CN105204295B - Phase mask plate switching device - Google Patents
Phase mask plate switching device Download PDFInfo
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- CN105204295B CN105204295B CN201510289804.2A CN201510289804A CN105204295B CN 105204295 B CN105204295 B CN 105204295B CN 201510289804 A CN201510289804 A CN 201510289804A CN 105204295 B CN105204295 B CN 105204295B
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- mask plate
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Abstract
The array type phase mask plate switching device and stepped phase mask plate switching device of grating are inscribed for phase mask plate wrting method, by phase mask board clamp or phase mask plate fixture combination, two one-dimensional electric control displacement platforms, Change-over frame and control systems are constituted, compared with first technology, the present invention enormously simplify operation when fiber grating is inscribed, the automation for being capable of achieving fiber grating is inscribed, and can improve the quality and repeatability for inscribing grating.
Description
Technical field
The present invention relates to fiber grating, particularly a kind of phase mask plate that grating is inscribed for phase mask plate wrting method
Switching device.
Background technology
As fiber grating is in the extensive use in the fields such as coherent light communication, sensing and optical fiber laser, to optical fiber light
The demand of grid is also increasing, therefore realizes that the Automated condtrol of fiber grating inscription is conducive to the volume production to fiber grating.
The current method for inscribing fiber grating includes following several：
Standing wave interferometric method is early application, and its device is fairly simple, it is desirable to which germanic amount is very high, core diameter very little, and grating
Reflection wavelength only determine that the condition into grid is harsh by write-in optical wavelength, yield rate is low, does not meet real requirement, seldom
Use.
Horizontal holographic interferometry is that ultraviolet light is divided into the beam of intensity identical two after beam splitter, then converges at fiber cores
Area, is formed along the periodicity interference fringe of optical fiber axial direction, and a bit of photosensitive bare fibre of germanium of mixing is placed in into the relevant ultraviolet light beam of two beams
Exposed in the interference field for being formed, cause the periodic disturbance of fiber core refractive index, so as to form grating.This method is to used
The coherence of light source has requirement higher, and the micro-displacement that mechanical oscillation or temperature drift cause will all be produced to the making of grating
Tremendous influence, this requirement just to the stability of manufacturing system is very high.
Point-to-point writing method is to control fibre movement displacement using precision mechanism, is exposed every a cycle along fiber length
Light once, makes the refractive index of fiber cores form periodic distribution and be made fiber grating.This method flexibility is big, cycle and folding
Penetrate rate change and be all easier control, can make apodized bragg grating, and coherence to light source does not require.Have the disadvantage due to
Write-in light beam must focus on it is very intensive a bit, difficulty is larger；Limited by hot spot physical dimension simultaneously, the cycle of grating can not
It is too small.
Phase mask plate wrting method generally believes use most convenient at present, and effect is best, the best one kind side of development prospect
Method.This method is that light-sensitive optical fibre is pressed close into phase mask plate, using the interference fringe produced by phase mask plate near field diffraction pattern
The periodic disturbance of refractive index is formed in a fiber, so as to form fiber grating.Make fiber grating with phase mask plate legal system
Great advantage be write grating cycle only by phase mask plate cycle and write-in light beam direction determines, and with write light source
Wavelength it is unrelated；Meanwhile, the complexity of preparing grating system is greatly reduced, process is simple is reproducible, high yield rate, just
In large-scale mass production；Further, since write-in grating region is located at phase mask plate near field diffraction pattern area, therefore to the time of light source
Coherence requirement is not high, and the vibration isolation requirement to the light path system of write-in configuration can be reduced, using phase mask plate and scan exposure
Technology can also realize the control of refractive index, make the grating of special construction.
But also needed to sometimes same, it is necessary to obtain the fiber grating of different centre wavelengths due to the different of application occasion
The fiber grating of different wave length is inscribed on one section of optical fiber.The fiber grating of different wave length is inscribed, it is necessary to the phase of different cycles is covered
Template, and can be to the period vernier of grating with the method for stretching optical fiber using optical system amplification.
Generally when grating is inscribed, phase mask plate is changed every time artificially will be placed on a fixed folder by phase mask plate
, it is necessary to note the one side of the cutting face near optical fiber of phase mask plate on tool, phase-plate is difficult to control to the relative position of optical fiber
Accurately, if may closely damage very much phase-plate with the distance of optical fiber, too far, the speed for inscribing grating is excessively slow, it is necessary to be accurately positioned.
And when fiber grating is inscribed, optical fiber must be vertical with the groove of phase mask plate, can otherwise influence to inscribe the quality of grating.
When the grating of different cycles is inscribed on same section of optical fiber sometimes, it is also desirable to note as above problem, therefore to complete
The inscription of such grating, most of the time is used in replacing with for phase mask plate.
The content of the invention
In order to overcome the shortcoming of above-mentioned prior art, write for phase mask plate it is an object of the invention to provide one kind
Method inscribes the phase mask plate automation switching device of grating, and the grating quality inscribed using this switching device is good, repeatability
Height, handoff procedure without artificial operation, it is to avoid some human errors, reduces the inscription time by computer program control, it is adaptable to
Batch production.
Technical solution of the invention is as follows：
Scheme 1：
A kind of array type phase mask plate switching device that grating is inscribed for phase mask plate wrting method, is characterised by it
Composition includes that phase mask board clamp, one-dimensional electric control displacement platform are combined and control system, described phase mask board clamp
Used as base plate, with multiple rectangular recess, the size of rectangular recess is true with thickness by the size of phase mask plate with depth in front
Fixed, there is a certain size a rectangle loophole centre, regularly arranged, constitutes an array, and array both can be that multirow is more
Row, or single file multiple row or multirow it is single-row, the positive one group horizontal cutting conduct of described phase mask board clamp
Rectangle loophole of the datum line respectively with every a line is corresponding, and described one-dimensional electric control displacement platform combination is by first by Change-over frame
One-dimensional electric control displacement platform is fixed to the structure constituted on the sliding block of the second one-dimensional electric control displacement platform vertically, it is ensured that the 1st
The plane tieed up residing for the sliding block of electric control displacement platform is vertical with the direction that the sliding block of the second one-dimensional electric control displacement platform is moved, described
Phase mask plate fixture side fit and be screwed with the sliding block of the first one-dimensional electric control displacement platform.
Scheme 2：
A kind of stepped phase mask plate switching device that grating is inscribed for phase mask plate wrting method, it is characterised in that
Composition includes phase mask plate fixture combination, phase mask plate combination switch frame, the combination of one-dimensional electric control displacement platform and control system
System, described phase mask plate fixture combination includes multiple small jigs and a phase mask plate fixed mount, and described phase is covered
Fixing frame of formworks is a step structure, the number of steps of described phase mask plate fixed mount and the number one of phase mask plate
Cause, first small jig is placed on the uppermost step of phase mask plate fixed mount, soket head cap screw is screwed in first
In two screwed holes above small jig, and screw, second small jig is placed on second platform of phase mask plate fixed mount
On rank, two screwed holes above second small jig are aligned with two screwed holes below first small jig, screw in and revolve
Tight soket head cap screw, repeats to work above, and to the last a small jig is placed on nethermost step and fixes last
Behind small jig top, screwed in two screwed holes below last small jig and screw soket head cap screw, described phase
Bit mask board clamp is combined in uppermost phase small jig two datum lines, and described small jig is put into fixture frame by base plate
In the groove at the back side and it is screwed and is constituted, described one-dimensional electric control displacement platform combination is one-dimensional by first by Change-over frame
Electric control displacement platform is fixed to the structure constituted on the sliding block of the second one-dimensional electric control displacement platform vertically, it is ensured that the first one-dimensional electricity
Control parallel, the described phase in the direction of the sliding block movement of plane and the second one-dimensional electric control displacement platform residing for the sliding block of displacement platform
Bit mask plate fixed mount is fixed on the sliding block of the first one-dimensional electric control displacement platform vertically by phase mask plate combination switch frame,
The sliding block of the side of phase mask plate fixed mount and the first one-dimensional electric control displacement platform is at grade.
When using, the second one-dimensional electric control displacement platform is horizontally fixed on fiber clamp on the inscription platform of fiber grating
Above.Phase mask plate is fixed on switching fixture, each phase mask plate is numbered.By computer software, in selection
After required phase mask plate numbering, two movements of one-dimensional electric control displacement platform are automatically controlled, by selected phase mask plate
It is sent in fiber grating inscription light path.
The characteristics of present invention has following and advantage：
1st, the numbering of the phase mask plate currently to be used need to be only input into host computer, two mini positioning platforms are automatically controlled
Sliding block amount of movement, complete the switch operating of phase mask plate, selected phase mask plate is accurate in place every time, and energy
Enough ensure the groove and fiber perpendicular of mask plate.
2 and prior art ratio, there is the present invention phase mask plate to switch high precision, simple to operate, can guarantee that and cuts every time
Change that rear phase mask plate is consistent with the horizontal range of optical fiber, the groove and fiber perpendicular of mask plate, grating recording quality and repetition
The advantages of property is good.
3rd, the stepped phase mask plate switching device in scheme 2 is compared with the phase mask plate switching device in scheme 1,
Can be more quick detachable each phase mask plate although structure is more complicated, be easy to independent preservation, and can be more accurate
The distance between control phase mask plate and optical fiber.
Brief description of the drawings
Fig. 1 is the schematic diagram of array type phase mask plate switching device；
Fig. 2 is phase mask board clamp schematic diagram in scheme one；
Fig. 3 is one-dimensional electric control displacement platform combination diagram in scheme one；
Fig. 4 is the schematic diagram of stepped phase mask plate switching device；
Fig. 5 is phase mask plate fixture combination schematic diagram in scheme two；
Fig. 6 is one-dimensional electric control displacement platform combination diagram in scheme two.
Specific embodiment
The present invention is further illustrated below in conjunction with the accompanying drawings, but should not limit protection scope of the present invention with this.
One of embodiment, array type phase mask plate switching device, as shown in figure 1, constitute including that phase mask plate is pressed from both sides
Tool 1, one-dimensional electric control displacement platform combines 2 and control system 3.As shown in Fig. 2 the front of described phase mask board clamp 1 is made
It is base plate, with multiple rectangular recess 11, the size of rectangular recess 11 is true with thickness by the size of phase mask plate 6 with depth
Fixed, there is a certain size a rectangle loophole 12 centre, regularly arranged, constitutes an array, and array both can be multirow
Multiple row, or single file multiple row or multirow are single-row, and the horizontal cutting of 1 positive one group described of phase mask board clamp is made
On the basis of rectangle loophole 12 of the line 13 respectively with every a line it is corresponding.As shown in figure 3, described one-dimensional electric control displacement platform combination
2 is the sliding block that the first one-dimensional electric control displacement platform 21 is fixed to the second one-dimensional electric control displacement platform 22 vertically by Change-over frame 23
The structure constituted on 221, it is ensured that plane residing for sliding block 211 phase mask vertical, described with the direction that sliding block 221 is moved
Fit and be screwed with the sliding block 211 of the first one-dimensional electric control displacement platform 21 in the side of board clamp 1.
When using, phase mask plate 6 is pasted onto in each rectangular recess 11 of phase mask board clamp 1, is noted during stickup
Meaning faces up the cutting of phase mask plate 6, and each phase mask plate 6 is numbered.By the second one-dimensional electric control displacement platform
It is fixed on the inscription platform of fiber grating before fiber clamp.The phase mask plate 6 in the upper left corner is moved on into fiber grating to carve
In the light path write, using self-defined two one-dimensional electric control displacement platform moving directions of control software and displacement, so as to finely tune
The front and back position up and down of phase mask plate 6, the cutting face of phase mask plate 6 should try one's best close to but can not paste with the distance of optical fiber
On, and the energy of datum line 13 and fiber congruent, this uses terminate every time as the initial position of phase mask plate whirligig
Afterwards, the device is all recalled into initial position.When long-time is using the same position of phase mask plate 6, phase mask plate 6 is damaged
Afterwards, the upper-lower position of fine-tuning phase mask plate 6, after control system records current location, the phase mask is selected when next time
The position can be still navigated to during plate 6.
The two of embodiment, stepped phase mask plate switching device, as shown in figure 4, constitute including that phase mask plate is pressed from both sides
2 and control system 3 are combined in tool combination 4, phase mask plate combination switch frame 5, one-dimensional electric control displacement platform.As shown in figure 5, described
Phase mask plate fixture combination 4 include multiple small jigs and a phase mask plate fixed mount 41, described phase mask plate
Fixed mount 41 is a step structure, first small jig 43 is placed on the uppermost step of phase mask plate fixed mount 41
On, during soket head cap screw 42 screwed in into two screwed holes 431 above first small jig 43, and screw, it is small by second
Fixture 44 is placed on 41 second steps of phase mask plate fixed mount, two screwed holes 441 above second small jig 44 with
Two screwed holes 432 below first small jig 41 are aligned, and screw in and screw soket head cap screw 42, repeat to work above, directly
It is small at last after being placed on nethermost step and fix last top of small jig 45 to last small jig 45
Screwed in two screwed holes 452 below fixture 45 and screw soket head cap screw 42, described phase mask plate fixture combination 4 is most
There are two datum lines 433 in small jig 43 above, described small jig 43 is put into the back side of fixture frame 435 by base plate 434
In groove and it is screwed and is constituted, there is a rectangle loophole in the middle of described base plate 434.As shown in fig. 6, described one
Dimension electric control displacement platform combination 2 is that the first one-dimensional electric control displacement platform 21 is fixed into second vertically by Change-over frame 23 is one-dimensional automatically controlled
The structure constituted on the sliding block 221 of displacement platform 22, it is ensured that the plane residing for sliding block 211 is put down with the direction of the movement of sliding block 221
OK, described phase mask plate fixed mount 41 is fixed on the first one-dimensional automatically controlled position vertically by phase mask plate combination switch frame 5
Move on the sliding block 211 of platform 21, the sliding block 211 of the side of phase mask plate fixed mount 11 and the first one-dimensional electric control displacement platform 21
At grade.
When using, phase mask plate 6 is pasted onto on base plate 434, notes facing the cutting of phase mask plate 6 during stickup
On, base plate 434 is fixed up with fixture frame 435 using screw, each phase mask plate 6 is numbered.By the 2nd 1
Dimension electric control displacement platform is fixed on the inscription platform of fiber grating before fiber clamp, when installing for the first time, will be topmost
Small jig 43 move to optical fiber before, that is, inscribe fiber grating light path in, it is one-dimensional automatically controlled using self-defined two of control software
Displacement platform moving direction and displacement, so as to finely tune the front and back position up and down of phase mask plate 6, the quarter of phase mask plate 6
Groove face should try one's best close to but can not stick with the distance of optical fiber, and the energy of datum line 433 and fiber congruent, and this is used as phase mask
The initial position of plate whirligig, every time using after terminating, all recalls to initial position by the device.When long-time is covered using phase
The same position of template 6, after phase mask plate 6 is damaged, the upper-lower position of fine-tuning phase mask plate 6, control system ought
After the record of front position, the position can be still navigated to when the phase mask plate 6 is selected next time.
Control system 3 can be with computer as host computer 31, and the phase mask plate 6 needed for software interface selection is corresponding
Numbering, instruction is sent to slave computer 32 by computer interface, controls the first one-dimensional electric control displacement platform 31 and the second one-dimensional electricity
The moving direction and amount of movement of displacement platform 32 are controlled, required phase mask plate 5 is switched in the inscription light path of fiber grating.
Can also be using slave computer 32 separately as control system 3, such control system 3 needs relative with each phase mask plate 6
The switch 33 answered is used as input, the phase mask plate 6 needed for selection.
Experiment shows that the present invention enormously simplify operation when fiber grating is inscribed, and be capable of achieving the automation of fiber grating
Inscribe, and the quality and repeatability for inscribing grating can be improved.
Mark and rectangular recess or small jig number be for illustrative purposes only in figure, it is impossible to limits the protection model of the patent according to this
Enclose.
Claims (1)
1. a kind of stepped phase mask plate switching device that grating is inscribed for phase mask plate wrting method, is characterised by its structure
Into including phase mask plate fixture combination (4), phase mask plate combination switch frame (5), one-dimensional electric control displacement platform combination (2) and
Control system (3), described phase mask plate fixture combination (4) includes multiple small jigs and a phase mask plate fixed mount
(41), described phase mask plate fixed mount (41) is a step structure, and first small jig (43) is placed on phase to be covered
On the uppermost step of fixing frame of formworks (41), soket head cap screw (42) is screwed in into first small jig (43), two above
In screwed hole (431), and screw, second small jig (44) is placed on (41) second steps of phase mask plate fixed mount
On, two screwed holes of second small jig (44), two screwed holes (441) above with first small jig (41) below
(432) it is aligned, screws in and screw soket head cap screw (42), repeat to work above, to the last a small jig (45) is placed on most
On following step and after fixing last small jig (45) top, in last small jig (45) two screw threads below
Soket head cap screw (42), described phase mask plate fixture combination (4) uppermost small jig are screwed in and screwed in hole (452)
(43) there are two datum lines (433) on, described small jig (43) is put into the recessed of fixture frame (435) back side by base plate (434)
In groove and it is screwed and is constituted, has a rectangle loophole, described one-dimensional automatically controlled displacement in the middle of described base plate (434)
Platform combination (2) is that the first one-dimensional electric control displacement platform (21) is fixed into the second one-dimensional automatically controlled displacement vertically by Change-over frame (23)
The structure constituted on the sliding block (221) of platform (22), it is ensured that the side of plane and sliding block (221) movement residing for sliding block (211)
To parallel, described phase mask plate fixed mount (41) the 1st is fixed on by phase mask plate combination switch frame (5) vertically
On the sliding block (211) of dimension electric control displacement platform (21), the side of phase mask plate fixed mount (11) and the first one-dimensional automatically controlled displacement
The sliding block (211) of platform (21) is at grade.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510289804.2A CN105204295B (en) | 2015-05-29 | 2015-05-29 | Phase mask plate switching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510289804.2A CN105204295B (en) | 2015-05-29 | 2015-05-29 | Phase mask plate switching device |
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| CN105204295A CN105204295A (en) | 2015-12-30 |
| CN105204295B true CN105204295B (en) | 2017-05-31 |
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| CN201510289804.2A Active CN105204295B (en) | 2015-05-29 | 2015-05-29 | Phase mask plate switching device |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107121749A (en) * | 2017-06-08 | 2017-09-01 | 武汉光谷航天三江激光产业技术研究院有限公司 | A kind of special fixture group of fiber grating |
| CN107340565B (en) * | 2017-08-25 | 2018-10-09 | 武汉理工大学 | A kind of online device and method for preparing optical fiber optical grating array and automatically switching wavelength |
| CN110082855B (en) * | 2018-01-26 | 2022-09-20 | 福州高意光学有限公司 | Device and method for multi-fiber grating continuous writing and on-line testing |
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| JPS62198863A (en) * | 1986-02-27 | 1987-09-02 | Canon Inc | Exposing device |
| US6492077B1 (en) * | 2001-04-23 | 2002-12-10 | Taiwan Semiconductor Manufacturing Company | Multiple-reticle mask holder and aligner |
| CN101363712A (en) * | 2008-08-27 | 2009-02-11 | 天津大学 | Dynamic precision target drone for demarcating three-dimensional colourful digital system |
| CN102920086A (en) * | 2012-10-31 | 2013-02-13 | 中国科学院长春光学精密机械与物理研究所 | Installation device of helmet faceplate protective lens |
| CN104459875A (en) * | 2014-12-19 | 2015-03-25 | 中国科学院上海光学精密机械研究所 | Automatic phase mask plate switching device |
-
2015
- 2015-05-29 CN CN201510289804.2A patent/CN105204295B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62198863A (en) * | 1986-02-27 | 1987-09-02 | Canon Inc | Exposing device |
| US6492077B1 (en) * | 2001-04-23 | 2002-12-10 | Taiwan Semiconductor Manufacturing Company | Multiple-reticle mask holder and aligner |
| CN101363712A (en) * | 2008-08-27 | 2009-02-11 | 天津大学 | Dynamic precision target drone for demarcating three-dimensional colourful digital system |
| CN102920086A (en) * | 2012-10-31 | 2013-02-13 | 中国科学院长春光学精密机械与物理研究所 | Installation device of helmet faceplate protective lens |
| CN104459875A (en) * | 2014-12-19 | 2015-03-25 | 中国科学院上海光学精密机械研究所 | Automatic phase mask plate switching device |
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Effective date of registration: 20161027 Address after: 201800 Shanghai, Shanghai, 800-211 post office box Applicant after: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences Applicant after: Nanjing poly Photoelectric Technology Co., Ltd. Address before: 201800 Shanghai, Shanghai, 800-211 post office box Applicant before: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences Applicant before: Optical information Technology Co., Ltd. is sent in Nanjing |
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