CN105233629A - Gas absorbing device and technology - Google Patents
Gas absorbing device and technology Download PDFInfo
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- CN105233629A CN105233629A CN201510629714.3A CN201510629714A CN105233629A CN 105233629 A CN105233629 A CN 105233629A CN 201510629714 A CN201510629714 A CN 201510629714A CN 105233629 A CN105233629 A CN 105233629A
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Abstract
The invention discloses a gas absorbing device and technology. The gas absorbing device comprises a buffer tank, a primary absorbing tank, a secondary absorbing tank, and a foaming device, which are serially connected in sequence through soft pipes. The bottoms of the buffer tank, primary absorbing tank, secondary absorbing tank, and foaming device are all connected to a recovery tank through soft pipes, wherein the soft pipes are all provided with a valve and connected to the recovery tank individually, or the soft pipes are gathered together before being connected to the recovery tank. The inlet of the buffer tank is connected to a technology tail gas pipeline and an analysis tail gas pipeline, which are parallelly connected, wherein the joints between the two pipelines and buffer tank are both provided with a valve. A partition plate is arranged in the buffer tank. Two absorbing tanks are both provided with an absorbing liquid feed inlet with a valve; a high purity nitrogen gas or compressed air pipeline, a pressure meter, and a vacuum pipeline are parallelly connected to a tungsten hexafluoride gas pipeline, each pipeline are controlled by the valves; and an analysis and detection instrument is individually connected to the tungsten hexafluoride gas pipeline and the analysis tail gas pipeline and is arranged between the high purity nitrogen pipeline/pressure meter/vacuum pipeline and the analysis tail gas pipeline. The provided device has the advantages of simple structure, corrosion resistance, good absorbing effect, environment-friendliness, energy saving, convenience for observation, and no need of examination.
Description
Technical field
The present invention relates to device for absorbing tail gas, be specifically related to a kind of gas absorbing device and technique, particularly relate to absorption plant and the technique of tail gas in tungsten hexafluoride production process.
Background technology
In the production process of tungsten hexafluoride, inevitably there is hydrogen fluoride gas to produce.Hydrogen fluoride has extremely strong corrosivity, has severe toxicity, can pass through skin and mucosa, respiratory tract and gastrointestinal absorption, and skeletal tissue more can be caused downright bad.And tungsten hexafluoride meet steam in air can fast and water react and generate hydrogen fluoride, cause the injury the same with hydrogen fluoride.
In the production process of tungsten hexafluoride, have tail gas produce, the main component of tail gas is tungsten hexafluoride, hydrogen fluoride gas and nitrogen.Exhaust emissions containing tungsten hexafluoride and hydrogen fluoride gas not only contaminated environment in air, and cause a hidden trouble to the healthy of people, the discharge standard therefore tail gas clean-up being reached national environmental protection goal is the major issue of benefiting the nation and the people.
At present, factory adopts single cycle water washing tank to carry out absorption containing hydrofluoric tail gas usually, but this kind absorbs processing mode thoroughly can not eliminate hydrogen fluoride in waste gas, and water consumption is large, increases production cost.The tail gas adopting the method to absorb containing tungsten hexafluoride usually causes shower road junction to block, and impact absorbs.
Patent application CN103331092A discloses a kind of fluorinated hydrogen mixed gas absorption experiment device, blender is by the air from air-source and mix in proportion from the hydrogen fluoride gas of hydrogen fluoride source of the gas, mist to enter after gas absorption system by the calcium sulphate soln of inside or sodium hydroxide solution through spray-absorption, air-introduced machine again by being connected to external environment is emptying by it, and described gas absorption system is the two-level absorption tower of first grade absorption tower and/or series connection with it.This absorption experiment device is not suitable for the tail gas absorption containing tungsten hexafluoride, has and the risk of suck-back occurs, and use calcium sulfate or NaOH not good as the assimilation effect of absorbing liquid, easily there is pipeline clogging.
In order to process tungsten hexafluoride better production process in harmful tail gas of producing, improve plant produced working environment, simultaneously cost-saving better, therefore design and research and develop a kind of tungsten hexafluoride device for absorbing tail gas and be very important.
Summary of the invention
The object of the present invention is to provide and a kind ofly can purify the tail gas produced in tungsten hexafluoride production process, absorb the absorption plant of tungsten hexafluoride and hydrogen fluoride and nitrogen gas.
For achieving the above object, the invention provides a kind of gas absorbing device, it is characterized in that, comprise surge tank (8), first order absorption tank (11), secondary tourie (12), foam device (16) connected by flexible pipe successively, wherein surge tank (8), first order absorption tank (11), secondary tourie (12) are all connected with accumulator tank (17) by the flexible pipe with valve (15) respectively or after gathering with the bottom of foam device (16); Wherein the porch of surge tank (8) is connected with process tail gas pipeline (7) in parallel and analyzes exhaust pipe (6), and wherein process tail gas pipeline (7) and analysis exhaust pipe (6) and surge tank (8) junction are all with valve (15); Surge tank (8) inside is provided with the described first order absorption tank (11) of dividing plate (9) and secondary tourie (12) and establishes absorbing liquid charge door (14) with valve (15) respectively; High pure nitrogen or compressed air piping (2); Pressure gauge (3) and vacuum pipe (4) are connected in parallel on tungsten hexafluoride pipeline (1), and each pipeline is controlled by valve (15); Analysis and detecting instrument (5) one end is connected with tungsten hexafluoride pipeline (1), and one end is connected with analysis exhaust pipe (6), is positioned at high pure nitrogen pipeline (2) in parallel; Pressure gauge (3) and vacuum pipe (4) and analyze between exhaust pipe (6).
Further, it is characterized in that, described flexible pipe is corrosion-resistant flexible pipe;
Optional, dividing plate (9) is stainless steel.
Further, to stretch under liquid level slightly larger than the entrance of first order absorption tank (11) and secondary tourie (12) can the maximum volume sum of suck-back for the volume of described surge tank (8).
Further, described surge tank (8) inside is provided with dividing plate (9), can the import of isolation buffer tank and outlet; Preferred separator (9) is stainless steel.
Further, described first order absorption tank (11) and secondary tourie (12) air inlet are designed to horn shape.
Further, described absorbing liquid charge door (14) is positioned at the cover place of first order absorption tank (11) and secondary tourie (12), can supplement in time or change absorbing liquid, and this charge door be in case of emergency, can temporarily as evacuation port; The outer wall of first order absorption tank (11) and secondary tourie (12) is provided with transparent window (13) simultaneously; Preferably, transparent window (13) material adopts corrosion-resistant transparent PFA pipe.
Further, the absorbing liquid in described first order absorption tank (11) and secondary tourie (12) tank is potassium hydroxide solution; The potassium hydroxide solution of preferred 2.5mol/L.
Further, described surge tank (8), first order absorption tank (11) and secondary tourie (12) all adopt stainless steel, are the sealing device of disassembling cleaning, have phenyl tetrafluoride pad to seal between tank body and cover, and fixed by screw, can be corrosion-resistant.
Further, described foam device (16) is corrosion-resistant and transparent, and inside is furnished with potassium hydroxide solution and drips the aobvious redness of phenolphthalein indicator, and when absorbing saturated, solution decolourization in foam device, can assist the state judging tourie absorbed inside liquid.
Another one aspect, the present invention also provides a kind of technique for removing the industrial tail gas produced in tungsten hexafluoride production process, it is characterized in that, uses described gas absorbing device;
Concrete, analyze tail gas and enter the surge tank (8) with dividing plate (9) by analysis exhaust pipe (6) or industrial tail gas by process tail gas pipeline (7), accumulation in surge tank also mixes with nitrogen, if there is absorbing liquid suck-back, the absorbing liquid of suck-back is introduced in accumulator tank (17) by the valve (15) can opened on the flexible pipe of surge tank (8) connection accumulator tank (17); When the industrial tail gas in surge tank and the gaseous mixture of the nitrogen supplemented, when pressure reaches more than an atmospheric pressure, first order absorption tank (11) and secondary tourie (12) can be entered successively by connecting hose; Tungsten hexafluoride in tail gas is absorbed by the absorbing liquid of its inside, and the nitrogen do not reacted with absorbing liquid enters in air via foam device (16).
Absorption plant of the present invention both can absorb the process tail gas produced and produce in tungsten hexafluoride process, again can the analysis tail gas that produces of absorption analysis detecting instrument 5 tail end.The main component of the process tail gas produced in described production tungsten hexafluoride process is tungsten hexafluoride, hydrogen fluoride gas and nitrogen.Gas absorbing device of the present invention is not only applicable to purify the tail gas produced in tungsten hexafluoride production process simultaneously, is applicable to purification only containing hydrofluoric tail gas simultaneously.When only not containing hydrogen fluoride gas in tail gas containing tungsten hexafluoride, the High Purity Nitrogen source of the gas in high pure nitrogen pipeline (2) can replace to compressed air source, and absorbing liquid can replace to industrial sheet alkali lye, effectively reduces cost absorption.
Namely the steam running in air trace due to tungsten hexafluoride can react generation hydrogen fluoride, therefore analyze detect before be filled with high pure nitrogen by what repeatedly replace and vacuumize two kinds of operations and after pipe blow-through, then tungsten hexafluoride passed into analysis and detecting instrument detect.Described high pure nitrogen purity is 99.999%.Be filled with high pure nitrogen purging tungsten hexafluoride after detection terminates and enter analysis exhaust pipe (6).Therefore the main component of described analysis tail gas is tungsten hexafluoride and nitrogen.
In order to prevent tail gas from when reacting with absorbing liquid, suck-back occurring, thus pollute pipeline and analysis and detecting instrument (5), the present invention has installed surge tank (8) in tourie front end, is furnished with high pure nitrogen simultaneously and supplements malleation.The volume of described surge tank (8) to stretch under liquid level slightly larger than two tourie entrances can the maximum volume sum of suck-back.
Described surge tank (8) inside is provided with the dividing plate (9) of stainless steel, can the import of isolation buffer tank and outlet, effectively reduces the risk because of people's absorbing liquid suck-back caused for maloperation vacuumizes.The bottom of described surge tank (8) is provided with exhaust outlet, once there is suck-back accident, can open the tank connected valve of buffering (15) and be introduced in accumulator tank (17) by the absorbing liquid of suck-back.
Described surge tank (8) and tourie are the sealing device of disassembling cleaning, and have phenyl tetrafluoride pad to seal between tank body and cover, fixed by screw, material is 316 stainless steels, can resistance to tungsten hexafluoride and hydrofluoric corrosion, effectively its life-span of growth.
Absorbing liquid in described first order absorption tank (11) and secondary tourie (12) is potassium hydroxide solution.Select potassium hydroxide solution not use calcium sulphate soln or sodium hydroxide solution as absorbing liquid, be due to absorb after product potassium fluoride better than the dissolubility of calcirm-fluoride or sodium fluoride, absorb after prevented from caking blocking pipe.Preferred absorbing liquid concentration is 2.5mol/L, because potassium hydroxide solution assimilation effect the best at this concentration.
Described first order absorption tank (11) and secondary tourie (12) air inlet are designed to horn shape, stretch into below liquid level, effectively can increase the response area of tail gas and absorbing liquid, be beneficial to the carrying out of absorption.
Be provided with exhaust outlet at the bottom of the tank of described first order absorption tank (11) and secondary tourie (12), opening valve (15) can be undertaken unifying recycling by saturated absorbing liquid introducing accumulator tank 17.
The cover place of described first order absorption tank (11) and secondary tourie (12) is provided with absorbing liquid charge door (14), can supplement in time or change absorbing liquid, and this charge door in case of emergency, can temporarily as evacuation port.Be provided with exhaust outlet at the bottom of the tank of simultaneously first order absorption tank (11) and secondary tourie (12), open valve 15 and saturated absorbing liquid can be introduced in accumulator tank 17 and carry out unifying to recycle.
For the ease of observing the service condition of absorbing liquid, add corrosion-resistant transparent PFA pipe as form (13) at the outer wall of tourie.Described form (13) can help the change of the color of the absorbing liquid observed in tourie, state, liquid level, when absorbing liquid become muddy, color become milky or faint yellow time should change absorbing liquid in time; Absorbing liquid should be supplemented in time to scale when the liquid level of absorbing liquid declines.
Described foam device (16) is corrosion-resistant transparent vessel, and its entrance is connected with the outlet of secondary tourie (12), and inside is furnished with potassium hydroxide solution and drips the aobvious redness of phenolphthalein indicator.Once solution colour shoals or takes off for colourless, the known gas blown out by secondary tourie is aobvious acid immediately, and the absorbing liquid namely in tourie is saturated, can change absorbing liquid in time.Described foam device (16) alternative sample tap, can judge assimilation effect, save manpower and materials after regularly sampling inspection by analysis, effectively simple and efficient.
The present invention can be widely used in small scale experiments research level or large-scale plant produced level, has that structure simple possible, handling safety are reliable, the feature of energy-conserving and environment-protective.
The present invention, by the absorption efficiency of traditional single cycle water washing tank device and the many experiments contrast of apparatus of the present invention absorption efficiency, verifies that absorption plant of the present invention has better assimilation effect.Device in the embodiment of the present invention 1 is compared with traditional single cycle water washing tank device, the rate of recovery of tungsten and fluorine is all significantly improved, and proves that device in the embodiment of the present invention 1 has better assimilation effect than traditional single cycle water washing tank device for the tail gas of tungsten hexafluoride.
Gas absorbing device of the present invention is not only applicable to purify the tail gas produced in tungsten hexafluoride production process, is applicable to purification only containing hydrofluoric tail gas simultaneously.When only not containing hydrogen fluoride gas in tail gas containing tungsten hexafluoride, the High Purity Nitrogen source of the gas in high pure nitrogen pipeline 2 can replace to compressed air source, and absorbing liquid can replace to industrial sheet alkali lye, effectively reduces cost absorption.
Device of the present invention, compared with traditional single cycle water washing tank device, has that structure is simple, withstand corrosion, assimilation effect are good, energy-conserving and environment-protective, is convenient to observe, without the need to advantages such as inspections.
Accompanying drawing explanation
Fig. 1 is the structural representation of the absorption plant of tungsten hexafluoride of the present invention and hydrogen fluoride gas.
Fig. 2 is the structural representation of traditional single cycle water washing tank device.
Detailed description of the invention
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the present invention, and can not limitation of the present invention be interpreted as.Unreceipted concrete technology or condition person in embodiment, according to the technology described by the document in this area or condition or carry out according to product description.Agents useful for same or the unreceipted production firm person of instrument, being can by the conventional products of commercial acquisition.
Embodiment 1: the process of tungsten hexafluoride tail gas
See accompanying drawing 1, absorption plant of the present invention is mainly made up of surge tank 8, first order absorption tank 11, secondary tourie 12, foam device 16 and accumulator tank 17.High pure nitrogen pipeline 2, Pressure gauge 3 and vacuum lead 4 are connected in parallel on tungsten hexafluoride pipeline 1, each pipeline passes through Valve controlling, analyze detect before be filled with high pure nitrogen by what repeatedly replace and vacuumize two kinds of operations and after pipe blow-through, then tungsten hexafluoride is passed into analysis and detecting instrument 5 and detects.Be filled with high pure nitrogen purging tungsten hexafluoride after detection terminates and enter analysis exhaust pipe 6.Analyze exhaust pipe 6 porch of accessing surge tank 8 in parallel with process tail gas pipeline 7, each pipeline passes through Valve controlling.Two kinds of tail gas, by absorbing respectively through first order absorption tank 11, secondary tourie 12 after surge tank 8, import after in foam device 16 and enter in air.
Surge tank 8 inside is provided with the dividing plate 9 of stainless steel, can the import of isolation buffer tank and outlet, effectively reduces the risk because of people's absorbing liquid suck-back caused for maloperation vacuumizes.The bottom of described surge tank 8 is provided with exhaust outlet, once there is suck-back accident, can open valve 10 and be introduced in accumulator tank 17 by the absorbing liquid of suck-back.The absorbing liquid of first order absorption tank 11 and secondary tourie 12 is the potassium hydroxide solution of 2.5mol/L.The can body of first order absorption tank 11 and secondary tourie 12 is provided with form 13, can help the change of the color of the absorbing liquid observed in tourie, state, surplus, can change in time or supplementary absorbing liquid once change.The cover place of first order absorption tank 11 and secondary tourie 12 is provided with absorbing liquid charge door 14, can supplement in time or change absorbing liquid, and this charge door in case of emergency, can temporarily as evacuation port.Be provided with exhaust outlet at the bottom of the tank of first order absorption tank 11 and secondary tourie 12, opening valve 15 can be undertaken unifying recycling by saturated absorbing liquid introducing accumulator tank 17.
By to adopting traditional single cycle water washing tank device (see Fig. 2) of circulated sprinkling alkali liquor absorption method and utilizing apparatus of the present invention of malleation importing secondary alkali liquor absorption method to carry out many experiments contrast for the absorption efficiency of tungsten hexafluoride tail gas, verify that absorption plant of the present invention has the assimilation effect better to tungsten hexafluoride.
In Fig. 2,18 sample taps, 19 absorption towers, 20 bottomspumps, liquid storage tank at the bottom of 21 towers, 22 charge doors, 23 agitating devices, 24 storage tanks, 25 filler pipes, 26 wash one's hands liquid pump, and 27 sample taps, 28 air-introduced machines, 29 is emptying.
Table 1 is the rate of recovery contrast table that device in the embodiment of the present invention 1 and traditional single cycle water washing tank device absorb tungsten and fluorine.Wherein the rate of recovery of tungsten adopts the content of tungstic acid in spectrophotometry absorbing liquid to calculate, and formula is shown in following formula (1), (2); The rate of recovery of fluorine is that the content adopting Fluoride ion selective electrode method to measure fluorine ion in absorbing liquid calculates, and formula is shown in following formula (3), (4).
Be calculated as follows the content of tungstic acid in absorbing liquid:
In formula:
--the concentration of tungstic acid in absorbing liquid, mol/L;
E
1--record absorbing liquid or dilution light absorption value;
E
0--record sample blank light absorption value;
K--the slope of tungstic acid standard working curve;
V
1--pipette the volume of absorbing liquid, mL;
V
2--divide the liquor capacity getting dilution, mL.
Be calculated as follows the rate of recovery of tungsten (in W):
In formula:
--the concentration of tungstic acid in absorbing liquid, mol/L;
V--absorbing liquid cumulative volume, L;
M
wF6--pass into the gross mass of tungsten hexafluoride, g;
M
w--the molal weight of tungsten, g/mol;
M
wF6--the molal weight of tungsten hexafluoride, g/mol.
Be calculated as follows the content of fluorine ion in absorbing liquid:
In formula:
--V
xthe concentration of fluorine ion in ml soln, mol/L;
C
s--add the molar concentration of NaF standard liquid in test solution, mol/L;
V
s--add the volume of NaF standard liquid in test solution, mL;
V
x--divide and get test solution institute constant volume, mL;
E
2--after mark-on survey the potential value of solution, mV;
E
1--survey the potential value of solution, mV;
S--electrode slope.
Be calculated as follows fluorine (with F
-meter) the rate of recovery:
In formula:
--the concentration of fluorine ion in absorbing liquid, mol/L;
V--absorbing liquid cumulative volume, L;
M
f--the molal weight of fluorine ion, g/mol;
M
wF6--pass into the gross mass of tungsten hexafluoride, g;
M
wF6--the molal weight of tungsten hexafluoride, g/mol.
Device in table 1 embodiment of the present invention 1 and traditional single cycle water washing tank device absorb the rate of recovery contrast table of tungsten and fluorine
| Device | Tradition single cycle water washing tank device | Device in the embodiment of the present invention 1 |
| The rate of recovery of tungsten | 37％ | 85％ |
| The rate of recovery of fluorine | 31％ | 80％ |
From upper table 1, device in the embodiment of the present invention 1 is compared with traditional single cycle water washing tank device, the rate of recovery of tungsten and fluorine all has obvious rising, proves that device in the embodiment of the present invention 1 has better assimilation effect than traditional single cycle water washing tank device for the tail gas of tungsten hexafluoride.
Embodiment 2: the process of hydrogen fluoride tail gas
See accompanying drawing 1, compressed air piping 2, Pressure gauge 3 and vacuum lead 4 are connected in parallel on hydrogen fluoride gas pipeline 1, each pipeline passes through Valve controlling, analyze detect before be filled with high pure nitrogen by what repeatedly replace and vacuumize two kinds of operations and after pipe blow-through, then hydrogen fluoride gas is passed into analysis and detecting instrument 5 and detects.Be filled with compressed air purging hydrogen fluoride gas after detection terminates and enter analysis exhaust pipe 6.Analyze exhaust pipe 6 porch of accessing surge tank 8 in parallel with hydrogen fluoride process tail gas pipeline 7, each pipeline passes through Valve controlling.Two kinds of tail gas, by absorbing respectively through first order absorption tank 11, secondary tourie 12 after surge tank 8, import after in foam device 16 and enter in air.
Surge tank 8 inside is provided with the dividing plate 9 of stainless steel, can the import of isolation buffer tank and outlet, effectively reduces the risk because of people's absorbing liquid suck-back caused for maloperation vacuumizes.The bottom of described surge tank 8 is provided with exhaust outlet, once there is suck-back accident, can open valve 10 and be introduced in accumulator tank 17 by the absorbing liquid of suck-back.The absorbing liquid of first order absorption tank 11 and secondary tourie 12 is the industrial sheet aqueous slkali of 10mol/L.The can body of first order absorption tank 11 and secondary tourie 12 is provided with form 13, can help the change of the color of the absorbing liquid observed in tourie, state, surplus, can change in time or supplementary absorbing liquid once change.The cover place of first order absorption tank 11 and secondary tourie 12 is provided with absorbing liquid charge door 14, can supplement in time or change absorbing liquid, and this charge door in case of emergency, can temporarily as evacuation port.Be provided with exhaust outlet at the bottom of the tank of first order absorption tank 11 and secondary tourie 12, opening valve 15 can be undertaken unifying recycling by saturated absorbing liquid introducing accumulator tank 17.
When only not containing hydrogen fluoride gas in tail gas containing tungsten hexafluoride, High Purity Nitrogen source of the gas can replace to compressed air source, and KOH absorption liquid can replace to industrial sheet alkali lye, effectively reduces cost absorption.
Although illustrate and describe embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, those of ordinary skill in the art can change above-described embodiment within the scope of the invention when not departing from principle of the present invention and aim, revising, replacing and modification.
Claims (10)
1. a gas absorbing device, it is characterized in that, comprise surge tank (8), first order absorption tank (11), secondary tourie (12), foam device (16) connected by flexible pipe successively, wherein surge tank (8), first order absorption tank (11), secondary tourie (12) are all connected with accumulator tank (17) by the flexible pipe with valve (15) respectively or after gathering with the bottom of foam device (16); Wherein the porch of surge tank (8) is connected with process tail gas pipeline (7) in parallel and analyzes exhaust pipe (6), and wherein process tail gas pipeline (7) and analysis exhaust pipe (6) and surge tank (8) junction are all with valve (15); Surge tank (8) inside is provided with the described first order absorption tank (11) of dividing plate (9) and secondary tourie (12) and establishes absorbing liquid charge door (14) with valve (15) respectively; High pure nitrogen or compressed air piping (2); Pressure gauge (3) and vacuum pipe (4) are connected in parallel on tungsten hexafluoride pipeline (1), and each pipeline is controlled by valve (15); Analysis and detecting instrument (5) one end is connected with tungsten hexafluoride pipeline (1), and one end is connected with analysis exhaust pipe (6), is positioned at high pure nitrogen pipeline (2) in parallel; Pressure gauge (3) and vacuum pipe (4) and analyze between exhaust pipe (6).
2. gas absorbing device according to claim 1, is characterized in that, described flexible pipe is corrosion-resistant flexible pipe;
Optional, dividing plate (9) is stainless steel.
3. gas absorbing device according to claim 1, it is characterized in that, the volume of described surge tank (8) to stretch under liquid level slightly larger than the entrance of first order absorption tank (11) and secondary tourie (12) can the maximum volume sum of suck-back.
4. gas absorbing device according to claim 1, is characterized in that, described surge tank (8) inside is provided with dividing plate (9), can the import of isolation buffer tank and outlet; Preferred separator (9) is stainless steel.
5. gas absorbing device according to claim 1, is characterized in that, described first order absorption tank (11) and secondary tourie (12) air inlet are designed to horn shape.
6. gas absorbing device according to claim 1, it is characterized in that, described absorbing liquid charge door (14) is positioned at the cover place of first order absorption tank (11) and secondary tourie (12), can supplement in time or change absorbing liquid, and this charge door is in case of emergency, can temporarily as evacuation port; The outer wall of first order absorption tank (11) and secondary tourie (12) is provided with transparent window (13) simultaneously; Preferably, transparent window (13) material adopts corrosion-resistant transparent PFA pipe.
7. gas absorbing device according to claim 1, is characterized in that, the absorbing liquid in described first order absorption tank (11) and secondary tourie (12) tank is potassium hydroxide solution; The potassium hydroxide solution of preferred 2.5mol/L.
8. gas absorbing device according to claim 1, it is characterized in that, described surge tank (8), first order absorption tank (11) and secondary tourie (12) all adopt stainless steel, be the sealing device of disassembling cleaning, phenyl tetrafluoride pad is had to seal between tank body and cover, and fixed by screw, can be corrosion-resistant.
9. gas absorbing device according to claim 1, it is characterized in that, described foam device (16) is corrosion-resistant and transparent, inside is furnished with potassium hydroxide solution and drips the aobvious redness of phenolphthalein indicator, when absorbing saturated, solution decolourization in foam device, can assist the state judging tourie absorbed inside liquid.
10. for removing a technique for the industrial tail gas produced in tungsten hexafluoride production process, it is characterized in that, using the arbitrary described gas absorbing device of claim 1-9;
Concrete, analyze tail gas and enter the surge tank (8) with dividing plate (9) by analysis exhaust pipe (6) or industrial tail gas by process tail gas pipeline (7), accumulation in surge tank also mixes with nitrogen, if there is absorbing liquid suck-back, the absorbing liquid of suck-back is introduced in accumulator tank (17) by the valve (15) can opened on the flexible pipe of surge tank (8) connection accumulator tank (17); When the industrial tail gas in surge tank and the gaseous mixture of the nitrogen supplemented, when pressure reaches more than an atmospheric pressure, first order absorption tank (11) and secondary tourie (12) can be entered successively by connecting hose; Tungsten hexafluoride in tail gas is absorbed by the absorbing liquid of its inside, and the nitrogen do not reacted with absorbing liquid enters in air via foam device (16).
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| CN114293173A (en) * | 2021-12-17 | 2022-04-08 | 厦门钨业股份有限公司 | Device for carbon-doped chemical vapor deposition of tungsten coating |
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| CN108201871A (en) * | 2018-01-10 | 2018-06-26 | 南通大学 | Aluminium clinker water solution nitrogen removing device |
| CN108862193A (en) * | 2018-08-15 | 2018-11-23 | 黑龙江莱睿普思环境科技发展有限公司 | A kind of pressure surge tank for methanol decomposition hydrogen manufacturing |
| CN110618237A (en) * | 2019-09-23 | 2019-12-27 | 东北大学 | Fluorine concentration measuring device, fluorine concentration measuring method, and method for measuring adsorption efficiency of adsorbent |
| CN111638286A (en) * | 2020-06-11 | 2020-09-08 | 盐城工学院 | Device for pretreating smelly water sample and operation process thereof |
| CN114293173A (en) * | 2021-12-17 | 2022-04-08 | 厦门钨业股份有限公司 | Device for carbon-doped chemical vapor deposition of tungsten coating |
| CN114293173B (en) * | 2021-12-17 | 2024-02-09 | 厦门钨业股份有限公司 | Device for carbon doped chemical vapor deposition tungsten coating |
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