon-based horizontal groove type minicircle polarization multiplexing and demultiplexing device which comprises a substrate, a cladding, an input waveguide, a transverse electric mode output waveguide, a transverse magnetic mode output waveguide and a horizontal groove type minicircle structure minicircle. The substrate is located at the bottom of the cladding. The input waveguide, the transverse electric mode output waveguide, the transverse magnetic mode output waveguide and the horizontal groove type minicircle adheres to the surface of the substrate. The horizontal groove type minicircle sequentially comprises a bottom dielectric waveguide ring, a low refractive index material filling ring and an upper dielectric waveguide ring from bottom to top. The horizontal groove type minicircle is located among the input waveguide, the transverse electric mode output waveguide and the transverse magnetic mode output waveguide. The silicon-based horizontal groove type minicircle polarization multiplexing and demultiplexing device has the advantages of having excellent polarization multiplexing and demultiplexing performance and being compact in structure, high in working efficiency, low in manufacturing difficulty, relatively low in cost and capable of being compatible with a wavelength division multiplexing (WDM) based on a minicircle resonator.
Description
Technical field
The present invention relates to integrated optics technique field, specifically a kind of novel silica-based level trough ring structure that declines has palarization multiplexing and demultiplexing function.
Background technology
In recent years, along with the fast development of integreted phontonics technology, the size of photonic device reduces gradually, and CMOS technology that is with low cost, technology maturation is widely applied to design and the making field of photonic device.Utilize the material of high index-contrast as silicon on insulation course, can the integrated level of greatly improved sheet glazing device.It is the demand that the current light network capacity of reply and bandwidth increase sharply simultaneously, polarization multiplexing has been widely used in long-distance optical communication network, has greatly improved optical communication capability, but in SOC (system on a chip), polarization multiplexing and also need further research with the fusion of other technology.
Palarization multiplexing and demodulation multiplexer are as the critical component in polarisation multiplex system, have great importance in raising system transmission capacity and act on, its cardinal principle and function are under specific wavelength condition, exported respectively by the light in signal transmission with different polarization pattern or carried out by the input signal of different port multiplexingly transmitting in bus waveguide at different waveguide port.Because the pattern with different polarization states can simultaneously communicating optical signals, by effectively can promote transmission capacity and the bandwidth of light network to the multiplexing of different polarization states pattern and demultiplexing.
Silicon-based micro ring resonator has superior spectral characteristic and polarization characteristic, be widely studied and be applied to modulator, wave filter, light open the light, recovery is used and in demodulation multiplexer, and silicon-based micro ring resonator type wavelength-division multiplex (WDM) transmission system is considered to the solution that chip internal light network of future generation has prospect, have compact package, low-power consumption and with the advantage such as CMOS technology is compatible.Utilize the difference of silica-based waveguides TE and TM mode characteristic and the significant wavelength of micro-ring resonator and polarization selectivity, pass through structure optimization, effective separation of different polarization states and the function of compound can be realized, corresponding to demultiplexing and the multiplexing function of different polarization states pattern.For this reason, based on micro-ring resonant cavity, in conjunction with the difference of polarization mode characteristic, design compact conformation, superior performance and also can seem particularly important with the palarization multiplexing of existing upper micro annular resonant cavity type WDM transmission system compatible and demodulation multiplexer.
Summary of the invention
Technical matters: in order to solve the deficiencies in the prior art, the present invention proposes a kind of silica-based level trough and to decline ring-like palarization multiplexing and demodulation multiplexer, separation and the complex function of polarization mode can be realized by the resonance coupling declined between ring of straight wave guide and level trough, integrated level is higher simultaneously, overcomes the deficiencies in the prior art.
Technical scheme: a kind of silica-based level trough declines ring palarization multiplexing and demodulation multiplexer, comprises substrate and covering, comprises input waveguide, transverse electric mode output waveguide, transverse magnetic wave output waveguide and level trough and to decline ring;
Described substrate is positioned at covering inner bottom part, and input waveguide, transverse electric mode output waveguide, transverse magnetic wave output waveguide and the level trough ring that declines is positioned over types of flexure and is close to substrate surface; The level trough ring that declines comprises bottom dielectric waveguide ring, low-index material ring type filling and upper dielectric waveguide ring from bottom to top successively;
Described waveguide is silica-based waveguides, and wherein input waveguide and transverse electric mode output waveguide lead directly to and be connected to form input and output waveguide, and level trough declines ring between the input waveguide and input and output waveguide of parallel placement.
Further, the decline bottom dielectric waveguide ring of ring of described input waveguide, transverse electric mode output waveguide, transverse magnetic wave output waveguide, level trough is all identical with the height of upper dielectric waveguide ring.
Further, the decline bottom dielectric waveguide ring of ring and the height of upper dielectric waveguide ring of described input waveguide, transverse electric mode output waveguide, transverse magnetic wave output waveguide, level trough is 220nm to 270nm.
Further, the height of described low-index material ring type filling is 80nm to 120nm.
Further, the refractive index of described low-index material ring type filling be less than 1.8 material.
Further, the decline bottom dielectric waveguide ring of ring and upper dielectric waveguide ring of described input waveguide, transverse electric mode output waveguide, transverse magnetic wave output waveguide, level trough all adopts refractive index to be greater than the material of 1.8.
The present invention also provides a kind of and to decline ring palarization multiplexing and Deplexing method according to decline silica-based level trough that ring palarization multiplexing and demodulation multiplexer realize of silica-based level trough, demultiplexing functional realiey step is as follows: from the input port input optical signal of input waveguide, then the output port of transverse electric mode output waveguide exports the output port output transverse magnetic wave light signal TM polarization mode of transverse electric mode light signal TE polarization mode and transverse magnetic wave output waveguide;
Multiplexing functional realiey step is as follows: inputted by the output port of transverse electric mode light signal TE polarization mode from transverse electric mode output waveguide, transverse magnetic wave light signal TM polarization mode inputs from the output port of transverse magnetic wave output waveguide, then the input port of input waveguide exports the light signal after palarization multiplexing.
Beneficial effect: compared with prior art, technical scheme of the present invention has following beneficial effect:
1, compact conformation, cost of manufacture is cheap.Input, output waveguide be conventional nano wire decline with level trough waveguide bottom Medium Wave Guide ring in ring, upper dielectric waveguide ring height identical, and silicon materials on the insulation course adopting high index-contrast, make its physical dimension have higher compactedness.Meanwhile, due to silica-based technical maturity, cost is lower, easily integrated with other photonic device with platform, compatible high.
2, manufacture difficulty is low, reliability is high.In the present invention, physical dimension is in micron and sub-micrometer scale, and the CMOS technology line of technology maturation can be utilized to make.Utilize the technical standard of ripe CMOS technology, its reliability can be ensured fully simultaneously.
3, easy to use, expansion flexibly.The mode set forth in technical solution of the present invention is mainly used in the function designing polarization mode demultiplexing; The symmetric form of structure based, only by the exchange function of input, output port, need can realize the function that polarization mode is multiplexing, have higher use dirigibility.In addition, this invention is easy to other micro-ring resonator cascade to further expand using function.
4, palarization multiplexing and demultiplexing efficiency high.Relative to common palarization multiplexing and demodulation multiplexer, the spectral characteristic that the present invention utilizes micro-ring resonator superior and polarization characteristic, select micro-ring resonator as the core component of palarization multiplexing and demultiplexing, can not only be compatible with micro annular resonant cavity type wdm system on sheet, and effectively can improve the efficiency of palarization multiplexing and demultiplexing, promote the transmission capacity of light network.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention's first example.
Fig. 2 is the cross-sectional structure schematic diagram at input and output waveguide and micro-ring place in example of the present invention.
Fig. 3 is the principal component mode distributions figure of transverse electric mode in input waveguide structure in the present invention.
Fig. 4 is the principal component mode distributions figure of transverse magnetic wave in input waveguide structure in the present invention.
Fig. 5 is that in the present invention, level trough declines the principal component mode distributions figure of transverse electric mode in ring cross section.
Fig. 6 is that in the present invention, level trough declines the principal component mode distributions figure of transverse magnetic wave in ring cross section.
The transfer rate at palarization multiplexing and demodulation multiplexer output waveguide 2 place and the relation of operation wavelength in Fig. 7 the present invention.
The transfer rate at palarization multiplexing and demodulation multiplexer output waveguide 3 place and the relation of operation wavelength in Fig. 8 the present invention.
The transmission mode field pattern of transverse electric mode in Fig. 9 the present invention, wherein, horizontal ordinate represents the size of transmission direction, unit: micron (μm); Ordinate represents horizontal size, unit: micron (μm).
The transmission mode field pattern of transverse magnetic wave in Figure 10 the present invention, wherein, horizontal ordinate represents the size of transmission direction, unit: micron (μm); Ordinate represents horizontal size, unit: micron (μm).
In figure: input waveguide 1, transverse electric mode output waveguide 2, transverse magnetic wave output waveguide 3, level trough decline ring 4, substrate 5, covering 6.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further explained.
As shown in Figures 1 and 2, a kind of silica-based level trough declines the palarization multiplexing of ring and demodulation multiplexer, comprises substrate 5 and covering 6, it is characterized in that: comprise the input waveguide 1 of light signal, transverse electric mode output waveguide 2, transverse magnetic wave output waveguide 3 and level trough and to decline ring 4;
Described palarization multiplexing and demodulation multiplexer structure, substrate 5 is positioned at covering 6 inner bottom part, and input waveguide 1, transverse electric mode output waveguide 2, transverse magnetic wave output waveguide 3 and the level trough ring 4 bottom dielectric waveguide ring 41 that declines is close to the upper surface of substrate 5; The level trough ring 4 that declines comprises bottom dielectric waveguide ring 41, low-index material ring type filling 42 and upper dielectric waveguide ring 43 from bottom to top successively;
Described waveguide is silica-based waveguides, and wherein input waveguide 1 is connected with transverse electric mode output waveguide 2 is straight-through, and level trough declines ring 4 at input waveguide 1, between transverse electric mode output waveguide 2 and transverse magnetic wave output waveguide 3.
Described input waveguide 1, transverse electric mode output waveguide 2, transverse magnetic wave output waveguide 3 and level trough decline ring 4 bottom dielectric waveguide ring 41, upper dielectric waveguide ring 43 height all identical, between 220nm to 270nm.
The refractive index of described low-index material ring type filling 42 be less than 1.8 material.Height is between 80nm to 120nm.
Concrete, the transmission feature of light signal in the palarization multiplexing and demodulation multiplexer of said structure is as follows: wherein two silica-based nanowires are used for input optical signal, export transverse electric mode light signal TE mould, export transverse magnetic wave light signal TM mould, and level trough declines ring structure between constrained input waveguide.Decline based on level trough wavelength, the polarization independent relation of mode characteristic resonant cavity of ring, and under specific resonance wavelength condition, TM mould can be exported from waveguide 3 port by coupling and resonance effect; Meanwhile, TE mould does not mate and causes coupling efficiency lower due to the decline mode characteristic of loops of mode characteristic and the level trough inputting silica-based waveguides, therefore directly exports from waveguide 2 port, and occurs without obvious relaxation phenomenon.Therefore, functionally achieve the polarization mode demultiplexing at a particular wavelength of light signal, by adjusting and optimizing the parameters such as waveguide dimensions, micro-ring radius, waveguide separation distance, as duct width be 400nm, duct height is 250nm, micro-ring radius is 3.45 μm, the waveguide separation distance of input and output waveguide and micro-ring is 120nm, can be implemented in the function of the multiplexing and demultiplexing of 1.55 mum wavelength place polarization modes.In addition, structure has higher symmetry, and input/output port has larger selectivity, can promote its dirigibility and extendability, promotes the message capacity of light network.Outstanding advantage of the present invention is that the efficiency of palarization multiplexing demultiplexing is high, compatible with the wdm system based on micro-ring, and compact conformation, is easy to integrated.
Above-mentioned palarization multiplexing demodulation multiplexer material all adopts silicon materials on insulation course, adopts the CMOS technology of existing maturation to make.Have the feature of high index-contrast, wherein said input waveguide 1, transverse electric mode output waveguide 2, transverse magnetic wave output waveguide 3 all adopt high-index material silicon (Si) with the micro-ring 41,43 of Medium Wave Guide, and refractive index is greater than 1.8.The refractive index of low-index material ring type filling 42 be less than 1.8 material, substrate 5 and covering 6 adopt low-index material, as silicon dioxide (SiO
2).
Fig. 3 and Fig. 4 is respectively the principal component mode distributions of transverse electric mode and transverse magnetic wave in input waveguide structure, and for silica-based waveguides, TE and TM mould electric field energy is mainly distributed in high-index regions, i.e. waveguide core layer forms stable transmission mode in waveguide.Wherein, transverse electric mode is different from the polarization direction of transverse magnetic wave.Fig. 5 and Fig. 6 is respectively level trough and declines the principal component mode distributions of transverse electric mode and transverse magnetic wave in ring structure cross section, and transverse electric mode is mainly distributed in core region, and transverse magnetic wave is mainly distributed in the packed layer of low-refraction.By the structural parameters of optimized transmission waveguide, the effective refractive index coupling that transverse magnetic wave can be made to decline in ring structure at conventional waveguide and level trough, through resonance coupling, exports at output waveguide 3 port.Meanwhile, transverse electric mode differs greatly in above-mentioned waveguiding structure, and output waveguide 2 port directly exports, thus achieves the demultiplexing of polarization mode.
Fig. 7 and Fig. 8 is the transfer rate of palarization multiplexing and demodulation multiplexer output waveguide 2,3 port and the relation of operation wavelength.As can be seen from the figure, by optimizing the parameters such as waveguide dimensions, micro-ring radius, spacing distance, as duct width be 400nm, duct height is 250nm, micro-ring radius is 3.45 μm, the waveguide separation distance of input and output waveguide and micro-ring is 120nm, TM pattern can be made to produce obvious resonance phenomena at 1.55 μm of places, be coupling in output waveguide 3 port by resonance and export; And the mode characteristic of corresponding TE mould has larger difference, can not produce with the micro-ring of slot type in coupled zone and effectively be coupled, will export at waveguide port 2 place, thus realize the function of polarization demultiplexing.Meanwhile, the free spectral range scope calculated is about 27nm.According to micro-ring resonant coupled wave theory, coupling coefficient has following formula:
κ＝[(π
2-4δ
2l
c 2)/(4l
c 2)]
1/2(1)
In formula (1), δ is that conventional silica-based nanowire and level trough decline the difference of propagation constant of ring structure, l
cfor mode coupling length, can be obtained by full vector analysis and mode computation, for the TE mould of input, coupling coefficient is lower, and resonance characteristic is not obvious, will export from output waveguide port 2 port; For the TM mould of input, coupling coefficient is higher, easily produces obvious resonance coupling effect, and can export from output waveguide port 3 port by optimizing, thus realize polarization demultiplexing, corresponding transmission mode field pattern is as shown in Fig. 9,10.
In addition, based on the symmetry of structure in the present invention, when input TE polarization mode inputs from waveguide port 2, when TM polarization mode inputs from waveguide port 3, the signal of compound will export from waveguide port 1, effectively can realize the palarization multiplexing function of light signal.Therefore, the present invention can realize the function of palarization multiplexing and demultiplexing on sheet as required, has higher dirigibility and set expandability, is convenient to integrated.
Foregoing is only the preferred embodiment of the present invention; it should be pointed out that the those of ordinary skill for technical field, under the premise without departing from the principles of the invention; can also make some improvement and modification, these improve and modify and also should be considered as protection scope of the present invention.
Claims (7)
1. a silica-based level trough declines ring palarization multiplexing and demodulation multiplexer, comprise substrate (5) and covering (6), it is characterized in that, comprise input waveguide (1), transverse electric mode output waveguide (2), transverse magnetic wave output waveguide (3) and level trough and to decline ring (4);
Described substrate (5) is positioned at covering (6) inner bottom part, input waveguide (1), transverse electric mode output waveguide (2), transverse magnetic wave output waveguide (3) and level trough decline ring (4) be positioned over substrate (5) top be close to substrate (5) surface; The level trough ring (4) that declines comprises bottom dielectric waveguide ring (41), low-index material ring type filling (42) and upper dielectric waveguide ring (43) from bottom to top successively;
Described waveguide is silica-based waveguides, wherein input waveguide (1) and transverse electric mode output waveguide (2) are straight-through is connected to form input and output waveguide, and the level trough ring (4) that declines is positioned between the input waveguide (1) of parallel placement and input and output waveguide.
2. a kind of silica-based level trough as claimed in claim 1 declines ring palarization multiplexing and demodulation multiplexer, it is characterized in that, the decline bottom dielectric waveguide ring (41) of ring (4) of described input waveguide (1), transverse electric mode output waveguide (2), transverse magnetic wave output waveguide (3), level trough is all identical with the height of upper dielectric waveguide ring (43).
3. a kind of silica-based level trough as claimed in claim 2 declines ring palarization multiplexing and demodulation multiplexer, it is characterized in that, the decline bottom dielectric waveguide ring (41) of ring (4) and the height of upper dielectric waveguide ring (43) of described input waveguide (1), transverse electric mode output waveguide (2), transverse magnetic wave output waveguide (3), level trough is 220nm to 270nm.
4. a kind of silica-based level trough as claimed in claim 3 declines ring palarization multiplexing and demodulation multiplexer, and it is characterized in that, the height of described low-index material ring type filling (42) is 80nm to 120nm.
5. a kind of silica-based level trough as claimed in claim 1 declines ring palarization multiplexing and demodulation multiplexer, it is characterized in that, the refractive index of described low-index material ring type filling (42) be less than 1.8 material.
6. a kind of silica-based level trough as claimed in claim 1 declines ring palarization multiplexing and demodulation multiplexer, it is characterized in that, described input waveguide (1), transverse electric mode output waveguide (2), transverse magnetic wave output waveguide (3), level trough decline the material that the bottom dielectric waveguide ring (41) of ring (4) and upper dielectric waveguide ring (43) all adopt refractive index to be greater than 1.8.
7. utilize the arbitrary described a kind of silica-based level trough of claim 1-6 to decline silica-based level trough that ring palarization multiplexing and demodulation multiplexer realize declines ring palarization multiplexing and Deplexing method, it is characterized in that, demultiplexing functional realiey step is as follows: from the input port input optical signal of input waveguide, then the output port of transverse electric mode output waveguide exports the output port output transverse magnetic wave light signal TM polarization mode of transverse electric mode light signal TE polarization mode and transverse magnetic wave output waveguide;
Multiplexing functional realiey step is as follows: inputted by the output port of transverse electric mode light signal TE polarization mode from transverse electric mode output waveguide, transverse magnetic wave light signal TM polarization mode inputs from the output port of transverse magnetic wave output waveguide, then the input port of input waveguide exports the light signal after palarization multiplexing.
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