CN104035087B - High-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement device and method - Google Patents
High-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement device and method Download PDFInfo
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- CN104035087B CN104035087B CN201410263610.0A CN201410263610A CN104035087B CN 104035087 B CN104035087 B CN 104035087B CN 201410263610 A CN201410263610 A CN 201410263610A CN 104035087 B CN104035087 B CN 104035087B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S11/00—Systems for determining distance or velocity not using reflection or reradiation
- G01S11/12—Systems for determining distance or velocity not using reflection or reradiation using electromagnetic waves other than radio waves
Abstract
The invention provides a high-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement device and method and belongs to a phase laser distance measurement technology. The high-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement device comprises a measuring ruler generation unit, a laser frequency shifting unit, a beam expanding collimation lens group and a light path and a circuit measurement unit. The high-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement method comprises step 1, opening a frequency standard laser and a semiconductor laser; step 2, serving one beam as a reference laser beam and serving the other beam as a measurement laser beam; step 3, serving a formula as an accurate measurement ruler; step 4, serving a formula as a rough measurement ruler; step 5, moving a measurement prism to a target side to obtain the phase difference Phi 1 of the rough measurement ruler and the phase difference Phi 2 of the accurate measurement ruler and obtaining a measured distance value through a formula. According to the high-accuracy synchronous multi-measurement-ruler based semiconductor laser distance measurement device and method, the problem that the multi-measurement-ruler synchronicity and traceability of devices and methods cannot be integrated in the phase laser distance measurement technology is solved, the accuracy of distance measurement is high, the measurement efficiency is high, and the stability and the real-time performance are high.
Description
Technical field
The invention belongs to phase place laser measuring technique, relate generally to a kind of phase laser distance apparatus and method.
Background technology
Large-scale metrology development large-scale precision machine-building, great science and technology engineering, aerospace industry, shipping industry and
Receive much concern in the large-scale optical, mechanical and electronic integration equipment processing and manufacturing of microelectronics equipment industry etc., wherein several meters to hundreds of meter of scopes big
Dimensional measurement is large parts processing and the overall important foundation assembled in aerospace vehicle and jumbo ship, its measurement side
Method directly affects workpiece quality and assembly precision with the quality of equipment performance, and then affects the running quality of complete equipment, performance
And the life-span.Chi phase ranging methods of surveying carry out refining accuracy survey using one group of survey chi wavelength from big to small to tested distance more
Amount, solves conflicting between measurement range and certainty of measurement, can reach submillimeter in hundreds of meters overlength operating distance
To micron-sized static measurement precision.
Survey in chi phase laser distance technology, although the mode how survey chi measures step by step has taken into account measurement range and survey more
The demand of accuracy of measurement, but the restriction due to light source technology, bigness scale chi and accurate measurement chi can not produce line phase measurement of going forward side by side simultaneously,
Cause that time of measuring is long, the problem of measurement result poor real, on the other hand due to surveying chi phase laser distance skills more
Measured on the basis of surveying chi wavelength size in art, survey the stability of chi wavelength and accuracy directly affects the essence of laser ranging
How degree, therefore obtain the bigness scale chi that high stability can trace to the source and accurate measurement chi wavelength, and to be allowed to simultaneously participate in measurement be current
Improve the subject matters surveying chi phase laser distance precision and real-time more.
Under distance or even over distance measurement background, the output of light source is one of important aspect, passes through
The analysis of existing LASER Light Source is understood, light source the more commonly used at present is gas laser, semiconductor laser, Solid State Laser
Device and dye laser.Wherein gas laser structure is simple, good beam quality, but its output is limited simultaneously, and document was [once
Bright, fourth Venus, Yuan Xiaodong. improve frequency stabilization he-ne laser output power research. Acta Optica .1996.1] mention conventional
He-ne laser instrument peak power output also only within 5 milliwatts it is impossible to meet the needs of long range measurements.And quasiconductor swashs
Light device is a kind of high efficiency, broadband, is easy to the laser instrument modulated, its peak power output is far longer than gas laser, and
Structure is simple, meets demand for development and the trend of over distance range finding.
In absolute distance measurement, another key point is to survey stability and the tractability of chi, and it is relevant with light source technology,
By the analysis of the light source technology to phase laser distance method laser, the modulation means of phase method have electric current both at home and abroad at present
Directly modulation, light modulation and intermode beats frequency modulation etc..
Direct current modulation method utilizes semiconductor laser, the feature that light intensity changes with curent change, comes to quasiconductor
The output intensity of laser instrument is modulated, and has the advantages that simply easily to modulate.Document [siyuan liu, jiubin tan and
binke hou. multicycle synchronous digital phase measurement used to further
improve phase-shift laser range finding.meas. sci. technol.2007,18:1756–
1762] with patent [multiple frequency synchronous modulation large range high precision fast laser ranging apparatus and method, publication number:
Cn1825138] all elaborate a kind of current modulating method based on semiconductor laser, it adopts the compound of multiple frequency synchronous synthesis
Signal synchronizes modulation it is achieved that obtaining each modulation frequency pin in multifrequency modulation range finding in synchronization to laser output power
Measurement result to tested distance, but in order to obtain linear modulation, make operating point be in the straight line portion of output characteristic curve,
Suitable bias current makes its output signal undistorted must to add one while adding modulated signal electric current, the introducing of direct current biasing
Increase power consumption, temperature raises when working long hours, and can affect the stability of Output optical power, lead to modulation waveform to deform,
And the increase with modulating frequency, modulation depth can reduce, and lead to modulation waveform to deform it is impossible to carry out high frequency modulated, limit
The size of accurate measurement chi wavelength and degree of stability；On the other hand, in the actual application of large-scale metrology, laser passes in distance
Easily cause the loss of laser power during defeated, cause to modulation waveform impact, and then affect survey chi accuracy and
Degree of stability, it is surveyed the frequency stability of chi and is generally less than 10-7.
It is mainly acousto-optic modulation method and electro-optic modulation method using light modulating method, its modulation bandwidth is subject to laser beam spot sizes
Etc. multifactorial impact, also bring along waveform distortions, just even more serious, therefore its institute particularly when high frequency (Gigahertz)
Form big survey chi, certainty of measurement is difficult to improve due to limiting by maximum modulation frequency.
Method by the use of the formed beat signal of laser instrument different mode output as surveying chi, referred to as intermode modulation.This
The modulation bandwidth of method is related to the chamber length of laser instrument, and he-ne laser frequency stabilization technology is ripe, and its frequency stability is high, by
The degree of stability of the survey chi that it is obtained is high, patent [high accuracy multiple frequency synchronous phase laser distance apparatus and method, publication number: cn
102419166] and patent [the multiple frequency synchronous phase laser distance apparatus and method based on dual-acousto-optic shift, publication number: cn
102305591a] all make use of the intermode of he-ne laser instrument to modulate and combine acousto-optic frequency translation technology, obtain high-precision accurate measurement
Chi and bigness scale chi, but the produced chi of surveying of the method does not possess tractability, and during its measurement, absolute measuring chi length needs another detection
System is given, and increased the complexity of measurement；On the other hand, the method that this utilization heterodyne method obtains accurate measurement chi phase place, at it
The frequency of reason signal is higher, can be to follow-up phase measurement difficulty with certainty of measurement affects it is assumed that phase-measurement accuracy
For 0.05o, range measurement accuracy will reach 1um-10um, then signal frequency is at least 2ghz-20ghz, at signal
The bandwidth of reason circuit.
Patent [superheterodyne device and method of reseptance and reception device semiconductor integrated circuit, open
Number: cn102484492a] all describe a kind of superhet interference signal treatment technology, [Zhang Cunman etc. surpasses Tsing-Hua University Zhang Cunman
Difference interference absolute distance measurement Review Study, optical technology 1998, (1): 7-9.] and Japanese shuko yokoyama professor
[shuko yokoyamaet al. real-time and high-resolution absolute-distance
measurement using a two-wavelength superheterodyne interferometer. meas. sci.
Technol.1999,10:1233-1239] all describe superhet absolute distance measurement method, this method reduce signal
Processing frequency it is easier to reach higher certainty of measurement.But this technology is on the one hand, can only obtain a survey chi, and do not possess
Tractability measures it is impossible to carry out chis of surveying more, let alone the synchronicity surveying chi more；Another aspect superhet obtains surveying chi wavelength
Less, typically in micron dimension, it is only used for the measurement of the micro- shape in surface.
In order to improve the stability of laser instrument output frequency, occur in that with the output laser of iodine saturated absorption frequency stabilization laser instrument
Frequency is entered to he-ne laser instrument and semiconductor laser as the frequency-stabilizing method of frequency stabilization benchmark, the saturated absorption spectra using iodine
Row rrequency-offset-lock controls.China has been also carried out studying, such as patent zl200910072518.5 and patent
Zl200910072519.x etc. all describes a kind of rrequency-offset-lock device of utilization iodine saturated absorption he-ne frequency stabilized carbon dioxide laser, makes
Laser output frequency after rrequency-offset-lock has very high frequency stability, has the advantages that output frequency can be traced to the source, but laser
Output frequency reach 1014Hz, between 400-700nm, measurement range is in nm rank it is impossible to be used for long distance for corresponding survey chi
From laser ranging, need a kind of survey chi of laser ranging on a large scale high frequency stability laser frequency being converted to and can tracing to the source badly, and
Synchronize them the technology of generation.
In sum, lack in phase laser distance technology at present one kind can take into account high-power, many survey chi synchronicitys with
The long distance and high precision laser ranging system of tractability and method.
Content of the invention
The invention aims to solve the existing technology in phase laser distance in lack one kind can take into account high-power, many
Survey the laser ranging system of chi synchronicity and tractability and the problem of method, provide a kind of based on surveying chi high-precise synchronization more
Semiconductor laser range apparatus and method, reach increase range finding motility, simplify ranging step, improve measurement efficiency and precision and
Degree of stability, the purpose of real-time.
The object of the present invention is achieved like this:
A kind of based on the semiconductor laser range device surveying chi high-precise synchronization more, by surveying chi signal generating unit, laser shift frequency
Unit, beam-expanding collimation microscope group and optical path and circuit unit composition, the laser that survey chi signal generating unit sends exports laser and moves
The input of frequency unit, a road laser of laser shift frequency unit output exports optical path and circuit by beam-expanding collimation microscope group
One input of unit, another road laser of laser shift frequency unit output is directly inputted to the another of optical path and circuit unit
One input；
The structure of described survey chi signal generating unit is: the laser beam of frequency reference laser instrument transmitting reaches the input of beam splitter
End, first outfan of beam splitter connects No. seven spectroscopical inputs, and No. seven spectroscopical outfans connect No. three
The input of photodetector, second outfan of beam splitter connects a spectroscopical input, a spectroscope
Outfan connect the input of a photodetector, the 3rd outfan of beam splitter connect No. two spectroscopical one defeated
Enter end, No. two spectroscopical outfans connect the input of No. two photodetectors, photodetector, No. two photodetections
The outfan of device and No. three photodetectors all connects the input of single-chip microcomputer, and connecting cavity is long respectively for three outfans of single-chip microcomputer
The input of adjustment executor, the outfan that chamber length adjusts executor connects a semiconductor laser, No. two quasiconductors respectively
Laser instrument and the input of No. three semiconductor lasers, an outfan connection four of a semiconductor laser is spectroscopical
One input, one outfan of No. four spectroscopes connects a spectroscopical input, No. four another output spectroscopical
End connects the input of a polaroid, and an outfan of No. two semiconductor lasers connects No. five spectroscopical inputs
End, one outfan of No. five spectroscopes connects No. two spectroscopical inputs, and No. five another outfan spectroscopical connect two
The input of number polaroid, the outfan of No. two polaroids connects No. six spectroscopical inputs, No. three semiconductor lasers
One outfan of device connects No. three spectroscopical inputs, and No. three spectroscopical outfans connect No. seven spectroscopes
Input, No. three spectroscopical another outfan connect the input of No. three polaroids, and the outfan of No. three polaroids leads to
Cross No. ten reflecting mirrors and connect No. six another input spectroscopical；
The structure of described laser shift frequency unit is: an outfan surveying chi signal generating unit connects the input of No. six reflecting mirrors
End, the outfan of No. six reflecting mirrors connects No. eight spectroscopical inputs, and No. eight spectroscopical outfans connect No. nine points
One input of light microscopic, another outfan surveying chi signal generating unit connects the input of a polarization spectroscope, and No. one partially
Spectroscopical outfan that shakes connects the input of a half-wave plate, and the outfan of a half-wave plate connects No. two polarization spectros
The input of mirror, an outfan of No. two polarization spectroscopes connects an input of No. three polarization spectroscopes, No. two polarizations
Another outfan spectroscopical connects the input of a reflecting mirror, and the outfan of a reflecting mirror connects a laser shift frequency
One input of device, the outfan of a dds signal source connects another input of a laser frequency shifter, a laser
The outfan of frequency shifter connects the input of No. two reflecting mirrors, and the outfan of No. two reflecting mirrors connects the another of No. three polarization spectroscopes
One input, the outfan of No. three polarization spectroscopes connects No. eight another input spectroscopical, and No. eight spectroscopical defeated
Go out end and connect No. nine spectroscopical inputs, another outfan of a polarization spectroscope connects the defeated of No. three reflecting mirrors
Enter end, the outfan of No. three reflecting mirrors connects the input of No. four polarization spectroscopes, No. four polarization spectros through No. two half-wave plates
One outfan of mirror connects an input of No. five polarization spectroscopes, and another outfan of No. four polarization spectroscopes connects
The input of No. four reflecting mirrors, the outfan of No. four reflecting mirrors connects an input of No. two laser frequency shifters, No. two dds letters
The outfan in number source connects another input of No. two laser frequency shifters, the outfan of No. two laser frequency shifters connect No. five anti-
Penetrate the input of mirror, the outfan of No. five reflecting mirrors connects another input of No. five polarization spectroscopes, No. five polarization spectros
The outfan of mirror connects No. nine another input spectroscopical；
The structure of described optical path and circuit unit is: an outfan of laser shift frequency unit connects No. seven reflecting mirrors
Input, the outfan of No. seven reflecting mirrors connects No. ten spectroscopical inputs, and No. ten spectroscopical outfans pass through
No. four polaroids are connected with the input of No. four photodetectors, and the outfan of No. four photodetectors connects a low-pass filtering
The input of device, an input of an outfan number frequency mixer of connection of a low pass filter, the one of No. three dds signal sources
Individual outfan connects another input of a frequency mixer, and one of an outfan number phase discriminator of connection of a frequency mixer defeated
Enter end, No. ten another outfan spectroscopical are connected with the input of No. five photodetectors by No. five polaroids, No. five
The outfan of photodetector connects the input of No. two low pass filters, and the outfan of No. two low pass filters connects No. two mirror
One input of phase device, the outfan of beam-expanding collimation microscope group connects an input of No. six polarization spectroscopes, No. six polarizations
A spectroscopical outfan is connected with the input of No. eight reflecting mirrors by a quarter-wave plate, No. eight reflecting mirrors defeated
Go out end connected with an input of No. six polarization spectroscopes by a quarter-wave plate, No. six polarization spectroscopes another
Individual outfan is connected with the input of No. nine reflecting mirrors by No. two quarter-wave plates, and the outfan of No. nine reflecting mirrors passes through two
Number quarter-wave plate is connected with another input of No. six polarization spectroscopes, another outfan of No. six polarization spectroscopes
Connect the spectroscopical input of ride on Bus No. 11, the spectroscopical outfan of ride on Bus No. 11 passes through No. six polaroids and No. six photoelectricity
The input connection of detector, the outfan of No. six photodetectors connects the input of No. three low pass filters, No. three low passes
The outfan of wave filter connects an input of No. three frequency mixers, and another outfan of No. three dds signal sources connects No. three
Another input of frequency mixer, the outfan of No. three frequency mixers connects another input of a phase discriminator, and ride on Bus No. 11 is divided
Another outfan of light microscopic is connected with the input of No. seven photodetectors by No. seven polaroids, No. seven photodetectors
Outfan connects the input of No. four low pass filters, and the outfan of No. four low pass filters connects another of No. two phase discriminators
Input.
A kind of based on the semiconductor laser range method surveying chi high-precise synchronization more, it specifically comprises the following steps that
Step one, open frequency benchmark laser, semiconductor laser, No. two semiconductor lasers and three and half are led
Body laser, after passing through preheating and frequency stabilization, by feedback control, by a semiconductor laser, No. two semiconductor lasers
Within the scope of device and No. three semiconductor laser output frequencies are locked in the certain frequency of frequency reference laser instrument, lead from one and half
Body laser sends after polaroid only surplus frequencyv 1Laser, send through polaroid from No. two semiconductor lasers
Only remaining frequency afterwards isv 2Laser, and by spectroscope with send from No. three semiconductor lasers remaining after polaroid
Frequency isv 3Laser converge；
Step 2, the laser of the three kinds of frequencies being formed by step one enter laser shift frequency unit, and wherein a branch of double frequency swashs
Light separates frequency with a polarization spectroscopev 2Withv 3Two bundle laser, are polarized with No. two after half-wave plate more respectively
Spectroscope and No. four polarization spectroscopes separate two bundle double-frequency lasers, and wherein one tunnel, through laser frequency shifter, is driven by dds signal source
Laser frequency shifter, frequency is respectivelyf 1Withf 2, finally the laser of various frequencies collect, wherein have five kinds of frequencies, respectivelyv 1、v 2、v 3、v 2+f 1Withv 3+f 2, this bundle laser light incident be divided into two-beam to Amici prism, a branch of as reference
Laser beam, another Shu Zuowei Laser Measurement bundle shines measurement target；
Step 3, reference laser beam are divided into two bundle laser through Amici prism, wherein beam of laser through polarization direction withv 1Phase
After No. four same polaroids, frequency isv 1、v 2Withv 3The polarization laser of horizontal direction enter into No. four photodetectors
Changed, it exports the signal of telecommunication, frequency isv 1 -v 2 ,In this, as bigness scale chi, another beam of laser through polarization direction withv 1
No. five photodetectors are incided, the signal of telecommunication of No. five photodetector outputs is through low pass filtered after No. five polaroids becoming 45 degree
Ripple device has filtered high frequency electrical signal, retains low-frequency electrical signal, and its frequency isf 1-f 2, in this, as accurate measurement chi；
When step 4, measurement start, No. eight reflecting mirrors of the plane of reference maintain static, and mobile No. nine reflecting mirrors, to destination end, are surveyed
, from for l, after measuring beam reflects through No. nine reflecting mirrors, the light beam reflecting with the plane of reference is at No. six polarization spectroscopes for span
Converge, enter measuring circuit, Laser Measurement bundle is divided into two bundle laser beams through Amici prism, and wherein one laser beam is through polarization direction
Withv 1After No. six polaroids of identical, frequency isv 1、v 2Withv 3The polarization laser of horizontal direction enter into No. six photoelectricity
Detector is changed, and it exports the signal of telecommunication, and its frequency isv 1-v 2, in this, as bigness scale chi, survey chi a length of, separately
Beam of laser through polarization direction withv 1No. seven photodetectors, No. five photodetections are incided after No. seven polaroids becoming 45 degree
The signal of telecommunication of device output has filtered high frequency electrical signal through low pass filter, retains low-frequency electrical signal, and its frequency isf 1-f 2,
In this, as accurate measurement chi, survey chi a length of；
Step 5, respectively obtain frequency by a phase discriminator and No. two phase discriminators and bev 1-v 2Withf 1-f 2Two-way
The phase contrast of the signal of telecommunicationφ 1Withφ 2, according to formulaTry to achieve the distance measure of bigness scale chil c , and will
It substitutes into the phase integer value that formula tries to achieve accurate measurement chi；Whereinfloor(x) function returnxValue
Integer part, try to achieve tested distance value finally according to formula:, in formula: c is the light velocity, n is environment
Air refraction.
The feature of the present invention and beneficial effect are:
First, the present invention proposes a kind of trace to the source
Survey chi production methods and device, this apparatus and method utilizes frequency reference type frequency reference laser instrument to three and half
Conductor laser carries out frequency stabilization and feedback control, makes output laser frequency and can directly trace back with the laser ranging survey chi wavelength being formed
Source is to frequency/wavelength benchmark, and can adjust lock point according to actual needs, and then is adjusted to surveying chi wavelength, increases
The motility of range finding, overcomes in existing range unit and surveys the shortcoming that chi is not directly traced to the source, simplify general range unit
Survey, when absolute measuring is long, the step that chi wavelength needs another detecting system need to provide, improve measurement efficiency and precision, this is this
One of innovative point of the other existing apparatus in area pellucida.
Second, the present invention proposes a kind of many surveys chi Phase synchronization acquisition methods being combined based on heterodyne and dress with superhet
Put.This apparatus and method carries out shift frequency using laser frequency shifter to the laser of component frequency, produces the laser of multi-frequency, and with
Shi Liyong heterodyne approach and superhet approach obtain bigness scale chi and accurate measurement chi respectively, so be allowed to simultaneously participate in measurement it is achieved that
The coarse-fine synchro measure surveying chi phase place, shortens time of measuring, improves the real-time of measurement result.By heterodyne and superhet
The laser interferometry combining obtains test phase signal, eliminates common mode disturbances, improves the degree of stability surveying chi, drops simultaneously
The low frequency of phase measuring circuit receipt signal, reduces the difficulty of circuit design, and this is the wound that the present invention distinguishes existing apparatus
The two of new point.
3rd, there is light source using the semiconductor laser light resource based on rrequency-offset-lock as surveying chi in the present invention, make quasiconductor
Laser frequency lock, on iodine frequency stabilization absworption peak, has the advantages that frequency stability is high, and semiconductor laser light resource output laser
Energy is big, and light echo energy is strong, and signal to noise ratio is higher, advantageously in the measurement of distance, overcomes general gas to a certain extent
Body laser is faint and light echo energy that lead to is faint due to output light energy, and signal to noise ratio is low, or even causes system normal
The problem of work.This is the three of the innovative point that the present invention distinguishes existing apparatus.
Brief description
Fig. 1 is the general structure schematic diagram of the laser ranging system of the present invention；
Fig. 2 is the structural representation surveying chi signal generating unit；
Fig. 3 is the structural representation of laser shift frequency unit；
Fig. 4 is the structural representation of optical path and circuit unit.
In figure piece number illustrate: 1, survey chi signal generating unit, 2, laser shift frequency unit, 3, beam-expanding collimation microscope group, 4, optical path
And circuit unit, 5, frequency reference laser instrument, 6, beam splitter, 7, spectroscope, 8, No. two spectroscopes, 9, No. three spectroscopes,
10th, photodetector, 11, No. two photodetectors, 12, No. three photodetectors, 13, chamber length adjustment executor, 14, single
Piece machine, 15, semiconductor laser, 16, No. two semiconductor lasers, 17, No. three semiconductor lasers, 18, No. four light splitting
Mirror, 19, No. five spectroscopes, 20, No. six spectroscopes, 21, polaroid, 22, No. two polaroids, 23, No. three polaroids, 24 1
Number polarization spectroscope, 25, half-wave plate, 26, No. two polarization spectroscopes, 27, reflecting mirror, 28, dds signal source,
29th, laser frequency shifter, 30, No. two reflecting mirrors, 31, No. three polarization spectroscopes, 32, No. eight spectroscopes, 33, No. three reflections
Mirror, 34, No. two half-wave plates, 35, No. four polarization spectroscopes, 36, No. four reflecting mirrors, 37, No. two dds signal sources, 38, No. two laser
Frequency shifter, 39, No. five reflecting mirrors, 40, No. five polarization spectroscopes, 41, No. six reflecting mirrors, 42, No. nine spectroscopes, 43, No. seven anti-
Penetrate mirror, 44, No. ten spectroscopes, 45, No. four polaroids, 46, No. four photodetectors, 47, low pass filter, 48, No. one
Frequency mixer, 49, No. three dds signal sources, 50, phase discriminator, 51, No. five polaroids, 52, No. five photodetectors, 53, No. two
Low pass filter, 54, No. two phase discriminators, 55, No. six polarization spectroscopes, 56, quarter-wave plate, 57, No. eight reflecting mirrors,
58th, No. two quarter-wave plates, 59, No. nine reflecting mirrors, 60, ride on Bus No. 11 spectroscope, 61, No. six polaroids, 62, No. six light electrical resistivity surveys
Survey device, 63, No. three low pass filters, 64, No. three frequency mixers, 65, No. seven polaroids, 66, No. seven photodetectors, 67, No. four
Low pass filter, 68, No. ten reflecting mirrors, 69, No. seven spectroscopes.
Specific embodiment
Below in conjunction with the accompanying drawings embodiment of the present invention is described in detail.
A kind of based on the semiconductor laser range device surveying chi high-precise synchronization more,
Described device is by surveying chi signal generating unit 1, laser shift frequency unit 2, beam-expanding collimation microscope group 3 and optical path and circuit list
Unit 4 composition, the laser that survey chi signal generating unit 1 sends exports the input of laser shift frequency unit 2, and laser shift frequency unit 2 exports
A road laser export an input of optical path and circuit unit 4, laser shift frequency unit by beam-expanding collimation microscope group 3
Another road laser of 2 outputs is directly inputted to another input of optical path and circuit unit 4；
The structure of described survey chi signal generating unit 1 is: the laser beam of frequency reference laser instrument 5 transmitting reaches the defeated of beam splitter 6
Enter end, first outfan of beam splitter 6 connects an input of No. seven spectroscopes 69, the outfan of No. seven spectroscopes 69
Connect the input of No. three photodetectors 12, second outfan of beam splitter 6 connects an input of a spectroscope 7
End, the outfan of a spectroscope 7 connects the input of a photodetector 10, and the 3rd outfan of beam splitter 6 connects
One input of No. two spectroscopes 8, the input of outfan No. two photodetectors 11 of connection of No. two spectroscopes 8, No. one
The outfan of 10, No. two photodetectors 11 of photodetector and No. three photodetectors 12 all connects the input of single-chip microcomputer 14
End, three outfans difference connecting cavity length of single-chip microcomputer 14 adjust the input of executor 13, and chamber length adjusts the defeated of executor 13
Go out the input that end connects 15, No. two semiconductor lasers 16 of a semiconductor laser and No. three semiconductor lasers 17 respectively
End, an outfan of a semiconductor laser 15 connects an input of No. four spectroscopes 18, No. four spectroscopes 18 1
Individual outfan connects the input of a spectroscope 7, and another outfan of No. four spectroscopes 18 connects a polaroid 21
Input, an outfan of No. two semiconductor lasers 16 connects an input of No. five spectroscopes 19, No. five spectroscopes
19 1 outfans connect the input of No. two spectroscopes 8, and another outfan of No. five spectroscopes 19 connects No. two polaroids
22 input, the outfan of No. two polaroids 22 connects an input of No. six spectroscopes 20, No. three semiconductor lasers
17 outfan connects an input of No. three spectroscopes 9, and an outfan of No. three spectroscopes 9 connects No. seven light splitting
The input of mirror 69, another outfan of No. three spectroscopes 9 connects the input of No. three polaroids 23, No. three polaroids 23
Outfan passes through another input that No. ten reflecting mirrors 68 connect No. six spectroscopes 20；
The structure of described laser shift frequency unit 2 is: an outfan surveying chi signal generating unit 1 connects No. six reflecting mirrors 41
Input, the outfan of No. six reflecting mirrors 41 connects an input of No. eight spectroscopes 32, the outfan of No. eight spectroscopes 32
Connect an input of No. nine spectroscopes 42, another outfan surveying chi signal generating unit 1 connects a polarization spectroscope 24
Input, outfan of a polarization spectroscope 24 connects the input of a half-wave plate 25, a half-wave plate 25
Outfan connects the input of No. two polarization spectroscopes 26, and an outfan of No. two polarization spectroscopes 26 connects No. three polarizations point
One input of light microscopic 31, the input of another outfan number reflecting mirror 27 of connection of No. two polarization spectroscopes 26, one
The outfan of number reflecting mirror 27 connects an input of a laser frequency shifter 29, and the outfan of a dds signal source 28 is even
Connect another input of a laser frequency shifter 29, the outfan of a laser frequency shifter 29 connects the defeated of No. two reflecting mirrors 30
Enter end, the outfan of No. two reflecting mirrors 30 connects another input of No. three polarization spectroscopes 31, No. three polarization spectroscopes 31
Outfan connect another inputs of No. eight spectroscopes 32, the outfan of No. eight spectroscopes 32 connects No. nine spectroscopes 42
One input, another outfan of a polarization spectroscope 24 connects the input of No. three reflecting mirrors 33, No. three reflecting mirrors
33 outfan connects the input of No. four polarization spectroscopes 35 through No. two half-wave plates 34, one of No. four polarization spectroscopes 35
Outfan connects an input of No. five polarization spectroscopes 40, and another outfan of No. four polarization spectroscopes 35 connects No. four
The input of reflecting mirror 36, the outfan of No. four reflecting mirrors 36 connects an input of No. two laser frequency shifters 38, No. two dds
The outfan of signal source 37 connects another input of No. two laser frequency shifters 38, and the outfan of No. two laser frequency shifters 38 is even
Connect the input of No. five reflecting mirrors 39, the outfan of No. five reflecting mirrors 39 connects another input of No. five polarization spectroscopes 40
End, the outfan of No. five polarization spectroscopes 40 connects another input of No. nine spectroscopes 42；
The structure of described optical path and circuit unit 4 is: an outfan of laser shift frequency unit 2 connects No. seven reflections
The input of mirror 43, the input of outfan No. ten spectroscopes 44 of connection of No. seven reflecting mirrors 43, one of No. ten spectroscopes 44
Outfan is connected with the input of No. four photodetectors 46 by No. four polaroids 45, the outfan of No. four photodetectors 46
Connect the input of a low pass filter 47, one of an outfan number frequency mixer 48 of connection of a low pass filter 47 defeated
Enter end, an outfan of No. three dds signal sources 49 connects another input of a frequency mixer 48, a frequency mixer 48
Outfan connects an input of a phase discriminator 50, and another outfan of No. ten spectroscopes 44 passes through No. five polaroids 51
Connect with the input of No. five photodetectors 52, the outfan of No. five photodetectors 52 connects No. two low pass filters 53
Input, the outfan of No. two low pass filters 53 connects an input of No. two phase discriminators 54, beam-expanding collimation microscope group 3 defeated
Go out the input that end connects No. six polarization spectroscopes 55, an outfan of No. six polarization spectroscopes 55 passes through No. one four points
One of wave plate 56 connect with the input of No. eight reflecting mirrors 57, the outfan of No. eight reflecting mirrors 57 passes through a quarter-wave plate
56 are connected with an input of No. six polarization spectroscopes 55, and another outfan of No. six polarization spectroscopes 55 passes through No. two four
/ mono- wave plate 58 is connected with the input of No. nine reflecting mirrors 59, and the outfan of No. nine reflecting mirrors 59 passes through No. two quarter-waves
Piece 58 is connected with another input of No. six polarization spectroscopes 55, and another outfan of No. six polarization spectroscopes 55 connects ten
One input of a number spectroscope 60, an outfan of ride on Bus No. 11 spectroscope 60 passes through No. six polaroids 61 and No. six photoelectricity
The input connection of detector 62, the input of outfan No. three low pass filters 63 of connection of No. six photodetectors 62, three
The outfan of number low pass filter 63 connects an input of No. three frequency mixers 64, and another of No. three dds signal sources 49 is defeated
Go out another input that end connects No. three frequency mixers 64, the outfan of No. three frequency mixers 64 connects the another of a phase discriminator 50
Individual input, another outfan of ride on Bus No. 11 spectroscope 60 passes through the input of No. seven polaroids 65 and No. seven photodetectors 66
End connection, the outfan of No. seven photodetectors 66 connects the input of No. four low pass filters 67, No. four low pass filters 67
Outfan connect No. two phase discriminators 54 another input.
One, No. two laser frequency shifters 29,38 of described laser shift frequency unit 2 include acousto-optic frequency shifters, electro-optic frequency translation device, and
Laser frequency can be adjusted.
Described survey chi signal generating unit 1 medium frequency benchmark laser 5 includes iodine saturated absorption frequency stabilization laser instrument, femtosecond laser frequency
Rate combs laser instrument, and frequency stability is better than 10-12.
A kind of based on the semiconductor laser range method surveying chi high-precise synchronization more, it specifically comprises the following steps that
Step one, open frequency benchmark laser 15, No. two semiconductor lasers 16 and three of 5, semiconductor laser
Number semiconductor laser 17, after preheating and frequency stabilization, by feedback control, by a semiconductor laser 15, two
Semiconductor laser 16 and No. three semiconductor laser 17 output frequencies are locked in the certain frequency scope of frequency reference laser instrument 5
Within, sending after polaroid only surplus frequency from a semiconductor laser 15 isv 1Laser, from No. two semiconductor lasers
Device 16 sends after polaroid only surplus frequencyv 2Laser, and by spectroscope with from No. three semiconductor lasers 17
Going out remaining frequency after polaroid isv 3Laser converge；
Step 2, the laser of the three kinds of frequencies being formed by step one enter laser shift frequency unit 2, and wherein a branch of double frequency swashs
Light separates frequency with a polarization spectroscope 24v 2Withv 3Two bundle laser, after half-wave plate more respectively with No. two partially
Shake spectroscope 26 and No. four polarization spectroscopes 35 separate two bundle double-frequency lasers, wherein one tunnel through laser frequency shifter, by dds signal
Source drives laser frequency shifter, and frequency is respectivelyf 1Withf 2, finally the laser of various frequencies collect, wherein have five kinds of frequencies,
It is respectivelyv 1、v 2、v 3、v 2+f 1Withv 3+f 2, this restraints laser light incident and is divided into two-beam, Yi Shuzuo to Amici prism
For reference laser beam, another Shu Zuowei Laser Measurement bundle shines measurement target；
Step 3, reference laser beam are divided into two bundle laser through Amici prism, wherein beam of laser through polarization direction withv 1Phase
After No. four same polaroids 45, frequency isv 1、v 2Withv 3The polarization laser of horizontal direction enter into No. four photodetections
Device 46 is changed, and it exports the signal of telecommunication, and frequency isv 1 -v 2 ,In this, as bigness scale chi, another beam of laser is through polarization direction
Withv 1No. five photodetectors 52, the telecommunications of No. five photodetector 52 outputs is incided after No. five polaroids 51 becoming 45 degree
Number filter high frequency electrical signal through low pass filter, retain low-frequency electrical signal, its frequency isf 1-f 2, in this, as accurate measurement
Chi；
When step 4, measurement start, No. eight reflecting mirrors 57 of the plane of reference maintain static, and mobile No. nine reflecting mirrors 59 are to target
End, measurement distance is l, and after measuring beam reflects through No. nine reflecting mirrors 59, the light beam being reflected with the plane of reference is polarized at No. six
Converge at spectroscope 55, enter measuring circuit, Laser Measurement bundle is divided into two bundle laser beams, wherein one laser beam through Amici prism
Through polarization direction withv 1After No. six polaroids 61 of identical, frequency isv 1、v 2Withv 3The polarization laser of horizontal direction enter
Enter and changed to No. six photodetectors 62, it exports the signal of telecommunication, its frequency isv 1 -v 2 ,In this, as bigness scale chi, survey
Chi is a length of, another beam of laser through polarization direction withv 1No. seven photoelectricity are incided after No. seven polaroids 65 becoming 45 degree
Detector 66, the signal of telecommunication of No. five photodetector 52 outputs has filtered high frequency electrical signal through low pass filter, retains low frequency
The signal of telecommunication, its frequency isf 1-f 2, in this, as accurate measurement chi, survey chi a length of；
Step 5, respectively obtain frequency by a phase discriminator 50 and No. two phase discriminators 54 and bev 1-v 2Withf 1-f 2's
The phase contrast of two path signalφ 1Withφ 2, according to formulaTry to achieve the distance measure of bigness scale chil c ,
And substituted into the phase integer value that formula tries to achieve accurate measurement chi；Whereinfloor(x) function
ReturnxThe integer part of value, tries to achieve tested distance value finally according to formula:, in formula: c is light
Speed, n is the air refraction of environment.
The phase contrast of described two path signalφ 1With phase contrastφ 2Measurement carry out in synchronization.
Accurate measurement chi used and bigness scale chi all can be traced to the source.
Claims (6)
1. a kind of based on the semiconductor laser range device surveying chi high-precise synchronization more it is characterised in that: described device is by surveying chi
Signal generating unit (1), laser shift frequency unit (2), beam-expanding collimation microscope group (3) and optical path and circuit unit (4) composition, survey chi life
The laser that unit (1) sends is become to export the input of laser shift frequency unit (2), the road that laser shift frequency unit (2) exports is swashed
Light exports an input of optical path and circuit unit (4), laser shift frequency unit (2) by beam-expanding collimation microscope group (3)
Another road laser of output is directly inputted to optical path and another input of circuit unit (4)；
The structure of described survey chi signal generating unit (1) is: the laser beam that frequency reference laser instrument (5) is launched reaches beam splitter (6)
Input, first outfan of beam splitter (6) connects an input of No. seven spectroscopes (69), No. seven spectroscopes (69)
Outfan connect the input of No. three photodetectors (12), second outfan of beam splitter (6) connects a spectroscope
(7) a input, the outfan of a spectroscope (7) connects the input of a photodetector (10), beam splitter (6)
The 3rd outfan connect an input of No. two spectroscopes (8), the outfan of No. two spectroscopes (8) connects No. two photoelectricity
The input of detector (11), a photodetector (10), No. two photodetectors (11) and No. three photodetectors (12)
Outfan all connect the input of single-chip microcomputer (14), three outfans connecting cavity length adjustment executors respectively of single-chip microcomputer (14)
(13) input, the outfan that chamber length adjusts executor (13) connects a semiconductor laser (15) respectively, two and half leads
Body laser (16) and the input of No. three semiconductor lasers (17), an outfan of a semiconductor laser (15) is even
Connect an input of No. four spectroscopes (18), (18) outfans of No. four spectroscopes connect the input of a spectroscope (7)
End, another outfan of No. four spectroscopes (18) connects the input of a polaroid (21), No. two semiconductor lasers
(16) a outfan connects an input of No. five spectroscopes (19), and (19) outfans of No. five spectroscopes connect two
The input of number spectroscope (8), another outfan of No. five spectroscopes (19) connects the input of No. two polaroids (22), and two
The outfan of number polaroid (22) connects an input of No. six spectroscopes (20), one of No. three semiconductor lasers (17)
Outfan connects an input of No. three spectroscopes (9), and an outfan of No. three spectroscopes (9) connects No. seven spectroscopes
(69) input, another outfan of No. three spectroscopes (9) connects the input of No. three polaroids (23), No. three polaroids
(23) outfan passes through another input that No. ten reflecting mirrors (68) connect No. six spectroscopes (20)；
The structure of described laser shift frequency unit (2) is: an outfan surveying chi signal generating unit (1) connects No. six reflecting mirrors (41)
Input, the outfan of No. six reflecting mirrors (41) connects an input of No. eight spectroscopes (32), No. eight spectroscopes (32)
Outfan connect No. nine spectroscopes (42) an input, survey chi signal generating unit (1) another outfan connect No. one
The input of polarization spectroscope (24), an outfan of a polarization spectroscope (24) connects the input of a half-wave plate (25)
End, the outfan of a half-wave plate (25) connects the input of No. two polarization spectroscopes (26), No. two polarization spectroscopes (26)
One outfan connects an input of No. three polarization spectroscopes (31), another outfan of No. two polarization spectroscopes (26)
Connect the input of a reflecting mirror (27), the outfan of a reflecting mirror (27) connects one of a laser frequency shifter (29)
Input, the outfan of a dds signal source (28) connects another input of a laser frequency shifter (29), a laser
The outfan of frequency shifter (29) connects the input of No. two reflecting mirrors (30), and the outfan of No. two reflecting mirrors (30) connects No. three partially
Shake another input of spectroscope (31), and the outfan of No. three polarization spectroscopes (31) connects the another of No. eight spectroscopes (32)
Individual input, the outfan of No. eight spectroscopes (32) connects an input of No. nine spectroscopes (42), a polarization spectroscope
(24) another outfan connects the input of No. three reflecting mirrors (33), and the outfan of No. three reflecting mirrors (33) is through two and half
Wave plate (34) connects the input of No. four polarization spectroscopes (35), and an outfan of No. four polarization spectroscopes (35) connects No. five
One input of polarization spectroscope (40), another outfan of No. four polarization spectroscopes (35) connects No. four reflecting mirrors (36)
Input, the outfan of No. four reflecting mirrors (36) connects an input of No. two laser frequency shifters (38), No. two dds signals
The outfan in source (37) connects another input of No. two laser frequency shifters (38), the outfan of No. two laser frequency shifters (38)
Connect the input of No. five reflecting mirrors (39), the outfan of No. five reflecting mirrors (39) connects the another of No. five polarization spectroscopes (40)
Individual input, the outfan of No. five polarization spectroscopes (40) connects another input of No. nine spectroscopes (42)；
The structure of described optical path and circuit unit (4) is: an outfan of laser shift frequency unit (2) connects No. seven reflections
The input of mirror (43), the outfan of No. seven reflecting mirrors (43) connects the input of No. ten spectroscopes (44), No. ten spectroscopes
(44) a outfan is connected with the input of No. four photodetectors (46) by No. four polaroids (45), No. four light electrical resistivity surveys
The outfan surveying device (46) connects the input of a low pass filter (47), and the outfan of a low pass filter (47) connects
One input of a number frequency mixer (48), an outfan of No. three dds signal sources (49) connects a frequency mixer (48)
Another input, the outfan of a frequency mixer (48) connects an input of a phase discriminator (50), No. ten spectroscopes
(44) another outfan is connected with the input of No. five photodetectors (52) by No. five polaroids (51), No. five photoelectricity
The outfan of detector (52) connects the input of No. two low pass filters (53), and the outfan of No. two low pass filters (53) is even
Connect an input of No. two phase discriminators (54), the outfan of beam-expanding collimation microscope group (3) connects No. six polarization spectroscopes (55)
One input, an outfan of No. six polarization spectroscopes (55) passes through a quarter-wave plate (56) and No. eight reflecting mirrors
(57) input connection, the outfan of No. eight reflecting mirrors (57) passes through a quarter-wave plate (56) and No. six polarization spectros
One input connection of mirror (55), another outfan of No. six polarization spectroscopes (55) passes through No. two quarter-wave plates
(58) connect with the input of No. nine reflecting mirrors (59), the outfan of No. nine reflecting mirrors (59) passes through No. two quarter-wave plates
(58) connect with another input of No. six polarization spectroscopes (55), another outfan of No. six polarization spectroscopes (55) is even
Connect an input of ride on Bus No. 11 spectroscope (60), an outfan of ride on Bus No. 11 spectroscope (60) passes through No. six polaroids (61)
Connect with the input of No. six photodetectors (62), the outfan of No. six photodetectors (62) connects No. three low pass filters
(63) input, the outfan of No. three low pass filters (63) connects an input of No. three frequency mixers (64), No. three dds
Another outfan of signal source (49) connects another input of No. three frequency mixers (64), the output of No. three frequency mixers (64)
End connects another input of a phase discriminator (50), and another outfan of ride on Bus No. 11 spectroscope (60) passes through No. seven and polarizes
Piece (65) is connected with the input of No. seven photodetectors (66), and the outfan of No. seven photodetectors (66) connects No. four low passes
The input of wave filter (67), the outfan of No. four low pass filters (67) connects another input of No. two phase discriminators (54)
End.
2. according to claim 1 based on the semiconductor laser range device surveying chi high-precise synchronization more it is characterised in that:
One, No. two laser frequency shifters (29,38) of described laser shift frequency unit (2) include acousto-optic frequency shifters, electro-optic frequency translation device, and laser
Frequency can be adjusted.
3. according to claim 1 based on the semiconductor laser range device surveying chi high-precise synchronization more it is characterised in that:
Described survey chi signal generating unit (1) medium frequency benchmark laser (5) includes iodine saturated absorption frequency stabilization laser instrument, femtosecond laser frequency comb
Laser instrument, and frequency stability is better than 10-12.
4. a kind of range finding side based on the semiconductor laser range device surveying chi high-precise synchronization as claimed in claim 1 more
Method it is characterised in that: specifically comprise the following steps that
Step one, open frequency benchmark laser (5), a semiconductor laser (15), No. two semiconductor lasers (16) and
No. three semiconductor lasers (17), after passing through preheating and frequency stabilization, by feedback control, by a semiconductor laser
(15), No. two semiconductor lasers (16) and No. three semiconductor laser (17) output frequencies are locked in frequency reference laser instrument
(5), within the scope of certain frequency, sending after polaroid only surplus frequency from a semiconductor laser (15) isv 1Swash
Light, sending after polaroid only surplus frequency from No. two semiconductor lasers (16) isv 2Laser, and by spectroscope with from
No. three semiconductor lasers (17) send remaining frequency after polaroid and arev 3Laser converge；
Step 2, the laser of the three kinds of frequencies being formed by step one enter laser shift frequency unit (2), wherein a branch of double-frequency laser
Separating frequency with a polarization spectroscope (24) isv 2Withv 3Two bundle laser, after half-wave plate more respectively with No. two partially
Shake spectroscope (26) and No. four polarization spectroscopes (35) separate two bundle double-frequency lasers, wherein one tunnel through laser frequency shifter, by dds
Signal source drives laser frequency shifter, and frequency is respectivelyf 1Withf 2, finally the laser of various frequencies collect, wherein have five kinds
Frequency, respectivelyv 1、v 2、v 3、v 2+f 1Withv 3+f 2, this restraints laser light incident and is divided into two-beam to Amici prism, and one
Shu Zuowei reference laser beam, another Shu Zuowei Laser Measurement bundle shines measurement target；
Step 3, reference laser beam are divided into two bundle laser through Amici prism, wherein beam of laser through polarization direction withv 1Identical
After No. four polaroids (45), frequency isv 1、v 2Withv 3The polarization laser of horizontal direction enter into No. four photodetectors
(46) changed, it exports the signal of telecommunication, frequency isv 1-v 2 ,In this, as bigness scale chi, another beam of laser is through polarization direction
Withv 1No. five photodetectors (52), No. five photodetector (52) outputs are incided after No. five polaroids (51) becoming 45 degree
The signal of telecommunication filtered high frequency electrical signal through low pass filter, retain low-frequency electrical signal, its frequency isf 1-f 2, made with this
For accurate measurement chi；
When step 4, measurement start, No. eight reflecting mirrors (57) of the plane of reference maintain static, and mobile No. nine reflecting mirrors (59) are to target
End, measurement distance is l, and after measuring beam reflects through No. nine reflecting mirrors (59), the light beam reflecting with the plane of reference is at No. six partially
Spectroscope (55) place that shakes converges, and enters measuring circuit, Laser Measurement bundle is divided into two bundle laser beams through Amici prism, wherein a branch of swashs
Light beam through polarization direction withv 1After No. six polaroids (61) of identical, frequency isv 1、v 2Withv 3Horizontal direction polarization
Laser enters into No. six photodetectors (62) and is changed, and it exports the signal of telecommunication, and its frequency isv 1-v 2 ,In this, as
Bigness scale chi, surveys chi a length of, another beam of laser through polarization direction withv 1Enter after No. seven polaroids (65) becoming 45 degree
It is mapped to No. seven photodetectors (66), the signal of telecommunication that No. five photodetectors (52) export has filtered high frequency through low pass filter
The signal of telecommunication, retains low-frequency electrical signal, and its frequency isf 1-f 2, in this, as accurate measurement chi, survey chi a length of；
Step 5, respectively obtain frequency by a phase discriminator (50) and No. two phase discriminators (54) and bev 1-v 2Withf 1-f 2's
The phase contrast of two path signalφ 1Withφ 2, according to formulaTry to achieve the distance measure of bigness scale chil c ,
And substituted into the phase integer value that formula tries to achieve accurate measurement chi；Whereinfloor(x) function returnx
The integer part of value, tries to achieve tested distance value finally according to formula:, in formula: c is the light velocity, n is environment
Air refraction.
5. the distance-finding method based on the semiconductor laser range device surveying chi high-precise synchronization according to claim 4 more,
It is characterized in that: the phase contrast of described two path signalφ 1With phase contrastφ 2Measurement carry out in synchronization.
6. the distance-finding method based on the semiconductor laser range device surveying chi high-precise synchronization according to claim 4 more,
It is characterized in that: accurate measurement chi used and bigness scale chi all can be traced to the source.
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| JP2003149341A (en) * | 2001-11-09 | 2003-05-21 | Nikon Geotecs Co Ltd | Distance measuring device |
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| CN102419166A (en) * | 2011-08-17 | 2012-04-18 | 哈尔滨工业大学 | High-precision multi-frequency phase-synchronized laser distance measurement device and method |
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| JP2003149341A (en) * | 2001-11-09 | 2003-05-21 | Nikon Geotecs Co Ltd | Distance measuring device |
| JP2008267893A (en) * | 2007-04-18 | 2008-11-06 | Sokkia Topcon Co Ltd | Electro-optical range finder |
| CN101533096A (en) * | 2009-04-23 | 2009-09-16 | 哈尔滨工业大学 | Dual-frequency laser ranging method and device based on polarization state regulation and wavelength synthesis |
| CN102305591A (en) * | 2011-08-17 | 2012-01-04 | 哈尔滨工业大学 | Multi-frequency synchronization phase laser ranging device and method based on dual-acousto-optic shift frequency |
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