CN105318839A - Hybrid laser ranging device and method based on traceable simultaneous multiple measurement tapes - Google Patents
Hybrid laser ranging device and method based on traceable simultaneous multiple measurement tapes Download PDFInfo
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Abstract
The invention provides a hybrid laser ranging device and method based on traceable simultaneous multiple measurement tapes, belonging to the technology of phase laser ranging. The ranging device comprises a measuring tape generation unit, a laser frequency shift unit, an expanded beam collimation lens group, a measuring light path and a circuit unit. The ranging method comprises the following steps of (1) starting a reference frequency lasers and a semiconductor laser, (2) taking one beam as a reference laser beam, and taking the other beam as measurement laser, (3) taking c/|v2-v3| as a fine measurement tape, (4) taking c/|v1-v2| as a crude measurement tape, (5) moving a measurement retroreflector to a target end, obtaining the phase differences phi 1 and phi2 of the crude measurement tape and the fine measurement tape respectively, and finally obtaining a measured distance value through a formula. According to the device and the method, the problem that a device and a method with the consideration of synchronization and traceability of multiple measurement tapes are lacked in the phase laser ranging technology is solved, and the device and the method have the characteristics of high ranging precision, high measurement efficiency, high stability and high real-time performance.
Description
Technical field
The invention belongs to phase place laser measuring technique, relate generally to a kind of phase laser distance apparatus and method.
Background technology
Large-scale metrology receives much concern in the large-scale optical, mechanical and electronic integration equipment processing and manufacturings such as the machine-building of development large-scale precision, great scientific and technological engineering, aerospace industry, shipping industry and microelectronics equipment industry, wherein several meters of large-scale metrologies to hundreds of rice scope are the important foundations of large parts processing in aerospace vehicle and jumbo ship and overall assembling, the quality of its measuring method and equipment performance directly affects workpiece quality and assembly precision, and then affects the running quality of complete equipment, performance and life-span.Many surveys chi phase ranging method utilizes one group of survey chi wavelength from big to small to carry out refining accuracy measurement to tested distance, what solve between measurement range and measuring accuracy is conflicting, can reach submillimeter to micron-sized static measurement precision in hundreds of meters of overlength operating distances.
Survey in chi phase laser distance technology more, although the mode that many survey chis are measured step by step has taken into account the demand of measurement range and measuring accuracy, but due to the restriction of light source technology, bigness scale chi and accurate measurement chi can not produce line phase of going forward side by side simultaneously and measure, cause Measuring Time long, the problem of measurement result poor real, on the other hand owing to measuring to survey chi wavelength size for benchmark survey in chi phase laser distance technology more, the stability of survey chi wavelength and accuracy directly affect the precision of laser ranging, therefore bigness scale chi and accurate measurement chi wavelength that high stability can trace to the source how is obtained, and make it to participate in measuring is improve the subject matter surveying chi phase laser distance precision and real-time at present more simultaneously.
Under in long distance, even over distance measures background, the output power of light source is one of important aspect, by analyzing known to existing LASER Light Source, light source relatively more conventional is at present gas laser, semiconductor laser, solid state laser and dye laser.Wherein gas laser structure is simple, good beam quality, but its output power is limited simultaneously, document [Zeng Ming, fourth Venus, Yuan Xiaodong. improve the research of stabilizing He Ne laser output power. Acta Optica .1996.1] mention conventional He-Ne laser instrument peak power output also only within 5 milliwatts, the needs of long range measurements can not be met.And semiconductor laser is a kind of high-level efficiency, broadband, is convenient to the laser instrument modulated, its peak power output is far longer than gas laser, and structure is simple, meets demand for development and the trend of over distance range finding.
In absolute distance measurement, another key point surveys stability and the tractability of chi, it is relevant with light source technology, known by the analysis of the light source technology to phase laser distance method laser, the modulation means of phase method has electric current directly modulation, optical modulation and intermode beat frequency modulation etc. both at home and abroad at present.
Direct current modulation method utilizes semiconductor laser, light intensity curent change and the feature changed, and the output intensity carrying out noise spectra of semiconductor lasers is modulated, and has advantages such as being simple and easy to modulation.Document [SiyuanLiu, JiubinTanandBinkeHou.MulticycleSynchronousDigitalPhaseMe asurementUsedtoFurtherImprovePhase-ShiftLaserRangeFindin g.
meas.Sci.Technol.2007, 18:1756 – 1762] and patent [the large range high precision fast laser ranging apparatus and method that multiple frequency synchronous is modulated, publication number: CN1825138] all set forth a kind of current modulating method of based semiconductor laser instrument, its composite signal adopting multiple frequency synchronous to synthesize carries out synchronous modulation to laser output power, achieve and to obtain in multifrequency modulation range finding each modulation frequency for the measurement result of tested distance at synchronization, but in order to obtain linear modulation, working point is made to be in the straight line portion of output characteristic curve, must adding a suitable bias current while adding modulation signal electric current, to make it output signal undistorted, the introducing of direct current biasing increases power consumption, when working long hours, temperature raises, the stability of Output optical power can be affected, modulation waveform is caused to be out of shape, and along with the increase of modulating frequency, depth of modulation can reduce, modulation waveform is caused to be out of shape, high frequency modulated can not be carried out, limit size and the degree of stability of accurate measurement chi wavelength, on the other hand in the actual application of large-scale metrology, laser easily causes the loss of laser power in long range propagation process, cause the impact on modulation waveform, and then accuracy and the degree of stability of chi are surveyed in impact, its frequency stability surveying chi is generally less than 10
-7.
Light modulating method is utilized to be mainly acoustooptic modulation method and electro-optic modulation method, its modulation band-width is subject to the multifactorial impact of laser beam spot sizes etc., also waveform distortions can be brought, particularly just even more serious when high frequency (Gigahertz), therefore it form large survey chi, measuring accuracy due to be subject to maximum modulation frequency restriction and be difficult to improve.
The beat signal utilizing laser instrument different mode to export to be formed, as the method surveying chi, is called that intermode is modulated.The modulation band-width of the method and the chamber appearance of laser instrument are closed, He-Ne laser frequency stabilization technology is ripe, its frequency stability is high, the degree of stability of the survey chi obtained by it is high, patent [high precision multiple frequency synchronous phase laser distance apparatus and method, publication number: CN102419166] and patent [based on the multiple frequency synchronous phase laser distance apparatus and method of dual-acousto-optic shift, publication number: CN102305591A] intermode that all make use of He-Ne laser instrument modulates and in conjunction with acousto-optic frequency translation technology, obtain high-precision accurate measurement chi and bigness scale chi, but the survey chi that the method produces does not possess tractability, when it is measured, absolute measuring chi length needs another detection system to provide, add the complicacy of measurement, on the other hand, this method utilizing process of heterodyning to obtain accurate measurement chi phase place, the frequency of its processing signals is higher, can affect to follow-up phase measurement difficulty and measuring accuracy, assuming that phase-measurement accuracy is 0.05
o, range measurement accuracy will reach 1um-10um, then signal frequency is at least 2GHz-20GHz, far beyond the bandwidth of signal processing circuit.
Patent [superheterodyne device and method of reseptance and receiving trap SIC (semiconductor integrated circuit), publication number: CN102484492A] all describe a kind of superhet interference signal treatment technology, Tsing-Hua University Zhang Cunman [Zhang Cunman etc., superhet interferes absolute distance measurement Review Study, optical technology 1998, (1): 7-9.] and Japanese ShukoYokoyama professor [ShukoYokoyama
etal.Real-timeandhigh-resolutionabsolute-distancemeasurement usingatwo-wavelengthsuperheterodyneinterferometer.Meas.S ci.Technol.1999,10:1233-1239] all describe superhet absolute distance measurement method, this method reduce the process frequency of signal, more easily reach higher measuring accuracy.But this technology is on the one hand, one can only be obtained and survey chi, and not possess tractability, chi of surveying can not be carried out more and measure, let alone the synchronism surveying chi more; It is less that another aspect superhet obtains surveying chi wavelength, generally in micron dimension, can only be used for the measurement of surperficial micro-shape.
In order to improve the stability of laser instrument output frequency, there is the frequency-stabilizing method using the Output of laser frequency of iodine saturated absorption frequency stabilization laser instrument as frequency stabilization benchmark, utilize the saturated absorption spectra of iodine to carry out rrequency-offset-lock control to He-Ne laser instrument and semiconductor laser.China is also studied, such as patent ZL200910072518.5 and patent ZL200910072519.X etc. all describe a kind of rrequency-offset-lock device utilizing iodine saturated absorption He-Ne frequency stabilized laser, the laser output frequency after rrequency-offset-lock is made to have very high frequency stability, there is the advantage that output frequency can be traced to the source, but the output frequency of laser reaches 10
14hz, corresponding survey chi is between 400-700nm, and measurement range, in nm rank, can not be used for long distance laser range finding, needs badly a kind ofly high frequency stability laser frequency to be converted to the laser ranging on a large scale that can trace to the source and to survey chi, and synchronizes them the technology of generation.
In sum, in phase laser distance technology, a kind of can take into account high-power, many surveys chi synchronism and tractability long distance and high precision laser ranging system and method is lacked at present.
Summary of the invention
The object of the invention is a kind ofly can take into account high-power, many surveys chi synchronism and the laser ranging system of tractability and the problem of method to solve existing lacking in phase laser distance technology, there is provided a kind of based on much more synchronous mixing laser distance measuring equipment and the method for surveying chi of can tracing to the source, reaching increases range finding dirigibility, simplifies ranging step, improves the object measuring efficiency and precision and degree of stability, real-time.
The object of the present invention is achieved like this:
A kind of based on the synchronous mixing laser distance measuring equipment surveying chi of can tracing to the source more, be made up of survey chi generation unit, laser shift frequency unit, beam-expanding collimation mirror group and optical path and circuit unit, the Laser output that survey chi generation unit sends is to the input end of laser shift frequency unit, the road laser that laser shift frequency unit exports outputs to an input end of optical path and circuit unit by beam-expanding collimation mirror group, another road laser that laser shift frequency unit exports is directly inputted to another input end of optical path and circuit unit;
The structure of described survey chi generation unit is: the laser beam that frequency reference laser instrument is launched arrives the input end of optical splitter, first output terminal of optical splitter connects No. seven spectroscopical input ends, No. seven spectroscopical output terminals connect the input end of No. three photodetectors, second output terminal of optical splitter connects a spectroscopical input end, a spectroscopical output terminal connects the input end of a photodetector, 3rd output terminal of optical splitter connects and a number spectroscopical input end, No. two spectroscopical output terminals connect the input end of No. two photodetectors, a photodetector, No. two photodetectors and the output terminal of No. three photodetectors are all connected the input end of single-chip microcomputer, the input end of three long adjust actuator of output terminals difference connection chamber of single-chip microcomputer, the output terminal of the long adjust actuator in chamber connects He-Ne laser instrument respectively, the input end of a semiconductor laser and No. two semiconductor lasers, an output terminal of He-Ne laser instrument connects No. four spectroscopical input ends, No. four spectroscopes output terminal connects a spectroscopical input end, No. four another output terminals spectroscopical connect the input end of a polaroid, an output terminal of a semiconductor laser connects No. five spectroscopical input ends, No. five spectroscopes output terminal connects No. two spectroscopical input ends, No. five another output terminals spectroscopical connect the input end of No. two polaroids, the output terminal of No. two polaroids connects No. six spectroscopical input ends, an output terminal of No. two semiconductor lasers connects No. three spectroscopical input ends, No. three spectroscopical output terminals connect No. seven spectroscopical input ends, No. three another output terminals spectroscopical connect the input end of No. three polaroids, the output terminal of No. three polaroids connects No. six another input ends spectroscopical by a catoptron,
The structure of described laser shift frequency unit is: the output terminal surveying chi generation unit connects the input end of No. seven catoptrons, the output terminal of No. seven catoptrons connects No. eight spectroscopical input ends, No. eight spectroscopical output terminals connect No. nine spectroscopical input ends, another output terminal surveying chi generation unit connects the input end of a polarization spectroscope, an output terminal of a polarization spectroscope connects the input end of a half-wave plate, the output terminal of a half-wave plate connects the input end of No. two polarization spectroscopes, an output terminal of No. two polarization spectroscopes connects an input end of No. three polarization spectroscopes, another output terminal of No. two polarization spectroscopes connects the input end of No. two catoptrons, the output terminal of No. two catoptrons connects an input end of a laser frequency shifter, the output terminal of a DDS signal source connects another input end of a laser frequency shifter, the output terminal of a laser frequency shifter connects the input end of No. three catoptrons, the output terminal of No. three catoptrons connects another input end of No. three polarization spectroscopes, the output terminal of No. three polarization spectroscopes connects No. eight another input ends spectroscopical, No. eight spectroscopical output terminals connect No. nine spectroscopical input ends, another output terminal of a polarization spectroscope connects the input end of No. four catoptrons, the output terminal of No. four catoptrons connects the input end of No. four polarization spectroscopes through No. two half-wave plates, an output terminal of No. four polarization spectroscopes connects an input end of No. five polarization spectroscopes, another output terminal of No. four polarization spectroscopes connects the input end of No. five catoptrons, the output terminal of No. five catoptrons connects an input end of No. two laser frequency shifters, the output terminal of No. two DDS signal sources connects another input end of No. two laser frequency shifters, the output terminal of No. two laser frequency shifters connects the input end of No. six catoptrons, the output terminal of No. six catoptrons connects another input end of No. five polarization spectroscopes, the output terminal of No. five polarization spectroscopes connects No. nine another input ends spectroscopical,
The structure of described optical path and circuit unit is: an output terminal of laser shift frequency unit connects No. ten spectroscopical input ends, No. ten spectroscopical output terminals connect No. ten spectroscopical input ends, an output terminal of No. ten spectroscopes 46 is communicated with the input end of No. four photodetectors by No. four polaroids, the output terminal of No. four photodetectors connects the input end of a low-pass filter, the output terminal of a low-pass filter connects an input end of a frequency mixer, an output terminal of No. three DDS signal sources connects another input end of a frequency mixer, the output terminal of a frequency mixer connects an input end of a phase detector, No. ten another output terminals spectroscopical are communicated with the input end of No. five photodetectors by No. five polaroids, the output terminal of No. five photodetectors connects the input end of No. two low-pass filters, the output terminal of No. two low-pass filters connects an input end of No. two phase detectors, the output terminal of beam-expanding collimation mirror group connects an input end of No. six polarization spectroscopes, an output terminal of No. six polarization spectroscopes is communicated with the input end of No. nine catoptrons by a quarter-wave plate, the output terminal of No. nine catoptrons is communicated with an input end of No. six polarization spectroscopes by a quarter-wave plate, another output terminal of No. six polarization spectroscopes is communicated with the input end of No. ten catoptrons by No. two quarter-wave plates, the output terminal of No. ten catoptrons is communicated with another input end of No. six polarization spectroscopes by No. two quarter-wave plates, another output terminal of No. six polarization spectroscopes connects the spectroscopical input end of ride on Bus No. 11, the spectroscopical output terminal of ride on Bus No. 11 is communicated with the input end of No. six photodetectors by No. six polaroids, the output terminal of No. six photodetectors connects the input end of No. three low-pass filters, the output terminal of No. three low-pass filters connects an input end of No. three frequency mixer, another output terminal of No. three DDS signal sources connects another input end of No. three frequency mixer, the output terminal of No. three frequency mixer connects another input end of a phase detector, ride on Bus No. 11 another output terminal spectroscopical is communicated with the input end of No. seven photodetectors by No. seven polaroids, the output terminal of No. seven photodetectors connects the input end of No. four low-pass filters, the output terminal of No. four low-pass filters connects another input end of No. two phase detectors.
Based on the synchronous mixing laser distance-finding method surveying chi of can tracing to the source, concrete steps are as follows more:
Step one, open frequency benchmark laser, He-Ne laser instrument, a semiconductor laser and No. two semiconductor lasers, after preheating and frequency stabilization, pass through FEEDBACK CONTROL, be locked within the certain frequency scope of frequency reference laser instrument by He-Ne laser instrument, a semiconductor laser and No. two semiconductor laser output frequencies, sending after polaroid only surplus frequency from He-Ne laser instrument is
v 1laser, sending after polaroid only surplus frequency from a semiconductor laser is
v 2laser, and by spectroscope with to send after polaroid remaining frequency from No. two semiconductor lasers and be
v 3laser converge;
Step 2, the laser of three kinds of frequencies formed by step one enter laser shift frequency unit, and wherein a branch of double-frequency laser separates frequency with a polarization spectroscope and is
v 2with
v 3two bundle laser, after half-wave plate, separate two bundle double-frequency lasers respectively again with No. two polarization spectroscopes and No. four polarization spectroscopes, wherein a road is through acousto-optic frequency shifters, and drive acousto-optic frequency shifters by DDS signal source, frequency is respectively
f 1with
f 2, the laser of last various frequency gathers, and wherein has five kinds of frequencies, is respectively
v 1,
v 2,
v 3,
v 2+
f 1with
v 3+
f 2,, this Shu Jiguang incides Amici prism and is divided into two-beam, and a branch of as reference laser beam, another Shu Zuowei measures laser beam exits to measurement target;
Step 3, reference laser beam are divided into two bundle laser through Amici prism, wherein beam of laser through polarization direction with
v 1after No. four identical polaroids, frequency is
v 1,
v 2with
v 3the polarization laser of horizontal direction enter into No. four photodetectors and change, its output packet is containing the electric signal of bigness scale chi phase information, and frequency is
v 1-
v 2, another beam of laser through polarization direction with
v 1incide No. five photodetectors after becoming No. five polaroids of 45 degree, the electric signal that No. five photodetectors export is high frequency electrical signal through low-pass filter filtering, and retain low frequency electrical number, obtain the signal comprising accurate measurement chi phase information, its frequency is
f 1-
f 2;
When step 4, measurement start, reference surface No. nine catoptrons maintain static, mobile No. ten catoptrons are to destination end, measuring distance is L, measuring beam is after measuring catoptron reflection, and the light beam reflected with reference surface converges at No. six polarization spectroscope places, enters metering circuit, measure laser beam be divided into two bundle laser beam through Amici prism, wherein beam of laser bundle through polarization direction with
v 1after No. six identical polaroids, frequency is
v 1,
v 2with
v 3the polarization laser of horizontal direction enter into No. six photodetectors and change, its output packet is containing the electric signal of bigness scale chi phase information, and frequency is
v 1-
v 2, surveying chi length is
, another beam of laser through polarization direction with
v 1incide No. seven photodetectors after becoming No. seven polaroids of 45 degree, the electric signal that No. five photodetectors export is high frequency electrical signal through low-pass filter filtering, and retain low frequency electrical number, obtain the signal comprising accurate measurement chi phase information, its frequency is
f 1-
f 2, surveying chi length is
;
Step 5, obtain frequency respectively by a phase detector and No. two phase detectors and be
v 1-
v 2with
f 1-
f 2the phase differential of two path signal
Φ 1with
Φ 2, according to formula
try to achieve the distance measure of bigness scale chi
l c , and substituted into the phase integer value that formula tries to achieve accurate measurement chi
; Wherein
floor(
x) function returns
xthe integral part of value, finally try to achieve tested distance value according to formula:
, in formula: c is the light velocity, n is the air refraction of environment.
Feature of the present invention and beneficial effect are:
First, the present invention proposes trace to the source many survey chi production methods and the device based on mixing laser, these apparatus and method utilize frequency reference type frequency reference laser instrument to carry out rrequency-offset-lock control to two semiconductor lasers and a He-Ne laser instrument, and utilize two semiconductor lasers after frequency stabilization to form laser ranging accurate measurement chi with superhet form, the heterodyne signal between stabilizing He Ne laser and frequency stabilized semiconductor laser is utilized to form range finding bigness scale chi, make Output of laser frequency survey chi wavelength with the laser ranging formed and can directly be traceable to frequency/wavelength benchmark, and lock point can be adjusted according to actual needs, and then survey chi wavelength is regulated, add the dirigibility of range finding, overcome in existing distance measuring equipment the shortcoming surveyed chi and not directly trace to the source, simplify general distance measuring equipment and survey the link that chi wavelength needs another detection system to detect when absolute measuring is long, improve measurement efficiency and precision, this is one of the present invention's innovative point distinguishing existing apparatus.
The second, the present invention proposes a kind of many surveys chi phase-locking acquisition methods of being combined with superhet based on heterodyne and device.These apparatus and method utilize laser frequency shifter to carry out shift frequency to the laser of component frequency, produce the laser of multi-frequency, and utilize heterodyne approach and superhet approach to obtain bigness scale chi and accurate measurement chi respectively simultaneously, and then make it to participate in measuring simultaneously, achieve the synchro measure of thick accurate measurement chi phase place, shorten Measuring Time, improve the real-time of measurement result.The laser interferometry combined with superhet by heterodyne obtains test phase signal, eliminate common mode interference, improve the degree of stability surveying chi, reduce the frequency of phase measuring circuit Received signal strength simultaneously, reduce the difficulty of circuit design, this is the innovative point two that the present invention distinguishes existing apparatus.
3rd, the present invention adopts mixing laser as survey chi generation light source, the respective advantage of semiconductor laser and He-Ne laser instrument can be made full use of, first the feature that semiconductor laser light resource Output of laser energy is large is made full use of, two semiconductor laser Output of lasers are made to form range finding accurate measurement chi, ensure that light echo energy, improve signal to noise ratio (S/N ratio), be conducive to the acquisition of high precision accurate measurement chi phase information, secondly the simple feature rapidly of ripe iodine laser rrequency-offset-lock formula He-Ne laser instrument frequency stabilization process is utilized, can quick adjustment Output of laser frequency, and then bigness scale chi is regulated, reach when ensureing measuring-signal signal to noise ratio (S/N ratio), the object of rapid adjustment measurement range, this is the innovative point three that the present invention distinguishes existing apparatus.
Accompanying drawing explanation
Fig. 1 is the general structure schematic diagram of laser ranging system of the present invention;
Fig. 2 is the structural representation surveying chi generation unit;
Fig. 3 is the structural representation of acousto-optic frequency translation unit;
Fig. 4 is the structural representation of optical path and circuit unit.
In figure, piece number illustrates: 1, survey chi generation unit, 2, laser shift frequency unit, 3, beam-expanding collimation mirror group, 4, optical path and circuit unit, 5, frequency reference laser instrument, 6, optical splitter, 7, a spectroscope, 8, No. two spectroscopes, 9, No. three spectroscopes, 10, a photodetector, 11, No. two photodetectors, 12, No. three photodetectors, 13, the long adjust actuator in chamber, 14, single-chip microcomputer, 15, He-Ne laser instrument, 16, a semiconductor laser, 17, No. two semiconductor lasers, 18, No. four spectroscopes, 19, No. five spectroscopes, 20, No. six spectroscopes, 21, a polaroid, 22, No. two polaroids, 23, No. three polaroids, 24, a catoptron, 25, No. seven spectroscopes, 26, a polarization spectroscope, 27, a half-wave plate, 28, No. two polarization spectroscopes, 29, No. two catoptrons, 30, a DDS signal source, 31, a laser frequency shifter, 32, No. three catoptrons, 33, No. three polarization spectroscopes, 34, No. eight spectroscopes, 35, No. four catoptrons, 36, No. two half-wave plates, 37, No. four polarization spectroscopes, 38, No. five catoptrons, 39, No. two DDS signal sources, 40, No. two laser frequency shifters, 41, No. six catoptrons, 42, No. five polarization spectroscopes, 43, No. seven catoptrons, 44, No. nine spectroscopes, 45, No. eight catoptrons, 46, No. ten spectroscopes, 47, No. four polaroids, 48, No. four photodetectors, 49, a low-pass filter, 50, a frequency mixer, 51, No. three DDS signal sources, 52, a phase detector, 53, No. five polaroids, 54, No. five photodetectors, 55, No. two low-pass filters, 56, No. two phase detectors, 57, No. six polarization spectroscopes, 58, a quarter-wave plate, 59, No. nine catoptrons, 60, No. two quarter-wave plates, 61, No. ten catoptrons, 62, ride on Bus No. 11 spectroscope, 63, No. six polaroids, 64, No. six photodetectors, 65, No. three low-pass filters, 66, No. three frequency mixer, 67, No. seven polaroids, 68, No. seven photodetectors, 69, No. four low-pass filters.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in detail.
A kind of based on the synchronous mixing laser distance measuring equipment surveying chi of can tracing to the source more, comprise beam-expanding collimation mirror group 3, it is characterized in that: described device is by surveying chi generation unit 1, laser shift frequency unit 2, beam-expanding collimation mirror group 3 and optical path and circuit unit 4 form, the Laser output that survey chi generation unit 1 sends is to the input end of laser shift frequency unit 2, the road laser that laser shift frequency unit 2 exports outputs to an input end of optical path and circuit unit 4 by beam-expanding collimation mirror group 3, another road laser that laser shift frequency unit 2 exports is directly inputted to another input end of optical path and circuit unit 4,
The structure of described survey chi generation unit 1 is: the laser beam that frequency reference laser instrument 5 is launched arrives the input end of optical splitter 6, first output terminal of optical splitter 6 connects an input end of No. seven spectroscopes 25, an output terminal of No. seven spectroscopes 25 connects the input end of No. three photodetectors 12, second output terminal of optical splitter 6 connects an input end of a spectroscope 7, an output terminal of a spectroscope 7 connects the input end of a photodetector 10, 3rd output terminal of optical splitter 6 connects and an input end of number spectroscope 8, the output terminal of No. two spectroscopes 8 connects the input end of No. two photodetectors 11, a photodetector 10, No. two photodetectors 11 and the output terminal of No. three photodetectors 12 are all connected the input end of single-chip microcomputer 14, the input end of three long adjust actuator 13 of output terminals difference connection chamber of single-chip microcomputer 14, the output terminal of the long adjust actuator 13 in chamber connects He-Ne laser instrument 15 respectively, the input end of a semiconductor laser 16 and No. two semiconductor lasers 17, an output terminal of He-Ne laser instrument 15 connects an input end of No. four spectroscopes 18, No. four spectroscopes 18 1 output terminals connect the input end of a spectroscope 7, another output terminal of No. four spectroscopes 18 connects the input end of a polaroid 21, an output terminal of a semiconductor laser 16 connects an input end of No. five spectroscopes 19, No. five spectroscopes 19 1 output terminals connect the input end of No. two spectroscopes 8, another output terminal of No. five spectroscopes 19 connects the input end of No. two polaroids 22, the output terminal of No. two polaroids 22 connects an input end of No. six spectroscopes 20, an output terminal of No. two semiconductor lasers 17 connects an input end of No. three spectroscopes 9, an output terminal of No. three spectroscopes 9 connects the input end of No. seven spectroscopes 25, another output terminal of No. three spectroscopes 9 connects the input end of No. three polaroids 23, the output terminal of No. three polaroids 23 connects another input end of No. six spectroscopes 20 by a catoptron 24,
The structure of described laser shift frequency unit 2 is: the output terminal surveying chi generation unit 1 connects the input end of No. seven catoptrons 43, the output terminal of No. seven catoptrons 43 connects an input end of No. eight spectroscopes 34, the output terminal of No. eight spectroscopes 34 connects an input end of No. nine spectroscopes 44, another output terminal surveying chi generation unit 1 connects the input end of a polarization spectroscope 26, an output terminal of a polarization spectroscope 26 connects the input end of a half-wave plate 27, the output terminal of a half-wave plate 27 connects the input end of No. two polarization spectroscopes 28, an output terminal of No. two polarization spectroscopes 28 connects an input end of No. three polarization spectroscopes 33, another output terminal of No. two polarization spectroscopes 28 connects the input end of No. two catoptrons 29, the output terminal of No. two catoptrons 29 connects an input end of a laser frequency shifter 31, the output terminal of a DDS signal source 30 connects another input end of a laser frequency shifter 31, the output terminal of a laser frequency shifter 31 connects the input end of No. three catoptrons 32, the output terminal of No. three catoptrons 32 connects another input end of No. three polarization spectroscopes 33, the output terminal of No. three polarization spectroscopes 33 connects another input end of No. eight spectroscopes 34, the output terminal of No. eight spectroscopes 34 connects an input end of No. nine spectroscopes 44, another output terminal of a polarization spectroscope 26 connects the input end of No. four catoptrons 35, the output terminal of No. four catoptrons 35 connects the input end of No. four polarization spectroscopes 37 through No. two half-wave plates 36, an output terminal of No. four polarization spectroscopes 37 connects an input end of No. five polarization spectroscopes 42, another output terminal of No. four polarization spectroscopes 37 connects the input end of No. five catoptrons 38, the output terminal of No. five catoptrons 38 connects an input end of No. two laser frequency shifters 40, the output terminal of No. two DDS signal sources 39 connects another input end of No. two laser frequency shifters 40, the output terminal of No. two laser frequency shifters 40 connects the input end of No. six catoptrons 41, the output terminal of No. six catoptrons 41 connects another input end of No. five polarization spectroscopes 42, the output terminal of No. five polarization spectroscopes 42 connects another input end of No. nine spectroscopes 44,
The structure of described optical path and circuit unit 4 is: an output terminal of laser shift frequency unit 2 connects the input end of No. ten spectroscopes 43, the output terminal of No. ten spectroscopes 43 connects the input end of No. ten spectroscopes 46, an output terminal of No. ten spectroscopes 46 is communicated with the input end of No. four photodetectors 48 by No. four polaroids 47, the output terminal of No. four photodetectors 48 connects the input end of a low-pass filter 49, the output terminal of a low-pass filter 49 connects an input end of a frequency mixer 50, an output terminal of No. three DDS signal sources 51 connects another input end of a frequency mixer 50, the output terminal of a frequency mixer 50 connects an input end of a phase detector 52, another output terminal of No. ten spectroscopes 46 is communicated with the input end of No. five photodetectors 54 by No. five polaroids 53, the output terminal of No. five photodetectors 54 connects the input end of No. two low-pass filters 55, the output terminal of No. two low-pass filters 55 connects an input end of No. two phase detectors 56, the output terminal of beam-expanding collimation mirror group 3 connects an input end of No. six polarization spectroscopes 57, an output terminal of No. six polarization spectroscopes 57 is communicated with the input end of No. nine catoptrons 59 by a quarter-wave plate 58, the output terminal of No. nine catoptrons 59 is communicated with an input end of No. six polarization spectroscopes 57 by a quarter-wave plate 58, another output terminal of No. six polarization spectroscopes 57 is communicated with the input end of No. ten catoptrons 61 by No. two quarter-wave plates 60, the output terminal of No. ten catoptrons 61 is communicated with another input end of No. six polarization spectroscopes 57 by No. two quarter-wave plates 60, another output terminal of No. six polarization spectroscopes 57 connects an input end of ride on Bus No. 11 spectroscope 62, an output terminal of ride on Bus No. 11 spectroscope 62 is communicated with the input end of No. six photodetectors 64 by No. six polaroids 63, the output terminal of No. six photodetectors 64 connects the input end of No. three low-pass filters 65, the output terminal of No. three low-pass filters 65 connects an input end of No. three frequency mixer 66, another output terminal of No. three DDS signal sources 51 connects another input end of No. three frequency mixer 66, the output terminal of No. three frequency mixer 66 connects another input end of a phase detector 52, another output terminal of ride on Bus No. 11 spectroscope 62 is communicated with the input end of No. seven photodetectors 68 by No. seven polaroids 67, the output terminal of No. seven photodetectors 68 connects the input end of No. four low-pass filters 69, the output terminal of No. four low-pass filters 69 connects another input end of No. two phase detectors 56.
One, No. two laser frequency shifter 31,40 of described laser shift frequency unit 2 comprises acousto-optic frequency shifters, electro-optic frequency translation device, and laser frequency can regulate.
Described survey chi generation unit 1 medium frequency benchmark laser 5 comprises iodine saturated absorption frequency stabilization laser instrument, femtosecond laser frequency comb laser instrument, and frequency stability is better than 10
-12.
Based on the synchronous mixing laser distance-finding method surveying chi of can tracing to the source, concrete steps are as follows more:
Step one, open frequency benchmark laser 5, He-Ne laser instrument 15, semiconductor laser 16 and No. two semiconductor lasers 17, after preheating and frequency stabilization, pass through FEEDBACK CONTROL, be locked within the certain frequency scope of frequency reference laser instrument 5 by He-Ne laser instrument 15, semiconductor laser 16 and No. two semiconductor laser 17 output frequencies, sending after polaroid only surplus frequency from He-Ne laser instrument 15 is
v 1laser, sending after polaroid only surplus frequency from a semiconductor laser 16 is
v 2laser, and by spectroscope with to send after polaroid remaining frequency from No. two semiconductor lasers 17 and be
v 3laser converge;
Step 2, the laser of three kinds of frequencies formed by step one enter laser shift frequency unit 2, and wherein a branch of double-frequency laser separates frequency with a polarization spectroscope 26 and is
v 2with
v 3two bundle laser, after half-wave plate, separate two bundle double-frequency lasers respectively again with No. two polarization spectroscopes 28 and No. four polarization spectroscopes 37, wherein a road is through acousto-optic frequency shifters, and drive acousto-optic frequency shifters by DDS signal source, frequency is respectively
f 1with
f 2, the laser of last various frequency gathers, and wherein has five kinds of frequencies, is respectively
v 1,
v 2,
v 3,
v 2+
f 1with
v 3+
f 2,, this Shu Jiguang incides Amici prism and is divided into two-beam, and a branch of as reference laser beam, another Shu Zuowei measures laser beam exits to measurement target;
Step 3, reference laser beam are divided into two bundle laser through Amici prism, wherein beam of laser through polarization direction with
v 1after No. four identical polaroids 47, frequency is
v 1,
v 2with
v 3the polarization laser of horizontal direction enter into No. four photodetectors 48 and change, its output packet is containing the electric signal of bigness scale chi phase information, and frequency is
v 1-
v 2, another beam of laser through polarization direction with
v 1incide after becoming No. five polaroids 53 of 45 degree electric signal that No. five photodetectors 54, No. five photodetectors 54 export through low-pass filter filtering high frequency electrical signal, retain low frequency electrical number, obtain the signal comprising accurate measurement chi phase information, its frequency is
f 1-
f 2;
When step 4, measurement start, reference surface No. nine catoptrons 59 maintain static, mobile No. ten catoptron 61 to destination end, measuring distance is L, measuring beam is after measuring catoptron 59 and reflecting, and the light beam reflected with reference surface converges at No. six polarization spectroscope 57 places, enters metering circuit, measure laser beam be divided into two bundle laser beam through Amici prism, wherein beam of laser bundle through polarization direction with
v 1after No. six identical polaroids 63, frequency is
v 1,
v 2with
v 3the polarization laser of horizontal direction enter into No. six photodetectors 64 and change, its output packet is containing the electric signal of bigness scale chi phase information, and frequency is
v 1-
v 2, surveying chi length is
, another beam of laser through polarization direction with
v 1incide after becoming No. seven polaroids 67 of 45 degree electric signal that No. seven photodetectors 68, No. five photodetectors 60 export through low-pass filter filtering high frequency electrical signal, retain low frequency electrical number, obtain the signal comprising accurate measurement chi phase information, its frequency is
f 1-
f 2, surveying chi length is
;
Step 5, obtain frequency respectively by a phase detector 52 and No. two phase detectors 56 and be
v 1-
v 2with
f 1-
f 2the phase differential of two path signal
Φ 1with
Φ 2, according to formula
try to achieve the distance measure of bigness scale chi
l c , and substituted into the phase integer value that formula tries to achieve accurate measurement chi
; Wherein
floor(
x) function returns
xthe integral part of value, finally try to achieve tested distance value according to formula:
, in formula: c is the light velocity, n is the air refraction of environment.
The phase differential of described two path signal
Φ 1with phase differential
Φ 2measurement carry out at synchronization.
Accurate measurement chi used and bigness scale chi all can be traced to the source.
Claims (6)
1. the mixing laser distance measuring equipment based on synchronous many survey chis of can tracing to the source, comprise beam-expanding collimation mirror group (3), it is characterized in that: described device is by surveying chi generation unit (1), laser shift frequency unit (2), beam-expanding collimation mirror group (3) and optical path and circuit unit (4) composition, the Laser output that survey chi generation unit (1) sends is to the input end of laser shift frequency unit (2), the road laser that laser shift frequency unit (2) exports outputs to an input end of optical path and circuit unit (4) by beam-expanding collimation mirror group (3), another road laser that laser shift frequency unit (2) exports is directly inputted to another input end of optical path and circuit unit (4),
The structure of described survey chi generation unit (1) is: the laser beam that frequency reference laser instrument (5) is launched arrives the input end of optical splitter (6), first output terminal of optical splitter (6) connects an input end of No. seven spectroscopes (25), an output terminal of No. seven spectroscopes (25) connects the input end of No. three photodetectors (12), second output terminal of optical splitter (6) connects an input end of a spectroscope (7), an output terminal of a spectroscope (7) connects the input end of a photodetector (10), 3rd output terminal of optical splitter (6) connects and an input end of number spectroscope 8, the output terminal of No. two spectroscopes (8) connects the input end of No. two photodetectors (11), a photodetector (10), No. two photodetectors (11) and the output terminal of No. three photodetectors (12) are all connected the input end of single-chip microcomputer (14), the input end of three output terminals difference long adjust actuator of connection chamber (13) of single-chip microcomputer (14), the output terminal in the long adjust actuator in chamber (13) connects He-Ne laser instrument (15) respectively, the input end of a semiconductor laser (16) and No. two semiconductor lasers (17), an output terminal of He-Ne laser instrument (15) connects an input end of No. four spectroscopes (18), No. four spectroscopes (18) output terminals connect the input end of a spectroscope (7), another output terminal of No. four spectroscopes (18) connects the input end of a polaroid (21), an output terminal of a semiconductor laser (16) connects an input end of No. five spectroscopes (19), No. five spectroscopes (19) output terminals connect the input end of No. two spectroscopes (8), another output terminal of No. five spectroscopes (19) connects the input end of No. two polaroids (22), the output terminal of No. two polaroids (22) connects an input end of No. six spectroscopes (20), an output terminal of No. two semiconductor lasers (17) connects an input end of No. three spectroscopes (9), an output terminal of No. three spectroscopes (9) connects the input end of No. seven spectroscopes (25), another output terminal of No. three spectroscopes (9) connects the input end of No. three polaroids (23), the output terminal of No. three polaroids (23) connects another input end of No. six spectroscopes (20) by a catoptron (24),
The structure of described laser shift frequency unit (2) is: the output terminal surveying chi generation unit (1) connects the input end of No. seven catoptrons (43), the output terminal of No. seven catoptrons (43) connects an input end of No. eight spectroscopes (34), the output terminal of No. eight spectroscopes (34) connects an input end of No. nine spectroscopes (44), another output terminal surveying chi generation unit (1) connects the input end of a polarization spectroscope (26), an output terminal of a polarization spectroscope (26) connects the input end of a half-wave plate (27), the output terminal of a half-wave plate (27) connects the input end of No. two polarization spectroscopes (28), an output terminal of No. two polarization spectroscopes (28) connects an input end of No. three polarization spectroscopes (33), another output terminal of No. two polarization spectroscopes (28) connects the input end of No. two catoptrons (29), the output terminal of No. two catoptrons (29) connects an input end of a laser frequency shifter (31), the output terminal of a DDS signal source (30) connects another input end of a laser frequency shifter (31), the output terminal of a laser frequency shifter (31) connects the input end of No. three catoptrons (32), the output terminal of No. three catoptrons (32) connects another input end of No. three polarization spectroscopes (33), the output terminal of No. three polarization spectroscopes (33) connects another input end of No. eight spectroscopes (34), the output terminal of No. eight spectroscopes (34) connects an input end of No. nine spectroscopes (44), another output terminal of a polarization spectroscope (26) connects the input end of No. four catoptrons (35), the output terminal of No. four catoptrons (35) connects the input end of No. four polarization spectroscopes (37) through No. two half-wave plates (36), an output terminal of No. four polarization spectroscopes (37) connects an input end of No. five polarization spectroscopes (42), another output terminal of No. four polarization spectroscopes (37) connects the input end of No. five catoptrons (38), the output terminal of No. five catoptrons (38) connects an input end of No. two laser frequency shifters (40), the output terminal of No. two DDS signal sources (39) connects another input end of No. two laser frequency shifters (40), the output terminal of No. two laser frequency shifters (40) connects the input end of No. six catoptrons (41), the output terminal of No. six catoptrons (41) connects another input end of No. five polarization spectroscopes (42), the output terminal of No. five polarization spectroscopes (42) connects another input end of No. nine spectroscopes (44),
The structure of described optical path and circuit unit (4) is: an output terminal of laser shift frequency unit (2) connects the input end of No. ten spectroscopes (43), the output terminal of No. ten spectroscopes (43) connects the input end of No. ten spectroscopes (46), an output terminal of No. ten spectroscopes (46) is communicated with the input end of No. four photodetectors (48) by No. four polaroids (47), the output terminal of No. four photodetectors (48) connects the input end of a low-pass filter (49), the output terminal of a low-pass filter (49) connects an input end of a frequency mixer (50), an output terminal of No. three DDS signal sources (51) connects another input end of a frequency mixer (50), the output terminal of a frequency mixer (50) connects an input end of a phase detector (52), another output terminal of No. ten spectroscopes (46) is communicated with the input end of No. five photodetectors (54) by No. five polaroids (53), the output terminal of No. five photodetectors (54) connects the input end of No. two low-pass filters (55), the output terminal of No. two low-pass filters (55) connects an input end of No. two phase detectors (56), the output terminal of beam-expanding collimation mirror group (3) connects an input end of No. six polarization spectroscopes (57), an output terminal of No. six polarization spectroscopes (57) is communicated with the input end of No. nine catoptrons (59) by a quarter-wave plate (58), the output terminal of No. nine catoptrons (59) is communicated with an input end of No. six polarization spectroscopes (57) by a quarter-wave plate (58), another output terminal of No. six polarization spectroscopes (57) is communicated with the input end of No. ten catoptrons (61) by No. two quarter-wave plates (60), the output terminal of No. ten catoptrons (61) is communicated with another input end of No. six polarization spectroscopes (57) by No. two quarter-wave plates (60), another output terminal of No. six polarization spectroscopes (57) connects an input end of ride on Bus No. 11 spectroscope (62), an output terminal of ride on Bus No. 11 spectroscope (62) is communicated with the input end of No. six photodetectors (64) by No. six polaroids (63), the output terminal of No. six photodetectors (64) connects the input end of No. three low-pass filters (65), the output terminal of No. three low-pass filters (65) connects an input end of No. three frequency mixer (66), another output terminal of No. three DDS signal sources (51) connects another input end of No. three frequency mixer (66), the output terminal of No. three frequency mixer (66) connects another input end of a phase detector (52), another output terminal of ride on Bus No. 11 spectroscope (62) is communicated with the input end of No. seven photodetectors (68) by No. seven polaroids (67), the output terminal of No. seven photodetectors (68) connects the input end of No. four low-pass filters (69), the output terminal of No. four low-pass filters (69) connects another input end of No. two phase detectors (56).
2. according to claim 1 based on the synchronous mixing laser distance measuring equipment surveying chi of can tracing to the source more, it is characterized in that: one, No. two laser frequency shifter (31,40) of described laser shift frequency unit (2) comprises acousto-optic frequency shifters, electro-optic frequency translation device, and laser frequency can regulate.
3. according to claim 1 based on the synchronous mixing laser distance measuring equipment surveying chi of can tracing to the source more, it is characterized in that: described survey chi generation unit 1 medium frequency benchmark laser (5) comprises iodine saturated absorption frequency stabilization laser instrument, femtosecond laser frequency comb laser instrument, and frequency stability is better than 10
-12.
4., as claimed in claim 1 based on the synchronous mixing laser distance-finding method surveying chi of can tracing to the source, it is characterized in that: concrete steps are as follows more:
Step one, open frequency benchmark laser (5), He-Ne laser instrument (15), a semiconductor laser (16) and No. two semiconductor lasers (17), after preheating and frequency stabilization, pass through FEEDBACK CONTROL, be locked within the certain frequency scope of frequency reference laser instrument (5) by He-Ne laser instrument (15), a semiconductor laser (16) and No. two semiconductor laser (17) output frequencies, sending after polaroid only surplus frequency from He-Ne laser instrument (15) is
v 1laser, sending after polaroid only surplus frequency from a semiconductor laser (16) is
v 2laser, and by spectroscope with to send after polaroid remaining frequency from No. two semiconductor lasers (17) and be
v 3laser converge;
Step 2, the laser of three kinds of frequencies formed by step one enter laser shift frequency unit (2), and wherein a branch of double-frequency laser separates frequency with a polarization spectroscope (26) and is
v 2with
v 3two bundle laser, after half-wave plate, use No. two polarization spectroscopes (28) and No. four polarization spectroscopes (37) to separate two bundle double-frequency lasers more respectively, wherein a road is through acousto-optic frequency shifters, and drive acousto-optic frequency shifters by DDS signal source, frequency is respectively
f 1with
f 2, the laser of last various frequency gathers, and wherein has five kinds of frequencies, is respectively
v 1,
v 2,
v 3,
v 2+
f 1with
v 3+
f 2,, this Shu Jiguang incides Amici prism and is divided into two-beam, and a branch of as reference laser beam, another Shu Zuowei measures laser beam exits to measurement target;
Step 3, reference laser beam are divided into two bundle laser through Amici prism, wherein beam of laser through polarization direction with
v 1after No. four identical polaroids (47), frequency is
v 1,
v 2with
v 3the polarization laser of horizontal direction enter into No. four photodetectors (48) and change, its output packet is containing the electric signal of bigness scale chi phase information, and frequency is
v 1-
v 2, another beam of laser through polarization direction with
v 1no. five photodetectors (54) are incided after becoming No. five polaroids (53) of 45 degree, electric signal that No. five photodetectors (54) export is high frequency electrical signal through low-pass filter filtering, retain low frequency electrical number, obtain the signal comprising accurate measurement chi phase information, its frequency is
f 1-
f 2;
When step 4, measurement start, reference surface No. nine catoptrons (59) maintain static, mobile No. ten catoptrons (61) are to destination end, measuring distance is L, measuring beam is after measuring catoptron (59) reflection, and the light beam reflected with reference surface converges at No. six polarization spectroscope (57) places, enters metering circuit, measure laser beam be divided into two bundle laser beam through Amici prism, wherein beam of laser bundle through polarization direction with
v 1after No. six identical polaroids (63), frequency is
v 1,
v 2with
v 3the polarization laser of horizontal direction enter into No. six photodetectors (64) and change, its output packet is containing the electric signal of bigness scale chi phase information, and frequency is
v 1-
v 2, surveying chi length is
, another beam of laser through polarization direction with
v 1no. seven photodetectors (68) are incided after becoming No. seven polaroids (67) of 45 degree, electric signal that No. five photodetectors (60) export is high frequency electrical signal through low-pass filter filtering, retain low frequency electrical number, obtain the signal comprising accurate measurement chi phase information, its frequency is
f 1-
f 2, surveying chi length is
;
Step 5, obtain frequency respectively by a phase detector (52) and No. two phase detectors (56) and be
v 1-
v 2with
f 1-
f 2the phase differential of two path signal
Φ 1with
Φ 2, according to formula
try to achieve the distance measure of bigness scale chi
l c , and substituted into the phase integer value that formula tries to achieve accurate measurement chi
; Wherein
floor(
x) function returns
xthe integral part of value, finally try to achieve tested distance value according to formula:
, in formula: c is the light velocity, n is the air refraction of environment.
5. according to claim 4 based on the synchronous mixing laser distance-finding method surveying chi of can tracing to the source more, it is characterized in that: the phase differential of described two path signal
Φ 1with phase differential
Φ 2measurement carry out at synchronization.
6. according to claim 4 based on the synchronous mixing laser distance-finding method surveying chi of can tracing to the source more, it is characterized in that: accurate measurement chi used and bigness scale chi all can be traced to the source.
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