CN105158750A - On-axis light calibration apparatus and calibration method for receiving telescope and grating spectrometer of laser radar - Google Patents
On-axis light calibration apparatus and calibration method for receiving telescope and grating spectrometer of laser radar Download PDFInfo
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- CN105158750A CN105158750A CN201510524107.0A CN201510524107A CN105158750A CN 105158750 A CN105158750 A CN 105158750A CN 201510524107 A CN201510524107 A CN 201510524107A CN 105158750 A CN105158750 A CN 105158750A
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- receiving telescope
- bias
- laser radar
- telescope
- light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/497—Means for monitoring or calibrating
Abstract
The invention discloses an on-axis light calibration apparatus and a calibration method for a receiving telescope and a grating spectrometer of a laser radar. The laser radar receiving telescope comprises a parallel light source, a receiving telescope and a grating spectrometer. The parallel light source is capable of simultaneously emitting three symmetrically distributed light beams. The three light beams perpendicularly shoot into the receiving telescope and are symmetrically distributed relative to the center of the spherical primary mirror of the telescope. After being received by the telescope, the light beams converge at one point on the optical axis of the telescope. Through adjusting the position of the grating spectrometer relative to the receiving telescope, the three light beams converge into an aperture diaphragm of the grating spectrometer after passing through the receiving telescope. Meanwhile, the light beams are symmetrically distributed relative to the center of a high-reflection collimating mirror of the grating spectrometer. According to the technical scheme of the invention, the parallel light source is capable of emitting three symmetrically distributed wide-bin light beams. Through adjusting the position of the grating spectrometer relative to the receiving telescope, the optical axis calibration of the grating spectrometer and the receiving telescope is realized. The method is simple in operation, strong in controllability and high in calibration accuracy. Therefore, the method ensures the effective reception of the echo signals of the laser radar.
Description
Technical field
The present invention relates to the technical field of laser radar calibration, be specifically related to a kind of laser radar receiving telescope and grating spectrograph calibrating installation and scaling method.
Background technology
Laser radar adopts laser instrument as transmitting illuminant and the active telemetry equipment in conjunction with detecting technique means, is the advanced detection means that laser technology combines with modern detecting technique.Laser radar mainly comprises LASER Light Source transmitter unit, receiving telescope and multi-wavelength signals spectrophotometric unit, data control collection unit.Laser radar has the features such as high-spatial and temporal resolution, real-time, unmanned formula, extensive application in environmental pollution monitoring, the measurement of gasoloid spatial and temporal distributions, weather and weather phenomenon research.
Laser radar system light path calibration is key one ring that laser radar obtains useful signal, laser radar system light path calibration method and calibration accuracy directly have influence on laser radar echo Signal-to-Noise and signal quality, and finally determine pollutant profile inversion accuracy to be measured.The standardization and industrialization realizing laser radar also requires to set up a kind of high laser radar light path calibration method of controllable precision.Laser radar light path calibration mainly comprises Raman light source light path calibration, receiving telescope optical axis calibrator, grating spectrograph light path calibration and receiving telescope and the same optical axis calibrator of grating spectrograph.Wherein, receiving telescope and grating spectrograph carry out on receiving telescope optical axis calibrator and grating spectrum light path calibration basis with optical axis calibrator, optical axis between receiving telescope and grating spectrograph two parts is calibrated, make two parts have same optical axis, thus ensure that laser radar echo signal effectively receives.Present stage, laser radar receiving telescope and grating spectrograph mainly mechanically ensure on the basis of light path coaxial with optical axis calibrator, by corner reflector, the light beam of wavelength Raman light source is directly imported in receiving telescope, utilize the light beam of wavelength Raman light source to carry out the debugging with optical axis of receiving telescope and grating spectrograph.The method can effectively utilize the source of parallel light that light path launched by laser radar, but because this source of parallel light spot diameter only has 20mm, spot diameter is too small, and the source of parallel light vertical incidence receiving telescope launching light path can only be ensured, launching spot can not be made to be positioned at the center of receiving telescope, therefore the hot spot formed on the high reverse--bias collimating mirror of grating spectrograph is not also at the center of minute surface, need repeatedly angle of critical deformation reverberator thus determine that the relative position of receiving telescope and grating spectrograph is calibrated, the method complicated operation, controllability and adjustment accuracy poor, urgent need a kind of laser radar receiving telescope of development and grating spectrograph are with optical axis calibrator device and scaling method.
Summary of the invention
The technical problem to be solved in the present invention is: overcome the deficiencies in the prior art, specifically relate to by source of parallel light and the follow-up light path of laser radar combined, set up the follow-up light path light axis calibrating installation of laser radar, utilize the source of parallel light of large bin size to regulate the relative position of laser radar receiving telescope and grating spectrograph, realize the follow-up light path light axis calibration of laser radar.With can launch simultaneously present symmetrical three beams directional light source of parallel light for regulation light source, by the relative position between debugging laser radar receiving telescope and grating spectrograph, realize laser radar receiving telescope and the same optical axis calibrator of grating spectrograph, the method is simple to operate, controllability is strong, precision is high, ensure that effective reception of laser radar echo signal.
Technical scheme of the present invention is: a kind of laser radar receiving telescope and grating spectrograph, with optical axis calibrator device, comprising: source of parallel light, receiving telescope, grating spectrograph; The three beams directional light vertical incidence that described source of parallel light is launched enters in receiving telescope, three beams directional light is symmetrically distributed in the center of receiving telescope, three-beam converges at a bit after receiving telescope is assembled on the optical axis of receiving telescope, this point is positioned at the aperture center of grating spectrograph simultaneously, and in the high reverse--bias collimating mirror of grating spectrograph, be formed centrally three symmetrical luminous points.Described source of parallel light can launch three beams directional light simultaneously, and it is on the circle of 100mm that three beams directional light is symmetrically distributed in a diameter; Described receiving telescope comprises one piece of primary mirror sphere and one piece of convex mirror; Described grating spectrograph comprises aperture, high reverse--bias collimating mirror, high resolving power plane reflection grating, three groups of high reverse--bias plano-concave mirrors, four groups of photoelectricity photomultipliers; Described aperture, high reverse--bias collimating mirror, high resolving power plane reflection grating, three groups of high reverse--bias plano-concave mirrors, that four groups of photomultipliers have identical center is high, is mounted in successively above one block of optical flat, and by airtight black box sealing; Described high reverse--bias collimating mirror is one piece of high reverse--bias plano-concave mirror, have employed JGS1 (i.e. fused quartz) material, has excellent saturating ultraviolet performance, and collimating mirror plating high reverse--bias deielectric-coating, has the reflectivity of more than 98% to the light signal of ultraviolet band; F number is make multi-wavelength light beam just cover high resolving power plane reflection grating completely after the beam collimation of 10 by described high reverse--bias collimating mirror, makes full use of high resolving power plane reflection grating bin, improves the receiving efficiency of grating spectrograph; Described high resolving power plane reflection grating is the core component of this device, because the angle of diffraction of different wavelengths of light is different, can by 266nm, 289nm, 299nm, 316nm tetra-wavelength echoed signal be separated to different angle positions; Described three groups of high reverse--bias plano-concave mirrors and four groups of photomultipliers be positioned over respectively 266nm, 289nm, 299nm, 316nm tetra-wavelength echoed signal optical path on, and by adjustment three groups of high reverse--bias plano-concave mirror angle, by 266nm, 289nm, 299nm, 316nm tetra-wavelength echoed signal accurately converge in four groups of photomultipliers; Described three groups of high reverse--bias plano-concave mirrors all have employed JGS1 material, and plating deielectric-coating, has the reflectivity of more than 98% to the light signal of ultraviolet band; Described four groups of photomultipliers all have employed the R7400-09 type photomultiplier that Bin Song company produces, and effective Receiver aperture is 8mm, and the response time is short, high in 200nm ~ 300nm ultraviolet band quantum efficiency; The F number of described grating spectrograph needs to coordinate laser radar receiving telescope F number to use, and makes the F number of grating spectrograph equal the F number of laser radar receiving telescope.
The present invention also provides a kind of laser radar receiving telescope and grating spectrograph with optical axis scaling method, has first calibrated the optical axis of receiving telescope.Receiving telescope optical axis caliberating device comprises source of parallel light, receiving telescope and aperture; Described source of parallel light can launch three beams directional light simultaneously, and it is on the circle of 100mm that three beams directional light is symmetrically distributed in a diameter; Described receiving telescope comprises one piece of primary mirror sphere and one piece of convex mirror; Described aperture is positioned on receiving telescope optical axis, and aperture diameter is 1mm.Described receiving telescope optical axis scaling method, performing step is as follows:
Step (1), receiving telescope is positioned on optical table, source of parallel light is positioned over apart from receiving telescope 10 meters of distances;
Step (2), adjustment source of parallel light horizontal direction and vertical direction fixed support knob make source of parallel light get back to original transmitting site through the three-beam that receiving telescope window glass reflects, thus ensure in source of parallel light vertical incidence receiving telescope;
Step (3), adjustment receiving telescope are for regulating the knob of the both direction of convex mirror, and the three beams directional light that source of parallel light is launched converges in aperture.
Further, laser radar receiving telescope and grating spectrograph, with optical axis scaling method, on the basis completing the debugging of receiving telescope optical axis, are fixed on laser radar inside configuration by described laser radar receiving telescope and grating spectrograph; Source of parallel light is regulated to make three beams directional light focus in aperture after receiving telescope receives; Regulate the relative position between receiving telescope and grating spectrograph, make the symcenter of three-beam be the center of grating spectrograph high reverse--bias collimating mirror.
The present invention's beneficial effect compared with prior art: with can launch simultaneously present symmetrical large bin size three beams directional light source of parallel light for regulation light source, by the relative position between debugging laser radar receiving telescope and grating spectrograph, realize laser radar receiving telescope and the same optical axis calibrator of grating spectrograph, the method is simple to operate, controllability is strong, precision is high, ensure that effective reception of laser radar echo signal.
Accompanying drawing explanation
Fig. 1 is receiving telescope optical axis calibrator plant system drawing of the present invention, and wherein, 1 is source of parallel light, and 2 is receiving telescope, and 3 is aperture.
Fig. 2 be laser radar receiving telescope of the present invention and grating spectrograph with optical axis calibrator plant system drawing, wherein, 1 be source of parallel light, 2 be receiving telescope, 3 be aperture, 4 is high reverse--bias collimating mirror, 5 is high resolving power plane reflection grating, and 6 is the first circular flat concave mirror, and 7 is rectangle plano-concave mirror, 8 is the second circular flat concave mirror, 9 is the first photomultiplier, and 10 is the second photomultiplier, and 11 is the 3rd photomultiplier, 12 is the 4th photomultiplier, and 13 is black casing.
Embodiment
The present invention is further illustrated below in conjunction with accompanying drawing and specific embodiment.
As shown in Figure 1, a kind of laser radar receiving telescope and grating spectrograph, with optical axis calibrator device and scaling method, comprising: source of parallel light 1, receiving telescope 2, grating spectrograph; The three beams directional light vertical incidence that described source of parallel light 1 is launched enters in receiving telescope, three beams directional light is symmetrically distributed in the center of receiving telescope, three-beam converges at a bit after receiving telescope is assembled on the optical axis of receiving telescope, this point is positioned at aperture 3 center of grating spectrograph simultaneously, and in the high reverse--bias collimating mirror 4 of grating spectrograph, be formed centrally three symmetrical luminous points.Described source of parallel light 1 can launch three beams directional light simultaneously, and it is on the circle of 100mm that three beams directional light is symmetrically distributed in a diameter; Described receiving telescope 2 comprises one piece of primary mirror sphere and one piece of convex mirror; Described grating spectrograph comprises aperture 3, high reverse--bias collimating mirror 4, high resolving power plane reflection grating 5, three groups of high reverse--bias plano-concave mirrors, four groups of photoelectricity photomultipliers; It is high that described aperture 3, high reverse--bias collimating mirror 4, high resolving power plane reflection grating 5, three groups of high reverse--bias plano-concave mirrors, four groups of photomultipliers have identical center, is mounted in successively above one block of optical flat, and sealed by airtight black casing 13; Described high reverse--bias collimating mirror 4 is one piece of high reverse--bias plano-concave mirror, have employed JGS1 (i.e. fused quartz) material, there is excellent saturating ultraviolet performance, in order to improve the reflectivity of high reverse--bias collimating mirror, plating high reverse--bias deielectric-coating, has the reflectivity of more than 98% to the light signal of ultraviolet band; F number is make multi-wavelength light beam just cover high resolving power plane reflection grating 5 completely after the beam collimation of 10 by described high reverse--bias collimating mirror 4, makes full use of high resolving power plane reflection grating bin, improves the receiving efficiency of grating spectrograph; Described high resolving power plane reflection grating 5 is the core component of this device, because the angle of diffraction of different wavelengths of light is different, can by 266nm, 289nm, 299nm, 316nm tetra-wavelength echoed signal be separated to different angle positions; Described three groups of high reverse--bias plano-concave mirrors and four groups of photomultipliers be positioned over respectively 266nm, 289nm, 299nm, 316nm tetra-wavelength echoed signal optical path on, and by adjustment three groups of high reverse--bias plano-concave mirror angle, by 266nm, 289nm, 299nm, 316nm tetra-wavelength echoed signal accurately converge in four groups of photomultipliers; Described three groups of high reverse--bias plano-concave mirror groups are 76mm for reflect 266nm wavelength echoed signal diameter be the first circular flat concave mirror 6, a piece of 38mm for reflecting the length of 289nm, 299nm wavelength channels simultaneously by one piece, and wide 7, one piece, the rectangle plano-concave mirror for 38mm is that the second circular flat concave mirror 8 of 38mm forms for reflecting the diameter of 316nm light signal; Described three groups of high reverse--bias plano-concave mirrors all have employed JGS1 material, and plating deielectric-coating, has the reflectivity of more than 98% to the light signal of ultraviolet band; Described four groups of photomultipliers respectively by the first photomultiplier 9 for receiving 266nm echoed signal, for receive 289nm echoed signal the second photomultiplier 10, for receive 299nm echoed signal the 3rd photomultiplier 11, form for the 4th photomultiplier 12 receiving 316nm echoed signal; Described four groups of photomultipliers all have employed the R7400-09 type photomultiplier that Bin Song company produces, and effective Receiver aperture is 8mm, and the response time is short, high in 200nm ~ 300nm ultraviolet band quantum efficiency; The F number of described grating spectrograph needs to coordinate laser radar receiving telescope F number to use, and makes the F number of grating spectrograph equal the F number of laser radar receiving telescope.
Described laser radar receiving telescope and grating spectrograph, with optical axis scaling method, have first calibrated the optical axis of receiving telescope.Receiving telescope optical axis caliberating device comprises source of parallel light 1, receiving telescope 2 and aperture 3; Described source of parallel light 1 can launch three beams directional light simultaneously, and it is on the circle of 100mm that three beams directional light is symmetrically distributed in a diameter; Described receiving telescope 2 comprises one piece of primary mirror sphere and one piece of convex mirror; Described aperture 3 is positioned on receiving telescope optical axis, and aperture diameter is 1mm.Described receiving telescope optical axis scaling method, performing step is as follows:
(1) receiving telescope 2 is positioned on optical table, source of parallel light is positioned over apart from receiving telescope 10 meters of distances;
(2) three-beam regulating source of parallel light 1 horizontal direction and vertical direction fixed support knob that source of parallel light is reflected through receiving telescope 2 window glass gets back to original transmitting site, thus ensures in source of parallel light vertical incidence receiving telescope;
(3) regulate receiving telescope for regulating the knob of the both direction of convex mirror, the three beams directional light that source of parallel light is launched converges in aperture 3.
Laser radar receiving telescope 2 and grating spectrograph, with optical axis scaling method, on the basis completing the debugging of receiving telescope optical axis, are fixed on laser radar inside configuration by described laser radar receiving telescope and grating spectrograph; Source of parallel light 1 is regulated to make three beams directional light focus in aperture 3 after receiving telescope receives; Regulate the relative position between receiving telescope and grating spectrograph, make the center of three-beam be the center of the high reverse--bias collimating mirror 4 of grating spectrograph.
The foregoing is only present pre-ferred embodiments, so it is not for limiting the present invention.Non-elaborated part of the present invention belongs to the common practise of those skilled in the art, and all conversion in principle of the present invention and scope and improvement, all should be included within protection scope of the present invention.
Claims (3)
1. laser radar receiving telescope and grating spectrograph are with an optical axis calibrator device, it is characterized in that: comprise source of parallel light, receiving telescope, grating spectrograph; The three beams directional light vertical incidence that described source of parallel light is launched enters in receiving telescope, three beams directional light is symmetrically distributed in receiving telescope center, three-beam converges at a bit after receiving telescope is assembled on the optical axis of receiving telescope, this point is positioned at the aperture center of grating spectrograph simultaneously, and in the high reverse--bias collimating mirror of grating spectrograph, be formed centrally three symmetrical luminous points, described source of parallel light can launch three beams directional light simultaneously, and it is on the circle of 100mm that three beams directional light is symmetrically distributed in a diameter; Described receiving telescope comprises one piece of primary mirror sphere and one piece of convex mirror; Described grating spectrograph comprises aperture, high reverse--bias collimating mirror, high resolving power plane reflection grating, three groups of high reverse--bias plano-concave mirrors, four groups of photoelectricity photomultipliers; Described aperture, high reverse--bias collimating mirror, high resolving power plane reflection grating, three groups of high reverse--bias plano-concave mirrors, that four groups of photomultipliers have identical center is high, is mounted in successively above one block of optical flat, and by airtight black box sealing; Described high reverse--bias collimating mirror is one piece of high reverse--bias plano-concave mirror, have employed JGS1 fused silica material, has excellent saturating ultraviolet performance, and collimating mirror plating high reverse--bias deielectric-coating, has the reflectivity of more than 98% to the light signal of ultraviolet band; F number is make multi-wavelength light beam just cover high resolving power plane reflection grating completely after the beam collimation of 10 by described high reverse--bias collimating mirror, makes full use of high resolving power plane reflection grating bin, improves the receiving efficiency of grating spectrograph; Described high resolving power plane reflection grating is the core component of this device, because the angle of diffraction of different wavelengths of light is different, can by 266nm, 289nm, 299nm, 316nm tetra-wavelength echoed signal be separated to different angle positions; Described three groups of high reverse--bias plano-concave mirrors and four groups of photomultipliers be positioned over respectively 266nm, 289nm, 299nm, 316nm tetra-wavelength echoed signal optical path on, and by adjustment three groups of high reverse--bias plano-concave mirror angle, by 266nm, 289nm, 299nm, 316nm tetra-wavelength echoed signal accurately converge in four groups of photomultipliers; Described three groups of high reverse--bias plano-concave mirrors all have employed JGS1 fused silica material, and plating deielectric-coating, has the reflectivity of more than 98% to the light signal of ultraviolet band; Described four groups of photomultipliers all have employed the R7400-09 type photomultiplier that Bin Song company produces, and effective Receiver aperture is 8mm, and the response time is short, high in 200nm ~ 300nm ultraviolet band quantum efficiency; The F number of described grating spectrograph needs to coordinate laser radar receiving telescope F number to use, and makes the F number of grating spectrograph equal the F number of laser radar receiving telescope.
2. laser radar receiving telescope and grating spectrograph are with an optical axis scaling method, it is characterized in that: the optical axis first having calibrated receiving telescope, and receiving telescope optical axis caliberating device comprises source of parallel light, receiving telescope and aperture; Described source of parallel light can launch three beams directional light simultaneously, and it is on the circle of 100mm that three beams directional light is symmetrically distributed in a diameter; Described receiving telescope comprises one piece of primary mirror sphere and one piece of convex mirror; Described aperture is positioned on receiving telescope optical axis, and aperture diameter is 1mm, described receiving telescope optical axis scaling method, and performing step is as follows:
Step (1), receiving telescope is positioned on optical table, source of parallel light is positioned over apart from receiving telescope 10 meters of distances;
Step (2), adjustment source of parallel light horizontal direction and vertical direction fixed support knob make source of parallel light get back to original transmitting site through the three-beam that receiving telescope window glass reflects, thus ensure in source of parallel light vertical incidence receiving telescope;
Step (3), adjustment receiving telescope are for regulating the knob of the both direction of convex mirror, and the three beams directional light that source of parallel light is launched converges in aperture.
3. laser radar receiving telescope according to claim 2 and grating spectrograph are with optical axis scaling method, it is characterized in that: on the basis completing the debugging of receiving telescope optical axis, laser radar receiving telescope and grating spectrograph are fixed on laser radar inside configuration; Source of parallel light is regulated to make three beams directional light focus in aperture after receiving telescope receives; Regulate the relative position between receiving telescope and grating spectrograph, make the center of three-beam be the center of the high reverse--bias collimating mirror of grating spectrograph.
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CN113741043A (en) * | 2020-05-29 | 2021-12-03 | 上海微电子装备(集团)股份有限公司 | Position adjusting device and method for ellipsoidal reflector |
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CN113741043A (en) * | 2020-05-29 | 2021-12-03 | 上海微电子装备(集团)股份有限公司 | Position adjusting device and method for ellipsoidal reflector |
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