CN105300267A - 基于电磁涡流和数据融合算法的金属板厚度测量方法 - Google Patents
基于电磁涡流和数据融合算法的金属板厚度测量方法 Download PDFInfo
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106910274A (zh) * | 2017-02-28 | 2017-06-30 | 深圳怡化电脑股份有限公司 | 一种介质厚度测量方法、装置及atm机 |
CN107990820A (zh) * | 2017-11-28 | 2018-05-04 | 四川元匠科技有限公司 | 一种基于脉冲涡流的金属板厚度信息检测方法 |
CN108171120A (zh) * | 2017-12-11 | 2018-06-15 | 中冶京诚工程技术有限公司 | 一种中厚板厚度检测信号的处理方法及装置 |
CN109186508A (zh) * | 2018-09-19 | 2019-01-11 | 晓智科技(成都)有限公司 | 一种厚度测量的中值滤波方法 |
CN109668506A (zh) * | 2019-02-21 | 2019-04-23 | 电子科技大学 | 一种基于涡流稳态特性的磁性金属材料厚度检测方法 |
Citations (6)
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DE4325767A1 (de) * | 1993-07-31 | 1995-02-02 | Karl Deutsch Pruef Und Mesgera | Schichtdickenmeßvorrichtung |
US6407546B1 (en) * | 2000-04-07 | 2002-06-18 | Cuong Duy Le | Non-contact technique for using an eddy current probe for measuring the thickness of metal layers disposed on semi-conductor wafer products |
CN101532816A (zh) * | 2009-04-09 | 2009-09-16 | 浙江大学 | 基于巨磁阻传感器和智能算法的多层厚度涡流检测装置 |
CN101788260A (zh) * | 2010-03-18 | 2010-07-28 | 清华大学 | 一种金属薄膜厚度的电涡流测量方法 |
CN103852000A (zh) * | 2014-03-24 | 2014-06-11 | 电子科技大学 | 多层导电涂层厚度的涡流检测方法和装置 |
CN104913716A (zh) * | 2015-06-09 | 2015-09-16 | 电子科技大学 | 一种单层导电涂层厚度和电导率涡流检测方法及装置 |
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- 2015-11-17 CN CN201510793741.4A patent/CN105300267B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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DE4325767A1 (de) * | 1993-07-31 | 1995-02-02 | Karl Deutsch Pruef Und Mesgera | Schichtdickenmeßvorrichtung |
US6407546B1 (en) * | 2000-04-07 | 2002-06-18 | Cuong Duy Le | Non-contact technique for using an eddy current probe for measuring the thickness of metal layers disposed on semi-conductor wafer products |
CN101532816A (zh) * | 2009-04-09 | 2009-09-16 | 浙江大学 | 基于巨磁阻传感器和智能算法的多层厚度涡流检测装置 |
CN101788260A (zh) * | 2010-03-18 | 2010-07-28 | 清华大学 | 一种金属薄膜厚度的电涡流测量方法 |
CN103852000A (zh) * | 2014-03-24 | 2014-06-11 | 电子科技大学 | 多层导电涂层厚度的涡流检测方法和装置 |
CN104913716A (zh) * | 2015-06-09 | 2015-09-16 | 电子科技大学 | 一种单层导电涂层厚度和电导率涡流检测方法及装置 |
Non-Patent Citations (1)
Title |
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张杰等: "多传感器数据融合技术应用研究", 《测试技术学报》 * |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106910274A (zh) * | 2017-02-28 | 2017-06-30 | 深圳怡化电脑股份有限公司 | 一种介质厚度测量方法、装置及atm机 |
CN106910274B (zh) * | 2017-02-28 | 2019-03-12 | 深圳怡化电脑股份有限公司 | 一种介质厚度测量方法、装置及atm机 |
CN107990820A (zh) * | 2017-11-28 | 2018-05-04 | 四川元匠科技有限公司 | 一种基于脉冲涡流的金属板厚度信息检测方法 |
CN107990820B (zh) * | 2017-11-28 | 2019-09-24 | 四川元匠科技有限公司 | 一种基于脉冲涡流的金属板厚度信息检测方法 |
CN108171120A (zh) * | 2017-12-11 | 2018-06-15 | 中冶京诚工程技术有限公司 | 一种中厚板厚度检测信号的处理方法及装置 |
CN109186508A (zh) * | 2018-09-19 | 2019-01-11 | 晓智科技(成都)有限公司 | 一种厚度测量的中值滤波方法 |
CN109668506A (zh) * | 2019-02-21 | 2019-04-23 | 电子科技大学 | 一种基于涡流稳态特性的磁性金属材料厚度检测方法 |
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Inventor after: Cheng Yuhua Inventor after: Yin Chun Inventor after: Tian Lulu Inventor after: Bai Libing Inventor after: Chen Kai Inventor after: Wang Chao Inventor after: Huang Xuegang Inventor after: Zhang Jie Inventor before: Cheng Yuhua Inventor before: Yin Chun Inventor before: Tian Lulu Inventor before: Bai Libing Inventor before: Chen Kai Inventor before: Huang Xuegang Inventor before: Zhang Jie |
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