CN105327900A - Method for recovering first mirror reflectivity through magnetic enhanced radio frequency plasma - Google Patents
Method for recovering first mirror reflectivity through magnetic enhanced radio frequency plasma Download PDFInfo
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- CN105327900A CN105327900A CN201510736107.7A CN201510736107A CN105327900A CN 105327900 A CN105327900 A CN 105327900A CN 201510736107 A CN201510736107 A CN 201510736107A CN 105327900 A CN105327900 A CN 105327900A
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- mirror
- radio frequency
- magnetic
- specular reflectivity
- frequency plasma
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
Abstract
The invention discloses a method for recovering first mirror reflectivity through magnetic enhanced radio frequency plasma. The method includes the steps that firstly, a vacuum chamber is closed, a cooling water valve and a gas valve are opened, a mechanical pump and a molecule pump are opened, vacuumizing is conducted till the pressure ranges from 10<2> Pa, a radio frequency power source, a gas flowmeter and the like are started, and the discharging preparation work is completed; the parameters such as radio frequency power and gas flow are adjusted to obtain the stable magnetic enhanced radio frequency plasma so as to clean the surface deposition layer of a first mirror; meanwhile, a laser is opened, and laser energy after first mirror reflection is recorded through a joule flowmeter; if the laser energy rises gradually, it is indicated that the first mirror reflectivity is in the recovering process after the stained first mirror is cleaned, and cleaning continues; otherwise, it is indicated that the first mirror reflectivity is in the worsen state, the parameters such as the plasma parameter are adjusted, and re-cleaning is conducted; and if the laser energy is maintained within a certain range, it is indicated that the surface impurity deposition layer of the first mirror is cleaned, and cleaning is stopped.
Description
Technical field
The present invention relates to Tokamak type magnetic confinement nuclear fusion device field, specifically a kind of magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity.
Background technology
In Tokamak type magnetic confinement nuclear fusion device, the first wall and plasma running status obtain and monitor one of most important means is various normal optical diagnostic systems.Along with the increase of unit scale and the raising of plasma operational factor, adopt optical mirror to substitute silica-based window in traditional optical diagnostic system, transmitting diagnostic signal, reduce radiation-induced absorption and radiation-induced fluorescent effect to the impact of silica-based window transmission rate.Because these speculums are directly in the face of plasma, be referred to as the first mirror.
Tokamak run duration, first mirror suffers the bombardment of energetic ion and charge-exchange neutral atom etc., the radiation of various ray, and wall processing element deposits and sputters the processes such as wall material deposits again, its optical reflectivity sharply worsens, and service life shortens rapidly.Can this directly has influence on duty and the overall performance of dependent diagnostic system cloud gray model, also determine various normal optical diagnostic system and be applied in each large-scale tokamak device.Tokamak Plasma run duration, mirror surface deposition is the one of the main reasons causing the first specular reflectivity to worsen.Adopt the methods such as heating, air blowing and mechanical shutter can alleviate the sedimentary deposit on the first mirror surface to a certain extent, reduce sedimentary deposit to effects such as the absorption of light and interference, prevent the first specular reflectivity severe exacerbation; Adopt laser cleaning and radio frequency and Ecr plasma to remove the first mirror surface deposits, recover the first specular reflectivity.But there is following shortcoming in these methods: one, heating and air blowing are only given prominence to the inhibition of the first hydrocarbon sedimentary deposit in mirror surface, and present stage, tokamak plasma facing material was gradually to metal transfer, and it is undesirable to the inhibition of metal impurities; Two, the first mirror is inevitable in the course of the work will directly be exposed in plasma, makes its surface occur sedimentary deposit; Three, the sedimentary deposit on the first mirror surface is removed in laser cleaning point by point scanning, and cleaning speed is comparatively slow, and the first specular reflectivity is undesirable at visible light wave range recovery situation; Four, Ecr plasma equipment is more complicated, is unfavorable for realizing situ cleaning in the future, and radio frequency plasma scavenging period is longer, and the first specular reflectivity recovers slower; Five, suitable plasma parameter cannot be selected according to the first mirror sedimentary deposit cleaning real-time status.Therefore, need one badly can realize large area, fast and remove the first mirror surface deposits equably, have the method for efficient recovery first specular reflectivity.
summary of the inventionthe object of this invention is to provide a kind of magnetic and strengthen the method that radio frequency plasma recovers the first specular reflectivity, magnetic is utilized to strengthen the feature of radio frequency plasma field controllable plasma motion, strengthen the interaction of plasma and the first mirror sedimentary deposit, realize large area, fast, clean the first mirror surface deposits equably, recover the first specular reflectivity, and the real-time monitoring completed the first specular reflectivity, lower to solve prior art first mirror sedimentary deposit cleaning efficiency, reflectivity recovers undesirable problem.
In order to achieve the above object, the technical solution adopted in the present invention is:
Magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: comprise the following steps:
Steps A: working gas is connected to magnetic and strengthens radio frequency plasma equipment, and be mounted on sample target platform by the first mirror sample after getting dirty, ensures that target platform overcoat and sample are open-circuit condition;
Step B: close vacuum chamber, open cooling water and gas valve, open mechanical pump and molecular pump subsequently, be evacuated to 10
-2during below Pa, open radio-frequency power supply and gas flowmeter etc., complete electric discharge preparation;
Step C: regulate the stable magnetic of the different air pressure of the gain of parameter such as radio-frequency power, gas flow and sample automatic bias to strengthen radio frequency plasma, plasma clean first mirror surface impurity;
Step D: meanwhile, opens laser instrument, and adopts the laser energy of joule cmf record after the first mirror reflection; If laser energy raises gradually, illustrate that the first mirror first specular reflectivity after cleaning of getting dirty is in recovery process, cleaning continues; Otherwise, then show that the first specular reflectivity is in an aggravated form, then repeat step C, D; If laser energy is maintained within a certain range, then show that the first mirror surface impurity sedimentary deposit has been removed complete, then stop cleaning.
Described magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: in described steps A, working gas is inert gas, as: He, Ne, Ar etc., and become component selections working gas kind according to first mirror sample material and the first mirror sedimentary deposit.
Described magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: in described step B, cooling water is connected with sample target platform in mechanical pump, molecular pump and vacuum chamber.
Described magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: in described step B, mechanical pump is evacuated to 10-20Pa, opens molecular pump and be evacuated to 10
-2pa-10
-4pa.
Described magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: in described step C, regulate vent valve and gas flow to vacuum pressure to be 1Pa – 2Pa, regulate radio-frequency power and radio-frequency power supply adaptation subsequently, RF-reflective power is made to be 0, produce and stablize magnetic enhancing radio frequency plasma, again by Waste gate to initial position, recover gas flow and radio-frequency power to the required numerical value of cleaning.
Described magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: Real-Time Monitoring first specular reflectivity in described step D, its method is: open laser instrument, make laser light source strengthen radio-frequency apparatus glass window by magnetic, after the first mirror surface reflection, adopt the laser energy of joule cmf record after the first mirror reflection, and compared with Laser output energy, if ratio raises, show that the first specular reflectivity raises, then continue cleaning; Ratio reduces, and shows that the first specular reflectivity reduces, then repeats step C, D; Ratio is constant, and show that the first mirror surface deposits has been removed, reflectivity remains unchanged, then terminate cleaning.
Described magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: a kind of motion of the radio frequency plasma utilizing Magnetic control to produce, strengthen the interaction of plasma and the first mirror surface impurity material, increase the method for the first mirror sedimentary deposit cleaning and reflectivity regeneration rate.
Magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: a kind of can Real-Time Monitoring first specular reflectivity variation tendency in the first mirror sedimentary deposit cleaning, reflectivity recovery process, and adjust the method for suitable radio frequency plasma technological parameter.
Magnetic of the present invention strengthens the method step science that radio frequency plasma recovers the first specular reflectivity, rationally, compared with prior art, there is monitoring the first specular reflectivity in real time, and adjust suitable radio frequency plasma technological parameter according to the situation of change of the first specular reflectivity in cleaning process; Simultaneously, the motion of the radio frequency plasma utilizing Magnetic control to produce, to strengthen the interaction of plasma and the first mirror surface impurity material, increase by the first cleaning of mirror sedimentary deposit and reflectivity regeneration rate, realize large area, fast and remove the first mirror surface impurity sedimentary deposit uniformly, the advantages such as the first specular reflectivity are recovered.
Accompanying drawing explanation
Fig. 1 is the structural representation that magnetic strengthens that radio frequency plasma recovers the device of the first specular reflectivity.
Fig. 2 is the method flow diagram that magnetic of the present invention strengthens that radio frequency plasma recovers the first specular reflectivity.
Detailed description of the invention
As shown in Figure 1, in the present invention, the first mirror 1 to be cleaned is placed in target platform overcoat 17, and then entirety puts into vacuum chamber, vacuum chamber sidewall is arranged vacuum chamber hatch door 3.Adopt radio-frequency power supply 13 to be discharged in vacuum chamber by radio frequency adaptation 14, adopt laser instrument 16 to launch laser to the first mirror 1 to be cleaned in vacuum chamber, and adopt joule flowmeter 15 to measure the first mirror 1.In target platform overcoat 17, pass into cooling water by water cooling tube 2 simultaneously, vacuum chamber one end is communicated with air inlet pipe, air inlet pipe is provided with mass flow controller 4, gas valve 5, and mass flow controller 4 is connected with mass flow display 6, vacuum chamber bypass is also communicated with and is provided with vent valve 7 and push-pull valve 8, and vent valve 7 bypass is communicated with molecular pump 11, mechanical pump 12 successively.Gas pressure in vacuum adopts vacuum meter 9 to measure, and molecular pump 11 is powered by molecular pump power source 10.
As shown in Figure 2, magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, comprises the following steps:
Steps A: working gas is connected to magnetic and strengthens radio frequency plasma equipment, and be mounted on sample target platform by the first mirror sample after getting dirty, ensures that target platform overcoat and sample are open-circuit condition;
Step B: close vacuum chamber, open cooling water and gas valve, open mechanical pump and molecular pump subsequently, be evacuated to 10
-2during Pa, open radio-frequency power supply and gas flowmeter etc., complete electric discharge preparation;
Step C: regulate the stable magnetic of the different air pressure of the gain of parameter such as radio-frequency power, gas flow and sample automatic bias to strengthen radio frequency plasma, plasma clean first mirror surface impurity;
Step D: meanwhile, opens laser instrument, and adopts the laser energy of joule cmf record after the first mirror reflection; If laser energy raises gradually, illustrate that the first mirror first specular reflectivity after cleaning of getting dirty is in recovery process, cleaning continues; Otherwise, then show that the first specular reflectivity is in an aggravated form, then repeat step C, D; If laser energy is maintained within a certain range, then show that the first mirror surface impurity sedimentary deposit has been removed complete, then stop cleaning.
In steps A, working gas is generally inert gas, as: He, Ne, Ar etc., and become component selections working gas kind according to first mirror sample material and the first mirror sedimentary deposit.
In step B, cooling water is connected with sample target platform in mechanical pump, molecular pump and vacuum chamber.
In step B, mechanical pump is evacuated to about 10Pa, opens molecular pump and is evacuated to 10
-2about Pa.
Vent valve and gas flow to vacuum pressure is regulated to be about 1Pa in step C, regulate radio-frequency power and radio-frequency power supply adaptation subsequently, RF-reflective power is made to be 0, produce and stablize magnetic enhancing radio frequency plasma, again by Waste gate to initial position, recover gas flow and radio-frequency power to the required numerical value of cleaning.
Real-Time Monitoring first specular reflectivity in step D, its method is: open laser instrument, laser light source is made to strengthen radio-frequency apparatus glass window by magnetic, after the first mirror surface reflection, adopt the laser energy of joule cmf record after the first mirror reflection, and compared with Laser output energy, if ratio raises, show that the first specular reflectivity raises, then continue cleaning; Ratio reduces, and shows that the first specular reflectivity reduces, then repeats step C, D; Ratio is constant, and show that the first mirror surface deposits has been removed, reflectivity remains unchanged, then terminate cleaning.
A motion for the radio frequency plasma utilizing Magnetic control to produce, strengthens the interaction of plasma and the first mirror surface impurity material, increases the method for the first mirror sedimentary deposit cleaning and reflectivity regeneration rate.
A kind of can Real-Time Monitoring first specular reflectivity variation tendency in the first mirror sedimentary deposit cleaning, reflectivity recovery process, and adjust the method for suitable radio frequency plasma technological parameter.
Embodiment: magnetic strengthens the reflectivity that radio frequency plasma recovers laboratory plated film first mirror
The first mirror material that the present embodiment adopts is stainless steel, and mirror surface sputters plating carbon film pollution plot in laboratory conditions, thick about about the 100nm of carbon film, and after plated film, mirror surface is in buff, and the first mirror metallic luster loses.Because carbon film is to effects such as the absorption of light and interference, make the first specular reflectivity in visible-range, drop to 20% ~ 60% of initial value.The method described in this patent is adopted to carry out Recovery processing to this first specular reflectivity.
The first mirror after getting dirty is installed on the sample target platform shown in Fig. 1, after installing, the first mirror should be in position shown in 1, the resistance between the first mirror 1 and target platform overcoat 17 monitored by employing universal meter, universal meter display institute monitoring resistor is 0.5M Ω, show the first mirror and target platform cover insulation, mirror and target platform are open-circuit condition.
Device for screwing up vent valve 7, cuts out vacuum chamber hatch door 3, is connected by Ar gas pressure pan, and opens the gas valve 5 of pressure pan, open cooling water pipe 2 and push-pull valve 8 subsequently with device.Opening mechanical pump 12 for device vacuumizes, and gauge 9 display unit air pressure is about 10Pa, opens molecular pump power source 10, when molecular pump 11 is evacuated to 10
-2during Pa, in succession open radio-frequency power supply 13, mass flow controller 4, regulate push-pull valve 8 and record the position of push-pull valve 8, the control of quality of regulation flow indicator 6 to valve.
It is 6 that quality of regulation flow controller 4 makes mass flow display 6 show data, show now just with the speed of 6sccm (stardard-statecubiccentimetersperminute) logical Ar gas in vacuum chamber, air pressure 0.15Pa shown by record vacuum meter 9.It is 90 that quality of regulation flow controller 4 to mass flow controller 6 shows numerical value, and tightens push-pull valve 8, observes vacuum meter 9 and shows gas pressure in vacuum 2Pa.Increase the radio-frequency power that radio-frequency power supply 13 exports gradually, and coordinate the RF-reflective power regulated in radio-frequency power supply adaptation 14, make reflection power be 0 as far as possible.When increasing radio-frequency power supply power to 50W, successfully RF-reflective power is regulated to be 0.Now, can be observed through vacuum chamber hatch door 3 plasma light that first mirror sample 1 surface sends continuous uniform.Record the target platform automatic bias-120V in now radio-frequency power supply adaptation 14.Slowly regulate push-pull valve 8 to initial position subsequently, slow quality of regulation flow controller 4 to mass flow display is shown as 6, period observes RF-reflective power and target platform automatic bias in radio frequency adaptation 14 at any time, when RF-reflective power is greater than 0, and adjustment reflection power to 0.
In combination of argon plasma discharge process, the carbon film on plasma bombardment first mirror surface, flees from home position after C foreign atom is bombarded, or depart from the first mirror surface, or bombardment foreign atom, fled from home position by the foreign atom bombarded, produce cascading, thus reach cleaning performance.Magnetic strengthens in RF Plasma Discharge process, due to the existence in magnetic field, plasma initiatively can bombard first mirror sample 1 surface by the impact in magnetic field, and the speed making the first mirror surface C impurity flee from mirror surface by bombardment is faster, thus makes the first specular reflectivity resume speed faster.
Open laser instrument 16, adopt joule flowmeter 15 to record the laser energy after the first mirror 1 reflects, along with the carrying out of cleaning, joule flowmeter 15 recording laser energy slowly rise, show that now plasma physical efficiency recovers the first specular reflectivity effectively, cleaning should proceed.The energy of lasers recorded when joule flowmeter 15 is maintained within a certain range, and infers that now magnetic strengthens the carbon film that radio frequency plasma has effect cleaning first mirror 1 surface, has recovered the reflectivity of the first mirror 1.
Close laser instrument 16, the radio-frequency power to 0 of adjustment radio-frequency power supply 13, close radio-frequency power supply 13 and radio-frequency power supply adaptation 14, closure molecule pumping source 10, cooling first mirror sample 1, after about 1 hour, close mechanical pump 12 and cooling water pipe 2, adjustment mass flow display 6 to 0, closes mass flow controller 4, tighten gas valve 5, open push-pull valve 8, slowly open vent valve 7 and to make in vacuum chamber slowly gas injection, gauge 9 shows vacuum chamber internal gas pressure when being normal pressure, open vacuum chamber hatch door 3, take out first mirror sample 1 and carry out ex-post analysis.
Claims (8)
1. magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: comprise the following steps:
Steps A: working gas is connected to magnetic and strengthens radio frequency plasma equipment, and be mounted on sample target platform by the first mirror sample after getting dirty, ensures that target platform overcoat and sample are open-circuit condition;
Step B: close vacuum chamber, open cooling water and gas valve, open mechanical pump and molecular pump subsequently, be evacuated to 10
-2during below Pa, open radio-frequency power supply and gas flowmeter, complete electric discharge preparation;
Step C: regulate the stable magnetic of the different air pressure of radio-frequency power, gas flow gain of parameter and sample automatic bias to strengthen radio frequency plasma, plasma clean first mirror surface impurity;
Step D: meanwhile, opens laser instrument, and adopts the laser energy of joule cmf record after the first mirror reflection; If laser energy raises gradually, illustrate that the first mirror first specular reflectivity after cleaning of getting dirty is in recovery process, cleaning continues; Otherwise, then show that the first specular reflectivity is in an aggravated form, then repeat step C, D; If laser energy is maintained within a certain range, then show that the first mirror surface impurity sedimentary deposit has been removed complete, then stop cleaning.
2. magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity according to claim 1, it is characterized in that: in described steps A, working gas is inert gas, as: He, Ne, Ar, and become component selections working gas kind according to first mirror sample material and the first mirror sedimentary deposit.
3. magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity according to claim 1, it is characterized in that: in described step B, cooling water is connected with sample target platform in mechanical pump, molecular pump and vacuum chamber.
4. magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity according to claim 1, it is characterized in that: in described step B, mechanical pump is evacuated to 10-20Pa, opens molecular pump and be evacuated to 10
-2pa-10
-4pa.
5. magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity according to claim 1, it is characterized in that: in described step C, regulate vent valve and gas flow to vacuum pressure to be 1Pa-2Pa, regulate radio-frequency power and radio-frequency power supply adaptation subsequently, RF-reflective power is made to be 0, produce and stablize magnetic enhancing radio frequency plasma, again by Waste gate to initial position, recover gas flow and radio-frequency power to the required numerical value of cleaning.
6. magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity according to claim 1, it is characterized in that: Real-Time Monitoring first specular reflectivity in described step D, its method is: open laser instrument, make laser light source strengthen radio-frequency apparatus glass window by magnetic, after the first mirror surface reflection, adopt the laser energy of joule cmf record after the first mirror reflection, and compared with Laser output energy, if ratio raises, show that the first specular reflectivity raises, then continue cleaning; Ratio reduces, and shows that the first specular reflectivity reduces, then repeats step C, D; Ratio is constant, and show that the first mirror surface deposits has been removed, reflectivity remains unchanged, then terminate cleaning.
7. magnetic strengthens the method that radio frequency plasma recovers the first specular reflectivity according to claim 1, it is characterized in that: a kind of motion of the radio frequency plasma utilizing Magnetic control to produce, strengthen the interaction of plasma and the first mirror surface impurity material, increase the method for the first mirror sedimentary deposit cleaning and reflectivity regeneration rate.
8. strengthen according to claim 1 magnetic the method that radio frequency plasma recovers the first specular reflectivity, it is characterized in that: a kind of can Real-Time Monitoring first specular reflectivity variation tendency in the first mirror sedimentary deposit cleaning, reflectivity recovery process, and adjust the method for suitable radio frequency plasma technological parameter.
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Cited By (4)
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| CN106064167A (en) * | 2016-08-05 | 2016-11-02 | 中国科学院等离子体物理研究所 | A kind of method of radio frequency plasma situ cleaning the first mirror |
| CN106249587A (en) * | 2016-08-31 | 2016-12-21 | 中国科学院等离子体物理研究所 | A kind of heating means of accurate control first mirror sample surface temperature |
| CN111957675A (en) * | 2020-06-28 | 2020-11-20 | 中国科学院上海光学精密机械研究所 | Method for removing deposited pollutant on surface of optical element in vacuum system |
| CN114200778A (en) * | 2021-06-25 | 2022-03-18 | 四川大学 | Plasma in-situ cleaning structure of LPP light source collecting mirror of extreme ultraviolet lithography machine |
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| CN114200778A (en) * | 2021-06-25 | 2022-03-18 | 四川大学 | Plasma in-situ cleaning structure of LPP light source collecting mirror of extreme ultraviolet lithography machine |
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Application publication date: 20160217 |