CN105140084A - Fabrication method of sodium-cesium-antimony bialkali photocathode - Google Patents
Fabrication method of sodium-cesium-antimony bialkali photocathode Download PDFInfo
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Abstract
The invention discloses a fabrication method of a sodium-cesium-antimony bialkali photocathode. The fabrication method is mainly applied to fabrication of photocathodes of a photomultiplier and a low-light level image intensifier in the field of weak light detection. The fabrication method is mainly technically characterized by comprising a fabrication device of a sodium bialkali photocathode and the following main operation steps: installing an evaporator; connecting an evaporation power supply; adjusting evaporator current; controlling cesium-antimony evaporating current; controlling sodium evaporating current; controlling cesium evaporating current; controlling cesium-antimony evaporating current; adjusting antimony evaporating current; and turning off a cesium-antimony current source. A practical application proves that the quantum efficiency of the sodium bialkali photocathode is obviously higher than that of an original potassium bialkali photocathode; the peak quantum efficiency can be up to 45% and is improved by 15%;the defect of low quantum efficiency of an original photocathode is fundamentally overcome; the requirements of users on relatively high quantum efficiency of the photomultiplier can be met; and the method adapts to the requirements of modern science and technology development.
Description
Technical field
the present invention relates to a kind of manufacture method of photocathode, specifically a kind of manufacture method of sodium caesium-antimony bialkali photocathode, is mainly used in the photocathode manufacture of the similar photoelectric devices such as the photomultiplier in weak light detection field, gleam image intensifier.
Background technology
for photomultiplier, photomultiplier is a kind of vacuum electron device small-signal being transformed into the signal of telecommunication, and (see figure 1) formed primarily of negative electrode windowpane I, photocathode II, focusing electrode III, dynode IV and anode V.Its operation principle is: when the low light level is irradiated to photocathode II by negative electrode windowpane I, photocathode is to utilizing emitted light electronics in vacuum, photoelectron enters the electron multiplication system of dynode IV under the effect of electric field, through multistage Secondary-emission multipbcation, form the electron stream signal amplified, finally collected by anode V and again carry out amplifying and processing, for.Photomultiplier is mainly used in weak light detection, in fields such as Medical Instruments, spectral instrument, nuclear physics research, study of high energy physics.Owing to have employed Secondary-emission multipbcation system, therefore there is high detectivity and extremely low noise.So photomultiplier in low-lying level photometry and spectroscopy, can measure atomic weak radiant power.But the core of photomultiplier (comprising other similar photoelectric device) is photocathode, its Specifeca tion speeification is quantum efficiency (quantum efficiency refers to the photoelectron number that photocathode often receives 100 photons and can launch), quantum efficiency is higher, the detection efficient of photomultiplier is higher, and signal to noise ratio is better.Photomultiplier at present for visible light wave range faint light detection generally mainly uses K
2
csSb bialkali photocathode (hereinafter referred to as potassium bialkali photocathode).The peak quantum efficiency of potassium bialkali photocathode spectral response is about 27%, is the highlyest no more than 30%, and the long wave threshold value of spectral response is shown in Fig. 2 dashed curve about 620nm().
along with the development of science and technology, the application of each photomultiplier, all to the performance of photomultiplier, is particularly had higher requirement to the quantum efficiency of photocathode.The quantum efficiency of existing potassium bialkali photocathode can not adapt to the demand of user, and due to the restriction of material behavior, the space that potassium bialkali photocathode quantum efficiency promotes is little, in any case improve, all can not meet the requirement of user to the sub-efficiency of photomultiplier higher amount.Therefore must seek new approach and solve long-standing technical barrier in this industry.
Summary of the invention
main task of the present invention and object are, low according to the photocathode quantum efficiency of existing photomultiplier and similar photoelectric device thereof, can not meet the defect of user to the sub-efficiency requirements of photomultiplier higher amount.Design a kind of new Na
2
csSb bialkali photocathode (hereinafter referred to as sodium bialkali photocathode), replaces the original application of potassium bialkali photocathode in photomultiplier with sodium bialkali photocathode.Fundamentally improve the quantum efficiency of photocathode, reach and meet the requirement of user to the sub-efficiency of photomultiplier higher amount, adapt to the demand of modern development in science and technology.
main technical schemes of the present invention is: the manufacture method of sodium caesium-antimony bialkali photocathode comprises sodium bialkali photocathode producing device and concrete operation step composition, A, the structure of sodium bialkali photocathode producing device, on table top, by the vacuum chamber of install pipeline one with pumped vacuum systems UNICOM, directly in vacuum chamber, one piece of observation window is housed, observation window is outer is equipped with a negative electrode processing lamp by support, negative electrode processing lamp is connected with the voltage source both positive and negative polarity that photocathode makes control system corresponding, upper right side in vacuum chamber, a manipulator is outside in housed, vacuum chamber inner bottom part, with alkali metal generator is housed, the sealing flange of antimony ball is tightly connected, sealing flange places an evaporation mask, negative electrode windowpane is placed in circular hole directly over evaporation mask, at vacuum chamber outer mask baking oven, the concrete operation step that B, sodium bialkali photocathode make: a, installation evaporator, sealing flange installs sodium evaporator, caesium evaporator, antimony ball and collector with screw, then evaporation mask is enclosed within sealing flange, then port lid is lived in circular hole negative electrode windowpane being placed on evaporation mask upper surface, the sealing of b, vacuum chamber, the sealing flange installing assembly is loaded vacuum chamber, oxygen-free copper pad is housed between sealing flange and the bottom of vacuum-chamber wall and is tightly connected by bolt tension, utilize manipulator to be removed from the circular hole of evaporation mask upper surface by negative electrode windowpane, make negative electrode windowpane no longer cover the hole of evaporation mask, c, to vacuumize, baking oven is covered vacuum chamber, connect baking oven and temperature control system, open pumped vacuum systems and vacuum chamber is vacuumized, when pressure is lower than 2 × 10
-5
during mbar, open temperature control system, program of heating is set, start, to baking oven heating, to make vacuum chamber temperature in 3-3.5 hours, rise to 350 DEG C, be incubated 7 hours, then Temperature fall, d, connect evaporator power supplies, baking oven is removed after oven temperature reaches normal temperature, circular hole is covered in circular hole negative electrode windowpane being put back into above evaporation mask with manipulator, with wire by the vacuum feedthroughs post on sealing flange, successively by sodium evaporator, caesium evaporator, the two ends of antimony ball make current source corresponding to control system respectively both positive and negative polarity with photocathode is connected, with wire by vacuum feedthroughs post, the circuit of the collector with negative electrode windowpane contact electrode that are in series with light current flowmeter is connected with the voltage source positive pole that photocathode makes control system corresponding, e, vacuum chamber are heated, and baking oven is covered vacuum chamber, open temperature control system, temperature are set as 185 DEG C, start, to baking oven heating, after vacuum chamber temperature reaches 185 DEG C, to be incubated 20 minutes, f, adjustment lamp, collector current/voltage, open photocathode and make control system, and negative electrode processing lamp current is transferred to 1.65 ± 0.2A, and catcher voltage is adjusted to+90V, observes the photocurrent variations of light current flowmeter, g, adjustment evaporator current, open the current source of sodium evaporator, caesium evaporator, antimony ball, respectively electric current is adjusted to 2.5A, 2.5A, 1.0A, the electric current of sodium evaporator and caesium evaporator is increased by the speed that 0.2A/ is per minute, increase the electric current of antimony ball by the speed that 0.1A/ is per minute, observe the change of photoelectric current in the process, caesium, antimony electric current are steamed in h, control, after 10 minutes, when the electric current of sodium evaporator and caesium evaporator is increased to 4.5A, when the electric current of antimony ball reaches 2.0A, close the current source of caesium evaporator and antimony ball, be held open the current source of sodium evaporator, but the 0.1A/ that advances the speed reducing sodium evaporator current is per minute, observes the change of photoelectric current in the process, sodium current is steamed in i, control, along with the continuous increase of sodium evaporator current, when reaching about 5.0A, can observe and occur photoelectric current, after there is photoelectric current, closes the current source of sodium evaporator immediately, j, control to steam caesium electric current, the current source of caesium evaporator is opened while closing sodium evaporator current, now the electric current of caesium evaporator is electric current when previously closing, be 4.5A, the electric current of caesium evaporator is increased by the speed that 0.1A/ is per minute, after 4 minutes, when the electric current of caesium evaporator reaches about 4.9A, photoelectric current can be observed continue to increase, now no longer increase the electric current of caesium evaporator, but be held open the current source of caesium evaporator, close after 2 minutes, sodium evaporator is opened while closedown, the current source of antimony ball, now sodium evaporator, the electric current of antimony ball is electric current when previously closing, namely sodium evaporator current is about 5.0A, and the electric current of antimony ball is 2.0A, k, control to steam caesium, antimony electric current, the electric current of antimony ball is increased by the speed that 0.1A/ is per minute, after 5 minutes, when the electric current of antimony ball reaches about 2.5A, photoelectric current also can increase further, now keep the electric current of antimony ball constant, continue 2 minutes, afterwards the electric current of antimony ball is reduced to 2.0A, the electric current of sodium evaporator is reduced to 4.5A, again open the current source of caesium evaporator simultaneously, now the electric current of caesium evaporator is electric current when previously closing, namely 4.9A is about, keep this evaporation process, photoelectric current can continue to rise in the process, after 20 minutes, photoelectric current can reach maximum, when photoelectric current reaches maximum, close the current source of sodium evaporator, the electric current of caesium evaporator is turned down to 4.5A, the electric current of antimony ball is turned down to 2.0A, l, baking oven are lowered the temperature, and within 50 to 60 minutes, the temperature of baking oven is reduced to 165 ± 5 DEG C, photoelectric current can progressively decline in the process, antimony electric current is steamed in m, adjustment, and when oven temperature reaches 165 DEG C, by the Current adjustment of antimony ball to 2.5A, and the speed of pressing 0.005A/ minute increases, in the process, and photoelectric current meeting rising fast, and reach maximum after 45 mins, n, closedown caesium, antimony current source, after photoelectric current reaches maximum, close the current source of caesium evaporator and antimony ball, Temperature fall is to room temperature.
the present invention is proved by practical application: reach development object completely, and the quantum efficiency of made sodium bialkali photocathode is obviously high than the quantum efficiency of potassium bialkali photocathode, and peak quantum efficiency can reach 45%, improves 15 percentage points; The long-wave response threshold value of sodium bialkali photocathode is larger than the long-wave response threshold value of potassium bialkali photocathode, can reach 700nm, expand 80nm; In signal detection application in visible spectrum, use the photomultiplier of sodium bialkali photocathode than using the photomultiplier of potassium bialkali photocathode to have higher acquisition of signal efficiency, especially in the application of high-energy physics, common demands photomultiplier use the quantum efficiency of photocathode to be greater than more than 40%, and the diameter of photocathode also need increase.Under this application conditions, sodium bialkali photocathode is unique optimal selection at present; The present invention is simple to operate, easily grasps, and only needs general electric vacuum technology workman.
Accompanying drawing explanation
below in conjunction with accompanying drawing, the present invention is described in further detail.
fig. 1 is the schematic diagram of photomultiplier.
fig. 2, be the quantum efficiency curve chart (solid line) of sodium bialkali photocathode of the present invention and the quantum efficiency curve chart (dotted line) of potassium bialkali photocathode respectively, wavelength unit is nm.
fig. 3 is process chart of the present invention.
fig. 4 is sodium bialkali photocathode producing device structural representation.
fig. 5 is the installation diagram of alkali metal evaporator and antimony ball.
fig. 6 is photoelectric current measuring circuit schematic diagram.
fig. 7, be process curve figure of the present invention (relation curve of photoelectric current i and time t), wherein photoelectric current and time are arbitrary unit.
Embodiment
with reference to Fig. 3, 4, 5, main technical schemes of the present invention is described: the present invention is made up of sodium bialkali photocathode producing device and concrete operation step, A, device (see figure 4) comprises table top 1, baking oven 2, collector 3, vacuum chamber 4, pipeline 5, contact electrode 6, negative electrode processing lamp 7, observation window 8, manipulator 9, negative electrode windowpane 10, evaporation mask 11, antimony ball 12, caesium evaporator 13, sealing flange 14, vacuum feedthroughs post 15, sodium evaporator 16, photocathode makes control system 17, temperature control system 18, pumped vacuum systems 19, its structure, on the playing surface 1, by pipeline 5 arrange one with the vacuum chamber 4 of pumped vacuum systems 19 UNICOM, directly in vacuum chamber, one piece of observation window 8 is housed, observation window is outer is equipped with a negative electrode processing lamp 7 by support, negative electrode processing lamp is connected with the voltage source both positive and negative polarity that photocathode makes control system 17 corresponding, and upper right side in vacuum chamber, is outside in equipped with a manipulator 9, vacuum chamber 4 inner bottom part, and is equipped with alkali metal generator, the sealing flange 14 of antimony ball 12 is tightly connected, and sealing flange places an evaporation mask 11, places negative electrode windowpane 10, be covered with baking oven 2 outside vacuum chamber 4 in the circular hole directly over evaporation mask, the concrete operation step (see figure 3) that B, sodium bialkali photocathode make:
a, installation evaporator (see figure 5), sealing flange 14 installs sodium evaporator 16, caesium evaporator 13, antimony ball 12 and collector 3 with screw, (noting will ensureing evaporator, conducting between antimony ball and stem when installing), then evaporation mask 11 is enclosed within sealing flange 14, then port lid is lived in circular hole negative electrode windowpane 10 being placed on evaporation mask upper surface;
the sealing (see figure 4) of b, vacuum chamber, the sealing flange 14 installing assembly is loaded vacuum chamber 4, oxygen-free copper pad is housed between sealing flange 14 and the bottom of vacuum-chamber wall and is strained by bolt be tightly connected (common vacuum seal is connected), utilize manipulator 9 to be removed from the circular hole of evaporation mask 11 upper surface by negative electrode windowpane 10, make negative electrode windowpane no longer cover the hole of evaporation mask;
c, to vacuumize, baking oven 2 is covered vacuum chamber, connect baking oven and temperature control system 18, unlatching pumped vacuum systems 19 pairs of vacuum chambers 4 vacuumize, when pressure is lower than 2 × 10
-5
during mbar, open temperature control system 18, program of heating is set, start, to baking oven heating, to make vacuum chamber temperature in 3-3.5 hours, rise to 350 DEG C, be incubated 7 hours, then Temperature fall;
d, connect evaporator power supplies (see figure 4), baking oven is removed after baking oven 2 temperature reaches normal temperature, circular hole is covered in circular hole negative electrode windowpane 10 being put back into above evaporation mask 11 with manipulator 9, with wire by the vacuum feedthroughs post 15 on sealing flange 14 successively by sodium evaporator 16, caesium evaporator 13, the two ends of antimony ball 12 make current source corresponding to control system 17 respectively both positive and negative polarity with photocathode is connected, with wire by vacuum feedthroughs post 15, the circuit of the collector 3 with negative electrode windowpane contact electrode 6 that are in series with light current flowmeter 21 and photocathode are made voltage source positive pole corresponding to control system to be connected (see figure 6),
e, vacuum chamber are heated, and baking oven 2 is covered vacuum chamber 4, open temperature control system 18, temperature are set as 185 DEG C, start, to baking oven heating, after vacuum chamber temperature reaches 185 DEG C, to be incubated 20 minutes;
f, adjustment lamp, collector current/voltage, open photocathode and make control system 17, and negative electrode processing lamp current is transferred to 1.65 ± 0.2A, and catcher voltage is adjusted to+90V, observes the photocurrent variations (see figure 7) of light current flowmeter 21;
g, adjustment evaporator current, open the current source of sodium evaporator 16, caesium evaporator 13, antimony ball 12, respectively electric current is adjusted to 2.5A, 2.5A, 1.0A, the electric current of sodium evaporator and caesium evaporator is increased by the speed that 0.2A/ is per minute, increase the electric current of antimony ball by the speed that 0.1A/ is per minute, observe the change (see figure 7) of photoelectric current in the process;
caesium, antimony electric current are steamed in h, control, after 10 minutes, when the electric current of sodium evaporator 16 and caesium evaporator 13 is increased to 4.5A, when the electric current of antimony ball 12 reaches 2.0A, close the current source of caesium evaporator and antimony ball, be held open the current source of sodium evaporator, but the 0.1A/ that advances the speed reducing sodium evaporator current is per minute, observes the change (see figure 7) of photoelectric current in the process;
sodium current is steamed in i, control, along with the continuous increase of sodium evaporator current, when reaching about 5.0A, can observe and occur photoelectric current (see figure 7), after there is photoelectric current, closes the current source of sodium evaporator immediately;
j, control to steam caesium electric current, the current source of caesium evaporator 13 is opened while closing sodium evaporator 16 electric current, now the electric current of caesium evaporator is electric current when previously closing, be 4.5A, the electric current of caesium evaporator is increased by the speed that 0.1A/ is per minute, after 4 minutes, when the electric current of caesium evaporator reaches about 4.9A, photoelectric current can be observed continue to increase (see figure 7), now no longer increase the electric current of caesium evaporator, but be held open the current source of caesium evaporator, close after 2 minutes, sodium evaporator is opened while closedown, the current source of antimony ball, now sodium evaporator, the electric current of antimony ball is electric current when previously closing, namely sodium evaporator current is about 5.0A, and the electric current of antimony ball is 2.0A,
k, control to steam caesium, antimony electric current, the electric current of antimony ball is increased by the speed that 0.1A/ is per minute, after 5 minutes, when the electric current of antimony ball 12 reaches about 2.5A, photoelectric current also can increase (see figure 7) further, now keep the electric current of antimony ball constant, continue 2 minutes, afterwards the electric current of antimony ball is reduced to 2.0A, the electric current of sodium evaporator 16 is reduced to 4.5A, again open the current source of caesium evaporator simultaneously, now the electric current of caesium evaporator 13 is electric current when previously closing, namely 4.9A is about, keep this evaporation process, photoelectric current can continue rising (see figure 7) in the process, after 20 minutes, photoelectric current can reach maximum, when photoelectric current reaches maximum (see the position in Fig. 7 1.), close the current source of sodium evaporator, the electric current of caesium evaporator is turned down to 4.5A, the electric current of antimony ball is turned down to 2.0A,
l, baking oven are lowered the temperature, and within 50 to 60 minutes, the temperature of baking oven is reduced to 165 ± 5 DEG C, photoelectric current progressively can decline (see the position in Fig. 7 2.) in the process;
m, adjustment steam antimony electric current, when oven temperature reaches 165 DEG C, by the Current adjustment of antimony ball 12 to 2.5A, and the speed of pressing 0.005A/ minute increases, in the process, photoelectric current can rise fast, and reaches after 45 mins maximum (see the position in Fig. 7 3.);
n, closedown caesium, antimony current source, after photoelectric current reaches maximum, close the current source of caesium evaporator 13 and antimony ball 12, and Temperature fall is to room temperature, and now sodium bialkali photocathode makes complete.
with reference to Fig. 4, described photocathode makes control system 17, temperature control system 18, pumped vacuum systems 19, all adopts existing conventional criteria system; Negative electrode processing lamp 7 adopts the standard tungsten halogen lamp of 6 volts 10 watts; Sodium evaporator 16 and caesium evaporator 13 all adopt the evaporator of Italian Sai Si company, and model is respectively NA/NF/6/50FT10+10 and CS/NF/16/50FT10+10; Antimony ball 12 adopts weight to be 8mg, and purity is 99.99%, and the nickel filament diameter of ball center's melting welding is 0.3mm; Oxygen-free copper pad is housed and is strained by bolt between bottom sealing flange 14 and vacuum-chamber wall and be tightly connected, be also common vacuum seal connected mode, in figure, inconvenience is drawn in detail; Manipulator is conventional conventional vacuum fixture, only plays and negative electrode windowpane 7 is clamped with elastic force the effect carrying out movement, simply can design according to the size and shape of negative electrode windowpane 10.
with reference to Fig. 4, when making photomultiplier (comprising other photoelectric devices such as gleam image intensifier), only the space of vacuum chamber 4 need be increased, by support, photomultiplier body complete for clamping is placed in vacuum chamber arranged side by side with negative electrode windowpane 10, according to the size of made negative electrode windowpane 10 size, select the size of evaporation mask 11 and circular hole thereof, select negative electrode windowpane to be moved to the corresponding manipulator that photomultiplier body carries out sealing-in.If the model of the alkali metal evaporator adopted, antimony ball is in different size, when so making negative electrode, evaporation current can slightly adjust on basis of the present invention.Photocathode is made complete negative electrode windowpane to move to photomultiplier body and carry out sealing-in, i.e. sealing-in under vacuum, be that photomultiplier sealing technology routinely requires to carry out, just do not launch to detail here.
with reference to Fig. 4, Analysis on Key Technologies of the present invention: the present invention is compared with potassium bialkali photocathode: on the material making photocathode, K, Cs and Sb tri-kinds of elements are included in potassium bialkali photocathode, and in sodium bialkali photocathode of the present invention, including Na, Cs and Sb tri-kinds of elements, this is the basic reason of the quantum efficiency improving photocathode; On concrete operation step, the temperature of toasting with making potassium bialkali photocathode, time, vacuum degree, evaporating temperature requires substantially identical, and maximum difference is when making potassium bialkali photocathode, is first electrified regulation antimony ball evaporation antimony, the antimony film on negative electrode windowpane is made to reach certain thickness, no longer evaporate antimony afterwards, after antimony film has evaporated, evaporation of cesium and potassium simultaneously, make Cs atom and potassium atom and antimony film generation chemical reaction, negative electrode windowpane generates potassium bialkali photocathode.And the present invention successively repeatedly evaporates antimony in operation, make sodium atom and Cs atom and antimony generation chemical reaction, negative electrode windowpane 10 generates sodium bialkali photocathode, and this is one of key technology of the present invention, and in evaporation process, evaporation current value is also different simultaneously; On producing device, not continue to use original equipment, but except several standarized component, all done structural improvement, make its structure simpler, operation is more convenient than original, higher without the need to technical merit, veteran expert, and only needs general electric vacuum technology operative.
Claims (1)
1. the manufacture method of a sodium caesium-antimony bialkali photocathode, it is characterized in that: comprise sodium bialkali photocathode producing device and concrete operation step composition, A, the structure of sodium bialkali photocathode producing device, on table top (1), by pipeline (5) arrange one with the vacuum chamber (4) of pumped vacuum systems (19) UNICOM, directly in vacuum chamber, one piece of observation window (8) is housed, observation window is outer is equipped with negative electrode processing lamp (7) by support, negative electrode processing lamp is connected with the voltage source both positive and negative polarity that photocathode makes control system (17) corresponding, upper right side in vacuum chamber, a manipulator (9) is outside in housed, vacuum chamber (4) inner bottom part, with alkali metal generator is housed, the sealing flange (14) of antimony ball (12) is tightly connected, sealing flange places an evaporation mask (11), negative electrode windowpane (10) is placed in circular hole directly over evaporation mask, baking oven (2) is covered with in vacuum chamber (4) outside, the concrete operation step that B, sodium bialkali photocathode make:
A, installation evaporator, sealing flange (14) installs sodium evaporator (16), caesium evaporator (13), antimony ball (12) and collector (3) with screw, then evaporation mask (11) is enclosed within sealing flange (14), then negative electrode windowpane (10) is placed in the circular hole of evaporation mask upper surface and port lid is lived;
The sealing of b, vacuum chamber, the sealing flange (14) installing assembly is loaded vacuum chamber (4), between sealing flange (14) and the bottom of vacuum-chamber wall, oxygen-free copper pad is housed and is strained by bolt and be tightly connected, utilize manipulator (9) to be removed from the circular hole of evaporation mask (11) upper surface by negative electrode windowpane (10), make negative electrode windowpane no longer cover the hole of evaporation mask;
C, to vacuumize, baking oven (2) is covered vacuum chamber, connect baking oven and temperature control system (18), unlatching pumped vacuum systems (19) vacuumizes vacuum chamber (4), when pressure is lower than 2 × 10
-5during mbar, open temperature control system (18), program of heating is set, start, to baking oven heating, to make vacuum chamber temperature in 3-3.5 hours, rise to 350 DEG C, be incubated 7 hours, then Temperature fall;
D, connect evaporator power supplies, baking oven is removed after baking oven (2) temperature reaches normal temperature, with manipulator (9) negative electrode windowpane (10) to be put back in the circular hole of evaporation mask (11) top and circular hole is covered, with wire by the vacuum feedthroughs post (15) on sealing flange (14), successively by sodium evaporator (16), caesium evaporator (13), the two ends of antimony ball (12) make current source corresponding to control system (17) respectively both positive and negative polarity with photocathode is connected, with wire by vacuum feedthroughs post (15), the circuit of the collector (3) with negative electrode windowpane contact electrode (6) that are in series with light current flowmeter (21) is connected with the voltage source positive pole that photocathode makes control system corresponding,
E, vacuum chamber are heated, and baking oven (2) is covered vacuum chamber (4), open temperature control system (18), temperature are set as 185 DEG C, start, to baking oven heating, after vacuum chamber temperature reaches 185 DEG C, to be incubated 20 minutes;
F, adjustment lamp, collector current/voltage, open photocathode and make control system (17), and negative electrode processing lamp current is transferred to 1.65 ± 0.2A, and catcher voltage is adjusted to+90V, observes the photocurrent variations of light current flowmeter (21);
G, adjustment evaporator current, open the current source of sodium evaporator (16), caesium evaporator (13), antimony ball (12), respectively electric current is adjusted to 2.5A, 2.5A, 1.0A, the electric current of sodium evaporator and caesium evaporator is increased by the speed that 0.2A/ is per minute, increase the electric current of antimony ball by the speed that 0.1A/ is per minute, observe the change of photoelectric current in the process;
Caesium, antimony electric current are steamed in h, control, after 10 minutes, when the electric current of sodium evaporator (16) and caesium evaporator (13) is increased to 4.5A, when the electric current of antimony ball (12) reaches 2.0A, close the current source of caesium evaporator and antimony ball, be held open the current source of sodium evaporator, but the 0.1A/ that advances the speed reducing sodium evaporator current is per minute, observes the change of photoelectric current in the process;
Sodium current is steamed in i, control, along with the continuous increase of sodium evaporator (16) electric current, when reaching about 5.0A, can observe and occur photoelectric current, after there is photoelectric current, closes the current source of sodium evaporator immediately;
J, control to steam caesium electric current, the current source of caesium evaporator (13) is opened while closing sodium evaporator (16) electric current, now the electric current of caesium evaporator is electric current when previously closing, be 4.5A, the electric current of caesium evaporator is increased by the speed that 0.1A/ is per minute, after 4 minutes, when the electric current of caesium evaporator reaches about 4.9A, photoelectric current can be observed continue to increase, now no longer increase the electric current of caesium evaporator, but be held open the current source of caesium evaporator, close after 2 minutes, sodium evaporator is opened while closedown, the current source of antimony ball (12), now sodium evaporator, the electric current of antimony ball is electric current when previously closing, namely sodium evaporator current is about 5.0A, and the electric current of antimony ball is 2.0A,
K, control to steam caesium, antimony electric current, the electric current of antimony ball is increased by the speed that 0.1A/ is per minute, after 5 minutes, when the electric current of antimony ball (12) reaches about 2.5A, photoelectric current also can increase further, now keep the electric current of antimony ball constant, continue 2 minutes, afterwards the electric current of antimony ball is reduced to 2.0A, the electric current of sodium evaporator (16) is reduced to 4.5A, again open the current source of caesium evaporator (13) simultaneously, now the electric current of caesium evaporator is electric current when previously closing, namely 4.9A is about, keep this evaporation process, photoelectric current can continue to rise in the process, after 20 minutes, photoelectric current can reach maximum, when photoelectric current reaches maximum, close the current source of sodium evaporator, the electric current of caesium evaporator is turned down to 4.5A, the electric current of antimony ball is turned down to 2.0A,
L, baking oven are lowered the temperature, and within 50 to 60 minutes, the temperature of baking oven is reduced to 165 ± 5 DEG C, photoelectric current can progressively decline in the process;
Antimony electric current is steamed in m, adjustment, and when oven temperature reaches 165 DEG C, by the Current adjustment of antimony ball (12) to 2.5A, and the speed of pressing 0.005A/ minute increases, in the process, and photoelectric current meeting rising fast, and reach maximum after 45 mins;
N, closedown caesium, antimony current source, after photoelectric current reaches maximum, close the current source of caesium evaporator (13) and antimony ball (12), Temperature fall is to room temperature.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105845528A (en) * | 2016-04-08 | 2016-08-10 | 北方夜视技术股份有限公司 | Manufacturing method for photoelectric cathode for scanning streak tube |
| CN106298400A (en) * | 2016-08-31 | 2017-01-04 | 山东东仪光电仪器有限公司 | Restriction pumping speed method and device in the manufacture of photomultiplier transit tube cathode |
| CN106409647A (en) * | 2016-12-06 | 2017-02-15 | 北京大学东莞光电研究院 | Ultraviolet cathode ray light source |
| CN106504972A (en) * | 2016-09-28 | 2017-03-15 | 北方夜视技术股份有限公司 | The microchannel template photomultiplier tube of high-quantum efficiency, bialkali photocathode and preparation method |
| CN107706071A (en) * | 2017-08-25 | 2018-02-16 | 北方夜视技术股份有限公司 | For adjusting the method, apparatus and the preparation method of photomultiplier and photocathode of photomultiplier transit tube cathode preparation process vacuum |
| CN107731639A (en) * | 2017-08-25 | 2018-02-23 | 北方夜视技术股份有限公司 | Prepare automatic control equipment, method and the prepared photocathode of photomultiplier transit tube cathode |
| WO2018058870A1 (en) * | 2016-09-28 | 2018-04-05 | 北方夜视技术股份有限公司 | High-quantum efficiency microchannel plate photomultiplier, and manufacturing device and method therefor |
| CN109755081A (en) * | 2019-01-07 | 2019-05-14 | 北方夜视技术股份有限公司 | Antimony electric current method for automatically regulating for the production of performance alkali metal antimonide photocathode |
| CN112530768A (en) * | 2020-12-21 | 2021-03-19 | 中国计量大学 | Nano-array photocathode with high quantum efficiency and preparation method thereof |
| CN114464510A (en) * | 2022-03-14 | 2022-05-10 | 中国科学院空天信息创新研究院 | Photocathode and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3838304A (en) * | 1973-07-12 | 1974-09-24 | Rca Corp | Method of making a bialkali photocathode with improved sensitivity and high temperature operating characteristics |
| US4853595A (en) * | 1987-08-31 | 1989-08-01 | Alfano Robert R | Photomultiplier tube having a transmission strip line photocathode and system for use therewith |
| CN1086347A (en) * | 1993-03-04 | 1994-05-04 | 中国科学院西安光学精密机械研究所 | A kind of double close-up framming image intensifier |
| CN202003946U (en) * | 2010-11-26 | 2011-10-05 | 中国船舶重工集团公司第七一八研究所 | Photomultiplier |
| CN203871298U (en) * | 2014-05-26 | 2014-10-08 | 北方夜视技术股份有限公司 | Exhaust device structure for photomultiplier cathode making and sealing |
-
2015
- 2015-07-24 CN CN201510438585.XA patent/CN105140084B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3838304A (en) * | 1973-07-12 | 1974-09-24 | Rca Corp | Method of making a bialkali photocathode with improved sensitivity and high temperature operating characteristics |
| US4853595A (en) * | 1987-08-31 | 1989-08-01 | Alfano Robert R | Photomultiplier tube having a transmission strip line photocathode and system for use therewith |
| CN1086347A (en) * | 1993-03-04 | 1994-05-04 | 中国科学院西安光学精密机械研究所 | A kind of double close-up framming image intensifier |
| CN202003946U (en) * | 2010-11-26 | 2011-10-05 | 中国船舶重工集团公司第七一八研究所 | Photomultiplier |
| CN203871298U (en) * | 2014-05-26 | 2014-10-08 | 北方夜视技术股份有限公司 | Exhaust device structure for photomultiplier cathode making and sealing |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105845528A (en) * | 2016-04-08 | 2016-08-10 | 北方夜视技术股份有限公司 | Manufacturing method for photoelectric cathode for scanning streak tube |
| CN105845528B (en) * | 2016-04-08 | 2017-09-15 | 北方夜视技术股份有限公司 | A kind of photocathode preparation method for being used to scan streak tube |
| CN106298400A (en) * | 2016-08-31 | 2017-01-04 | 山东东仪光电仪器有限公司 | Restriction pumping speed method and device in the manufacture of photomultiplier transit tube cathode |
| CN106504972A (en) * | 2016-09-28 | 2017-03-15 | 北方夜视技术股份有限公司 | The microchannel template photomultiplier tube of high-quantum efficiency, bialkali photocathode and preparation method |
| WO2018058870A1 (en) * | 2016-09-28 | 2018-04-05 | 北方夜视技术股份有限公司 | High-quantum efficiency microchannel plate photomultiplier, and manufacturing device and method therefor |
| CN106409647A (en) * | 2016-12-06 | 2017-02-15 | 北京大学东莞光电研究院 | Ultraviolet cathode ray light source |
| CN107731639A (en) * | 2017-08-25 | 2018-02-23 | 北方夜视技术股份有限公司 | Prepare automatic control equipment, method and the prepared photocathode of photomultiplier transit tube cathode |
| CN107706071A (en) * | 2017-08-25 | 2018-02-16 | 北方夜视技术股份有限公司 | For adjusting the method, apparatus and the preparation method of photomultiplier and photocathode of photomultiplier transit tube cathode preparation process vacuum |
| CN107731639B (en) * | 2017-08-25 | 2018-11-13 | 北方夜视技术股份有限公司 | Prepare the autocontrol method of photomultiplier transit tube cathode |
| CN109755081A (en) * | 2019-01-07 | 2019-05-14 | 北方夜视技术股份有限公司 | Antimony electric current method for automatically regulating for the production of performance alkali metal antimonide photocathode |
| CN109755081B (en) * | 2019-01-07 | 2020-07-17 | 北方夜视技术股份有限公司 | Automatic antimony current regulation and control method for manufacturing high-performance alkali metal antimonide photocathode |
| CN112530768A (en) * | 2020-12-21 | 2021-03-19 | 中国计量大学 | Nano-array photocathode with high quantum efficiency and preparation method thereof |
| CN112530768B (en) * | 2020-12-21 | 2024-02-27 | 中国计量大学 | High quantum efficiency nano array photocathode and preparation method thereof |
| CN114464510A (en) * | 2022-03-14 | 2022-05-10 | 中国科学院空天信息创新研究院 | Photocathode and preparation method thereof |
| CN114464510B (en) * | 2022-03-14 | 2024-03-19 | 中国科学院空天信息创新研究院 | Photocathode and preparation method thereof |
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