CN105154819A - Method for preparing reflective film on the surface of ultra light reflective mirror - Google Patents

Method for preparing reflective film on the surface of ultra light reflective mirror Download PDF

Info

Publication number
CN105154819A
CN105154819A CN201510576536.2A CN201510576536A CN105154819A CN 105154819 A CN105154819 A CN 105154819A CN 201510576536 A CN201510576536 A CN 201510576536A CN 105154819 A CN105154819 A CN 105154819A
Authority
CN
China
Prior art keywords
mirror
vacuum
ultralight
ion beam
reflective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510576536.2A
Other languages
Chinese (zh)
Inventor
马占吉
肖更竭
武生虎
牟先凯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lanzhou Institute of Physics of Chinese Academy of Space Technology
Original Assignee
Lanzhou Institute of Physics of Chinese Academy of Space Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lanzhou Institute of Physics of Chinese Academy of Space Technology filed Critical Lanzhou Institute of Physics of Chinese Academy of Space Technology
Priority to CN201510576536.2A priority Critical patent/CN105154819A/en
Publication of CN105154819A publication Critical patent/CN105154819A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a method for preparing a reflective film on the surface of an ultra light reflective mirror. The method comprises the following steps: (1) mirror surface treatment: subjecting the surface of the ultra light reflective mirror to dust blowing with dry gas and cleaning the surface with ethanol or acetone; (2) vacuum gas removal: fixing and heating the ultra light reflective mirror treated by the step (1) in vacuum; (3) ion beam cleaning: feeding argon or mixture gas of argon and oxygen at the state of vacuum, and performing ion beam cleaning on the ultras light reflective mirror; (4) reflective film deposition; plating the mirror surface of the ultra light reflective mirror with chrome or nickel chrome alloy layer, and then plating the mirror surface with nickel or silver layer. The reflective mirror substrate is subjected to technical means such as chemical cleaning, vacuum gas removal, ion beam cleaning and reflective film deposition, so as to effectively increase the compactness and adhesion of the reflective film, and solve the technical problem in preparing the reflective film on the surface of the substrate of the carbon fiber reinforced resin matrix composite material reflective mirror.

Description

Ultralight mirror surface prepares the method for reflectance coating
Technical field
The present invention relates to field of surface engineering technique, especially a kind of ultralight reflecting mirror material carbon fiber enhancement resin base composite material, in order to realize its surface reflection function, preparing the method for reflectance coating on carbon fiber enhancement resin base composite material mirror base surface.
Background technology
Due to carbon fiber enhancement resin base composite material have that proportion is little, specific tenacity and specific modulus high, and the feature such as Heat stability is good, be the ideal material manufacturing ultralight speculum, but one deck reflecting material must be prepared on mirror base surface and could realize reflection function.Large due to carbon fiber enhancement resin base composite material surface irregularity and with reflecting material performance difference, matching is poor, therefore prepares reflecting material on carbon fiber enhancement resin base composite material mirror base surface and has great difficulty, correlative study report is seldom.The present invention proposes the method adopting vacuum ionic coating technology to prepare reflectance coating in mirror surface, have no correlative study report.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, propose a kind of method that ultralight mirror surface prepares reflectance coating, easy and simple to handle, prepare reflectance coating on carbon fiber enhancement resin base composite material mirror base surface.
In order to realize foregoing invention object, the invention provides following technical scheme: a kind of ultralight mirror surface prepares the method for reflectance coating, comprises the following steps:
(1), mirror process: blow point process with the surface of dry gas to ultralight speculum, with ethanol or acetone cleaning minute surface;
(2), vacuum stripping: the ultralight speculum after (1) processing through step is fixed on heating under vacuum;
, ion beam cleaning: logical argon gas or argon gas and oxygen mixture under vacuum conditions, ion beam cleaning is carried out to ultralight speculum;
(4), deposition of reflective film: chromium plating or nickel-chrome alloy layer on the minute surface of ultralight speculum, then nickel plating or silver layer.
Further, step (1) in dry gas be pure nitrogen gas.
Further, step (2) in low vacuum in 5 × 10 -3pa, Heating temperature is 100 DEG C ~ 140 DEG C.
Further, step (3) in vacuum tightness be 2 × 10 -2pa ~ 5 × 10 -2pa.
Compared with prior art, the present invention has the following advantages: utilize technique means such as mirror base matting, vacuum stripping, ion beam cleaning and deposition of reflective films, effectively improve compactness and the sticking power of reflectance coating, solve the technical barrier preparing reflectance coating on carbon fiber enhancement resin base composite material mirror base surface.
(1) improve compactness and the sticking power of carbon fiber enhancement resin base composite material mirror surface reflective coating, be convenient to follow-up polishing.
(2) application demand of the thicker reflective coating of vacuum method preparation is achieved.
(3) the present invention is easy to repetition, is applicable to scale production.
Embodiment
Describe the present invention below in conjunction with embodiment, the description of this part is only exemplary and explanatory, should not have any restriction to protection scope of the present invention.
Ultralight mirror surface prepares a method for reflectance coating, comprises the following steps:
(1), mirror process: adopt pure nitrogen to blow point process to mirror base, adopt analytical pure dehydrated alcohol (or acetone) to carry out matting to mirror surface;
(2), vacuum stripping: mirror base is fixed in vacuum chamber on work rest, opens forevacuum pump and high-vacuum pump successively and vacuum tightness is evacuated to vacuum is better than 5 × 10 -3pa, opens well heater and is heated to 100 DEG C ~ 140 DEG C to vacuum chamber, carry out vacuum stripping process to mirror base;
(3), ion beam cleaning: pass into Ar(or Ar+O in vacuum chamber 2) gas, keep vacuum tightness to be 2 × 10 -2pa ~ 5 × 10 -2pa; Opening grid bias power supply, is-100V ~-200V by bias adjustment; Open ion source, setting operating voltage is 2.0kV ~ 3.0kV simultaneously, and the ion beam cleaning time is 20min ~ 30min, carries out ion beam cleaning to speculum;
, deposition of reflective film: open Cr(or NiCr) target, setting working current is 60A ± 10A, plating Cr(or NiCr) transition layer 10min ~ 30min; Open Ni(or Ag) target, setting working current is 60A ± 10A, plating Ni(or Ag) film accumulation 10h ~ 15h, often plate 10min ~ 30min and open ion source bombardment 10min, complete reflecting film deposition.
The present invention utilizes the good and bonding strength advantages of higher of the rete compactness of vacuum ion plating deposition techniques, reflectance coating preparation research is carried out on carbon fiber enhancement resin base composite material mirror base surface, matting is particularly adopted to remove mirror base surface contaminant, reflectance coating purity is improved by vacuum stripping, adopt ion beam cleaning mirror surface to improve its surfactivity, thus improve the bonding strength between reflectance coating and mirror base.Adopt present method invention to prepare reflectance coating on ultralight carbon fiber enhancement resin base composite material surface, there is the advantages such as rete compactness is good, bonding strength is high, thickness uniform, controllable, reach engineer applied level.
The present invention adopts vacuum ion membrane plating equipment to realize, and the starting material of employing mainly contain high-purity Cr(or NiCr) target, high-purity N i(or Ag) target, high-purity N 2gas, Ar gas, high-purity O 2gas and carbon fiber enhancement resin base composite material mirror base etc.
embodiment 1
(1) matting: adopt pure nitrogen to blow point process to mirror base, adopt analytical pure dehydrated alcohol to carry out matting to mirror surface.
(2) vacuum stripping: be fixed in vacuum chamber on work rest by mirror base, opens forevacuum pump successively and high-vacuum pump is evacuated to vacuum tightness to 1 × 10 to vacuum -3pa, opens well heater and is heated to 100 DEG C to vacuum chamber, carry out vacuum stripping process to mirror base;
(3) ion beam cleaning: pass into Ar gas in vacuum chamber, keeps vacuum tightness to be 2 × 10 -2pa; Opening grid bias power supply, is-200V by bias adjustment; Open ion source, setting operating voltage is 2.0kV simultaneously, and the ion beam cleaning time is 30min, carries out ion beam cleaning to speculum;
(4) deposition of reflective film: open Cr target, setting working current is 60A, plating Cr transition layer 30min; Open Ni target, setting working current is 60A, and plating Ni film accumulation 10h, often plates 30min and open ion source bombardment 10min, complete reflecting film deposition.
(5) its effect is that the conductive metal film thickness prepared is about 30 μm.
embodiment 2
(1) matting: adopt pure nitrogen to blow point process to mirror base, adopt analytical pure acetone to carry out matting to mirror surface.
(2) vacuum stripping: be fixed in vacuum chamber on work rest by mirror base, opens forevacuum pump successively and high-vacuum pump is evacuated to vacuum tightness to 5 × 10 to vacuum -3pa, opens well heater and is heated to 140 DEG C to vacuum chamber, carry out vacuum stripping process to mirror base;
(3) ion beam cleaning: pass into Ar+O in vacuum chamber 2gas, keeps vacuum tightness to be 4 × 10 -2pa; Opening grid bias power supply, is-100V by bias adjustment; Open ion source, setting operating voltage is 3.0kV simultaneously, and the ion beam cleaning time is 20min, carries out ion beam cleaning to speculum;
(4) deposition of reflective film: open NiCr target, setting working current is 70A, plating NiCr transition layer 20min; Open Ag target, setting working current is 70A, and plating Ag film accumulation 15h, often plates 10min and open ion source bombardment 10min, complete reflecting film deposition.
(5) its effect is that the conductive metal film thickness prepared is about 50 μm.
embodiment 3
(1) matting: adopt pure nitrogen to blow point process to mirror base, adopt analytical pure dehydrated alcohol to carry out matting to mirror surface.
(2) vacuum stripping: be fixed in vacuum chamber on work rest by mirror base, opens forevacuum pump and high-vacuum pump successively and is evacuated to vacuum tightness to vacuum and is better than 3 × 10 -3pa, opens well heater and is heated to 120 DEG C to vacuum chamber, carry out vacuum stripping process to mirror base;
(3) ion beam cleaning: pass into Ar gas in vacuum chamber, keeps vacuum tightness to be 3 × 10 -2pa; Opening grid bias power supply, is-150V by bias adjustment; Open ion source, setting operating voltage is 2.5kV simultaneously, and the ion beam cleaning time is 25min, carries out ion beam cleaning to speculum;
(4) deposition of reflective film: open Cr target, setting working current is 50A, plating Cr transition layer 30min; Open Ni target, setting working current is 70A, and plating Ni film accumulation 15h, often plates 30min and open ion source bombardment 10min, complete reflecting film deposition.
(5) its effect is that the conductive metal film thickness prepared is about 40 μm.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.

Claims (4)

1. ultralight mirror surface prepares a method for reflectance coating, comprises the following steps:
(1), mirror process: blow point process with the surface of dry gas to ultralight speculum, with ethanol or acetone cleaning minute surface;
(2), vacuum stripping: the ultralight speculum after (1) processing through step is fixed on heating under vacuum;
, ion beam cleaning: logical argon gas or argon gas and oxygen mixture under vacuum conditions, ion beam cleaning is carried out to ultralight speculum;
(4), deposition of reflective film: chromium plating or nickel-chrome alloy layer on the minute surface of ultralight speculum, then nickel plating or silver layer.
2. ultralight mirror surface prepares the method for reflectance coating as claimed in claim 1, it is characterized in that: step (1) middle dry gas is pure nitrogen gas.
3. ultralight mirror surface prepares the method for reflectance coating as claimed in claim 1, it is characterized in that: step (2) in low vacuum in 5 × 10 -3pa, Heating temperature is 100 DEG C ~ 140 DEG C.
4. ultralight mirror surface prepares the method for reflectance coating as claimed in claim 1, it is characterized in that: step (3) middle vacuum tightness is 2 × 10 -2pa ~ 5 × 10 -2pa.
CN201510576536.2A 2015-09-11 2015-09-11 Method for preparing reflective film on the surface of ultra light reflective mirror Pending CN105154819A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510576536.2A CN105154819A (en) 2015-09-11 2015-09-11 Method for preparing reflective film on the surface of ultra light reflective mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510576536.2A CN105154819A (en) 2015-09-11 2015-09-11 Method for preparing reflective film on the surface of ultra light reflective mirror

Publications (1)

Publication Number Publication Date
CN105154819A true CN105154819A (en) 2015-12-16

Family

ID=54795855

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510576536.2A Pending CN105154819A (en) 2015-09-11 2015-09-11 Method for preparing reflective film on the surface of ultra light reflective mirror

Country Status (1)

Country Link
CN (1) CN105154819A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109628973A (en) * 2019-01-22 2019-04-16 陕西赛科顺舟工贸有限公司 A kind of plating membrane coat and its technique receiving ability with superpower wireless telecommunications
CN109786951A (en) * 2018-12-20 2019-05-21 兰州空间技术物理研究所 A kind of thermoelectricity protection integrated membrane structure
CN111844831A (en) * 2020-07-06 2020-10-30 大连理工大学 Manufacturing method of light base material thin-wall reflector
CN114196916A (en) * 2021-12-16 2022-03-18 西湖大学 Preparation method of metal reflector and metal reflector

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4877505A (en) * 1987-08-26 1989-10-31 Balzers Aktiengesellschaft Method and apparatus for application of coatings on substrates
CN101962748A (en) * 2010-10-26 2011-02-02 中国航天科技集团公司第五研究院第五一○研究所 Method for plating conductive film on surface of polytetrafluoroethylene by adopting arc ion plating technology
CN103510053A (en) * 2012-06-29 2014-01-15 陈伟 Method for plating metal surface with diamond-like carbon (DLC) film

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4877505A (en) * 1987-08-26 1989-10-31 Balzers Aktiengesellschaft Method and apparatus for application of coatings on substrates
CN101962748A (en) * 2010-10-26 2011-02-02 中国航天科技集团公司第五研究院第五一○研究所 Method for plating conductive film on surface of polytetrafluoroethylene by adopting arc ion plating technology
CN103510053A (en) * 2012-06-29 2014-01-15 陈伟 Method for plating metal surface with diamond-like carbon (DLC) film

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
中国电工技术学会: "《电工高新技术丛书 第2分册》", 31 January 2001, 化学工业出版社 *
宋健: "《中国科学技术前沿:1999/2000 中国工程院版》", 30 June 2000, 高等教育出版社 *
盛磊: ""用碳纤维复合材料制造轻型空间光学镜面"", 《航天返回与遥感》 *
郝伟娜等: ""碳纤维复合材料用于光学镜面"", 《光学技术》 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109786951A (en) * 2018-12-20 2019-05-21 兰州空间技术物理研究所 A kind of thermoelectricity protection integrated membrane structure
CN109628973A (en) * 2019-01-22 2019-04-16 陕西赛科顺舟工贸有限公司 A kind of plating membrane coat and its technique receiving ability with superpower wireless telecommunications
CN111844831A (en) * 2020-07-06 2020-10-30 大连理工大学 Manufacturing method of light base material thin-wall reflector
CN114196916A (en) * 2021-12-16 2022-03-18 西湖大学 Preparation method of metal reflector and metal reflector
CN114196916B (en) * 2021-12-16 2024-05-07 西湖大学 Preparation method of metal reflector and metal reflector

Similar Documents

Publication Publication Date Title
CN105154819A (en) Method for preparing reflective film on the surface of ultra light reflective mirror
CN109943824B (en) Preparation method of high-hardness conductive carbon-based film
WO2021259046A1 (en) Method for preparing cr-al-c based max phase coating and use thereof
CN105296926B (en) A kind of anti-reflection composite membrane optical window of hard and preparation method thereof
CN100564576C (en) A kind of method at carbon-fibre composite surface preparation aluminium film
KR101446411B1 (en) Method for manufacturing corrosion resistant and conductive nano carbon coating and fuel cell bipolar plate thereby
CN105648414B (en) A method of nitrogenous titanium deoxid film is prepared using magnetron sputtering method
CN107058970A (en) A kind of fuel battery metal polar plate vacuum plated film pipelining equipment and its film plating process
CN103628024A (en) Technology for depositing titanium nitride film on surface of 4Cr13 stainless steel vernier caliper
CN105842767B (en) The device and method of diffraction optical element are prepared using micro- pattern electrode thermal poling
CN105568229B (en) A kind of preparation method of nitrogen doped titanium dioxide film
CN103374697A (en) Surface treatment method and product of diamond-like carbon film layer
CN107858684B (en) Metal-diamond-like composite coating, preparation method and application thereof and coated tool
CN101177773A (en) Method for preparing titanium surface black oxidation titanium film
JP2001073136A (en) Optical thin film producing system
CN115368031A (en) Preparation method of chalcogenide glass 8-12um waveband high-durability antireflection film
CN105506549A (en) Method for preparing niobium pentoxide thin film through pulse direct current sputtering
KR20150114891A (en) Thin film type transparent glass having high hardness, method for manufacturing the same, thin film type transparent glass having high hardness and conductivity, and touch panel including the same
CN102994964A (en) Preparation method of metal-sulfide-doped diamond-like carbon composite film
CN112501578A (en) Coating quality control method of gradient coating machine
TWI490354B (en) Housing and method for making the same
CN109023282B (en) Preparation method for preparing CrMoTiN nitride film nano coating on surface of bipolar plate
CN102828152A (en) Preparation method of Mo film with low resistance rate
CN101386976A (en) Technique for magnetron sputtering TiN film on magnesium alloy surface
CN104419905A (en) Preparation method of carbon-based multilayer composite coating

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20151216

RJ01 Rejection of invention patent application after publication