CN105277298B - A kind of manufacturing method of planar pressure sensor combination - Google Patents
A kind of manufacturing method of planar pressure sensor combination Download PDFInfo
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- CN105277298B CN105277298B CN201510811065.9A CN201510811065A CN105277298B CN 105277298 B CN105277298 B CN 105277298B CN 201510811065 A CN201510811065 A CN 201510811065A CN 105277298 B CN105277298 B CN 105277298B
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- rubber ring
- sealing rubber
- pressure sensor
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Abstract
A kind of manufacturing method of planar pressure sensor combination, in the lateral surface or medial surface of the first plate body, first electrode is set, in the lateral surface of the second plate body, second electrode is set, interlayer cavity is formed between the first plate body and the second plate body, and filling liquid insulating materials or gas in interlayer cavity, liquid dielectric layer or gaseous layer are formed, since the thickness of liquid dielectric layer or gaseous layer becomes according to external pressure, so that being formed by each capacitor being capable of induction pressure.Disposably form multiple capacitors that can incude pressing force, it is pressure sensor, to constitute the pressure sensor combination of a planar, it need not piece together multiple independent pressure sensors, therefore make the cost of manufacture that the combination of planar pressure sensor is very simply greatly lowered.
Description
Technical field
The present invention relates to the manufacturers that a kind of manufacturing method of sensor more particularly to a kind of planar pressure sensor combine
Method.
Background technology
Multiple pressure sensors are arranged to obtain a kind of planar pressure sensor combination in one side, can be surveyed
Pressure distribution of the pressure on the face is measured, to obtain the image of its pressure distribution.Currently, this pressure sensor combination is general
Need to piece together multiple independent pressure sensors, when its distribution density is higher or its required for detect area it is larger,
It generally requires to use many pressure sensors, it is not only of high cost, and make difficult.
Invention content
The technical problem to be solved in the present invention is to provide a kind of production method of pressure sensor combination, this pressure sensings
The production method of device combination can more easily make the planar pressure sensor combination that density is higher or area is larger, reduce face
The cost of manufacture of shape pressure sensor combination.The technical solution of use is as follows：
A kind of manufacturing method of planar pressure sensor combination, it is characterised in that include the following steps：
（1）The first plate body lateral surface or medial surface be arranged the first conductive layer, the first conductive layer include it is at least one
First electrode；
（2）Patterned second conductive layer is set in the lateral surface of the second plate body, the second conductive layer includes multiple second electricity
Pole；
（3）It is wrapped in the medial surface of the first plate body or the lateral surface setting sealing rubber ring of the second plate body and by sealing rubber ring
The pad spacer enclosed, sealing rubber ring are equipped with notch；
（4）The first plate body, the second plate body are bonded together by sealing rubber ring, sealing rubber ring and the first plate body, second
Plate body constitutes interlayer cavity, and the notch of sealing rubber ring constitutes the inlet of interlayer cavity；
（5）Liquid insulating material is injected into interlayer inside cavity by inlet, and closes inlet, makes liquid dielectric
Material is formed liquid dielectric layer between clamping first electrode, second electrode, so that first electrode, second electrode and liquid
State insulating layer constitutes multiple capacitors that can incude pressing force.
It is preferred that in above-mentioned steps（5）In, first interlayer cavity is vacuumized, then liquid insulating material is injected into interlayer cavity
In, form liquid dielectric layer.
A kind of manufacturing method of planar pressure sensor combination, it is characterised in that include the following steps：
（1）The first plate body lateral surface or medial surface be arranged the first conductive layer, the first conductive layer include it is at least one
First electrode；
（2）Patterned second conductive layer is set in the lateral surface of the second plate body, the second conductive layer includes multiple second electricity
Pole；
（3）It is wrapped in the medial surface of the first plate body or the lateral surface setting sealing rubber ring of the second plate body and by sealing rubber ring
The pad spacer enclosed；
（4）Liquid insulating material is dropped onto in sealing rubber ring area defined, until sealing rubber ring is surrounded
Region is filled up；
（5）The first plate body, the second plate body are bonded together by sealing rubber ring, sealing rubber ring and the first plate body, second
Plate body constitutes interlayer cavity, and liquid insulating material is sealed in interlayer cavity, makes liquid insulating material by clamping first electrode, the
Form liquid dielectric layer between two electrodes so that first electrode, second electrode and liquid dielectric layer constitute it is multiple can
Incude the capacitor of pressing force.
A kind of manufacturing method of planar pressure sensor combination, it is characterised in that include the following steps：
（1）The first plate body lateral surface or medial surface be arranged the first conductive layer, the first conductive layer include it is at least one
First electrode；
（2）Patterned second conductive layer is set in the lateral surface of the second plate body, the second conductive layer includes multiple second electricity
Pole；
（3）It is wrapped in the medial surface of the first plate body or the lateral surface setting sealing rubber ring of the second plate body and by sealing rubber ring
The pad spacer enclosed, sealing rubber ring are equipped with notch；
（4）The first plate body, the second plate body are bonded together by sealing rubber ring, sealing rubber ring and the first plate body, second
Plate body constitutes interlayer cavity, and the notch of sealing rubber ring constitutes the gas port of interlayer cavity；
（5）Gas is filled into interlayer inside cavity by gas port, and closes gas port, make gas by clamping first electrode,
Gaseous layer is formed between second electrode so that first electrode, second electrode and gaseous layer constitute it is multiple can incude press
The capacitor of pressure.
A kind of manufacturing method of planar pressure sensor combination, it is characterised in that include the following steps：
（1）The first conductive layer is set in the lateral surface or medial surface of the first plate body, the first conductive layer includes at least one the
One electrode；
（2）Patterned second conductive layer is set in the lateral surface of the second plate body, the second conductive layer includes multiple second electricity
Pole；
（3）It is wrapped in the medial surface of the first plate body or the lateral surface setting sealing rubber ring of the second plate body and by sealing rubber ring
The pad spacer enclosed；
（4）First plate body, the second plate body are placed under the atmosphere of dry gas；
（5）The first plate body, the second plate body are bonded together by sealing rubber ring, sealing rubber ring and the first plate body, second
Plate body constitutes interlayer cavity, and dry gas is sealed in interlayer cavity, make dry gas by clamping first electrode, second electrode it
Between and form gaseous layer so that first electrode, second electrode and gaseous layer constitute multiple capacitances that can incude pressing force
Device.
Above-mentioned outside refers to leaning on the side of proximal operator, and inside refers to the side far from operator.
First electrode is set in the lateral surface or medial surface of the first plate body, in the second electricity of lateral surface setting of the second plate body
Pole forms interlayer cavity, and filling liquid insulating materials or gas in interlayer cavity between the first plate body and the second plate body,
Liquid dielectric layer or gaseous layer are formed, since the thickness of liquid dielectric layer or gaseous layer becomes according to external pressure, to make
Each capacitor must be formed by being capable of induction pressure.Above-mentioned each method can disposably be formed it is multiple can incude press
The capacitor of pressure is pressure sensor, need not be by multiple independences to constitute the pressure sensor combination of a planar
Pressure sensor piece together, therefore make very simple, the making of planar pressure sensor combination be greatly lowered
Cost.
Above-mentioned, the first plate body, the second plate body can choose the glass plate, poly (methyl methacrylate) plate or thickness of 0.2~1.5mm of thickness
For the plastic foil of 0.02~0.5mm, sealing rubber ring can be the heat-curable glue or uv-curable glue for being mixed with pad spacer, pad spacer
Can be a diameter of 2~100 microns of microspheres, clava or blocks, liquid insulating material can be insulating oil, glue
Or liquid crystal, the gas of filling can be air, and preferably nitrogen or inert gas.
Above-mentioned first electrode, second electrode can be metal layer or semiconductor conductive material layer, above-mentioned first electrode, second
Electrode can also cover a layer insulating, to further enhance its insulating properties.
As the preferred embodiment of the present invention, in the step（5）Later, one layer of purple also is set in the lateral surface of the first plate body
Outer smooth filter layer.
As the preferred embodiment of the present invention, in the step（5）Later, also in the lateral surface of the first plate body and the second plate
The medial surface of body attaches ultraviolet light filter layer.
Ultraviolet light filter layer can filter out extraneous ultraviolet light, avoid filled liquid insulating material or gas rotten
Or be ionized, to ensure that liquid insulating material or gas have higher insulating properties, so as to avoid neighboring capacitors（It is
Pressure sensor）The mutual conduction caused by sharing one layer of liquid dielectric layer or gaseous layer, avoids neighboring capacitors（I.e.
It is pressure sensor）Between interfere with each other so that pressure sensor combination multipoint pressure image detection it is more accurate, and
It works together and more stablizes.Ultraviolet light filter layer can be glass or plastic sheet (such as polarisation with ultraviolet light strainability
Piece).
Compared with prior art, the present invention having the following advantages that：
Multiple capacitors that can incude pressing force are disposably formed, are pressure sensor, to constitute a planar
Pressure sensor combines, and need not piece together multiple independent pressure sensors, therefore makes very simply, greatly
The cost of manufacture of amplitude reduction planar pressure sensor combination.
Description of the drawings
Fig. 1 is the schematic diagram that the first conductive layer is arranged in the embodiment of the present invention one；
Fig. 2 is the schematic diagram that the second conductive layer is arranged in the embodiment of the present invention one；
Fig. 3 is that sealing rubber ring is arranged in the embodiment of the present invention one and pads the schematic diagram of spacer；
Fig. 4 is the schematic diagram for being bonded the first plate body, the second plate body in the embodiment of the present invention one；
Fig. 5 is the first plate body in the embodiment of the present invention one, forms the schematic diagram of interlayer cavity after the fitting of the second plate body；
Fig. 6 is the schematic diagram that insulating materials is perfused after interlayer cavity vacuumizes；
Fig. 7 is the schematic diagram for attaching ultraviolet light filter layer；
Fig. 8 is the schematic diagram that the first conductive layer is arranged in the embodiment of the present invention three；
Fig. 9 is the schematic diagram that the second conductive layer is arranged in the embodiment of the present invention three；
Figure 10 is that sealing rubber ring is arranged in the embodiment of the present invention three and pads the schematic diagram of spacer；
Figure 11 is that liquid insulating material is dropped onto showing in sealing rubber ring area defined in the embodiment of the present invention three
It is intended to；
Figure 12 be the first plate body in the embodiment of the present invention three, the second plate body patch schematic diagram；
Figure 13 is the schematic diagram that ultraviolet light filter layer is attached in the embodiment of the present invention three；
Figure 14 is the schematic diagram that the first conductive layer is arranged in the embodiment of the present invention four；
Figure 15 is the schematic diagram that the second conductive layer is arranged in the embodiment of the present invention four；
Figure 16 is that sealing rubber ring is arranged in the embodiment of the present invention four and pads the schematic diagram of spacer；
Figure 17 is the signal for pasting the first plate body, the second plate body under the atmosphere of dry gas in the embodiment of the present invention four
Figure；
Figure 18 is the schematic diagram that ultraviolet light filter layer is attached in the embodiment of the present invention four.
Specific implementation mode
It is described further below in conjunction with the accompanying drawings with the preferred embodiment of the present invention.
Embodiment one
The manufacturing method of this planar pressure sensor combination, it is characterised in that include the following steps：
（1）As shown in Figure 1, the first plate body 1 lateral surface（Medial surface can also）First conductive layer 2 is set, first
Conductive layer 2 includes a first electrode 3；
（2）As shown in Fig. 2, patterned second conductive layer 5, the second conductive layer 5 packet is arranged in the lateral surface in the second plate body 4
Containing multiple second electrodes 6；
（3）As shown in figure 3, in the lateral surface of the second plate body 4（It can also be in the medial surface of the first plate body 1）Fluid sealant is set
Circle 7 and the pad spacer 8 surrounded by sealing rubber ring 7, sealing rubber ring 7 are equipped with notch 9；
（4）As shown in figure 4, first plate body 1, the second plate body 4 are bonded together by sealing rubber ring 7, as shown in figure 5,
Sealing rubber ring 7 and the first plate body 1, the second plate body 4 constitute interlayer cavity 10, and the notch 9 of sealing rubber ring constitutes interlayer cavity 10
Inlet；
（5）As shown in fig. 6, interlayer cavity 10 is vacuumized, and liquid insulating material 11 is passed through into inlet（Notch 9）Note
Enter to inside interlayer cavity 10, and closes inlet（Notch 9）, make liquid insulating material 11 by the 3, second electricity of clamping first electrode
Liquid dielectric layer 12 is formed between pole 6, so that first electrode 3, second electrode 6 constitute multiple energy with liquid dielectric layer 12
Enough incude the capacitor of pressing force；
（6）As shown in fig. 7, the medial surface of the lateral surface of the first plate body 1 and the second plate body 4 attaches ultraviolet light filter layer
13。
Embodiment two
It is identical with embodiment one in other parts, it differs only in：Insulation will be perfused in embodiment one
Material is changed to insulating gas, is into gaseous layer formed in interlayer cavity 10.
Embodiment three
The manufacturing method of this planar pressure sensor combination, it is characterised in that include the following steps：
（1）As shown in figure 8, the first plate body 1 lateral surface（It can also be medial surface）First conductive layer 2 is set, the
One conductive layer 2 includes a first electrode 3；
（2）As shown in figure 9, patterned second conductive layer 5, the second conductive layer 6 packet is arranged in the lateral surface in the second plate body 4
Containing multiple second electrodes 6；
（3）As shown in Figure 10, in the lateral surface of the second plate body 4（It can also be the medial surface of the first plate body 1）Setting sealing
Cushion rubber 7 and the pad spacer 8 surrounded by sealing rubber ring 7；
（4）As shown in figure 11, liquid insulating material 11 is dropped onto in 7 area defined of sealing rubber ring, until will be close
7 area defined of sealing rubber ring is filled up；
（5）As shown in figure 12, first plate body 1, the second plate body 4 are bonded together by sealing rubber ring 7, sealing rubber ring 7
Interlayer cavity 10 is constituted with the first plate body 1, the second plate body 4, liquid insulating material 11 is sealed in interlayer cavity 10, keeps liquid exhausted
Edge material 11 is formed liquid dielectric layer 12 between clamping first electrode 3, second electrode 6, so that first electrode 3,
Two electrodes 6 constitute multiple capacitors that can incude pressing force with liquid dielectric layer 12；
（6）As shown in figure 13, the medial surface of the lateral surface of the first plate body 1 and the second plate body 4 attaches ultraviolet light filter layer
13。
Example IV
The manufacturing method of this planar pressure sensor combination, it is characterised in that include the following steps：
（1）As shown in figure 14, in the lateral surface of the first plate body 1（It can also be medial surface）First conductive layer 2 is set, first
Conductive layer 2 includes a first electrode 3；
（2）As shown in figure 15, patterned second conductive layer 5, the second conductive layer 5 are set in the lateral surface of the second plate body 4
Including multiple second electrodes 6；
（3）As shown in figure 16, in the lateral surface of the second plate body 4（Can also the first plate body 1 medial surface）Fluid sealant is set
Circle 7 and the pad spacer 8 surrounded by sealing rubber ring 7；
（4）First plate body 1, the second plate body 4 are placed under the atmosphere of dry gas；
（5）As shown in figure 17, first plate body 1, the second plate body 4 are bonded together by sealing rubber ring 7, sealing rubber ring 7
Interlayer cavity 10 is constituted with the first plate body 1, the second plate body 4, dry gas is sealed in interlayer cavity 10, and dry gas is made to be pressed from both sides
It closes between first electrode 3, second electrode 6 and forms gaseous layer, so that first electrode 3, second electrode 6 are constituted with gaseous layer
Multiple capacitors that can incude pressing force；
（6）As shown in figure 18, the medial surface of the lateral surface of the first plate body 1 and the second plate body 4 attaches ultraviolet light filter layer
13。
Above-mentioned, the first plate body 1, the second plate body 4 can choose the glass plate, poly (methyl methacrylate) plate or thickness of 0.2~1.5mm of thickness
Degree is the plastic foil of 0.02~0.5mm, and sealing rubber ring 7 can be the heat-curable glue or uv-curable glue for being mixed with pad spacer 8, pad
Spacer 8 can be a diameter of 2~100 microns of microspheres, clava or blocks, and liquid insulating material 11 can be insulation
Oil, glue or liquid crystal, the gas of filling can be air, and preferably nitrogen or inert gas.
Furthermore, it is necessary to illustrate, the specific embodiment described in this specification, each section title etc. can not
Together, the equivalent or simple change that all structure, feature and principles according to described in inventional idea of the present invention are done, is included in the present invention
In the protection domain of patent.Those skilled in the art can do described specific embodiment various each
The modify or supplement or adopt similar mode of sample substitutes, and without departing from structure of the invention or surmounts the claims
Defined range, is within the scope of protection of the invention.
Claims (3)
1. a kind of manufacturing method of planar pressure sensor combination, including step（1）In the lateral surface or medial surface of the first plate body
First conductive layer is set, and the first conductive layer includes at least one first electrode；Step（2）In the lateral surface of the second plate body, figure is set
Second conductive layer of shape, the second conductive layer include multiple second electrodes；Characterized by further comprising following steps：
（3）It is surrounded in the medial surface of the first plate body or the lateral surface setting sealing rubber ring of the second plate body and by sealing rubber ring
Spacer is padded, sealing rubber ring is equipped with notch；
（4）The first plate body, the second plate body are bonded together by sealing rubber ring, sealing rubber ring and the first plate body, the second plate body
Interlayer cavity is constituted, the notch of sealing rubber ring constitutes the inlet of interlayer cavity；
（5）Liquid insulating material is injected into interlayer inside cavity by inlet, and closes inlet, makes liquid insulating material
Liquid dielectric layer is formed between first electrode, second electrode by clamping, so that first electrode, second electrode and liquid
Insulating layer constitutes multiple capacitors that can incude pressing force.
2. the manufacturing method of planar pressure sensor combination as described in claim 1, it is characterized in that：In the step（5）It
Afterwards, one layer of ultraviolet light filter layer also is set in the lateral surface of the first plate body.
3. the manufacturing method of planar pressure sensor combination as described in claim 1, it is characterized in that：In the step（5）It
Afterwards, also ultraviolet light filter layer is attached in the medial surface of the lateral surface of the first plate body and the second plate body.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510811065.9A CN105277298B (en) | 2015-11-23 | 2015-11-23 | A kind of manufacturing method of planar pressure sensor combination |
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| CN201510811065.9A CN105277298B (en) | 2015-11-23 | 2015-11-23 | A kind of manufacturing method of planar pressure sensor combination |
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| CN105277298A CN105277298A (en) | 2016-01-27 |
| CN105277298B true CN105277298B (en) | 2018-11-06 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108534921B (en) * | 2018-03-26 | 2021-01-26 | 京东方科技集团股份有限公司 | Pressure sensor and display device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4986136A (en) * | 1988-12-07 | 1991-01-22 | Wolfgang Brunner | Measuring system |
| CN1643358A (en) * | 2002-03-29 | 2005-07-20 | 三洋电机株式会社 | Pressure sensor and method for fabricating the same |
| CN101140368A (en) * | 2007-10-17 | 2008-03-12 | 信利半导体有限公司 | Condenser type touch screen and preparation method thereof |
| CN101189498A (en) * | 2005-03-30 | 2008-05-28 | 株式会社施乐库 | Pressure distribution detection device |
| CN101359267A (en) * | 2007-07-30 | 2009-02-04 | 比亚迪股份有限公司 | Capacitance touch screen and making method thereof |
| CN101458133A (en) * | 2007-12-13 | 2009-06-17 | 雅马哈株式会社 | Pressure sensor and data input apparatus |
-
2015
- 2015-11-23 CN CN201510811065.9A patent/CN105277298B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4986136A (en) * | 1988-12-07 | 1991-01-22 | Wolfgang Brunner | Measuring system |
| CN1643358A (en) * | 2002-03-29 | 2005-07-20 | 三洋电机株式会社 | Pressure sensor and method for fabricating the same |
| CN101189498A (en) * | 2005-03-30 | 2008-05-28 | 株式会社施乐库 | Pressure distribution detection device |
| CN101359267A (en) * | 2007-07-30 | 2009-02-04 | 比亚迪股份有限公司 | Capacitance touch screen and making method thereof |
| CN101140368A (en) * | 2007-10-17 | 2008-03-12 | 信利半导体有限公司 | Condenser type touch screen and preparation method thereof |
| CN101458133A (en) * | 2007-12-13 | 2009-06-17 | 雅马哈株式会社 | Pressure sensor and data input apparatus |
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| CN105277298A (en) | 2016-01-27 |
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