CN105157910A - Vacuum pressure sensor - Google Patents
Vacuum pressure sensor Download PDFInfo
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- CN105157910A CN105157910A CN201510605643.3A CN201510605643A CN105157910A CN 105157910 A CN105157910 A CN 105157910A CN 201510605643 A CN201510605643 A CN 201510605643A CN 105157910 A CN105157910 A CN 105157910A
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- vacuum chamber
- vacuum
- pressure sensor
- sensor
- pressure converter
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Abstract
The invention discloses a vacuum pressure sensor, which comprises a shell, and an oil filter, a filter, a pressure converter and a vacuum chamber arranged inside the shell, wherein the pressure converter is arranged in the central position inside the shell; the vacuum chamber is arranged at the upper end of the pressure converter; the oil filter is arranged at the upper end of the pressure converter and located inside the vacuum chamber; and the filter is arranged at one side edge of the pressure converter and is connected with the pressure converter. Through the above mode, according to the vacuum pressure sensor, the overall sensor has a small size; the structure is simple, compact and flexible; the oil filter is arranged at the upper end of the pressure converter and located inside the vacuum chamber, the pressure converter carries out temperature detection according to features of temperature changes of the oil filter inside the vacuum chamber, multiple times of calibration can be carried out on the sensor, complexity and the cost of the calibration process can be reduced, the sensor device has high production efficiency, the reject rate is low, and operability is strong.
Description
Technical field
The present invention relates to the field of vacuum technique, particularly relate to a kind of vacuum pressure sensor.
Background technology
Vacuum pressure sensor is a kind of pressure transducer conventional in industrial practice, and it is widely used in various industrial automatic control environment, relates to numerous industries such as communications and transportation, Aero-Space, military project, vacuum equipment.
The general work principle of automobile-use vacuum pressure sensor is: the pressure of automobile vacuum booster act directly on be attached thereto the sensor connect sensitive diaphragm on, sensitive diaphragm is made to produce the Light deformation be directly proportional to vacuum pressure, thus the resistance of sensor is changed, detect this change by electronic circuit and changed the standard signal of output one corresponding to this pressure to control circuit.
In order to ensure the precision of diaphragm circuit, reliably convert simulating signal to digital signal, in the market can most of vacuum pressure sensors usually need to utilize artificial adjustment or laser resistor trimming circuit to carry out temperature and sensitivity compensation, and utilize discharge circuit to process the simulating signal recorded.Which results in whole size sensor comparatively large, structure relative complex, transducer calibration process and technique loaded down with trivial details.
Summary of the invention
The technical matters that the present invention mainly solves is to provide a kind of vacuum pressure sensor, whole size sensor is little, structure is simple, compact, flexible, filter cleaner is arranged on the upper end of sensator and is positioned at vacuum chamber, pressure changes and turns device and carry out temperature sensing according to the characteristic of filter cleaner temperature variation in vacuum chamber, repeatedly can demarcate, thus reduce complicacy and the cost of calibration process to sensor, make that sensor device production efficiency is high, rejection rate is low, workable.
For solving the problems of the technologies described above, the technical scheme that the present invention adopts is: provide a kind of vacuum pressure sensor, comprise housing and be arranged on filter cleaner in housing, filtrator, pressure changes and turns device and vacuum chamber, described sensator is arranged on the center in housing, described vacuum chamber is arranged on the upper end of sensator, described filter cleaner is arranged on the upper end of sensator and is positioned at vacuum chamber, and described filtrator is arranged on a side of sensator and changes with pressure and turn device and be connected.
In a preferred embodiment of the present invention, the vacuum tightness of described vacuum chamber is 0.02-0.06MPa.
In a preferred embodiment of the present invention, described vacuum pressure sensor also comprises silicon chip, and described silicon chip to be arranged in inner walls and to be positioned at the top of vacuum chamber.
In a preferred embodiment of the present invention, described vacuum pressure sensor also comprises electrical connection terminal, and described electrical connection terminal is arranged on the bottom of housing and changes with pressure and turn device and be connected.
The invention has the beneficial effects as follows: vacuum pressure sensor of the present invention, whole size sensor is little, structure is simple, compact, flexible, filter cleaner is arranged on the upper end of sensator and is positioned at vacuum chamber, pressure changes and turns device and carry out temperature sensing according to the characteristic of filter cleaner temperature variation in vacuum chamber, repeatedly can demarcate, thus reduce complicacy and the cost of calibration process to sensor, make that sensor device production efficiency is high, rejection rate is low, workable.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings, wherein:
Fig. 1 is the structural representation of a preferred embodiment of vacuum pressure sensor of the present invention;
Being labeled as in accompanying drawing: 1, housing, 2, filter cleaner, 3, filtrator, 4, pressure changes and turn device, 5, vacuum chamber, 6, silicon chip, 7, electrical connection terminal.
Embodiment
Be clearly and completely described to the technical scheme in the embodiment of the present invention below, obviously, described embodiment is only a part of embodiment of the present invention, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making other embodiments all obtained under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figure 1, the embodiment of the present invention comprises:
A kind of vacuum pressure sensor, comprise housing 1 and be arranged on filter cleaner 2 in housing 1, filtrator 3, pressure changes and turns device 4 and vacuum chamber 5, described sensator 4 is arranged on the center in housing 1, described vacuum chamber 5 is arranged on the upper end of sensator 4, described filter cleaner 2 is arranged on the upper end of sensator 4 and is positioned at vacuum chamber 5, and described filtrator 3 is arranged on a side of sensator 4 and changes with pressure and turn device 4 and be connected.
In above-mentioned, the vacuum tightness of described vacuum 5 Room is 0.02-0.06MPa, and pressure changes and turns device and carry out temperature sensing according to the characteristic of filter cleaner temperature variation in vacuum chamber, repeatedly can demarcate sensor.
Further, described vacuum pressure sensor also comprises silicon chip 6, and described silicon chip 6 to be arranged on housing 1 inwall and to be positioned at the top of vacuum chamber 5.Vacuum indoor temperature is higher, and the distortion of silicon chip 6 is larger, and its deflection is directly proportional to temperature.
Further, described vacuum pressure sensor also comprises electrical connection terminal 7, and described electrical connection terminal 7 is arranged on the bottom of housing 1 and changes with pressure and turn device 4 and be connected, and directly utilizes electrical connection terminal 7 pairs of sensors to demarcate.
In sum, vacuum pressure sensor of the present invention, whole size sensor is little, structure is simple, compact, flexible, and filter cleaner 2 is arranged on the upper end of sensator 4 and is positioned at vacuum chamber 5, and pressure changes and turns device 4 and carry out temperature sensing according to the characteristic of filter cleaner 2 temperature variation in vacuum chamber 5, repeatedly can demarcate sensor, thus reduce complicacy and the cost of calibration process, and such that sensor device production efficiency is high, rejection rate is low, workable.
The foregoing is only embodiments of the invention; not thereby the scope of the claims of the present invention is limited; every utilize description of the present invention to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical field, be all in like manner included in scope of patent protection of the present invention.
Claims (4)
1. a vacuum pressure sensor, it is characterized in that, comprise housing and be arranged on filter cleaner in housing, filtrator, pressure changes and turns device and vacuum chamber, described sensator is arranged on the center in housing, described vacuum chamber is arranged on the upper end of sensator, described filter cleaner is arranged on the upper end of sensator and is positioned at vacuum chamber, and described filtrator is arranged on a side of sensator and changes with pressure and turn device and be connected.
2. vacuum pressure sensor according to claim 1, is characterized in that, the vacuum tightness of described vacuum chamber is 0.02-0.06MPa.
3. vacuum pressure sensor according to claim 1, is characterized in that, described vacuum pressure sensor also comprises silicon chip, and described silicon chip to be arranged in inner walls and to be positioned at the top of vacuum chamber.
4. vacuum pressure sensor according to claim 1, is characterized in that, described vacuum pressure sensor also comprises electrical connection terminal, and described electrical connection terminal is arranged on the bottom of housing and changes with pressure and turn device and be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510605643.3A CN105157910A (en) | 2015-09-22 | 2015-09-22 | Vacuum pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510605643.3A CN105157910A (en) | 2015-09-22 | 2015-09-22 | Vacuum pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105157910A true CN105157910A (en) | 2015-12-16 |
Family
ID=54798846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510605643.3A Pending CN105157910A (en) | 2015-09-22 | 2015-09-22 | Vacuum pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105157910A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107588871A (en) * | 2017-08-23 | 2018-01-16 | 安徽工程大学 | A kind of novel evacuated micro-electronics pressure sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202574199U (en) * | 2012-03-29 | 2012-12-05 | 浙江吉利汽车研究院有限公司 | Automobile vacuum booster |
| CN202793682U (en) * | 2012-07-17 | 2013-03-13 | 奇瑞汽车股份有限公司 | Detection loop which can simulate vacuum degree of tail end of automobile pipeline |
| CN202853838U (en) * | 2012-08-17 | 2013-04-03 | 森萨塔科技（常州）有限公司 | Vacuum pressure transducer apparatus for vehicles |
| FR2963303B1 (en) * | 2010-07-29 | 2014-01-03 | Renault Sa | VACUUM SENSOR FOR BOOSTER AND CONTROL METHOD THEREFOR |
| CN203419131U (en) * | 2013-08-26 | 2014-02-05 | 昆山市兴利车辆科技配套有限公司 | Novel automobile vacuum pressure sensor |
-
2015
- 2015-09-22 CN CN201510605643.3A patent/CN105157910A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2963303B1 (en) * | 2010-07-29 | 2014-01-03 | Renault Sa | VACUUM SENSOR FOR BOOSTER AND CONTROL METHOD THEREFOR |
| CN202574199U (en) * | 2012-03-29 | 2012-12-05 | 浙江吉利汽车研究院有限公司 | Automobile vacuum booster |
| CN202793682U (en) * | 2012-07-17 | 2013-03-13 | 奇瑞汽车股份有限公司 | Detection loop which can simulate vacuum degree of tail end of automobile pipeline |
| CN202853838U (en) * | 2012-08-17 | 2013-04-03 | 森萨塔科技（常州）有限公司 | Vacuum pressure transducer apparatus for vehicles |
| CN203419131U (en) * | 2013-08-26 | 2014-02-05 | 昆山市兴利车辆科技配套有限公司 | Novel automobile vacuum pressure sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107588871A (en) * | 2017-08-23 | 2018-01-16 | 安徽工程大学 | A kind of novel evacuated micro-electronics pressure sensor |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20151216 |
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| RJ01 | Rejection of invention patent application after publication |