CN105271242A - Graphite shield of graphite assembly for polycrystalline silicon reduction furnace - Google Patents
Graphite shield of graphite assembly for polycrystalline silicon reduction furnace Download PDFInfo
- Publication number
- CN105271242A CN105271242A CN201510828897.1A CN201510828897A CN105271242A CN 105271242 A CN105271242 A CN 105271242A CN 201510828897 A CN201510828897 A CN 201510828897A CN 105271242 A CN105271242 A CN 105271242A
- Authority
- CN
- China
- Prior art keywords
- graphite
- components
- polycrystalline silicon
- guard shield
- reducing furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
The invention discloses a graphite shield of a graphite assembly for a polycrystalline silicon reduction furnace. The graphite assembly is used for fixing a silica core, and is characterized in that the graphite shield refers to an isolating part and is used for isolating the graphite assembly and the part, positioned on the outer part of the graphite assembly, of the silica core. Compared with the prior art, the graphite shield disclosed by the invention has the advantages that the graphite shield is simple, compact and reasonable in structure and convenient to use and mount, and the used amount of graphite is greatly reduced. Meanwhile, the aim of preventing silicon from being deposited on the graphite assembly can be completely achieved, the graphite assembly and the silica core are conveniently separated from each other, and a split type graphite assembly is repeatedly utilized.
Description
Technical field
The present invention relates to a kind of for polycrystalline silicon reducing furnace graphite components protection method, a kind of graphite guard shield for polycrystalline silicon reducing furnace graphite components, belongs to polycrystalline silicon reducing furnace graphite components technical field specifically.
Background technology
Polysilicon is the main raw material for the production of semi-conductor and photovoltaic product, main method at present for the production of polysilicon has the method such as improved Siemens, silane thermal decomposition process, sulfuration bed process, wherein improved Siemens and silane thermal decomposition process all need deposition vehicle in reduction process, now widely used is silicon core, comprise square silicon core, circular silicon core etc., silicon core is connected by graphite components with between electrode and clamps.
Because the polysilicon large-scale production of China is started late; relevant production technology mainly rests in the minority developed country such as America and Europe, Japan hand; industry overall technology is weak, no matter in scale, quality product or in production cost control, is all in a disadvantageous position in whole international competition.So lifting prior art, reduce the task of top priority that production cost becomes numerous manufacturer.This patent is exactly the production cost of the reduction link in order to reduce polysilicon, a kind of i.e. cheap but also polycrystalline silicon reducing furnace graphite components of handled easily is provided, significantly can reduce the consumption of graphite, and graphite base can accomplish recycling, the object of clamping silicon core can be reached simultaneously, significantly can reduce the production cost of production of polysilicon enterprise.
Traditional polycrystalline silicon reducing furnace graphite components is mainly two kinds of modes:
A kind of mode is three-piece formula, comprises graphite base, graphite nut and graphite clamping petal three part.There is screw thread graphite base upper end, can be screwed together with graphite nut, and graphite nut center is hole, pass through for graphite clamping petal part, card lobe is positioned over above graphite base, and graphite nut is connected with graphite base and after screwing, and reaches fixing graphite clamping petal and clamps the object of silicon core.This structure is comparatively complicated, can reach the object of clamping silicon core preferably, but uses quantity of graphite comparatively large, and cost is higher, installs comparatively loaded down with trivial details and inconvenient.
Another kind of mode is integral type, namely square or conical hole is processed in monoblock graphite upper end, silicon core directly inserts in hole, this mode is easy for installation, but there is the defect problems such as silicon core is difficult to clamping, whole graphite components can only use once, silicon core scale error cannot use time larger, cost is also higher.
Another kind of mode is my company's invention two pieces shell type, comprises graphite base, graphite clamping petal two portions.Graphite base and graphite clamping petal are socket fitting type structure, there is taper hole graphite base upper end, graphite clamping petal two is taper, and the taper on card lobe coordinates with the taper hole on graphite base, by compressing card lobe thus while clamping silicon core, graphite base taper hole also clamps card lobe.
For three-piece formula graphite components or two pieces shell type assembly, polysilicon grows (deposition) in reduction furnace, silicon can constantly deposit in silicon core and graphite components, is wrapped in wherein by silicon core, graphite clamping petal can be wrapped simultaneously, because technique is different, some enterprises even silicon can deposit on graphite base, and graphite base is also wrapped up wherein, so just cause whole graphite components can only single use, add production cost, also cause the cleaning difficulty of crystal bar simultaneously.
Summary of the invention
The object of the invention is to overcome above-mentioned traditional graphite components weak point, thus a kind of dependable performance is provided, easy to operate, lower-cost polycrystalline silicon reducing furnace graphite components guard shield, for polycrystalline silicon reducing furnace graphite components, what be conducive to increase graphite components reuses number of times, also contributes to the rear road cleaning work amount reducing crystal bar, thus saves production cost.
The present invention for achieving the above object, adopts following technical scheme:
For a graphite guard shield for polycrystalline silicon reducing furnace graphite components, described graphite components is used for fixing silicon core, it is characterized in that: described graphite guard shield is isolated part, for isolating graphite components and silicon core is positioned at graphite components external portion.
It is further characterized in that: described isolated part shape and described graphite components profile adapt.
Further: described isolated part is taper type cover body.
Described taper type cover body is prismatic platform or round platform.
Described taper type cover body is that after the fan-shaped graphite scraps of paper are rolled, side is formed by connecting.
Preferred: described fan-shaped graphite scraps of paper side is provided with inserting groove.
The present invention is applicable to the graphite components of various ways: described graphite components is the three-piece formula graphite components of graphite base, graphite nut and graphite clamping petal three part composition; Or described graphite components is graphite base, graphite clamping petal socket weld formula dimerous graphite components; Or described graphite components is integral type structure.
Compared with the prior art the present invention has the following advantages: structure is simple, compact, reasonable, easy to install and use, significantly reduce the consumption of graphite, can reach completely prevents siliceous deposits to the object in graphite components simultaneously, be convenient to being separated of graphite components and silicon core, be also beneficial to the recycling of split type graphite components.
Accompanying drawing explanation
Fig. 1 is the present invention and integral type graphite components fit form schematic diagram.
Fig. 2 is the present invention and three-piece formula graphite components fit form schematic diagram.
Fig. 3-5 is three kinds of form schematic diagram that the present invention coordinates with Two Piece Set formula graphite components.
Fig. 6 is fan-shaped graphite paper schematic diagram.
Embodiment
A kind of graphite guard shield 3 for polycrystalline silicon reducing furnace graphite components, is annular as shown in Figure 1, and cover integral type graphite components upper surface, silicon core 2 is fixed in graphite base 1.Circle ring center is enclosed within silicon core 2.
A kind of graphite guard shield 3 for polycrystalline silicon reducing furnace graphite components, is truncated cone-shaped as shown in Figure 2, and cover in three-piece formula graphite components, silicon core 2 is fixed in the graphite clamping petal 4 of graphite components, and graphite clamping petal 4 is fixed on graphite base 1 by graphite nut 5.Round platform center is on silicon core 2.
A kind of graphite guard shield for polycrystalline silicon reducing furnace graphite components as in Figure 3-5, described graphite components comprises graphite base 1 and graphite clamping petal 4, described graphite base 1 and graphite clamping petal 4 are socket fitting type structure, and described graphite clamping petal 4 inserts in described graphite base 1; Described graphite guard shield 3 is enclosed within graphite clamping petal 4, and isolation graphite components and silicon core 2 are positioned at graphite components external portion.The quick-clamping of graphite clamping petal 4 can be realized by socket fitting type structure, and the recycling of graphite base 1.Make in polysilicon growth process by graphite guard shield 3, silicon can not deposit in graphite components.
A kind of form as shown in Figure 3: described graphite guard shield 3 profile and graphite components profile adapt, and are fitted in graphite components, cover graphite components.
A kind of form as shown in Figure 4: described graphite guard shield 3 is truncated cone-shaped, the angle of round platform and the tapering of graphite clamping petal 4 one end match, and suitable for readingly cover graphite clamping petal 4, and end opening covers and graphite clamping petal 4 and graphite base 1 combination section.
Another kind of form as shown in Figure 5: described graphite guard shield 3 is suitable for reading the same with graphite clamping petal 4 upper end size, and whole graphite base 1 upper surface covers by end opening.
Described graphite guard shield 3 forms lobe by one or more pieces graphite papers and forms, and the card lobe for different shapes all can reach the object of protection.
As shown in Figure 6, preferred: described graphite guard shield 3 is the fan-shaped graphite scraps of paper of a slice, and fan-shaped graphite scraps of paper side band inserting groove 31, mutually blocks and prevent from dropping.
Same graphite guard shield 3 also can be prismatic table shape, the square or trilateral guard shield of graphite paper sheet composition.
Claims (7)
1. for a graphite guard shield for polycrystalline silicon reducing furnace graphite components, described graphite components is used for fixing silicon core, it is characterized in that: described graphite guard shield is isolated part, for isolating graphite components and silicon core is positioned at graphite components external portion.
2. the graphite guard shield for polycrystalline silicon reducing furnace graphite components according to claim 1, is characterized in that: described isolated part shape and described graphite components profile adapt.
3. the graphite guard shield for polycrystalline silicon reducing furnace graphite components according to claim 1, is characterized in that: described isolated part is taper type cover body.
4. the graphite guard shield for polycrystalline silicon reducing furnace graphite components according to claim 3, is characterized in that: described taper type cover body is prismatic platform or round platform.
5. the graphite guard shield for polycrystalline silicon reducing furnace graphite components according to claim 4, is characterized in that: described taper type cover body is that after the fan-shaped graphite scraps of paper are rolled, side is formed by connecting.
6. the graphite guard shield for polycrystalline silicon reducing furnace graphite components according to claim 5, is characterized in that: described fan-shaped graphite scraps of paper side is provided with inserting groove.
7. the graphite guard shield for polycrystalline silicon reducing furnace graphite components according to any one of claim 1-6, is characterized in that: described graphite components is the three-piece formula graphite components of graphite base, graphite nut and graphite clamping petal three part composition; Or described graphite components is graphite base, graphite clamping petal socket weld formula dimerous graphite components; Or described graphite components is integral type structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510828897.1A CN105271242A (en) | 2015-11-25 | 2015-11-25 | Graphite shield of graphite assembly for polycrystalline silicon reduction furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510828897.1A CN105271242A (en) | 2015-11-25 | 2015-11-25 | Graphite shield of graphite assembly for polycrystalline silicon reduction furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105271242A true CN105271242A (en) | 2016-01-27 |
Family
ID=55141183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510828897.1A Pending CN105271242A (en) | 2015-11-25 | 2015-11-25 | Graphite shield of graphite assembly for polycrystalline silicon reduction furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105271242A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107098347A (en) * | 2017-05-27 | 2017-08-29 | 石嘴山市新宇兰山电碳有限公司 | Polycrystalline silicon reducing furnace novel graphite component |
| CN112424121A (en) * | 2018-07-23 | 2021-02-26 | 株式会社德山 | Core wire holder, silicon manufacturing apparatus, and silicon manufacturing method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204151079U (en) * | 2014-09-30 | 2015-02-11 | 新疆大全新能源有限公司 | Polycrystalline silicon reducing furnace |
| CN204400626U (en) * | 2015-02-11 | 2015-06-17 | 无锡中硅新材料股份有限公司 | A kind of polycrystalline silicon reducing furnace graphite components with block |
| CN205313108U (en) * | 2015-11-25 | 2016-06-15 | 无锡中硅新材料股份有限公司 | A graphite guard shield for graphite subassembly for polycrystalline silicon reduction furnace |
-
2015
- 2015-11-25 CN CN201510828897.1A patent/CN105271242A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204151079U (en) * | 2014-09-30 | 2015-02-11 | 新疆大全新能源有限公司 | Polycrystalline silicon reducing furnace |
| CN204400626U (en) * | 2015-02-11 | 2015-06-17 | 无锡中硅新材料股份有限公司 | A kind of polycrystalline silicon reducing furnace graphite components with block |
| CN205313108U (en) * | 2015-11-25 | 2016-06-15 | 无锡中硅新材料股份有限公司 | A graphite guard shield for graphite subassembly for polycrystalline silicon reduction furnace |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107098347A (en) * | 2017-05-27 | 2017-08-29 | 石嘴山市新宇兰山电碳有限公司 | Polycrystalline silicon reducing furnace novel graphite component |
| CN107098347B (en) * | 2017-05-27 | 2023-10-20 | 石嘴山市新宇兰山电碳有限公司 | Graphite component for polycrystalline silicon reduction furnace |
| CN112424121A (en) * | 2018-07-23 | 2021-02-26 | 株式会社德山 | Core wire holder, silicon manufacturing apparatus, and silicon manufacturing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204400626U (en) | A kind of polycrystalline silicon reducing furnace graphite components with block | |
| CN105271242A (en) | Graphite shield of graphite assembly for polycrystalline silicon reduction furnace | |
| CN106495163B (en) | A kind of device for eliminating polysilicon carbon head material | |
| CN205313108U (en) | A graphite guard shield for graphite subassembly for polycrystalline silicon reduction furnace | |
| CN207669029U (en) | A kind of lenses clamp | |
| CN202934386U (en) | Turning fixture for mounting hole of reverse-gear fork | |
| CN204454607U (en) | A kind of polycrystalline silicon reducing furnace graphite components | |
| CN109623444A (en) | A kind of adjustable milling fixture of large cone revolving body | |
| CN204417140U (en) | A kind of polycrystalline silicon reducing furnace graphite clamping petal | |
| CN202246096U (en) | Graphite chuck capable of being used repeatedly | |
| CN204019228U (en) | A kind of disk-like accessory turning attachment | |
| CN211360477U (en) | A full-automatic press-cutting machine for pencil connects production | |
| CN204053774U (en) | A kind of gear chamber cover processing clamping device | |
| CN103014597B (en) | A kind of nitriding furnace feeder | |
| CN204897333U (en) | Hanging flower basket lifting machine with novel branch rope ware | |
| CN202157145U (en) | Containing device for silicon core master batches | |
| CN205662626U (en) | Crucible apron | |
| CN201428730Y (en) | Automobile universal joint with steps on straight handle end of ball sleeve portion | |
| CN102490258B (en) | Mould and method for casting quartz crucibles | |
| CN203367255U (en) | Semiconductor manufacturing process clamp processing equipment | |
| CN203622279U (en) | Assembly tool for realizing coaxial clamping of two parts | |
| CN204658639U (en) | Circular loose tool | |
| CN202157883U (en) | Handheld engine air filter | |
| CN204220435U (en) | A kind of filtering metal frock | |
| CN206393272U (en) | A kind of special fixture of optoelectronic switch box body in CNC machining centers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160127 |