CN105185801A - Solid state image pickup device and image pickup system - Google Patents
Solid state image pickup device and image pickup system Download PDFInfo
- Publication number
- CN105185801A CN105185801A CN201510540844.XA CN201510540844A CN105185801A CN 105185801 A CN105185801 A CN 105185801A CN 201510540844 A CN201510540844 A CN 201510540844A CN 105185801 A CN105185801 A CN 105185801A
- Authority
- CN
- China
- Prior art keywords
- substrate
- image pickup
- state image
- solid
- pickup apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
The invention relates to a solid state image pickup device and an image pickup system. The solid state image pickup device is configured by stacking a first substrate with a photoelectric conversion element and a gate electrode for conveying a transistor and a second substrate with a peripheral circuit portion. The first substrate does not comprise a high melting point metal compound layer while the second substrate comprises a high melting point metal compound layer. Through simple configuration, the transistor in the peripheral circuit portion can carry out an operation at a high speed; and meanwhile, characteristics degradation of the photoelectric conversion element is inhibited, so that a high-speed signal readout operation can be carried out.
Description
The divisional application that the application is application number is 200980163052.8, the applying date is on December 26th, 2009, denomination of invention is the application for a patent for invention of " solid-state image pickup apparatus and image picking system ".
Technical field
The present invention relates to rear surface irradiation type solid-state image pickup apparatus.
Background technology
The solid-state image pickup apparatus of fair speed has in recent years caused the structure proposing to arrange semiconductor compound layers at transistor place.
PTL1 discusses solid-state image pickup apparatus as follows, wherein refractory metal semiconductor compound layers is not set on the photodetector of photoelectric conversion part, and refractory metal semiconductor compound layers is set at peripheral circuit portion (peripheralcircuitportion) place.
PTL2 discusses the solid-state image pickup apparatus of rear surface irradiation type, in the solid-state image pickup apparatus of this rear surface irradiation type, in order to increase the sensitivity of photo-electric conversion element, the substrate comprising the pixel portion with this photo-electric conversion element and signal read circuit is mutually bonding with the substrate comprised for being processed the peripheral circuit of read output signal by the circuit in driving pixel portion.
Quoted passage list
Patent documentation
PTL1: Japanese Patent Publication No.2001-111022
PTL2: Japanese Patent Publication No.2009-170448
Summary of the invention
Technical problem
Arrange in the structure of refractory metal semiconductor compound layers in peripheral circuit portion in PTL1, because refractory metal is set up on the same substrate, therefore, refractory metal can be diffused into photo-electric conversion element.Even if the surface of photo-electric conversion element is protected by dielectric film, owing to such as there is the step forming refractory metal on dielectric film, therefore, refractory metal also can become and spread in dielectric film.In addition, such as, owing to polluting the resultant leakage current of photo-electric conversion element as refractory metal, therefore White Defects can be there is in the picture.Further, in order to be formed in the structure discussed in PTL1, must determine where form refractory metal semiconductor compound layers on the same substrate, making process complicated thus.
Therefore, an object of the present invention is, by using simple structure, being provided in the solid-state image pickup apparatus that high melting point metal compound layer is set in peripheral circuit portion while suppressing to cause the reduction of the characteristic of the photo-electric conversion element such as producing White Defects.
The solution of problem
The invention provides a kind of solid-state image pickup apparatus, wherein, arrange photo-electric conversion element and for the gate electrode that sends the electric charge from photo-electric conversion element first substrate and arrange mutually stacked for the second substrate of the peripheral circuit portion reading the signal based on the electric charge produced at photo-electric conversion element place, wherein, second substrate has high melting point metal compound layer, further, first substrate does not have high melting point metal compound layer.
Useful effect of the present invention
According to the present invention, the solid-state image pickup apparatus of high melting point metal compound layer is set in peripheral circuit portion while can being provided in the reduction of the characteristic of suppression photo-electric conversion element by using simple structure.
Accompanying drawing explanation
Fig. 1 is the sectional drawing of the solid-state image pickup apparatus for describing the first embodiment.
Fig. 2 is the sectional drawing of the solid-state image pickup apparatus for describing the second embodiment.
Fig. 3 is the sectional drawing of the solid-state image pickup apparatus for describing the 3rd embodiment.
Fig. 4 represents the manufacture method of the solid-state image pickup apparatus according to the 3rd embodiment.
Fig. 5 represents the manufacture method of the solid-state image pickup apparatus according to the 3rd embodiment.
Fig. 6 is the sectional drawing of the solid-state image pickup apparatus for describing the 5th embodiment.
Fig. 7 represents the manufacture method of the solid-state image pickup apparatus according to the 4th embodiment.
Fig. 8 represents the manufacture method of the solid-state image pickup apparatus according to the 4th embodiment.
Fig. 9 represents the manufacture method of the solid-state image pickup apparatus according to the 4th embodiment.
Figure 10 is the sectional drawing of the solid-state image pickup apparatus for describing the 5th embodiment.
Figure 11 is the sectional drawing of the solid-state image pickup apparatus for describing the 6th embodiment.
Figure 12 is the exemplary circuit according to solid-state image pickup apparatus of the present invention.
Figure 13 is the block diagram of the image picking system illustrated according to the 7th embodiment.
Embodiment
Formed according to solid-state image pickup apparatus of the present invention by mutual stacked first substrate and second substrate, wherein first substrate has photo-electric conversion element and for the gate electrode that transmits and second substrate has peripheral circuit portion.High melting point metal compound layer is not set at first substrate, and high melting point metal compound layer is set at second substrate.By this structure, become and more easily determine where form compound layer, and become the transistor at peripheral circuit portion place can be made with higher speed operation, and with the read operation of high speed executive signal, suppress the characteristic of photo-electric conversion element to reduce simultaneously.
Below, the present invention is described in detail with reference to the accompanying drawings.
First embodiment
With reference to Fig. 1 and Figure 12, the first embodiment of the present invention is described.
First, with reference to Figure 12, the exemplary circuit according to the solid-state image pickup apparatus of the first embodiment is described.Solid-state image pickup apparatus 300 shown in Figure 12 comprises the pixel portion 301 arranging multiple photo-electric conversion element and the control circuit had for performing the driving operation for reading signal from pixel portion 301 and has the peripheral circuit portion 302 of the signal processing circuit of process read output signal.
In pixel portion 301, multiple photo-electric conversion element 303, transfer transistor 304, amplifier transistor 306 and reset transistor 307 are set.The structure comprising at least one photo-electric conversion element 303 is defined as pixel.A pixel in embodiment comprises photo-electric conversion element 303, transfer transistor 304, amplifier transistor 306 and reset transistor 307.The source electrode of transfer transistor 304 is connected with photo-electric conversion element 303, and the drain region of transfer transistor 304 is connected with the gate electrode of amplifier transistor 306.The node corresponding with the gate electrode of amplifier transistor 306 is defined as node 305.Reset transistor is connected with node 305, and the electromotive force of node 305 is set as any electromotive force (such as, reset potential).Here, amplifier transistor 306 is parts of source follower circuit, and the signal corresponding with the electromotive force of node 305 is output to holding wire RL.
Peripheral circuit portion 302 comprises the vertical scanning circuit VSR of the gate electrode supply control signal for the transistor to pixel portion 301.Peripheral circuit portion 302 comprise the signal that keeps exporting from pixel portion 301 and comprise for amplifying, adding, the reading circuit RC of the signal processing circuit of AD conversion etc.In addition, peripheral circuit portion 302 comprises the horizontal scanning circuit HSR that control exports the control circuit of the timing of the signal from reading circuit RC successively.
Here, the solid-state image pickup apparatus 300 according to the first embodiment is formed by stacked two chips mutually.Two chips comprise the photo-electric conversion element 303 in pixel portion 301 and the first chip 308 of transfer transistor 304, and comprise the amplifier transistor 306 in pixel portion 301 and the second chip 309 of reset transistor 307 and peripheral circuit portion 302.In such an embodiment, control signal is fed into the gate electrode of the transfer transistor 304 of the first chip 308 from the peripheral circuit portion 302 of the second chip 309 by connecting portion 310.The signal produced at photo-electric conversion element 303 place of the first chip 308 is read out to node 305 by the connecting portion 311 be connected with the drain region of transfer transistor 304.By arranging reset transistor 307 and amplifier transistor 306 by this way on another chip, the area of photo-electric conversion element 303 can be increased, and increase sensitivity.If the area of photo-electric conversion element 303 is identical, so can provide many photo-electric conversion elements 303, make it possible to the quantity increasing pixel thus.
Below with reference to Fig. 1, the solid-state image pickup apparatus according to embodiment is described.Fig. 1 is the sectional drawing of the solid-state image pickup apparatus 100 corresponding with the solid-state image pickup apparatus 300 shown in Figure 12.Fig. 1 is the sectional drawing corresponding with the photo-electric conversion element 303 shown in Figure 12, transfer transistor 304 and amplifier transistor 306.Other part is not described.Fig. 1 represents the structure for two pixels.
Fig. 1 represents the composition surface 103 of the first chip 101, second chip 102 and the first chip and the second chip.First chip 101 is corresponding with the first chip 308 shown in Figure 12, and the second chip 102 is corresponding with the second chip 309 shown in Figure 12.
First chip 101 has first substrate 104.The surface of the formation transistor of first substrate 104 is interareas 105, and the face contrary with it of first substrate is the back side 106.The part forming the photo-electric conversion element 303 shown in Figure 12 and transfer transistor 304 is arranged on first substrate 104.The Miltilayer wiring structure 107 comprising the first wiring layer 122 and the second wiring layer 123 such as with the wiring (aluminum steel) that main component is aluminium is arranged on the top of interarea 105 side of the first substrate 104 of the first chip 101.Here, multiple interlayer dielectrics of Miltilayer wiring structure 107 are described to one dielectric film.
Second chip 102 has second substrate 108.The surface of the formation transistor of second substrate 108 is interareas 109, and the face contrary with it of this second substrate is the back side 110.The Miltilayer wiring structure 111 comprising the first wiring layer 128 and the second wiring layer 129 such as with aluminum steel is arranged on the top of interarea 109 of second substrate 108.Even if here, multiple interlayer dielectrics of Miltilayer wiring structure 111 are also described to one dielectric film.Amplifier transistor 306 shown in Figure 12 is arranged on second substrate 108.In the de-scription, in each chip, the direction from the interarea of substrate to the back side is defined as downward direction or dark direction, and the direction from the back side to interarea is defined as direction upwards or shallow direction.
Here, according in the solid-state image pickup apparatus of embodiment, the substrate interarea 105 of the first chip 101 and the substrate interarea 109 of the second chip 102 are by mutually stacked with faced by mutually.In FIG, in the structure of the connecting portion of the first chip 101 and the second chip 102, the connection between the gate electrode only representing the floating diffusion region (FD region) 113 of the first chip 101 and the amplifier transistor 126 of the second chip 102.Specifically, the FD region 113 of the first chip 101 is connected with the gate electrode 126 of amplifier transistor by Miltilayer wiring structure 107, connecting portion 311 and Miltilayer wiring structure 111.The connecting portion 310 that the gate electrode 114 to transfer transistor shown in Figure 12 supplies control signal is not illustrated at Fig. 1.It is the solid-state image pickup apparatus of the rear surface irradiation type of the back side 106 incident light from first substrate 104 according to the solid-state image pickup apparatus of embodiment.
Each chip will be described in detail.First, trap 115, the formation N-type charge accumulation region 112 of photo-electric conversion element and the gate electrode 114 of transfer transistor are arranged on the first substrate 104 of the first chip 101.Further, the P type sealer forming photo-electric conversion element is arranged on the top in charge accumulation region 112.Further, the drain region 113 of P-type semiconductor region 116, element isolation region 117 and transfer transistor is arranged on first substrate 104.Trap 115 is the semiconductor regions arranging transistor and photo-electric conversion element, and, can be here N-type or P type.P-type semiconductor region 116 can suppress the dark current produced on the interface between the silicon and silicon oxide film at the back side 106 of first substrate 104, and even can be used as a part for photo-electric conversion element.Charge accumulation region 112 is accumulated in the electric charge (electronics) that photo-electric conversion element place produces, and has P type sealer in the gate electrode side of transfer transistor in FIG.Element isolation region 117 is formed by P-type semiconductor region, and, although do not illustrate, the component isolation structure of the dielectric film comprising such as locos layer or STI separator can be had.The drain region 113 of transfer transistor is FD region, and forms the node 305 shown in Figure 12.The side, the back side 106 of the first substrate 104 of the first chip 101 has anti-reflective film 118, photomask 119, the colour filter 120 comprising planarization layer and lenticule 121.
Then, the source region of the amplifier transistor 306 in trap 124, Figure 12 and drain region 125 and gate electrode 126 and element isolation region 127 are arranged on the second substrate 108 of the second chip 102.Trap 124 is P-type semiconductor region.Here, the source region and the drain region 125 that are arranged on the transistor (amplifier transistor 306 shown in Figure 12) at the second chip 102 place of the solid-state image pickup apparatus according to embodiment comprise high melting point metal compound layer 130.The region being arranged on the peripheral circuit portion 302 shown in formation Figure 12 at the second chip 102 place also has the transistor (not shown) comprising high melting point metal compound layer similarly.When using silicon in semiconductor substrate, high melting point metal compound layer is such as used as the cobalt of refractory metal or the silicide of titanium.
High melting point metal compound layer is not formed at the transistor of such as first substrate 104.The dielectric film of Miltilayer wiring structure is arranged on the top of the interarea 105 of first substrate 104.Therefore, do not form high melting point metal compound layer at first substrate 104, and the transistor being arranged on the peripheral circuit portion of second substrate has high melting point metal compound layer, make it possible to the service speed increasing transistor while reducing noise.In addition, comprising the transistor of this high melting point metal compound layer by only arranging at the second chip 102, refractory metal being mixed into photo-electric conversion element can be reduced, and reduce the noise that the mixing due to refractory metal produces.To owing to being formed on the same substrate the region of high melting point metal compound layer be set and the region of high melting point metal compound layer is not set; therefore; such as diaphragm need not be formed to prevent the formation of high melting point metal compound layer; that is, each substrate can be made to have simple structure and manufacture it by the simple step of use.
In an embodiment, except photo-electric conversion element, also form FD region at first substrate 104.This be due to, if high melting point metal compound layer is arranged on photo-electric conversion element and forms the semiconductor regions in the FD region remaining on the signal charge that photo-electric conversion element produces, the noise so produced when refractory metal is mixed in semiconductor regions is mixed in signal charge.If amplifier transistor is arranged on first substrate, so do not form high melting point metal compound layer at amplifier transistor.
Although each wiring layer is formed by aluminum steel in an embodiment, the wiring (copper cash) that each wiring layer can be copper by main component is formed.Prevent the nonproliferation film of the diffusion of copper also can be arranged on the top of copper cash, and, prevent the nonproliferation film of the diffusion of copper from can stand composition.
Second embodiment
With reference to Fig. 2, the solid-state image pickup apparatus according to the present embodiment is described.Be that the circuit shown in its circuit with Figure 12 is equal to according to the solid-state image pickup apparatus of embodiment with the similar part of the solid-state image pickup apparatus according to the first embodiment, and both differences are its chip laminate structure.The description of circuit will be omitted below.Structure shown in Fig. 2 will be described below.
Fig. 2 is the sectional drawing of the solid-state image pickup apparatus 200 corresponding with the circuit shown in Figure 12.Fig. 2 is the sectional drawing of two pixels corresponding with the photo-electric conversion element 303 shown in Figure 12, transfer transistor 304 and amplifier transistor 306, and other part is not shown.
Fig. 2 represents the composition surface 203 of the first chip 201, second chip 202 and the first chip and the second chip.First chip 201 is corresponding with the first chip 308 shown in Figure 12, and the second chip 202 is corresponding with the second chip 309 shown in Figure 12.
First chip 201 has first substrate 204.The surface of the formation transistor of first substrate 204 is interareas 205, and the face contrary with it of first substrate is the back side 206.The part forming the photo-electric conversion element 303 shown in Figure 12 and transfer transistor 304 is arranged on first substrate 204.The Miltilayer wiring structure 207 comprising the first wiring layer 222 and the second wiring layer 223 such as with aluminum steel is arranged on the top of interarea 205 of first substrate 204.Here, multiple interlayer dielectrics of Miltilayer wiring structure 207 are described to one dielectric film.
Second chip 202 has second substrate 208.The surface of the formation transistor of second substrate 208 is interareas 209, and the face contrary with it of second substrate is the back side 210.The Miltilayer wiring structure 211 comprising the first wiring layer 228 and the second wiring layer 229 such as with aluminum steel is arranged on the top of interarea 209 of second substrate 208.Even if here, multiple interlayer dielectrics of Miltilayer wiring structure 211 are also described to one dielectric film.Amplifier transistor 306 shown in Figure 12 is arranged on second substrate 208.
Here, according in the solid-state image pickup apparatus of embodiment, the interarea 205 of first substrate 204 and the back side 210 of second substrate 208 are mutually stacked with faced by mutually.In fig. 2, in the structure of the connecting portion of the first chip 201 and the second chip 202, the connection between the gate electrode 226 that the FD213 of the first chip 201 and the amplifier transistor of the second chip 202 be only shown.Specifically, the FD region 213 of the first chip 201 is connected with the gate electrode 226 of amplifier transistor by Miltilayer wiring structure 207, connecting portion 311 and Miltilayer wiring structure 211.Here, arrange and form the part of connecting portion 311 and the through electrode 235 relevant with second substrate 208.By through electrode, the gate electrode 226 of FD region 213 and amplifier transistor is interconnected.Do not represent that the gate electrode 214 to transfer transistor supplies the connecting portion 310 shown in Figure 12 of control signal in fig. 2.It is the solid-state image pickup apparatus of the rear surface irradiation type of the back side 206 incident light from first substrate 204 according to the solid-state image pickup apparatus of embodiment.
Each chip will be described in detail below.Trap 215, the formation N-type charge accumulation region 212 of photo-electric conversion element and the gate electrode 214 of transfer transistor are arranged on the first substrate 204 of the first chip 201.Further, the drain region 213 of P-type semiconductor region 216, element isolation region 217 and transfer transistor is arranged on first substrate 204.The side, the back side 206 of the first substrate 204 of the first chip 201 has anti-reflective film 218, photomask 219, the colour filter 220 comprising planarization layer and lenticule 121.Then, the source region of the amplifier transistor 306 in trap 224, Figure 12 and drain region 225 and gate electrode 226 and element isolation region 227 are arranged on the second substrate 208 of the second chip 202.In addition, the first wiring layer 228 and the second wiring layer 229 are arranged on the top of second substrate 208, and insulating barrier 234 is arranged on the deepest part place of second substrate 208.Those of the structure of the first chip 201 and the second chip 202 and the first embodiment are similar, will not describe them therefore below.
In a second embodiment, further adhesive linkage 232 and support base 233 are set on the top of the second chip 202.Will be described later the insulating barrier in the second embodiment, adhesive linkage 232 and support base 233.
Here, be arranged on the source region of the transistor (amplifier transistor 306 shown in Figure 12) of the second chip 202 of the solid-state image pickup apparatus according to embodiment and drain region 225 and gate electrode 226 and there is high melting point metal compound layer 230.The region being arranged on the peripheral circuit portion 302 shown in formation Figure 12 of the second chip 202 also has the transistor (not shown) comprising high melting point metal compound layer similarly.When using silicon in semiconductor substrate, high melting point metal compound layer is such as used as the cobalt of refractory metal or the silicide of titanium.The transistor being such as arranged on the peripheral circuit portion of second substrate has high melting point metal compound layer, makes it possible to the speed of the operation increasing transistor.In addition, by only arranging the transistor comprising this high melting point metal compound layer at the second chip 202, refractory metal being mixed into photo-electric conversion element can be reduced while the characteristic of the photo-electric conversion element of suppression first chip 201 reduces.To owing to being formed on the same substrate the region of high melting point metal compound layer be set and the region of high melting point metal compound layer is not set; therefore; such as diaphragm need not be formed to prevent the formation of high melting point metal compound layer; that is, each substrate can be made to have simple structure and manufacture it by the simple step of use.
3rd embodiment
With reference to Fig. 3, the solid-state image pickup apparatus according to the present embodiment is described.Solid-state image pickup apparatus according to embodiment is corresponding with the solid-state image pickup apparatus 100 according to the first embodiment, and is from the different of its, and it comprises nonproliferation film.Structure shown in Fig. 3 will be described below.The architectural feature identical with the first embodiment will not be described.
In the solid-state image pickup apparatus 400 shown in Fig. 3, nonproliferation film 131 is arranged between the first chip 101 and the second chip 102.By arranging this nonproliferation film 131, can be diffused in Miltilayer wiring structure 111 and 107 and refractory metal is mixed into and forms in the semiconductor regions in FD region and the photo-electric conversion element of the first chip at the refractory metal of the high melting point metal compound layer of the second chip by restraint measure.Therefore, it is possible to suppress further to cause leakage current or the generation of the dark current of generation when refractory metal is mixed in semiconductor regions of (image) White Defects.
The manufacture method of the solid-state image pickup apparatus 400 shown in Fig. 3 is described with reference to Fig. 4 and Fig. 5.First, in Fig. 4 (a), the photodiode forming member (hereinafter referred to as " PD forming member ") 401 becoming the first substrate 104 shown in Fig. 3 and the circuit forming member 402 becoming the second substrate 108 shown in Fig. 3 are set.These parts are such as silicon semiconductor substrate, and can be any conduction type.PD forming member 401 comprises P-type semiconductor region 116 and insulating barrier 403.PD forming member 401 uses SOI substrate, and, form P-type semiconductor region 116 by epitaxial growth or ion implantation.
Then, as shown in Fig. 4 (b), form the gate electrode 114 of such as transfer transistor and the element in charge accumulation region 112 in PD forming member 401.Miltilayer wiring structure 107 is formed at the top of PD forming member 401.Miltilayer wiring structure 107 has the first wiring layer 122 and the second wiring layer 123.First wiring layer 122 and the second wiring layer 123 comprise multiple wiring.Wiring in embodiment is aluminum steel.Miltilayer wiring structure 107 has the interlayer dielectric for mutually insulated wiring.Such as, interlayer dielectric is arranged between the first wiring layer 122 and the gate electrode of transfer transistor and between the first wiring layer 122 and the second wiring layer 123.In order to form Miltilayer wiring structure 107, general semiconductor technology can be used.Finally, form the interlayer dielectric of covering second wiring layer, and its multiple part is removed, and some wirings of the second wiring layer 123 are exposed.The second wiring layer 123 exposed forms connecting portion 311.The surface of the gate electrode of the formation transfer transistor of PD forming member 401 becomes the interarea 105 of the first substrate described below.
In Fig. 4 (b), form trap 124 in circuit forming member 402 and comprise the peripheral circuit portion of transistor of such as amplifier transistor 306.Then, refractory metal is deposited on the precalculated position of the source region of such as transistor, drain region 125 and gate electrode 126, and, perform heat treatment, form high melting point metal compound layer 130 thus.Then, Miltilayer wiring structure 111 is formed on the top of circuit forming member 402.Miltilayer wiring structure 111 has the first wiring layer 128 and the second wiring layer 129.Those of the Miltilayer wiring structure 107 of the structure of Miltilayer wiring structure 111 and manufacture method and PD forming member 401 are similar.Then, after formation second wiring layer 129, form the nonproliferation film 131 of covering second wiring layer 129.Nonproliferation film 131 is formed by such as silicon nitride or carborundum.Nonproliferation film 131 spreads refractory metal for suppressing to PD forming member 401.Then, multiple parts of nonproliferation film 131 are removed, and some wirings of the second wiring layer 129 forming connecting portion 311 are exposed.Here, nonproliferation film is removed by etching or CMP technology.Here, circuit forming member 402 becomes second substrate 108.The interarea 109 of second substrate 108 is determined as shown in Fig. 4 (b).
Then, as shown in Fig. 5 (c), the interarea (105,109) of PD forming member 401 and circuit forming member 402 be set to mutually in the face of and be joined together by such as dimpling block.
Finally, as shown in Fig. 5 (d), undesirable part 404 and the insulating barrier 403 of removing PD forming member 401 by such as CMP or etching, make PD forming member 401 thinner, to form first substrate 104.Then, form on the top at the back side 106 of first substrate 104 anti-reflective film 118 formed by carborundum.After formation anti-reflective film 118, form tungsten film on the top of anti-reflective film 118 so that composition, form photomask 119 thus.Then, form planarization layer and colour filter 120, and form lenticule 121.This manufacture method makes it possible to the solid-state image pickup apparatus 400 shown in shop drawings 3.
Here, according to the structure of embodiment, formed Miltilayer wiring structure 107 interlayer dielectric after, at high temperature or for a long time can perform heat treatment, so as to improve photo-electric conversion element such as from defect recover characteristic.If first substrate has high melting point metal compound layer, so before formation interlayer dielectric, form high melting point metal compound layer.After formation interlayer dielectric, due to the problem of the diffusion of such as refractory metal, become and be difficult at high temperature or for a long time perform heat treatment.Therefore, according to the structure of embodiment, due to the heat treatment recovered from defect for photo-electric conversion element optionally can be performed, therefore, it is possible to suppress the reduction of the characteristic of photo-electric conversion element.
In the form of hope, in order to increase the contact resistance of the contact being arranged on FD region, it is desirable to perform ion implantation and heat treatment on the semiconductor regions be connected with plug.But, as mentioned above, if first substrate has high melting point metal compound layer, so become and be difficult to perform heat treatment in the contact forming step implemented after forming interlayer dielectric.Therefore, according to the structure of embodiment, while peripheral circuit portion arranges high melting point metal compound layer, sufficient heat treatment can be performed in the step of formation contact, FD region that high melting point metal compound layer is not set.Therefore, it is possible to suitably connect the contact at FD region place while the pollution of refractory metal reducing FD region.
As mentioned above, according to the solid-state image pickup apparatus of embodiment, can increase peripheral circuit portion place transistor operation speed and suppress the generation of the dark current at photo-electric conversion element place while increasing the speed of signal read operation further.
4th embodiment
With reference to Fig. 6, the solid-state image pickup apparatus according to the present embodiment is described.Corresponding with the structure of the solid-state image pickup apparatus according to the second embodiment according to the structure of the solid-state image pickup apparatus of the present embodiment, be from the different of its, it comprises nonproliferation film.Structure shown in Fig. 6 will be described below.The architectural feature be equal to the second embodiment will not be described.
In the solid-state image pickup apparatus 500 shown in Fig. 6, the nonproliferation film 231 of the diffusion of refractory metal is prevented to be arranged between the first chip 210 and the second chip 202.By arranging this nonproliferation film 231, can further restraint measure the high melting point metal compound layer of the second chip photo-electric conversion element from refractory metal to the first chip and form being mixed into of semiconductor regions in FD region.Therefore, it is possible to suppress the generation of (image) White Defects or dark current.Nonproliferation film 231 is the films formed by such as silicon nitride or carborundum.
Below, the manufacture method of the solid-state image pickup apparatus 500 shown in Fig. 6 is described with reference to Fig. 7 ~ 9.First, in Fig. 7 (a), the circuit forming member 502 that the photodiode becoming the first substrate 204 shown in Fig. 6 forms substrate (hereinafter referred to as " PD forming member ") 501 and becomes the second substrate 208 shown in Fig. 6 is set.PD forming member 501 comprises p-type semiconductor region 216 and insulating barrier 503.PD forming member 501 uses SOI substrate, and, form p-type semiconductor region 216 by epitaxial growth or ion implantation.Circuit forming member 502 uses SOI substrate and comprises insulating barrier 234.
Then, in the PD forming member 501 shown in Fig. 7 (b), form the element of the gate electrode 214 of such as transfer transistor, charge accumulation region 212 and trap 215.Miltilayer wiring structure 207 is formed at the top of PD forming member 501.Miltilayer wiring structure 207 comprises the first wiring layer 222 and the second wiring layer 223.Those in the structure of Miltilayer wiring structure 207 and manufacture method and the 3rd embodiment are similar, therefore will not describe them.Then, form the interlayer dielectric of covering second wiring layer 223, and multiple parts of interlayer dielectric are removed, and the wiring of the second wiring layer 223 is exposed.Second wiring layer 223 forms connecting portion 311.Then, covering second wiring layer 223 is formed and the nonproliferation film 231 formed by such as silicon nitride or carborundum.The interlayer dielectric covering the second wiring layer 233 can be arranged between the second wiring layer 223 and nonproliferation film 231.
In the circuit forming member 502 shown in Fig. 7 (b), form the transistor and the trap 224 that comprise amplifier transistor.Then, the precalculated position of the source region of such as transistor, drain region and gate electrode deposits refractory metal, and, perform heat treatment, form high melting point metal compound layer 230 thus.Then, Miltilayer wiring structure 211 is formed at the top of circuit forming member 502.Miltilayer wiring structure 211 has the first wiring layer 228.The structure of the first wiring layer 228 and manufacture method and the 3rd embodiment similar.
Then, in Fig. 8 (c), bond layer 506 and support base 507 are formed at the top of the first wiring layer 228 at circuit forming member 502 place.Then, removed undesirable part 504 of circuit forming member 502 by ablation or etching, and, form second substrate 208.
In Fig. 8 (d), become the interarea 205 of the PD forming member 501 of the first substrate 204 shown in Fig. 6 and the back side 210 of second substrate 208 by mutually stacked with faced by mutually, and, be joined together by such as dimpling block.Then, the first adhesive linkage 506 and the first support base 507 are removed.Then, interlayer dielectric is formed at the top of the first wiring layer 228 of second substrate 208, and, form the through electrode 235 be used for the electrical connection of first substrate 204.Through electrode 235 is manufactured by general semiconductor technology.Then, cover through electrode 235, and, form the second wiring layer 229.
Then, as shown in Figure 9, the top of the second wiring layer 229 of second substrate 208 arranges bond layer 232 and support base 233.Then, such as removed PD forming member 501 by CMP or etching undesirable 505, and, form first substrate 204.Then, form on the top at the back side 206 of first substrate 204 anti-reflective film 218 formed by such as silicon nitride.Then, the photomask 219 formed by such as tungsten is formed on the top of anti-reflective film 218.Further, planarization layer and colour filter 120 is formed on the top of photomask 219, and, form lenticule 212.This manufacture method makes it possible to the solid-state image pickup apparatus 500 shown in shop drawings 6.
Even if according in the structure of embodiment, due to the heat treatment of contact or photo-electric conversion element optionally can be performed, therefore, it is possible to suppress the reduction of characteristic of photo-electric conversion element and the increase of the contact resistance of contact.
As mentioned above, according to the solid-state image pickup apparatus of embodiment, can increase peripheral circuit portion place transistor service speed and suppress the generation of the dark current at photo-electric conversion element place while increasing the speed of signal read operation further.
5th embodiment
With reference to Figure 10, the solid-state image pickup apparatus according to the present embodiment is described.The structure of the solid-state image pickup apparatus 600,610 and 620 of the embodiment according to Figure 10 is corresponding with the structure of the solid-state image pickup apparatus 400 according to the 3rd embodiment, but the setting of nonproliferation film 131 is modified.The architectural feature be equal to the 3rd embodiment will not be described.
In the solid-state image pickup apparatus 600 shown in Figure 10 (a), nonproliferation film 131 is arranged between first substrate 104 and second substrate 108, and as the interlayer dielectric be contained in the Miltilayer wiring structure 107 on the top being arranged on first substrate 104.By means of this structure, the step forming interlayer dielectric can be omitted, and realize the slimming of solid-state image pickup apparatus.In addition, due to the solid-state image pickup apparatus that solid-state image pickup apparatus 600 is rear surface irradiation types, therefore, even if the nonproliferation film 131 formed by such as silicon nitride is arranged on the whole end face of photo-electric conversion element, such as, do not occur being derived from yet nonproliferation film 131 and as general interlayer dielectric silicon oxide film between the reflection of refringence.Therefore, it is possible to suppress the diffusion from the refractory metal of second substrate 108 while suppressing optical characteristics to reduce.The structure that nonproliferation film 131 is used as interlayer dielectric is not limited to the structure shown in Figure 10 (a).Such as, the interlayer dielectric in the Miltilayer wiring structure 111 on the top being arranged on second substrate 108 can be used.
Then, in the solid-state image pickup apparatus 610 shown in Figure 10 (b), nonproliferation film 131 is set between first substrate 104 and second substrate 108.In addition, nonproliferation film 131 is formed as contacting the high melting point metal compound layer 130 on the source region of second substrate 108 and drain region 125 and gate electrode 126.By means of this structure, nonproliferation film 131 can be used as etch stopper when forming the contact hole of second substrate 108.
Then, Figure 10 (c) Suo Shi in solid-state image pickup apparatus 620, nonproliferation film 131 is arranged between first substrate 104 and second substrate 108, and contacts the top of the first wiring layer 228 of second substrate 108.First wiring layer 228 is formed by copper cash.Nonproliferation film 131 is also as the nonproliferation film of diffusion preventing copper.By means of this structure, the step being formed and prevent the nonproliferation film of the diffusion of copper can be omitted, and realize the slimming of solid-state image pickup apparatus.Nonproliferation film 131 is not limited to the structure shown in Figure 10 (c) as the structure of the nonproliferation film preventing the diffusion of copper.Such as, the Miltilayer wiring structure 107 be arranged on the top of first substrate 104 can be formed by copper cash, and, nonproliferation film 131 can be formed for each wiring layer.
6th embodiment
With reference to Figure 11, the solid-state image pickup apparatus according to the present embodiment is described.The structure of the solid-state image pickup apparatus 700,710 and 720 of the embodiment according to Figure 11 is corresponding with the structure of the solid-state image pickup apparatus 500 according to the 4th embodiment, but the setting of nonproliferation film 231 is modified.The architectural feature be equal to the 4th embodiment will not described below.
In the solid-state image pickup apparatus 700 shown in Figure 11 (a), nonproliferation film 231 is arranged between first substrate 204 and second substrate 208, and as the interlayer dielectric be contained in the Miltilayer wiring structure 207 on the top being arranged on first substrate 104.By means of this structure, the step forming interlayer dielectric can be omitted, and realize the slimming of solid-state image pickup apparatus.In addition, solid-state image pickup apparatus 700 is solid-state image pickup apparatus of rear surface irradiation type.Therefore, even if the nonproliferation film 231 formed by such as silicon nitride is arranged on the whole end face of photo-electric conversion element, also need not consider to be derived from nonproliferation film 231 and as general interlayer dielectric silicon oxide film between the reflection of incident light of refringence.Therefore, it is possible to suppress the diffusion from the refractory metal of second substrate 208.
In the solid-state image pickup apparatus 710 shown in Figure 11 (b), nonproliferation film 231 is arranged between first substrate 204 and second substrate 208, and contacts the top of the first wiring layer 222 of first substrate 208.First wiring layer 222 is formed by copper cash.Nonproliferation film 231 is also as the nonproliferation film of diffusion preventing copper.By means of this structure, the step being formed and prevent the nonproliferation film of the diffusion of copper can be omitted, and realize the slimming of solid-state image pickup apparatus.Nonproliferation film 231 is not limited to the structure shown in Figure 11 (b) as the structure of the nonproliferation film preventing the diffusion of copper.Such as, as shown in Figure 11 (c), be arranged on first substrate 204 top Miltilayer wiring structure 207 multiple parts in, the second wiring layer 223 can be formed by copper cash, further, nonproliferation film 231 can be arranged on the top of the second wiring layer 223.Here, nonproliferation film 231 can be arranged on the top of the first wiring layer 222.In order to reduce the electric capacity between wiring layer, can perform according to the form of the wiring at the top place of the first wiring layer 222 composition preventing the nonproliferation film of the diffusion of copper, and remove its part.As shown in Figure 11 (c), the Miltilayer wiring structure 211 be arranged on the top of second substrate 208 can be formed by copper cash, and can comprise copper nonproliferation film 901.
7th embodiment
In an embodiment, photoelectric conversion device according to the present invention is applied to image picking system situation as image pick-up device is described in detail.Image picking system can be such as digital still life camera or digital camera.The block diagram of the situation of the digital still life camera application photoelectric conversion device to the example as image picking system shown in Figure 13.
In fig. 13, Reference numeral 1 represents the baffle plate for the protection of lens, and Reference numeral 2 represents the lens being in optical imagery image pick-up device 4 being formed irradiated body at this, and Reference numeral 3 represents the aperture diaphragm of the amount for changing the light through lens 2.Reference numeral 4 represents the image pick-up device as the solid-state image pickup apparatus described in the above-described embodiment any one.Image pick-up device 4 converts the optical imagery that scioptics 2 are formed to view data.Here, AD converter is arranged on image pick-up device 4 place.Specifically, AD converter is formed at the second chip place.Reference numeral 7 represents the signal processing part image pickup data exported from image pick-up device 4 being performed to various correction and data compression.In addition, in fig. 13, Reference numeral 8 represents the timing generating unit exporting various timing signal to image pick-up device 4 and signal processing part 7, and Reference numeral 9 represents the various computing of execution and controls the overall control/operational part of whole digital still life camera.Reference numeral 10 represents the memory section of temporary transient storing image data, Reference numeral 11 represents the interface portion being used for executive logging operation or read operation on the recording medium, and Reference numeral 12 represents such as recording or read the removable recording medium of the semiconductor memory of image pickup data.In addition, Reference numeral 13 represents the interface portion be used for such as outer computer executive communication.Here, such as, timing signal can be transfused to outside image picking system, and image picking system at least can comprise image pick-up device 4 and process the signal processing part 7 of the image pickup signal exported from image pick-up device.Although be used in the situation that image pick-up device 4 arranges AD converter in an embodiment, image pick-up device and AD converter can be set at different chip places.In addition, signal processing part 7 grade can be arranged on image pick-up device 4.Because the second chip place at image pick-up device 4 forms high melting point metal compound layer, therefore, can high speed executive signal process etc.Therefore, photoelectric conversion device according to the present invention is applicable to image picking system.By photoelectric conversion device according to the present invention is applied to image pick-up device, high-speed capture can be performed.
As mentioned above, solid-state image pickup apparatus according to the present invention makes it possible to provide the solid-state image pickup apparatus that can perform high speed operation.Further, nonproliferation film makes it possible to reduce dark current, and suppresses the generation of the White Defects in image.Embodiment is not limited to the structure described, and embodiment can be combined as required.Such as, solid-state image pickup apparatus can comprise the multiple nonproliferation films preventing the diffusion of refractory metal.
Except the source region of transistor, drain region and gate electrode, also can form high melting point metal compound layer in the part applying electromotive force to the semiconductor regions of such as trap contact.
Industrial usability
The present invention is applicable to the solid-state image pickup apparatus used in the image picking system of such as digital still life camera or digital camera.
101 first chips
102 second chips
103 composition surfaces
104 first substrates
107 Miltilayer wiring structures
108 second substrates
111 Miltilayer wiring structures
112 photo-electric conversion elements
124 traps
125 regions and source/drain
The gate electrode of 126 amplifier transistors
130 high melting point metal compound layers
Claims (17)
1. a solid-state image pickup apparatus, wherein, be provided with photo-electric conversion element and for the gate electrode of the transfer transistor that sends the electric charge from photo-electric conversion element first substrate and to be provided with the second substrate of the peripheral circuit portion for reading the signal based on the electric charge produced at photo-electric conversion element place mutually stacked, wherein
Second substrate has high melting point metal compound layer, and,
First substrate does not have high melting point metal compound layer.
2. solid-state image pickup apparatus according to claim 1, wherein, the top of first substrate has the wiring layer comprising aluminum steel or copper cash, and,
The top of second substrate has the wiring layer comprising aluminum steel or copper cash.
3. according to the solid-state image pickup apparatus of claim 1 or claim 2, comprise the nonproliferation film be arranged between first substrate and second substrate, this nonproliferation film prevents the diffusion of refractory metal.
4. according to the solid-state image pickup apparatus of claim 1 or claim 2, wherein, the interarea being provided with the transistor of peripheral circuit portion of the interarea being provided with the gate electrode of transfer transistor of first substrate and second substrate is mutually stacked with faced by mutually.
5. solid-state image pickup apparatus according to claim 4, comprises the nonproliferation film be arranged between first substrate and second substrate, and this nonproliferation film prevents the diffusion of refractory metal.
6. solid-state image pickup apparatus according to claim 5, comprises and is arranged on wiring layer on first substrate and interlayer dielectric,
Wherein, prevent the nonproliferation film of the diffusion of refractory metal from being the described interlayer dielectric being arranged on first substrate.
7. solid-state image pickup apparatus according to claim 5, comprises and is arranged on wiring layer on second substrate and interlayer dielectric,
Wherein, prevent the nonproliferation film of the diffusion of refractory metal from being the described interlayer dielectric being arranged on second substrate.
8. solid-state image pickup apparatus according to claim 5, wherein, prevents the nonproliferation film of the diffusion of refractory metal to be set to contact the high melting point metal compound layer of the transistor comprising the high melting point metal compound layer being arranged on second substrate.
9. solid-state image pickup apparatus according to claim 5, wherein, at least the top of first substrate or the top of second substrate have the wiring layer comprising copper cash,
The top comprising the wiring layer of copper cash has the nonproliferation film of the diffusion preventing copper, and,
Prevent the described nonproliferation film of the diffusion of copper as the nonproliferation film of diffusion preventing refractory metal.
10. according to the solid-state image pickup apparatus of claim 1 or claim 2, wherein, the interarea being provided with the gate electrode of transfer transistor of first substrate and second substrate is mutually stacked with faced by mutually at this opposing face being in peripheral circuit portion the interarea forming transistor.
11. solid-state image pickup apparatus according to claim 10, comprise the nonproliferation film be arranged between first substrate and second substrate, and nonproliferation film prevents the diffusion of refractory metal.
12. solid-state image pickup apparatus according to claim 11, comprise and are arranged on wiring layer on first substrate and the interlayer dielectric being set to contact described wiring layer,
Prevent the nonproliferation film of the diffusion of refractory metal from being the described interlayer dielectric being arranged on first substrate.
13. solid-state image pickup apparatus according to claim 11, wherein, prevent the nonproliferation film of the diffusion of refractory metal to be set to contact the back side of second substrate.
14. solid-state image pickup apparatus according to claim 11, comprise the wiring layer comprising copper cash be at least arranged on first substrate, and
Be arranged on the nonproliferation film preventing the diffusion of copper comprised on the wiring layer of copper cash,
Wherein, prevent the nonproliferation film of the diffusion of copper as the nonproliferation film of diffusion preventing refractory metal.
15. according to the solid-state image pickup apparatus of any one in claim 1 ~ 14, and wherein, first substrate has the floating diffusion region being transmitted electric charge by the gate electrode of transfer transistor from photo-electric conversion element, and,
Second substrate has the amplifier transistor of the gate electrode of the signal comprising the electromotive force be transfused to based on floating diffusion region and the reset transistor for the gate electrode of amplifier transistor being set to reset potential, further, the top of second substrate has the holding wire exported based on the signal of the gate electrode of amplifier transistor.
16. according to the solid-state image pickup apparatus of any one in claim 1 ~ 14, wherein, first substrate have by the gate electrode of transfer transistor from photo-electric conversion element transmit electric charge floating diffusion region, comprise the amplifier transistor of the gate electrode of the signal of the electromotive force be transfused to based on floating diffusion region and the reset transistor for the gate electrode of amplifier transistor being set to reset potential, and
The top of second substrate has the holding wire exported based on the signal of the gate electrode of amplifier transistor.
17. 1 kinds of image picking systems, comprising:
According to the solid-state image pickup apparatus of any one in claim 1 ~ 16; With
Process the signal processing part of the signal exported from solid-state image pickup apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510540844.XA CN105185801B (en) | 2009-12-26 | 2009-12-26 | Solid-state image pickup device and image pickup system |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510540844.XA CN105185801B (en) | 2009-12-26 | 2009-12-26 | Solid-state image pickup device and image pickup system |
| CN200980163052.8A CN102668081B (en) | 2009-12-26 | 2009-12-26 | Solid-state image pickup apparatus and image picking system |
| CN201510301075.8A CN105023930B (en) | 2009-12-26 | 2009-12-26 | Solid-state image pickup apparatus and image picking system |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200980163052.8A Division CN102668081B (en) | 2009-12-26 | 2009-12-26 | Solid-state image pickup apparatus and image picking system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105185801A true CN105185801A (en) | 2015-12-23 |
| CN105185801B CN105185801B (en) | 2020-07-24 |
Family
ID=55023788
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510301075.8A Active CN105023930B (en) | 2009-12-26 | 2009-12-26 | Solid-state image pickup apparatus and image picking system |
| CN201510540844.XA Active CN105185801B (en) | 2009-12-26 | 2009-12-26 | Solid-state image pickup device and image pickup system |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510301075.8A Active CN105023930B (en) | 2009-12-26 | 2009-12-26 | Solid-state image pickup apparatus and image picking system |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN105023930B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107621709B (en) * | 2017-10-10 | 2020-06-05 | 上海天马微电子有限公司 | Display panel and display device |
| TWI812680B (en) * | 2018-05-15 | 2023-08-21 | 日商索尼半導體解決方案公司 | Camera device and camera system |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001111022A (en) * | 1999-08-05 | 2001-04-20 | Canon Inc | Photoelectric conversion device and method of fabrication thereof, image information processor |
| US20060141661A1 (en) * | 2002-09-11 | 2006-06-29 | Park Young-Hoon | CMOS image sensor and method of fabricating the same |
| CN1822379A (en) * | 2004-12-30 | 2006-08-23 | 美格纳半导体有限会社 | Image sensor with enlarged photo detection area and method for fabricating the same |
| CN101060082A (en) * | 2006-04-20 | 2007-10-24 | 联华电子股份有限公司 | Semiconductor structure and its manufacture method |
| CN101075563A (en) * | 2006-05-19 | 2007-11-21 | 国际商业机器公司 | Structure and method for forming semiconductor component |
| CN101114596A (en) * | 2006-07-24 | 2008-01-30 | 联华电子股份有限公司 | MOSFET and manufacturing method thereof |
| WO2008156274A1 (en) * | 2007-06-19 | 2008-12-24 | Siliconfile Technologies Inc. | Pixel array preventing the cross talk between unit pixels and image sensor using the pixel |
| JP2009170448A (en) * | 2008-01-10 | 2009-07-30 | Nikon Corp | Solid-state imaging element |
-
2009
- 2009-12-26 CN CN201510301075.8A patent/CN105023930B/en active Active
- 2009-12-26 CN CN201510540844.XA patent/CN105185801B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001111022A (en) * | 1999-08-05 | 2001-04-20 | Canon Inc | Photoelectric conversion device and method of fabrication thereof, image information processor |
| US20060141661A1 (en) * | 2002-09-11 | 2006-06-29 | Park Young-Hoon | CMOS image sensor and method of fabricating the same |
| CN1822379A (en) * | 2004-12-30 | 2006-08-23 | 美格纳半导体有限会社 | Image sensor with enlarged photo detection area and method for fabricating the same |
| CN101060082A (en) * | 2006-04-20 | 2007-10-24 | 联华电子股份有限公司 | Semiconductor structure and its manufacture method |
| CN101075563A (en) * | 2006-05-19 | 2007-11-21 | 国际商业机器公司 | Structure and method for forming semiconductor component |
| CN101114596A (en) * | 2006-07-24 | 2008-01-30 | 联华电子股份有限公司 | MOSFET and manufacturing method thereof |
| WO2008156274A1 (en) * | 2007-06-19 | 2008-12-24 | Siliconfile Technologies Inc. | Pixel array preventing the cross talk between unit pixels and image sensor using the pixel |
| JP2009170448A (en) * | 2008-01-10 | 2009-07-30 | Nikon Corp | Solid-state imaging element |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105185801B (en) | 2020-07-24 |
| CN105023930A (en) | 2015-11-04 |
| CN105023930B (en) | 2018-04-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102668081B (en) | Solid-state image pickup apparatus and image picking system | |
| US11569287B2 (en) | Semiconductor device and electronic appliance | |
| CN102971851B (en) | Solid-state image pickup apparatus | |
| US9385152B2 (en) | Solid-state image pickup device and image pickup system | |
| JP5784167B2 (en) | Method for manufacturing solid-state imaging device | |
| CN105185801A (en) | Solid state image pickup device and image pickup system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |