CN105259710A - Optical alignment photomask - Google Patents

Optical alignment photomask Download PDF

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Publication number
CN105259710A
CN105259710A CN201510771809.9A CN201510771809A CN105259710A CN 105259710 A CN105259710 A CN 105259710A CN 201510771809 A CN201510771809 A CN 201510771809A CN 105259710 A CN105259710 A CN 105259710A
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China
Prior art keywords
light
orientation
plane
orientation light
light shield
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CN201510771809.9A
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Chinese (zh)
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CN105259710B (en
Inventor
张伟基
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation

Abstract

The invention discloses an optical alignment photomask, comprising a first area and a second area which are adjacently and alternatively arranged, wherein the first area comprises a first plane and a second plane which are parallel to each other; when irradiation light enters into the optical alignment photomask in a first irradiation direction, the irradiation light enters into the first area through the first plane, first alignment light is emitted out through the second plane, second alignment light is emitted out through the second area, the direction of the first alignment light is identical to the first irradiation direction, and the direction of the second alignment light and the first irradiation direction are symmetric to the second plane. The optical alignment photomask disclosed by the invention has the advantage that bidirectional alignment light can be provided simultaneously.

Description

Light orientation light shield
Technical field
The present invention relates to LCD alignment technical field, particularly relate to a kind of light orientation light shield.
Background technology
In liquid crystal panel manufacture process, allocating process is to product quality quality important.Allocating process is mainly divided into friction matching and non-model control orientation.The orientation ability that friction matching method can provide liquid crystal molecule stronger, but in the process of friction, owing to utilizing the friction of flannelette contact, therefore can produce the pollution of electrostatic and particle (particle), and these pollute the damage often directly causing liquid crystal cell.Though be therefore academia or industry all in the orientation mode of continuous Improvement non-friction type, except the pollution of electrostatic and particle can be avoided, also can than being easier to the orientation mode controlling liquid crystal molecule.Utilize the orientation mode of non-friction type, the orientation of small size can be made according to some specific figures at shade, and then make the liquid crystal cell of some special demands.Be wherein go to irradiate with the inclined ultraviolet light of line the orientation agent having emulsion by known non-friction type alignment method, we are referred to as ultraviolet light orientation method, are called for short light orientation.
Light orientation utilizes the UV-irradiation of linear polar biased on the high molecular polymer alignment film with emulsion, makes high molecular polymer have orientation ability.Its advantage is can avoid the pollution of glass baseplate surface, can carry out the orientation of small size, can do the orientation of figure through light shield, utilize the angle of incident light and the length of irradiation time, the parameter of liquid crystal cells can be controlled, as tilt angle, surface orientation intensity etc.
In existing smooth allocating process, comprise UV 2a allocating process, UV 2a (UltraVioletVerticalAlignment) technology is a kind of VA (VerticalAlignment adopting ultraviolet (UV=UltraViolet) to carry out LCD alignment, vertical orientation) panel technology, its title derives from being multiplied of ultraviolet (UV) and liquid crystal panel VA pattern.By importing UV 2after A technology, can save at present in VA mode liquid crystal panel for controlling slit gap and the projection of liquid crystal alignment, therefore pass through UV 2the aperture opening ratio of A technology liquid crystal panel, contrast and response speed can be improved, and significantly can cut down production routine.
At UV 2in A allocating process, for reaching the display effect of wide viewing angle, polarization state UV is needed to irradiate light with certain angle of inclination, carry out two or more to the single sub-pixel subregion of same substrate time to carry out two-way irradiation and (first carry out first time unidirectional irradiation, then rotary plate 180 °, carry out the unidirectional irradiation of second time again, twice unidirectional irradiation set forms two-way irradiation), to form the orientation effect of 4Domain, 8Domain.The utilization factor of exposure form to UV light that current employing one side of something blocks light shield is low, ensures that the efficiency of making technology is lower.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of light orientation light shield that simultaneously can provide two-way orientation light.
To achieve these goals, embodiment of the present invention adopts following technical scheme:
A kind of light orientation light shield is provided, comprise the firstth district and the secondth district that adjoin and be arranged alternately, described firstth district comprises the first surface and second that are parallel to each other, when irradiating light and entering described smooth orientation light shield from the first direction of illumination, described irradiation light is injected described firstth district by described first surface and is penetrated the first orientation light from described second, described secondth district penetrates the second orientation light, the direction of described first orientation light is consistent with described first direction of illumination, and the direction of described second orientation light and described first direction of illumination are relative to described second symmetry.
Preferably, described secondth district comprises the multiple prism unit repeating to arrange, described prism unit is triangular prism, described firstth district that two bottom surfaces of described triangular prism are all adjacent adjacent is arranged, the side of described triangular prism comprises the end to end plane of incidence, reflecting surface and plane of refraction, the described plane of incidence is arranged perpendicular to described first direction of illumination, described reflecting surface is provided with reflective coating, described irradiation light injects described prism unit by the described plane of incidence, then be totally reflected on described plane of refraction successively, described reflecting surface is reflected, finally penetrate described second orientation light by described plane of refraction.
Preferably, α angle is formed between described first direction of illumination and described second, θ angle is formed between described plane of refraction and described second, form γ+θ angle between described reflecting surface and described second and and form γ angle between described plane of refraction, described prism unit adopts refractive index to be the material of n, and described α, described θ, described γ, described n meet following relational expression:
Preferably, described α, described θ, described γ meet following relational expression: γ+θ=α.
Preferably, the size of described θ is between 0 ° to 2 °.
Preferably, described firstth district is being a perpendicular to the thickness on the direction of described second, and described secondth district is being b perpendicular to the thickness on the direction of described second, and described b is less than or equal to described a.
Preferably, when described α, described θ, described γ meet following relational expression: during γ+θ≤α, contact between two adjacent described prism unit.
Preferably, when described α, described θ, described γ meet following relational expression: during γ+θ > α, between two adjacent described prism unit, spacing distance S is arranged, and described distance S meets following relational expression:
S = b t a n α - b t a n ( γ + θ ) .
Preferably, the described reflective coating of described prism unit is metal-plated rete.
Preferably, the side that the described first surface in described firstth district deviates from described second is coated with hyaline membrane.
Compared to prior art, the present invention has following beneficial effect:
When smooth orientation light shield of the present invention is applied in the allocating process of substrate liquid crystal, described smooth orientation light shield is arranged on described surface abreast, in exposure process, described smooth orientation light shield can be injected and the equal orientation light of incident angle from both direction for described substrate provides simultaneously, utilization factor to light source when improve single exposure, the exposure process step, the process efficiency that decrease whole described substrate high simultaneously.Further, when described irradiation light is linearly polarized light and polarization direction is parallel or perpendicular to the plane perpendicular to described first surface at described irradiation light place, the described first orientation light penetrated by described smooth orientation light shield is consistent with described irradiation polarisation of light direction with described second orientation polarisation of light direction, also namely described first orientation light and described second orientation polarisation of light situation can be controlled, further for high-quality liquid crystal alignment process provides guarantee by controlling described irradiation polarisation of light situation.
Accompanying drawing explanation
In order to be illustrated more clearly in technical scheme of the present invention, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained as these accompanying drawings.
Fig. 1 is the plan structure schematic diagram of a kind of smooth orientation light shield that the embodiment of the present invention provides.
Fig. 2 is the cut-open view at A-A place in Fig. 1.
Fig. 3 is the structural representation of the prism unit of a kind of smooth orientation light shield that the embodiment of the present invention provides.
Fig. 4 is the partial schematic diagram of the second plot structure of a kind of smooth orientation light shield that the embodiment of the present invention provides.
Fig. 5 is the partial schematic diagram of another kind second plot structure of a kind of smooth orientation light shield that the embodiment of the present invention provides.
Embodiment
Below in conjunction with the accompanying drawing in embodiment of the present invention, the technical scheme in embodiment of the present invention is clearly and completely described.
Refer to Fig. 1 and Fig. 2, Fig. 1 is the plan structure schematic diagram (in Fig. 1, dotted arrow is for illustrating the orientation light direction that described smooth orientation light shield provides) of a kind of smooth orientation light shield that the embodiment of the present invention provides, Fig. 2 be a kind of smooth orientation light shield that the embodiment of the present invention provides face structural representation (in Fig. 2, solid arrow is for illustrating to irradiate light direction and orientation light direction).The embodiment of the present invention provides a kind of light orientation light shield, comprise adjacent the first district 1 and the second district 2 be arranged alternately, described first district 1 comprises the first surface 11 and the second face 12 that are parallel to each other, when irradiating light C and entering described smooth orientation light shield from the first direction of illumination, described irradiation light C injects described first district 1 by described first surface 11 and penetrates the first orientation light A from described second face 12, described second district 2 penetrates the second orientation light B, the direction of described first orientation light A is consistent with described first direction of illumination, the direction of described second orientation light B and described first direction of illumination are relative to described second face 12 symmetry.
Should be understood that, " adjacent be arranged alternately " described in the present embodiment refers between adjacent described first district 1 and described second district 2 seamless, and described irradiation light just can be irradiated on substrate 3 after necessarily passing described first district 1 or described second district 2." direction of described second orientation light B is symmetrical relative to described second face 12 with described first direction of illumination " described in the present embodiment refer to the direction of described second orientation light B with its on described second face 12 be projected as axle center rotate 180 ° after direction overlap with described first direction of illumination, the direction of now described first orientation light A and the projection of described second orientation light B on described second face 12 is contrary (as in Fig. 1, dotted arrow in described first district 1 points to contrary with the dotted arrow direction in described second district 2), the equal and opposite in direction (as shown in Figure 2) of the angle that described first orientation light A and described second orientation light B and described second face 12 are formed.
Therefore, when described smooth orientation light shield is arranged on described substrate 3 abreast, described smooth orientation light shield can be injected and the equal orientation light of incident angle from both direction for described substrate 3 provides simultaneously, utilization factor to light source when improve single exposure, the exposure process step, the process efficiency that decrease whole described substrate high simultaneously.Further, when described irradiation light is linearly polarized light and polarization direction is parallel or perpendicular to the plane perpendicular to described first surface at described irradiation light place, the described first orientation light A penetrated by described smooth orientation light shield is consistent with described irradiation polarisation of light direction with the polarization direction of described second orientation light B, also namely described first orientation light and described second orientation polarisation of light situation can be controlled, further for high-quality liquid crystal alignment process provides guarantee by controlling described irradiation polarisation of light situation.
Further, incorporated by reference to Fig. 1, Fig. 2 and Fig. 3, the structural representation of the prism unit of a kind of smooth orientation light shield that Fig. 3 provides for the embodiment of the present invention.Described second district 2 of light orientation light shield described in the embodiment of the present invention comprises the multiple prism unit 21 repeating to arrange, described prism unit 21 is triangular prism, described firstth district that two bottom surfaces of described triangular prism are all adjacent adjacent is arranged, the side of described triangular prism comprises the end to end plane of incidence 211, reflecting surface 212 and plane of refraction 213, the described plane of incidence 211 is arranged perpendicular to described first direction of illumination, described reflecting surface 212 is provided with reflective coating, described irradiation light C injects described prism unit 21 by the described plane of incidence 211, then be totally reflected on described plane of refraction 213 successively, described reflecting surface 212 is reflected, finally penetrate described second orientation light B from described plane of refraction 213.
Preferably, the side that can deviate from described second at described first surface is coated with hyaline membrane, in order to balance the illumination of the described second orientation light B of described first orientation light A and described second district 2 injection penetrated in described first district 1, even if also described first orientation light A and described second orientation light B has identical illumination.
Preferably, described reflective coating is metal-plated rete, especially can select silver coating layer.
Preferably, material and described second district 2 in described first district 1 material can consistent also can be inconsistent.For example, described first district 1 and described second district 2 all can adopt glass material, and the size of refractive index n is between 1.5 to 1.77.
Further, α angle is formed between described first direction of illumination and described second face 12, θ angle is formed between described plane of refraction 213 and described second face 12, form γ+θ angle between described reflecting surface 212 and described second face 12 and and form γ angle between described plane of refraction 213, described prism unit 21 adopts refractive index to be the material of n, and described α, described θ, described γ, described n meet following relational expression:
Preferably, described α, described θ, described γ meet following relational expression: γ+θ=α, and all irradiation light now entering described secondth district all can again penetrate and do not absorbed by described prism unit 21 from described plane of refraction 213, and light source utilization rate is the highest.
Preferably, the size of the described θ of described prism unit between 0 ° to 2 °, the best during described θ=0 °, the best when also namely described plane of refraction 213 is almost parallel to described second, now described second district 21 difficulty of processing is little, and described multiple prism unit 21 production process is the simplest.
Further, refer to Fig. 2 and Fig. 3, described first district 2 described be a perpendicular to the thickness on the direction of described second; Described prism unit 21 is being b perpendicular to the thickness on the direction of described second, and also namely described second district 2 is being b perpendicular to the thickness on the direction of described second; Described b is less than or equal to described a.Now, when described first district 1 is consistent with the material in described second district 2, the described smooth orientation light shield being processed to form one can be carried out on the material that same thickness is a.
As a preferred embodiment of the present invention, refer to Fig. 3 and Fig. 4, when described α, described θ, described γ meet following relational expression: during γ+θ≤α, contact between adjacent two described prism unit 21, between two also namely adjacent described prism unit 21, there is not gap.
As another kind of preferred embodiment of the present invention, refer to Fig. 3 and Fig. 5, when described α, described θ, described γ meet following relational expression: during γ+θ > α, between adjacent two described prism unit 21, spacing distance S is arranged, and described distance S meets following relational expression:
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.

Claims (10)

1. a light orientation light shield, it is characterized in that, comprise the firstth district and the secondth district that adjoin and be arranged alternately, described firstth district comprises the first surface and second that are parallel to each other, when irradiating light and entering described smooth orientation light shield from the first direction of illumination, described irradiation light is injected described firstth district by described first surface and is penetrated the first orientation light from described second, described secondth district penetrates the second orientation light, the direction of described first orientation light is consistent with described first direction of illumination, and the direction of described second orientation light and described first direction of illumination are relative to described second symmetry.
2. light orientation light shield as claimed in claim 1, it is characterized in that, described secondth district comprises the multiple prism unit repeating to arrange, described prism unit is triangular prism, described firstth district that two bottom surfaces of described triangular prism are all adjacent adjacent is arranged, the side of described triangular prism comprises the end to end plane of incidence, reflecting surface and plane of refraction, the described plane of incidence is arranged perpendicular to described first direction of illumination, described reflecting surface is provided with reflective coating, described irradiation light injects described prism unit by the described plane of incidence, then be totally reflected on described plane of refraction successively, described reflecting surface is reflected, finally penetrate described second orientation light by described plane of refraction.
3. light orientation light shield as claimed in claim 2, it is characterized in that, α angle is formed between described first direction of illumination and described second, θ angle is formed between described plane of refraction and described second, form γ+θ angle between described reflecting surface and described second and and form γ angle between described plane of refraction, described prism unit adopts refractive index to be the material of n, and described α, described θ, described γ, described n meet following relational expression:
4. light orientation light shield as claimed in claim 3, it is characterized in that, described α, described θ, described γ meet following relational expression: γ+θ=α.
5. light orientation light shield as claimed in claim 3, it is characterized in that, the size of described θ is between 0 ° to 2 °.
6. light orientation light shield as claimed in claim 3, it is characterized in that, described firstth district is being a perpendicular to the thickness on the direction of described second, and described secondth district is being b perpendicular to the thickness on the direction of described second, and described b is less than or equal to described a.
7. light orientation light shield as claimed in claim 3, is characterized in that, when described α, described θ, described γ meet following relational expression: during γ+θ≤α, contact between two adjacent described prism unit.
8. light orientation light shield as claimed in claim 3, it is characterized in that, when described α, described θ, described γ meet following relational expression: during γ+θ > α, between two adjacent described prism unit, spacing distance S is arranged, and described distance S meets following relational expression:
9. light orientation light shield as claimed in claim 2, it is characterized in that, the described reflective coating of described prism unit is metal-plated rete.
10. light orientation light shield as claimed in claim 5, is characterized in that, the side that the described first surface in described firstth district deviates from described second is coated with hyaline membrane.
CN201510771809.9A 2015-11-12 2015-11-12 Light orientation light shield Active CN105259710B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017139999A1 (en) * 2016-02-15 2017-08-24 深圳市华星光电技术有限公司 Vertical photo-alignment method and method for manufacturing liquid crystal display panel
CN108873486A (en) * 2018-05-24 2018-11-23 南京中电熊猫液晶显示科技有限公司 A method of mask plate and light orientation for substrate light orientation
WO2020143845A1 (en) * 2019-01-08 2020-07-16 成都中电熊猫显示科技有限公司 Optical alignment method and optical alignment apparatus

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CN102216840A (en) * 2008-09-17 2011-10-12 三星电子株式会社 Liquid crystal display and manufacturing method of the same
CN102221758A (en) * 2011-07-18 2011-10-19 南京中电熊猫液晶显示科技有限公司 Alignment method for hybrid vertical photoalignment liquid crystal display device
CN103399431A (en) * 2013-08-22 2013-11-20 南京中电熊猫液晶显示科技有限公司 Photo-alignment exposure device of liquid crystal display
JP2015041006A (en) * 2013-08-22 2015-03-02 スタンレー電気株式会社 Liquid crystal optical element, and method of manufacturing the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102216840A (en) * 2008-09-17 2011-10-12 三星电子株式会社 Liquid crystal display and manufacturing method of the same
CN102221758A (en) * 2011-07-18 2011-10-19 南京中电熊猫液晶显示科技有限公司 Alignment method for hybrid vertical photoalignment liquid crystal display device
CN103399431A (en) * 2013-08-22 2013-11-20 南京中电熊猫液晶显示科技有限公司 Photo-alignment exposure device of liquid crystal display
JP2015041006A (en) * 2013-08-22 2015-03-02 スタンレー電気株式会社 Liquid crystal optical element, and method of manufacturing the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017139999A1 (en) * 2016-02-15 2017-08-24 深圳市华星光电技术有限公司 Vertical photo-alignment method and method for manufacturing liquid crystal display panel
CN108873486A (en) * 2018-05-24 2018-11-23 南京中电熊猫液晶显示科技有限公司 A method of mask plate and light orientation for substrate light orientation
CN108873486B (en) * 2018-05-24 2020-11-27 南京中电熊猫液晶显示科技有限公司 Mask plate for substrate photo-alignment and photo-alignment method
WO2020143845A1 (en) * 2019-01-08 2020-07-16 成都中电熊猫显示科技有限公司 Optical alignment method and optical alignment apparatus
US11275275B2 (en) 2019-01-08 2022-03-15 Chengdu Cec Panda Display Technology Co., Ltd. Photoalignment method and photoalignment device

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