CN105143841A - 用于rf功率测量的微制造热量计 - Google Patents

用于rf功率测量的微制造热量计 Download PDF

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Publication number
CN105143841A
CN105143841A CN201480022437.3A CN201480022437A CN105143841A CN 105143841 A CN105143841 A CN 105143841A CN 201480022437 A CN201480022437 A CN 201480022437A CN 105143841 A CN105143841 A CN 105143841A
Authority
CN
China
Prior art keywords
power
thermal medium
low frequency
load
calorimeter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201480022437.3A
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English (en)
Chinese (zh)
Inventor
J·D·迈尔泽
A·H·泰塔斯
B·宁次
徐景
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BIRD TECHNOLOGIES GROUP Inc
Research Foundation of the State University of New York
Original Assignee
BIRD TECHNOLOGIES GROUP Inc
Research Foundation of the State University of New York
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BIRD TECHNOLOGIES GROUP Inc, Research Foundation of the State University of New York filed Critical BIRD TECHNOLOGIES GROUP Inc
Publication of CN105143841A publication Critical patent/CN105143841A/zh
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00Arrangements for measuring electric power or power factor
    • G01R21/02Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00Measuring quantity of heat
    • G01K17/06Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
    • G01K17/08Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
CN201480022437.3A 2013-02-22 2014-02-20 用于rf功率测量的微制造热量计 Pending CN105143841A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361767872P 2013-02-22 2013-02-22
US61/767,872 2013-02-22
PCT/US2014/017426 WO2014130689A1 (en) 2013-02-22 2014-02-20 Microfabricated calorimeter for rf power measurement

Publications (1)

Publication Number Publication Date
CN105143841A true CN105143841A (zh) 2015-12-09

Family

ID=51387499

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480022437.3A Pending CN105143841A (zh) 2013-02-22 2014-02-20 用于rf功率测量的微制造热量计

Country Status (8)

Country Link
US (2) US10168365B2 (enExample)
EP (1) EP2959278A4 (enExample)
JP (1) JP2016510871A (enExample)
KR (1) KR20150121133A (enExample)
CN (1) CN105143841A (enExample)
HK (1) HK1217039A1 (enExample)
TW (1) TW201443448A (enExample)
WO (1) WO2014130689A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110161303A (zh) * 2019-06-14 2019-08-23 电子科技大学 一种0-6GHz量热式微波功率计用微波负载
CN113702698A (zh) * 2021-09-22 2021-11-26 中国计量科学研究院 用于微波大功率测量系统的电阻片式射频大功率传感器

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10184330B2 (en) * 2015-06-24 2019-01-22 Chevron U.S.A. Inc. Antenna operation for reservoir heating
DE102015119832A1 (de) * 2015-11-17 2017-05-18 Xylem Ip Management Sàrl Förderpumpe zur Druckerhöhung in einer Leitung und Verfahren zum Betreiben einer Förderpumpe
US11513012B2 (en) 2019-06-06 2022-11-29 Mediatek Inc. Aging calibration for temperature sensor
CN112630526B (zh) * 2020-12-17 2024-04-05 北京航天计量测试技术研究所 改进型流量式微波中功率的测量装置和测量方法
CN113295921B (zh) * 2021-04-26 2022-11-25 中国计量科学研究院 一种基于微量热计的低频测温修正方法
EP4476794A1 (en) * 2022-02-07 2024-12-18 Bird Technologies Group Inc. Liquid-cooled termination for radio frequency power measurement
WO2025091051A1 (en) * 2023-10-26 2025-05-01 Bird Technologies Group Inc. Radio frequency calorimeter

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH549213A (de) * 1971-11-25 1974-05-15 Basf Ag Verfahren und einrichtung zur isothermen kalorimetrie.
GB1544270A (en) * 1975-06-12 1979-04-19 Ryusyo Industrial Co Integrating calorimeter
EP0092042B1 (de) * 1982-03-09 1987-09-16 Siemens Aktiengesellschaft Wärmemengenzähler
US20080114555A1 (en) * 2006-10-06 2008-05-15 Scott Jonathan B Fast Extrapolation of a Thermal Sensor's Final Value and Discovery/Verification of a Thermal Sensor's Thermal Time Constant
CN102494808A (zh) * 2011-11-21 2012-06-13 中国计量科学研究院 微量热计、使用该微量热计的功率基准系统及测量方法
CN102593120A (zh) * 2011-01-05 2012-07-18 Nxp股份有限公司 Rf功率器件

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426856Y2 (enExample) * 1975-06-30 1979-09-04
JPS5483484A (en) 1977-12-15 1979-07-03 Agency Of Ind Science & Technol Power measuring apparatus by calorimeter method
US5156459A (en) * 1989-09-01 1992-10-20 The United States Of America As Represented By The United States Department Of Energy Radiation beam calorimetric power measurement system
US5186540A (en) 1991-12-30 1993-02-16 Raytheon Company Power measurement calorimeter
US5376880A (en) 1993-03-30 1994-12-27 At&T Corp. Method and apparatus for measuring the average power in an electric signal
US5343755A (en) * 1993-05-05 1994-09-06 Rosemount Inc. Strain gage sensor with integral temperature signal
US5550526A (en) * 1994-12-27 1996-08-27 Lucent Technologies Inc. Thermal detection elements with heater
US5965410A (en) 1997-09-02 1999-10-12 Caliper Technologies Corp. Electrical current for controlling fluid parameters in microchannels
US6759839B2 (en) 2000-01-11 2004-07-06 Anritsu Corporation Wide-band RF signal power detecting element and power detecting device using the same
GB2385673B (en) * 2002-02-20 2005-05-18 Racal Instruments Ltd Radio frequency power measurement
US7447490B2 (en) 2005-05-18 2008-11-04 Nvidia Corporation In-situ gain calibration of radio frequency devices using thermal noise
JP4831670B2 (ja) * 2006-02-24 2011-12-07 富士通株式会社 試料抵抗測定装置
JP2008287999A (ja) 2007-05-16 2008-11-27 Panasonic Corp プラズマ処理装置およびその制御方法
CN100578236C (zh) 2007-10-12 2010-01-06 核工业西南物理研究院 基于量热法的兆瓦级微波功率测量系统
CA2725861C (en) 2008-06-06 2018-07-10 Perkinelmer Health Sciences, Inc. Calorimeter and methods of using it and control systems therefor
US8562210B2 (en) 2010-11-19 2013-10-22 International Business Machines Corporation Thermal sensor for semiconductor circuits

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH549213A (de) * 1971-11-25 1974-05-15 Basf Ag Verfahren und einrichtung zur isothermen kalorimetrie.
GB1544270A (en) * 1975-06-12 1979-04-19 Ryusyo Industrial Co Integrating calorimeter
EP0092042B1 (de) * 1982-03-09 1987-09-16 Siemens Aktiengesellschaft Wärmemengenzähler
US20080114555A1 (en) * 2006-10-06 2008-05-15 Scott Jonathan B Fast Extrapolation of a Thermal Sensor's Final Value and Discovery/Verification of a Thermal Sensor's Thermal Time Constant
CN102593120A (zh) * 2011-01-05 2012-07-18 Nxp股份有限公司 Rf功率器件
CN102494808A (zh) * 2011-11-21 2012-06-13 中国计量科学研究院 微量热计、使用该微量热计的功率基准系统及测量方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110161303A (zh) * 2019-06-14 2019-08-23 电子科技大学 一种0-6GHz量热式微波功率计用微波负载
CN113702698A (zh) * 2021-09-22 2021-11-26 中国计量科学研究院 用于微波大功率测量系统的电阻片式射频大功率传感器
CN113702698B (zh) * 2021-09-22 2023-08-15 中国计量科学研究院 用于微波大功率测量系统的电阻片式射频大功率传感器

Also Published As

Publication number Publication date
KR20150121133A (ko) 2015-10-28
EP2959278A1 (en) 2015-12-30
JP2016510871A (ja) 2016-04-11
US20160025783A1 (en) 2016-01-28
EP2959278A4 (en) 2016-11-16
HK1217039A1 (zh) 2016-12-16
US9921251B2 (en) 2018-03-20
WO2014130689A1 (en) 2014-08-28
TW201443448A (zh) 2014-11-16
US20140239940A1 (en) 2014-08-28
US10168365B2 (en) 2019-01-01

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