CN105298830B - A kind of structure of pass sheet chamber room exhaust pipe front end filtering fragment - Google Patents
A kind of structure of pass sheet chamber room exhaust pipe front end filtering fragment Download PDFInfo
- Publication number
- CN105298830B CN105298830B CN201510595228.4A CN201510595228A CN105298830B CN 105298830 B CN105298830 B CN 105298830B CN 201510595228 A CN201510595228 A CN 201510595228A CN 105298830 B CN105298830 B CN 105298830B
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- CN
- China
- Prior art keywords
- outer cover
- core
- gear
- fragment
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
- B01D45/08—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by impingement against baffle separators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
A kind of structure of pass sheet chamber room exhaust pipe front end filtering fragment, including：Sunk screw, outer cover and gear core.Gear core is fastened with outer cover by sunk screw.It is formed with multiple vent grooves on the gear core；The edge of the outer cover is formed with boss.The diameter of above-mentioned outer cover is bigger than the diameter for keeping off core, and the edge of the edge lug boss and gear core of outer cover forms certain gap.In use, after the gas of cavity is introduced into outer cover and keeps off the gap of core, enter back into the groove of gear core, subsequently into bleed-off passage.And fragment is stopped by outer cover with gear outer core so that fragment cannot enter exhaust pipe, and then protect control valve and vacuum pump without damage.It is good filtration effect of the present invention, safe, the shock of potsherd can be born under sudden abnormal condition and is hardly damaged.Its simple in structure, convenient disassembly, it is reusable after simply clean.Semiconductive thin film equipment technical field can be widely used in.
Description
Technical field
The present invention relates to the structures that fragment is filtered in a kind of pass sheet chamber room exhaust pipe front end, this structure, which is mainly used in, partly to be led
Body thin film deposits in preparation process, belongs to the applied technical field of semiconductor film film device.
Background technology
At the pass sheet chamber body bottom pumping mouth of semiconductor coated film equipment transmission module need that a kind of filtration is installed, to prevent
Fragment is generated when ceramic manipulator collides under fortuitous event, and fragment can enter along pumping direction in control valve and in the pump housing
It is caused to wear and is damaged.Designer uses filter screen sometimes, although filter screen can filter relatively large clast,
Subtle powdered granule object is but easy to pour control valve from mesh infiltration, and then damages valve body.In addition, filter screen is broken by ceramics
Piece is easily broken off when hitting, and is also easy in use by clogged with fragments, and actual filtration effect is poor.Therefore, it is badly in need of out
The structure for filtering fragment of sending out exhaust pipe front end a kind of, while ensureing filter effect, can also increase the safety of equipment with
Reliability.
Invention content
The present invention devises a kind of knot of pass sheet chamber room exhaust pipe front end filtering fragment for the purpose of solving the above problems
Structure ensure that the safety and reliability of equipment while ensureing filter effect.
To achieve the above object, the present invention uses following technical proposals, a kind of pass sheet chamber room exhaust pipe front end filtering broken
The structure of piece, including：Sunk screw, outer cover and gear core.Gear core is fastened with outer cover by sunk screw.It is formed on the gear core more
A vent grooves；The edge of the outer cover is formed with boss.The diameter of above-mentioned outer cover is bigger than the diameter for keeping off core, the edge of outer cover
The edge of boss and gear core forms certain gap.
In use, outer cover and gear core fastening composition filter are mounted on the top of cavity aspirating hole by sunk screw.
After the gas of installation is complete rear chamber is introduced into outer cover and keeps off the gap of core, enter back into the groove of gear core, subsequently into pumping
Channel.And fragment by outer cover with gear outer core stopped so that fragment cannot enter exhaust pipe, and then protect control valve and
Vacuum pump is without damage.
After use, filter is taken out from cavity stomata, removes the sundries around cavity stomata, dismounting outer cover, gear core are simultaneously
It is cleaned, it is reusable.
Beneficial effects of the present invention and feature are：
1, actual filtration effect is preferable, can prevent piece of debris from hitting, and block fragment prevents it from entering gas in filtering blocking
Body pipeline also has certain filter effect to fine particulates；
2, safety is higher, firm in structure reliable, can be born under sudden abnormal condition the shock of potsherd without
It is fragile, it is effectively protected the control valve and the pump housing of exhaust pipe rear end；
3, simple in structure, convenient disassembly is reusable after simply clean.
Description of the drawings
Fig. 1 is the broken away view of filter of the present invention.
Fig. 2 is the installation diagram of filter of the present invention.
Fig. 3 is filter fundamental diagram of the present invention.
Specific implementation mode
Embodiment
With reference to attached drawing 1-3, a kind of structure of pass sheet chamber room exhaust pipe front end filtering fragment, including：It is sunk screw 1, outer
Cover 2 and gear core 3.Gear core 3 is fastened with outer cover 2 by sunk screw 1.
It is formed with multiple vent grooves 4 on the gear core 3；
The vent grooves 4 can be made into round, rectangular or fan-shaped.
The quantity at least two of the vent grooves 4.
The edge of the outer cover 2 is formed with boss 5；
The diameter of the outer cover 2 is bigger than the diameter for keeping off core 3, and the edge lug boss 5 and the edge of gear core 3 of outer cover 2 are formed
Certain gap.
In use, outer cover 2 and the gear fastening composition filter of core 3 are mounted on the upper of cavity aspirating hole by sunk screw 1
Side.The gas of installation is complete rear chamber is introduced into outer cover 2 and keeps off the gap of core 3, enters back into the groove 4 of gear core 3 and enters pumping
Channel.And fragment is stopped by outer cover 2 with gear 3 outer wall of core so that fragment cannot enter exhaust pipe, and then protect control valve
And vacuum pump is without damage.
After use, filter is taken out from cavity stomata, removes the sundries around cavity stomata, dismantles outer cover 2 and gear core 3
And cleaned, it is reusable.
Operation principle：Since the material of this structure is metal, therefore the shock of bulk ceramic fragment can be born without damaging.In
Etc. the ceramic clasts of sizes will be blocked in filter area A (as shown in Fig. 3)；Under suitable gas flow rate, subtle pottery
Porcelain powder will be deposited on by gravity at filtration core root area B (as shown in Fig. 3)；Gas itself then can be along attached drawing 3
Flow path achievees the purpose that gas filtration by filter.
Claims (1)
1. a kind of structure of pass sheet chamber room exhaust pipe front end filtering fragment, it is characterised in that：It include sunk screw, outer cover and
Core is kept off, gear core is fastened with outer cover by sunk screw, and multiple vent grooves are formed on the gear core；The edge of the outer cover is formed with
Boss；The diameter of the outer cover is bigger than the diameter for keeping off core, and the edge of the edge lug boss and gear core of outer cover forms gap；It is described
Vent grooves are made round or fan-shaped.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510595228.4A CN105298830B (en) | 2015-09-17 | 2015-09-17 | A kind of structure of pass sheet chamber room exhaust pipe front end filtering fragment |
| PCT/CN2015/092171 WO2017045240A1 (en) | 2015-09-17 | 2015-10-19 | Structure for filtering fragments at front end of suction-pipe of wafer transfer chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510595228.4A CN105298830B (en) | 2015-09-17 | 2015-09-17 | A kind of structure of pass sheet chamber room exhaust pipe front end filtering fragment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105298830A CN105298830A (en) | 2016-02-03 |
| CN105298830B true CN105298830B (en) | 2018-10-23 |
Family
ID=55196486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510595228.4A Active CN105298830B (en) | 2015-09-17 | 2015-09-17 | A kind of structure of pass sheet chamber room exhaust pipe front end filtering fragment |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN105298830B (en) |
| WO (1) | WO2017045240A1 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101553264A (en) * | 2006-11-01 | 2009-10-07 | 梅德拉控股公司 | Self-returning contamination barrier |
| CN103239951A (en) * | 2012-02-07 | 2013-08-14 | 南通龙鹰真空泵业有限公司 | Improved filtrating device of vacuum pump |
| CN104846347A (en) * | 2015-04-15 | 2015-08-19 | 沈阳拓荆科技有限公司 | Backfill and gas pumping structure of bilayer type loading chamber |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2547662Y2 (en) * | 1992-11-05 | 1997-09-10 | 栗田 雅子 | Water suction pipe strainer for fire pump |
| JP3540064B2 (en) * | 1995-09-04 | 2004-07-07 | 株式会社アルバック | Trap for the first stage of dry vacuum pump |
| JPH09308837A (en) * | 1996-05-20 | 1997-12-02 | Teac Corp | Air cleaner |
| JPH09329089A (en) * | 1996-06-10 | 1997-12-22 | Keihin Seiki Mfg Co Ltd | Filter for fluid |
| JP4502411B2 (en) * | 1996-12-05 | 2010-07-14 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| BR9812098A (en) * | 1997-07-11 | 2000-07-18 | Moyra A Phillipson Family Trus | Submerged surface pool cleaning device |
| JPH11238780A (en) * | 1998-02-19 | 1999-08-31 | Shin Etsu Chem Co Ltd | Semiconductor silicon wafer carrying retention tool and semiconductor process device using the same |
| US6368372B1 (en) * | 2000-08-08 | 2002-04-09 | Intrabay Automation, Inc. | Fluid media particle isolating system |
| CN2882765Y (en) * | 2006-03-21 | 2007-03-28 | 景幼明 | Filter board |
| TW201009892A (en) * | 2008-05-06 | 2010-03-01 | Applied Materials Inc | Debris-extraction exhaust system |
| CA2815230C (en) * | 2012-05-09 | 2018-12-11 | Avon Protection Systems, Inc. | Filter assembly for a respirator |
| CN204428975U (en) * | 2015-01-19 | 2015-07-01 | 徐州同鑫光电科技有限公司 | Device for filtering impurities and the semiconductor equipment that this device is housed |
-
2015
- 2015-09-17 CN CN201510595228.4A patent/CN105298830B/en active Active
- 2015-10-19 WO PCT/CN2015/092171 patent/WO2017045240A1/en active Application Filing
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101553264A (en) * | 2006-11-01 | 2009-10-07 | 梅德拉控股公司 | Self-returning contamination barrier |
| CN103239951A (en) * | 2012-02-07 | 2013-08-14 | 南通龙鹰真空泵业有限公司 | Improved filtrating device of vacuum pump |
| CN104846347A (en) * | 2015-04-15 | 2015-08-19 | 沈阳拓荆科技有限公司 | Backfill and gas pumping structure of bilayer type loading chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2017045240A1 (en) | 2017-03-23 |
| CN105298830A (en) | 2016-02-03 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |
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| CP03 | Change of name, title or address |