CN105140084B - Fabrication method of sodium-cesium-antimony bialkali photocathode - Google Patents
Fabrication method of sodium-cesium-antimony bialkali photocathode Download PDFInfo
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Abstract
The invention discloses a fabrication method of a sodium-cesium-antimony bialkali photocathode. The fabrication method is mainly applied to fabrication of photocathodes of a photomultiplier and a low-light level image intensifier in the field of weak light detection. The fabrication method is mainly technically characterized by comprising a fabrication device of a sodium bialkali photocathode and the following main operation steps: installing an evaporator; connecting an evaporation power supply; adjusting evaporator current; controlling cesium-antimony evaporating current; controlling sodium evaporating current; controlling cesium evaporating current; controlling cesium-antimony evaporating current; adjusting antimony evaporating current; and turning off a cesium-antimony current source. A practical application proves that the quantum efficiency of the sodium bialkali photocathode is obviously higher than that of an original potassium bialkali photocathode; the peak quantum efficiency can be up to 45% and is improved by 15%;the defect of low quantum efficiency of an original photocathode is fundamentally overcome; the requirements of users on relatively high quantum efficiency of the photomultiplier can be met; and the method adapts to the requirements of modern science and technology development.
Description
Technical field
The present invention relates to a kind of manufacture method of photocathode, specifically a kind of making side of sodium caesium-antimony bialkali photocathode
Method, is mainly used in the photocathode manufacture of the similar photoelectric device such as photomultiplier tube, the gleam image intensifier in weak light detection field.
Background technology
By taking photomultiplier tube as an example, photomultiplier tube is a kind of vacuum electronic device that small-signal is transformed into the signal of telecommunication
Part,（See Fig. 1）, mainly it is made up of negative electrode windowpane I, photocathode II, focusing electrode III, dynode IV and anode V.Its work
As principle it is：When the low light level is irradiated to photocathode II by negative electrode windowpane I, photocathode launches photoelectron in vacuum,
Photoelectron enters the electron multiplication system of dynode IV in the presence of electric field, and through multistage Secondary-emission multipbcation, formation is put
Big electron stream signal, is finally collected by anode V and is amplified again and processes, for using.Photomultiplier tube is mainly used in
Weak light detection, in fields such as Medical Instruments, spectral instrument, nuclear physics research, study of high energy physics.As a result of secondary electron
Dynode system, therefore with high detectivity and extremely low noise.So photomultiplier tube can be in low-lying level photoptometry
In terms of spectroscopy, atomic weak radiant power is measured.But photomultiplier tube（Including other similar photoelectric devices）Core
Part is photocathode, and its Specifeca tion speeification is quantum efficiency（Quantum efficiency refers to that photocathode often receives 100 photon institute energy
The photoelectron number of transmitting）, quantum efficiency is higher, and the detection efficient of photomultiplier tube is higher, and signal to noise ratio is better.Currently used for
The photomultiplier tube of visible light wave range faint light detection generally mainly uses K2CsSb bialkali photocathodes（The hereinafter referred to as double alkali of potassium
Photocathode）.The peak quantum efficiency of potassium bialkali photocathode spectral response is about 27%, not more than 30%, spectral response
Long wave threshold value about in 620nm（See Fig. 2 dashed curves）.
With the development of science and technology, the performance of the application of each photomultiplier tube to photomultiplier tube, particularly
The quantum efficiency of photocathode is put forward higher requirement.The quantum efficiency of existing potassium bialkali photocathode is not adapted to
The demand of user, and due to the restriction of material behavior, the space that potassium bialkali photocathode quantum efficiency is lifted is little, anyway
Improve, all can not meet requirement of the user to the sub- efficiency of photomultiplier tube higher amount.Therefore new approach must be sought solves this
A line long-standing technical barrier in the industry.
The content of the invention
The main task and purpose of the present invention is, cloudy according to the photoelectricity of existing photomultiplier tube and its similar photoelectric device
Pole quantum efficiency is low, it is impossible to meet defect of the user to the sub- efficiency requirements of photomultiplier tube higher amount.Design is a kind of new
Na2CsSb bialkali photocathodes（Hereinafter referred to as sodium bialkali photocathode）, replace the double alkali of original potassium with sodium bialkali photocathode
Application of the photocathode in photomultiplier tube.The quantum efficiency of photocathode is fundamentally improved, and is reached and user is met to light
The requirement of the sub- efficiency of electric multiplier tube higher amount, adapts to the demand of modern development in science and technology.
The present invention main technical schemes be:The manufacture method of sodium caesium-antimony bialkali photocathode is cloudy comprising the double alkali photoelectricity of sodium
Pole producing device and concrete operation step, A, the structure of sodium bialkali photocathode producing device, on table top, are arranged by pipeline
One with the vacuum chamber of pumped vacuum systems UNICOM, in vacuum room directly over one piece of observation window is housed, observation is rack-mounted by outside window
There is a negative electrode processing lamp, negative electrode is processed lamp voltage source both positive and negative polarity corresponding with photocathode making control system and is connected, very
Upper right side in empty room, outside in equipped with a mechanical hand, vacuum chamber inner bottom part and has been loaded with alkali metal generator, antimony ball
Sealing flange is tightly connected, and places on sealing flange
Glass window, in vacuum chamber outer mask baking oven；The concrete operation step that B, sodium bialkali photocathode make：A, installation vaporizer, close
Sodium vaporizer, caesium vaporizer, antimony ball and collector are installed with screw on envelope ring flange, evaporation mask is enclosed within into sealing flange then
On, then negative electrode windowpane is placed in the circular hole of evaporation mask upper surface and lives port lid；The sealing of b, vacuum chamber, will install
The sealing flange of component loads vacuum chamber, anaerobic copper backing is housed between sealing flange and the bottom of vacuum-chamber wall and is passed through
Bolt is tensed and is tightly connected, and removes negative electrode windowpane using mechanical hand, make negative electrode glass from the circular hole of evaporation mask upper surface
Window no longer covers the hole of evaporation mask；Baking oven is covered vacuum chamber, connection baking oven and temperature control system by c, evacuation, and unlatching is taken out
Vacuum system carries out evacuation to vacuum chamber, when pressure is less than 2 × 10-5During mbar, temperature control system is opened, heating journey is set
Sequence, starts to baking oven for heating, makes vacuum room temperature that 350 DEG C were risen in 3-3.5 hours, is incubated 7 hours, then drops naturally
Temperature；D, connection evaporator power supplies, after oven temperature reaches room temperature remove baking oven, negative electrode windowpane are put back into steaming with mechanical hand
Cover in circular hole above hair net and by circular hole, with wire by the vacuum feedthroughs post on sealing flange, successively sodium is evaporated
The both positive and negative polarity that device, caesium vaporizer, the two ends of antimony ball make the corresponding current source of control system with photocathode respectively is connected, and uses
Wire, will be the circuit for being in series with the collector and negative electrode windowpane contact electrode of light current flowmeter cloudy with photoelectricity by vacuum feedthroughs post
Pole makes the corresponding voltage source positive pole of control system and is connected；Baking oven is covered vacuum chamber by e, vacuum greenhouse heating, opens temperature control
Temperature is set as 185 DEG C by system processed, is started to baking oven for heating, after vacuum room temperature reaches 185 DEG C, is incubated 20 minutes；f、
Negative electrode processing lamp, collector current/voltage are adjusted, photocathode is opened and is made control system, negative electrode processing lamp current is transferred to 1.65
± 0.2A, catcher voltage are adjusted to+90V, observe the photocurrent variations of light current flowmeter；G, regulation evaporator current, open sodium and steam
Device, caesium vaporizer, the current source of antimony ball are sent out, electric current is adjusted to into 2.5A, 2.5A, 1.0A respectively, increased by speed 0.2A/ per minute
Plus the electric current of sodium vaporizer and caesium vaporizer, increase the electric current of antimony ball by speed 0.1A/ per minute, observe light in the process
The change of electric current；Caesium, antimony electric current are steamed in h, control, and 10 minutes are afterwards, when the electric current of sodium vaporizer and caesium vaporizer increases to 4.5A,
The current source of caesium vaporizer and antimony ball when the electric current of antimony ball reaches 2.0A, is closed, the current source of sodium vaporizer is kept it turned on, but is subtracted
The 0.1A/ that advances the speed of little sodium evaporator current is per minute, observes the change of photoelectric current in the process；I, control steam sodium electricity
Stream, with being continuously increased for sodium evaporator current, when 5.0A is reached, it can be observed that photoelectric current occur, when there is photoelectric current
Afterwards, the current source of sodium vaporizer is closed immediately；Caesium electric current is steamed in j, control, opens caesium and steam while sodium evaporator current is closed
The current source of device is sent out, now the electric current of caesium vaporizer is electric current when previously closing, as 4.5A, by the speed that 0.1A/ is per minute
Rate increases the electric current of caesium vaporizer, after 4 minutes, when the electric current of caesium vaporizer reaches 4.9A, can observe that photoelectric current persistently increases
Greatly, now it is not further added by the electric current of caesium vaporizer, but keeps it turned on the current source of caesium vaporizer, close after 2 minutes, what is closes
Sodium vaporizer, the current source of antimony ball are opened simultaneously, and now sodium vaporizer, the electric current of antimony ball are electric current when previously closing, i.e. sodium
Evaporator current is 5.0A, and the electric current of antimony ball is 2.0A；Caesium, antimony electric current are steamed in k, control, increase by speed 0.1A/ per minute
The electric current of antimony ball, after 5 minutes, when the electric current of antimony ball reaches 2.5A, photoelectric current also further can increase, and now keep antimony ball
Electric current is constant, continues 2 minutes, afterwards by the current reduction of antimony ball to 2.0A, the current reduction of sodium vaporizer to 4.5A, while again
The secondary current source for opening caesium vaporizer, now the electric current of caesium vaporizer is electric current when previously closing, and as 4.9A keeps this to steam
Send out process, in the process photoelectric current persistently can rise, after 20 minutes, photoelectric current can reach maximum, when photoelectric current reaches maximum
The current source of sodium vaporizer during value, is closed, the electric current of caesium vaporizer is turned down to 4.5A, the electric current of antimony ball is turned down to 2.0A；l、
Baking oven lower the temperature, the temperature of baking oven is reduced to into 165 ± 5 DEG C within 50 to 60 minutes, in the process photoelectric current can progressively under
Drop；Antimony electric current is steamed in m, regulation, when oven temperature reaches 165 DEG C, the electric current of antimony ball is adjusted to 2.5A, and presses 0.005A/ point
The speed of clock increases, in the process, photoelectric current meeting rapid increase, and and maximum is reached after 45 mins；N, closing caesium, antimony electricity
Stream source, after photoelectric current reaches maximum, closes the current source of caesium vaporizer and antimony ball, is naturally cooling to room temperature.
The present invention is proved by practical application：It is fully achieved development purpose, the quantum of made sodium bialkali photocathode
Efficiency is substantially high than the quantum efficiency of potassium bialkali photocathode, and peak quantum efficiency can reach 45%, improves 15 percentages
Point；The long-wave response threshold value of sodium bialkali photocathode is bigger than the long-wave response threshold value of potassium bialkali photocathode, can reach
700nm, expands 80 nm；In the signal detection application in visible spectrum, using the light of sodium bialkali photocathode
Electric multiplier tube ratio has higher signal detection efficiency using the photomultiplier tube of potassium bialkali photocathode, especially in high energy thing
In the application of reason, common demands photomultiplier tube be greater than more than 40% using the quantum efficiency of photocathode, and photoelectricity is cloudy
The diameter of pole is also required to increase.Under this application conditions, sodium bialkali photocathode is currently unique optimum selection；The present invention
It is simple to operate, it is easily mastered, only needs general electric vacuum technology workman.
Description of the drawings
Below in conjunction with the accompanying drawings, the present invention is described in further detail.
Fig. 1, is the schematic diagram of photomultiplier tube.
Fig. 2, is the quantum efficiency curve chart of the sodium bialkali photocathode of the present invention respectively（Solid line）It is cloudy with the double alkali photoelectricity of potassium
The quantum efficiency curve chart of pole（Dotted line）, wavelength unit is nm.
Fig. 3, is the process chart of the present invention.
Fig. 4, is sodium bialkali photocathode producing device structural representation.
Fig. 5, is the installation diagram of alkali metal evaporator and antimony ball.
Fig. 6, is photoelectricity flow measurement circuitry schematic diagram.
Fig. 7, is the process curve figure of the present invention（The relation curve of photoelectric current i and time t）, wherein photoelectric current and the time is
Arbitrary unit.
Specific embodiment
With reference to Fig. 3,4,5, the main technical schemes of the present invention are illustrated：The present invention is made by sodium bialkali photocathode
Device and concrete operation step composition, A, device（See Fig. 4）Including table top 1, baking oven 2, collector 3, vacuum chamber 4, pipeline 5, connect
Touched electrode 6, negative electrode processing lamp 7, observation window 8, mechanical hand 9, negative electrode windowpane 10, evaporation mask 11, antimony ball 12, caesium vaporizer 13,
Sealing flange 14, vacuum feedthroughs post 15, sodium vaporizer 16, photocathode make control system 17, temperature control system 18, take out
Vacuum system 19, its structure on the playing surface 1, arrange the vacuum chamber 4 of and 19 UNICOM of pumped vacuum systems, vacuum by pipeline 5
One piece of observation window 8 is housed directly over indoor, observation processes lamp 7, negative electrode processing lamp and light equipped with a negative electrode by support outside window
Electric negative electrode makes 17 corresponding voltage source both positive and negative polarity of control system and is connected, upper right side in vacuum room, outside in equipped with
Mechanical hand 9,4 inner bottom part of vacuum chamber, with have been loaded with alkali metal generator, the sealing flange 14 of antimony ball 12 is tightly connected, sealing
Place on ring flange in an evaporation mask 11, the circular hole directly over evaporation mask and place negative electrode windowpane 10, in 4 outer mask of vacuum chamber
There is baking oven 2；The concrete operation step that B, sodium bialkali photocathode make（See Fig. 3）：
A, installation vaporizer（See Fig. 5）, on sealing flange 14 with screw install sodium vaporizer 16, caesium vaporizer 13,
Antimony ball 12 and collector 3,（Note the conducting to be ensured between vaporizer, antimony ball and stem when installing）, then by evaporation mask
11 are enclosed within sealing flange 14, then negative electrode windowpane 10 is placed in the circular hole of evaporation mask upper surface and lives port lid；
The sealing of b, vacuum chamber（See Fig. 4）, the sealing flange 14 for installing component is loaded into vacuum chamber 4, sealing flange
Anaerobic copper backing is housed between disk 14 and the bottom of vacuum-chamber wall and is tensed by bolt and be tightly connected（Common vacuum sealing connects
Connect）, negative electrode windowpane 10 is removed from the circular hole of 11 upper surface of evaporation mask using mechanical hand 9, negative electrode windowpane is no longer covered
The firmly hole of evaporation mask；
Baking oven 2 is covered vacuum chamber, connection baking oven and temperature control system 18, opens pumped vacuum systems 19 by c, evacuation
Evacuation is carried out to vacuum chamber 4, when pressure is less than 2 × 10-5During mbar, temperature control system 18 is opened, heating program is set, is opened
Begin to baking oven for heating, make vacuum room temperature that 350 DEG C were risen in 3-3.5 hours, be incubated 7 hours, then Temperature fall；
D, connection evaporator power supplies（See Fig. 4）, baking oven is removed after 2 temperature of baking oven reaches room temperature, with mechanical hand 9 by negative electrode
Windowpane 10 is put back in the circular hole above evaporation mask 11 and covers circular hole, with wire by the vacuum on sealing flange 14
The two ends of sodium vaporizer 16, caesium vaporizer 13, antimony ball 12 are made control system 17 with photocathode by stem 15 successively respectively
The both positive and negative polarity of corresponding current source is connected, and with wire by vacuum feedthroughs post 15, will be in series with the collector 3 of light current flowmeter 21
Voltage source positive pole corresponding with the circuit and photocathode making control system that negative electrode windowpane contacts electrode 6 is connected（See figure
6）；
Baking oven 2 is covered vacuum chamber 4 by e, vacuum greenhouse heating, opens temperature control system 18, temperature is set as 185 DEG C,
Start to baking oven for heating, after vacuum room temperature reaches 185 DEG C, be incubated 20 minutes；
F, regulation lamp, collector current/voltage, open photocathode and make control system 17, and negative electrode processing lamp current is transferred to
1.65 ± 0.2A, catcher voltage are adjusted to+90V, observe the photocurrent variations of light current flowmeter 21（See Fig. 7）；
G, regulation evaporator current, open sodium vaporizer 16, caesium vaporizer 13, the current source of antimony ball 12, respectively by electric current
2.5A, 2.5A, 1.0A are adjusted to, increase the electric current of sodium vaporizer and caesium vaporizer by speed 0.2A/ per minute, it is every by 0.1A/
The speed of minute increases the electric current of antimony ball, observes the change of photoelectric current in the process（See Fig. 7）；
Caesium, antimony electric current are steamed in h, control, and 10 minutes afterwards, when the electric current of sodium vaporizer 16 and caesium vaporizer 13 increases to
4.5A, when the electric current of antimony ball 12 reaches 2.0A, closes the current source of caesium vaporizer and antimony ball, keeps it turned on the electric current of sodium vaporizer
Source, but the 0.1A/ that advances the speed of reduction sodium evaporator current is per minute, observes the change of photoelectric current in the process（See figure
7）；
Sodium current is steamed in i, control, with being continuously increased for sodium evaporator current, when about 5.0A is reached, it can be observed that go out
Existing photoelectric current（See Fig. 7）, the current source of sodium vaporizer after there is photoelectric current, is closed immediately；
Caesium electric current is steamed in j, control, opens the current source of caesium vaporizer 13, now while sodium 16 electric current of vaporizer is closed
The electric current of caesium vaporizer is electric current when previously closing, as 4.5A, increases the electricity of caesium vaporizer by speed 0.1A/ per minute
Stream, after 4 minutes, when the electric current of caesium vaporizer reaches about 4.9A, can observe that photoelectric current persistently increases（See Fig. 7）, now not
It is further added by the electric current of caesium vaporizer, but keeps it turned on the current source of caesium vaporizer, close after 2 minutes, opens while closing
The current source of sodium vaporizer, antimony ball, now sodium vaporizer, the electric current of antimony ball are electric current when previously closing, i.e. sodium vaporizer electricity
Stream is about 5.0A, and the electric current of antimony ball is 2.0A；
Caesium, antimony electric current are steamed in k, control, increase the electric current of antimony ball by speed 0.1A/ per minute, after 5 minutes, when antimony ball 12
Electric current when reaching about 2.5A, photoelectric current also further can increase（See Fig. 7）, now keep the electric current of antimony ball constant, continue 2 points
Clock, afterwards by the current reduction of antimony ball to 2.0A, the current reduction of sodium vaporizer 16 is to 4.5A, while being again turned on caesium vaporizer
Current source, now the electric current of caesium vaporizer 13 is electric current when previously closing, i.e. about 4.9A keeps this evaporation process,
During this, photoelectric current persistently can rise（See Fig. 7）, after 20 minutes, photoelectric current can reach maximum, when photoelectric current reaches maximum
When（The position seen in Fig. 7 is 1.）, the current source of sodium vaporizer is closed, the electric current of caesium vaporizer is turned down to 4.5A, the electricity of antimony ball
Stream is turned down to 2.0A；
The temperature of baking oven was reduced to 165 ± 5 DEG C, in the process photoelectricity within 50 to 60 minutes by l, baking oven cooling
Stream progressively can decline（The position seen in Fig. 7 is 2.）；
Antimony electric current is steamed in m, regulation, when oven temperature reaches 165 DEG C, the electric current of antimony ball 12 is adjusted to 2.5A, and is pressed
The speed of 0.005A/ minutes increases, in the process, photoelectric current meeting rapid increase, and and maximum is reached after 45 mins（See figure
Position in 7 is 3.）；
N, closing caesium, antimony current source, after photoelectric current reaches maximum, close the electric current of caesium vaporizer 13 and antimony ball 12
Source, is naturally cooling to room temperature, and now sodium bialkali photocathode makes and finishes.
With reference to Fig. 4, described photocathode makes control system 17, temperature control system 18, pumped vacuum systems 19, adopts
With existing conventional criteria system；Negative electrode processing lamp 7 adopts 6 volts 10 watts of standard halogen tungsten lamp；Sodium vaporizer 16 and caesium vaporizer
13 using the vaporizer of Sai Si companies of Italy, and model is respectively NA/NF/6/50FT10+10 and CS/NF/16/50FT10+
10；Antimony ball 12 adopts weight for 8mg, and purity is 99.99%, a diameter of 0.3mm of nickel filament of ball center's melting welding；Sealing flange
Anaerobic copper backing is housed between 14 and vacuum-chamber wall bottom and is tensed by bolt and be tightly connected, and common vacuum sealing connects
Mode is connect, inconvenience in figure is drawn in detail；Mechanical hand is conventional conventional vacuum fixture, is only served negative electrode windowpane 7 with elastic force
The effect for moving is clamped, can simply be designed according to the size and shape of negative electrode windowpane 10.
With reference to Fig. 4, photomultiplier tube is being made（Other photoelectric devices such as including gleam image intensifier）When, only need to be vacuum
The space of room 4 increases, and is placed in vacuum room and negative electrode glass by the photomultiplier tube body that clamping is finished by support
Glass window 10 side by side, according to the size of made 10 size of negative electrode windowpane, selects the size of evaporation mask 11 and its circular hole, selects
Negative electrode windowpane is moved to photomultiplier tube body carries out the corresponding mechanical hand of sealing-in.If the alkali metal evaporator for being adopted
Model, antimony ball it is in different size, then make negative electrode when, evaporation current slightly can be adjusted i.e. on the basis of the present invention
Can.Photocathode is made the negative electrode windowpane that finishes to move to photomultiplier tube body carry out sealing-in, i.e., under vacuum
Sealing-in, is that photomultiplier tube sealing technology requirement routinely is carried out, does not just launch here to detail.
With reference to Fig. 4, the Analysis on Key Technologies of the present invention：The present invention is compared with potassium bialkali photocathode：It is cloudy photoelectricity is made
On the material of pole, in potassium bialkali photocathode, include tri- kinds of elements of K, Cs and Sb, and in the sodium bialkali photocathode of the present invention
But tri- kinds of elements of Na, Cs and Sb are included, this is the basic reason of the quantum efficiency for improving photocathode；In concrete operation step
On, with making potassium bialkali photocathode in the temperature toasted, time, vacuum, evaporating temperature require essentially identical, maximum area
It is not, when potassium bialkali photocathode is made, to be switched on first heating antimony ball evaporation antimony, reach the antimony film on negative electrode windowpane
Certain thickness, not re-evaporation antimony afterwards, after the completion of the evaporation of antimony film, while evaporate caesium and potassium, make Cs atom and potassium atom with
There is chemical reaction in antimony film, potassium bialkali photocathode is generated on negative electrode windowpane.And the present invention successively carry out in operation it is many
Secondary evaporation antimony, makes sodium atom and Cs atom that chemical reaction occur with antimony, and sodium bialkali photocathode is generated on negative electrode windowpane 10,
This is one of key technology of the present invention, while evaporation current value is also different in evaporation process；On producing device, no
It is to continue to use original equipment, but has made the improvement in structure in addition to several building blocks so as to which structure is simpler, operates
Than original convenient, without the need for technical merit is higher, veteran expert, and general electric vacuum technology operative is only needed i.e.
Can.
Claims (1)
1. a kind of manufacture method of sodium caesium-antimony bialkali photocathode, it is characterised in that：Comprising sodium bialkali photocathode producing device
And concrete operation step, A, the structure of sodium bialkali photocathode producing device, in table top（1）On, by pipeline（5）Arrange one
With pumped vacuum systems（19）The vacuum chamber of UNICOM（4）, in vacuum room, surface is equipped with one piece of observation window（8）, observe and pass through outside window
Support processes lamp equipped with a negative electrode（7）, negative electrode processes lamp and photocathode makes control system（17）Corresponding voltage source is just
Negative pole is connected, upper right side in vacuum room, outside in equipped with a mechanical hand（9）, vacuum chamber（4）Inner bottom part, and has been loaded with
Alkali metal generator, antimony ball（12）Sealing flange（14）It is tightly connected, on sealing flange, places an evaporation mask（11）,
Negative electrode windowpane is placed in circular hole directly over evaporation mask（10）, in vacuum chamber（4）Outside is covered with baking oven（2）；The double alkali light of B, sodium
The concrete operation step that electric negative electrode makes：
A, installation vaporizer, in sealing flange（14）On with screw install sodium vaporizer（16）, caesium vaporizer（13）, antimony ball
（12）And collector（3）, then by evaporation mask（11）It is enclosed within sealing flange（14）On, then by negative electrode windowpane（10）It is placed on
Live in the circular hole of evaporation mask upper surface and by port lid；
The sealing of b, vacuum chamber, will install the sealing flange of component（14）Load vacuum chamber（4）, sealing flange（14）With
Anaerobic copper backing is housed between the bottom of vacuum-chamber wall and is tensed by bolt and be tightly connected, using mechanical hand（9）By negative electrode glass
Glass window（10）From evaporation mask（11）Remove in the circular hole of upper surface, make negative electrode windowpane no longer cover the hole of evaporation mask；
C, evacuation, by baking oven（2）Cover vacuum chamber, connection baking oven and temperature control system（18）, open pumped vacuum systems
（19）To vacuum chamber（4）Evacuation is carried out, when pressure is less than 2 × 10-5During mbar, temperature control system is opened（18）, arrange and add
Warm program, starts to baking oven for heating, makes vacuum room temperature that 350 DEG C were risen in 3-3.5 hours, is incubated 7 hours, then certainly
So lower the temperature；
D, connection evaporator power supplies, work as baking oven（2）Temperature removes baking oven after reaching room temperature, uses mechanical hand（9）By negative electrode windowpane
（10）It is put back into evaporation mask（11）Cover in the circular hole of top and by circular hole, pass through sealing flange with wire（14）On vacuum
Stem（15）, successively by sodium vaporizer（16）, caesium vaporizer（13）, antimony ball（12）Two ends respectively with photocathode make control
System processed（17）The both positive and negative polarity of corresponding current source is connected, and passes through vacuum feedthroughs post with wire（15）, weak current will be in series with
Meter（21）Collector（3）Electrode is contacted with negative electrode windowpane（6）Circuit and photocathode make the corresponding electricity of control system
Potential source positive pole is connected；
E, vacuum greenhouse heating, by baking oven（2）Cover vacuum chamber（4）, open temperature control system（18）, temperature is set as into 185
DEG C, start to baking oven for heating, after vacuum room temperature reaches 185 DEG C, be incubated 20 minutes；
F, regulation negative electrode processing lamp, collector current/voltage, open photocathode and make control system（17）, negative electrode processing lamp electricity
Stream is transferred to 1.65 ± 0.2A, and catcher voltage is adjusted to+90V, observes light current flowmeter（21）Photocurrent variations；
G, regulation evaporator current, open sodium vaporizer（16）, caesium vaporizer（13）, antimony ball（12）Current source, respectively by electricity
Stream is adjusted to 2.5A, 2.5A, 1.0A, increases the electric current of sodium vaporizer and caesium vaporizer by speed 0.2A/ per minute, by 0.1A/
Speed per minute increases the electric current of antimony ball, observes the change of photoelectric current in the process；
Caesium, antimony electric current are steamed in h, control, and 10 minutes afterwards, when sodium vaporizer（16）With caesium vaporizer（13）Electric current increase to
4.5A, antimony ball（12）Electric current when reaching 2.0A, close the current source of caesium vaporizer and antimony ball, keep it turned on the electricity of sodium vaporizer
Stream source, but the 0.1A/ that advances the speed of reduction sodium evaporator current is per minute, observes the change of photoelectric current in the process；
Sodium current is steamed in i, control, with sodium vaporizer（16）Electric current is continuously increased, when reaching 5.0A, it can be observed that occur
Photoelectric current, after there is photoelectric current, closes the current source of sodium vaporizer immediately；
Caesium electric current is steamed in j, control, is closing sodium vaporizer（16）Caesium vaporizer is opened while electric current（13）Current source, now
The electric current of caesium vaporizer is electric current when previously closing, as 4.5A, increases the electricity of caesium vaporizer by speed 0.1A/ per minute
Stream, after 4 minutes, when the electric current of caesium vaporizer reaches 4.9A, can observe that photoelectric current persistently increases, and now not be further added by caesium steaming
The electric current of device is sent out, but keeps it turned on the current source of caesium vaporizer, closed after 2 minutes, sodium vaporizer, antimony are opened while closing
Ball（12）Current source, now sodium vaporizer, the electric current of antimony ball are electric current when previously closing, i.e. sodium evaporator current is
5.0A, and the electric current of antimony ball is 2.0A；
Caesium, antimony electric current are steamed in k, control, increase the electric current of antimony ball by speed 0.1A/ per minute, after 5 minutes, when antimony ball（12）'s
When electric current reaches 2.5A, photoelectric current also further can increase, and now keep the electric current of antimony ball constant, continue 2 minutes, afterwards by antimony
The current reduction of ball is to 2.0A, sodium vaporizer（16）Current reduction to 4.5A, while being again turned on caesium vaporizer（13）Electricity
Stream source, now the electric current of caesium vaporizer is electric current when previously closing, and as 4.9A keeps this evaporation process, in the process
Photoelectric current persistently can rise, and after 20 minutes, photoelectric current can reach maximum, when photoelectric current reaches maximum, close sodium vaporizer
Current source, the electric current of caesium vaporizer is turned down to 4.5A, the electric current of antimony ball is turned down to 2.0A；
The temperature of baking oven was reduced to 165 ± 5 DEG C, photoelectric current meeting in the process within 50 to 60 minutes by l, baking oven cooling
Progressively decline；
Antimony electric current is steamed in m, regulation, when oven temperature reaches 165 DEG C, by antimony ball（12）Electric current be adjusted to 2.5A, and press
The speed of 0.005A/ minutes increases, in the process, photoelectric current meeting rapid increase, and and maximum is reached after 45 mins；
N, closing caesium, antimony current source, after photoelectric current reaches maximum, close caesium vaporizer（13）With antimony ball（12）Electric current
Source, is naturally cooling to room temperature.
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| CN105845528B (en) * | 2016-04-08 | 2017-09-15 | 北方夜视技术股份有限公司 | A kind of photocathode preparation method for being used to scan streak tube |
| CN106298400A (en) * | 2016-08-31 | 2017-01-04 | 山东东仪光电仪器有限公司 | Restriction pumping speed method and device in the manufacture of photomultiplier transit tube cathode |
| CN106504972A (en) * | 2016-09-28 | 2017-03-15 | 北方夜视技术股份有限公司 | The microchannel template photomultiplier tube of high-quantum efficiency, bialkali photocathode and preparation method |
| WO2018058870A1 (en) * | 2016-09-28 | 2018-04-05 | 北方夜视技术股份有限公司 | High-quantum efficiency microchannel plate photomultiplier, and manufacturing device and method therefor |
| CN106409647A (en) * | 2016-12-06 | 2017-02-15 | 北京大学东莞光电研究院 | Ultraviolet cathode ray light source |
| CN107706071B (en) * | 2017-08-25 | 2019-03-05 | 北方夜视技术股份有限公司 | For adjusting the method, apparatus and production method of photomultiplier tube vacuum degree |
| CN107731639B (en) * | 2017-08-25 | 2018-11-13 | 北方夜视技术股份有限公司 | Prepare the autocontrol method of photomultiplier transit tube cathode |
| CN109755081B (en) * | 2019-01-07 | 2020-07-17 | 北方夜视技术股份有限公司 | Automatic antimony current regulation and control method for manufacturing high-performance alkali metal antimonide photocathode |
| CN112530768B (en) * | 2020-12-21 | 2024-02-27 | 中国计量大学 | High quantum efficiency nano array photocathode and preparation method thereof |
| CN114464510B (en) * | 2022-03-14 | 2024-03-19 | 中国科学院空天信息创新研究院 | Photocathode and preparation method thereof |
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