CN105127902B - The on-machine measurement method of wheel face microscopic three-dimensional pattern - Google Patents

The on-machine measurement method of wheel face microscopic three-dimensional pattern Download PDF

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CN105127902B
CN105127902B CN201510415852.1A CN201510415852A CN105127902B CN 105127902 B CN105127902 B CN 105127902B CN 201510415852 A CN201510415852 A CN 201510415852A CN 105127902 B CN105127902 B CN 105127902B
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emery wheel
point
measurement
dimensional
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CN105127902A (en
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潘永成
郭兵
冯小天
赵清亮
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Harbin Institute of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The on-machine measurement method of wheel face microscopic three-dimensional pattern, belongs to the measurement apparatus field of grinding.Solve the problems, such as existing Configuration of Grinding-wheel Surface e measurement technology cannot realize on-machine measurement, cannot the complete Configuration of Grinding-wheel Surface of accurate measurement.First, one-dimensional laser displacement sensor is placed on immediately below tested emery wheel, makes the laser beam direction of illumination of one-dimensional laser displacement sensor output vertical with the circumferential surface of tested emery wheel, and intersected vertically with the spindle centerline of tested emery wheel;Tested emery wheel is rotated with the speed of 100rpm, one-dimensional laser displacement sensor is axially translated with the speed of 0.8mm/min between two end faces of tested emery wheel axial direction simultaneously, the data message of collection is passed sequentially through one-dimensional laser displacement sensor into laser micrometer controller and data collecting card delivers to industrial computer in real time, industrial computer is processed the data-signal for receiving, so as to realize the measurement to being tested emery wheel full surface pattern.It is used to measure emery wheel three-dimensional appearance.

Description

The on-machine measurement method of wheel face microscopic three-dimensional pattern
Technical field
The invention belongs to the measurement apparatus field of grinding.
Background technology
Grinding, frequently as the finishing step of Mechanical Product's Machining, is widely used in work because its unique processed edge In industry production, especially for hard brittle material, grinding is currently the only ripe manufacturing process.And emery wheel is used as grinding Instrument, the state of its Abrasive Grain is directly connected to the grinding performance of emery wheel, and the precision and quality to processing part have important shadow Ring.In order to analyze the state of wheel face abrasive particle, the microscopic appearance of wheel face must be just obtained.
The measuring method of current emery wheel appearance mainly includes:
1. the direct imaging observation with SEM and all kinds of light microscopes as representative, this method can be with Intuitively see the form of wheel face abrasive particle, but be only capable of obtaining two dimensional image, it is impossible to which this is heavy to obtain abrasive particle projecting height Information is wanted, and is only capable of observing the region of wheel face very little, it is impossible to which observation evaluation is carried out to whole wheel face.
2. the scanning Reconstruction Method with three coordinate measuring machine, white light interferometer and Laser Scanning Confocal Microscope as representative, this method Configuration of Grinding-wheel Surface can be reconstructed according to the elevation information of each point on wheel face abrasive particle, but because Measurement Resolution is not high And all multiple errors that abrasive particle surface reflective tape comes, the abrasive particle shape that Reconstruction Method is obtained is generally circular cone or spherical, with true abrasive particle It is polyhedron-shaped to greatly differ from each other.And both approaches are both needed to remove emery wheel from lathe, could be surveyed with measuring instrument Amount, it is impossible to on-machine measurement, have impact on processing efficiency.
The content of the invention
The present invention be in order to solve existing Configuration of Grinding-wheel Surface e measurement technology cannot realize on-machine measurement, cannot accurate measurement The problem of complete Configuration of Grinding-wheel Surface, the invention provides a kind of on-machine measurement method of wheel face microscopic three-dimensional pattern.
The on-machine measurement method of wheel face microscopic three-dimensional pattern, the detailed process of the measuring method is:
Step one, one-dimensional laser displacement sensor is placed on immediately below tested emery wheel so that one-dimensional laser displacement sensing The laser beam direction of illumination of device output is vertical with the circumferential surface of tested emery wheel, and phase vertical with the spindle centerline of tested emery wheel Hand over;
Step 2, is tested emery wheel and is rotated with the speed of 100rpm, while one-dimensional laser displacement sensor is in tested grinding wheel spindle To two end faces between it is axially translated with the speed of 0.8mm/min, it is ensured that the laser that one-dimensional laser displacement sensor sends Beam is beaten on the circumferential surface of tested emery wheel all the time,
Under two kinds of superpositions of motion, the laser beam that one-dimensional laser displacement sensor sends is on tested emery wheel circumferential surface Movement locus for spiral yarn shaped, so as to scan the circumferential surface of whole tested emery wheel, one-dimensional laser displacement sensor will be gathered Data message pass sequentially through laser micrometer controller and data collecting card delivers to industrial computer in real time, industrial computer is to receiving Data-signal is processed, so as to realize the measurement to being tested emery wheel full surface pattern.
In described step two, data collecting card uses the sample frequency of 50kHz.
In step 2, described industrial computer is to the detailed process that the data-signal for receiving is processed:
Step A1, industrial computer reconstructs the microscopic three-dimensional pattern of wheel face using the raw measurement data for receiving,
Step A2, the microscopic three-dimensional pattern of the wheel face to reconstructing removes unusual point data, and the data to removing Point carries out reparation completion;
Step A3, the microscopic three-dimensional pattern to the wheel face after removal singular point is removed noise point data.
The microscopic three-dimensional pattern of the wheel face to reconstructing described in step A2 removes unusual point data, and to removal Data point carry out repair completion detailed process be:
Step A21, industrial computer carries out statistical distribution analysis to the raw measurement data for receiving, and obtains cumulative distribution accounting letter Number P (hk),
Wherein, h represents any one measurement point data;
hmaxAnd hminThe maximum and minimum value in all original measurement point datas are represented respectively;
hkIt is in hmaxAnd hminIn the range of arbitrary integer;
N represents the total number of all original measurement point datas,
N(h≤hk) represent less than or equal to hkData point number;
Step A22, given threshold scope, by P (hk) 4% is equal to as minimum threshold, P (hk) 99% is equal to as maximum Threshold value, and will be greater than max-thresholds or less than minimum threshold data point as singular point,
Step A23, by the removal of all singular points,
Step A24, using two-dimensional linear interpolation method, completion is repaired by removed data point.
The microscopic three-dimensional pattern to the wheel face after removal singular point described in step A3 is removed noise points According to detailed process be:
Step A31, for repair singular point after emery wheel microscopic three-dimensional topographic data, calculate each measurement point data and its 8 neighbouring mean differences of measurement pointComputing formula is as follows:
And as i=m, j ≠ n,
Wherein:hzmlnM rows, the measurement point data at the n-th row in data matrix are represented, m and n are positive integer,
hzilj8 measurement point datas being close to the data point are represented,
All measurement points are calculated by step A32Statistical distribution analysis is carried out, cumulative distribution has been taken and is reached At 95%As noise threshold △threshold,
Step A33, each measurement point is calculatedWith noise threshold △thresholdCompare, judge the measurement Whether point is noise spot, and Rule of judgment is as follows:
And will determine that all of noise point data in result is removed,
All removed noise data points, using two-dimensional linear interpolating function, are repaired completion by step A34, and it is right to realize The measurement of tested emery wheel full surface pattern.
The beneficial effect that the present invention brings is,
The present invention uses contactless one-dimensional laser displacement sensor, high precision, and can easily install Onto platen, quick measurement is realized.The topographic data of the whole emery wheel circumferential surface to once measuring is analyzed place After reason, restructural goes out wheel face and takes up an official post what microscopic three-dimensional pattern for zonule, and three-dimensional appearance parameter can be chosen accordingly Quantitative assessment is carried out come the grinding performance to emery wheel, and then underworker judges whether emery wheel needs finishing, improves industrial production Efficiency simultaneously ensures the quality of production.
The present invention takes full advantage of the high-precision motion performance of each axle of lathe, only addition of an one-dimensional laser displacement and passes Sensor just realizes the microscopic three-dimensional topography measurement to whole wheel face.Can reach 0.1 μm of certainty of measurement, and a whole set of survey Amount device is flexible for installation, simple to operate, with stronger practicality.
Brief description of the drawings
During Fig. 1 is specific embodiment one, the principle of the on-machine measurement method of described wheel face microscopic three-dimensional pattern Schematic diagram;
Fig. 2 is the microscopic three-dimensional shape appearance figure of the wheel face that raw measurement data of the industrial computer by receiving is obtained;
Fig. 3 is the microscopic three-dimensional shape appearance figure for removing the wheel face after singular point;
Fig. 4 is the microscopic three-dimensional shape appearance figure that the wheel face after completion is repaired to removed data point;
Fig. 5 is the microscopic three-dimensional shape appearance figure for removing the wheel face after noise spot;
Fig. 6 is the microscopic three-dimensional shape appearance figure that removed noise spot repairs the wheel face after completion.
Specific embodiment
Specific embodiment one:Present embodiment, the wheel face microscopic three-dimensional described in present embodiment are illustrated referring to Fig. 1 The on-machine measurement method of pattern, the detailed process of the measuring method is:
Step one, one-dimensional laser displacement sensor 1 is placed on immediately below tested emery wheel 2 so that one-dimensional laser displacement is passed Sensor 1 output laser beam direction of illumination it is vertical with the circumferential surface of tested emery wheel 2, and with the spindle centerline of tested emery wheel 2 Intersect vertically;
Step 2, is tested emery wheel 2 and is rotated with the speed of 100rpm, while one-dimensional laser displacement sensor 1 is in tested emery wheel 2 It is axially translated with the speed of 0.8mm/min between two end faces of axial direction, it is ensured that what one-dimensional laser displacement sensor 1 sent swashs Light beam is beaten on the circumferential surface of tested emery wheel 2 all the time,
Under two kinds of superpositions of motion, the laser beam that one-dimensional laser displacement sensor 1 sends is in the tested circumferential surface of emery wheel 2 On movement locus for spiral yarn shaped, so as to scan the circumferential surface of whole tested emery wheel 2, one-dimensional laser displacement sensor 1 will The data message of collection passes sequentially through laser micrometer controller 3 and data collecting card 4 delivers to industrial computer 5, industrial computer 5 in real time Data-signal to receiving is processed, so as to realize the measurement to being tested the full surface pattern of emery wheel 2.
Present embodiment, the one-dimensional laser displacement sensor 1 and laser micrometer controller 3 of use are Japan Keyence companies produce, and model is respectively LK-H020 and LK-G5000.
Data collecting card 4 can be using the product of NI companies of the U.S., model PCI 6132.Industrial computer has no special requirements, general The industrial computer of logical type can meet measurement request.
Specific embodiment two:Present embodiment and the wheel face microscopic three-dimensional pattern described in specific embodiment one The difference of on-machine measurement method is, in described step two, data collecting card 4 uses the sample frequency of 50kHz.
In present embodiment, it is to ensure all of measurement point in emery wheel axial direction and circumference to choose such measurement parameter The spacing in direction is equal, about 8 μm.
Specific embodiment three:Present embodiment and the wheel face microscopic three-dimensional pattern described in specific embodiment two The difference of on-machine measurement method is, in step 2, the specific mistake that described 5 pairs of data-signals for receiving of industrial computer are processed Cheng Wei:
Step A1, industrial computer 5 reconstructs the microscopic three-dimensional pattern of wheel face using the raw measurement data for receiving,
Step A2, the microscopic three-dimensional pattern of the wheel face to reconstructing removes unusual point data, and the data to removing Point carries out reparation completion;
Step A3, the microscopic three-dimensional pattern to the wheel face after removal singular point is removed noise point data.
In present embodiment, industrial computer 5 reconstructs the micro- of wheel face using the raw measurement data for receiving in step A1 Three-dimensional appearance is seen, is capable of achieving by existing technology, the process of implementing can be in the following way:
During raw measurement data is stored in industrial computer 5 in the form of the one-dimension array, with grinding wheel speed adopting divided by capture card Sample frequency (Speed unit must be scaled r/s), obtains final product the measurement points that emery wheel is often enclosed, and can be divided into one-dimension array accordingly many Section (points often enclose measurement points equal to emery wheel per segment data), then recombinant is two-dimensional array matrix.Can weight with the matrix Structure goes out the microscopic three-dimensional pattern of wheel face.Each element in the two-dimensional array matrix is the height of wheel face certain point Angle value.
Specific embodiment four:Present embodiment and the wheel face microscopic three-dimensional pattern described in specific embodiment three The difference of on-machine measurement method is that the microscopic three-dimensional pattern removal of the wheel face to reconstructing described in step A2 is unusual Point data, and to remove data point carry out repair completion detailed process be:
Step A21, the raw measurement data of 5 pairs of receptions of industrial computer carries out statistical distribution analysis, obtains cumulative distribution accounting Function P (hk),
Wherein, h represents any one measurement point data;
hmaxAnd hminThe maximum and minimum value in all original measurement point datas are represented respectively;
hkIt is in hmaxAnd hminIn the range of arbitrary integer;
N represents the total number of all original measurement point datas,
N(h≤hk) represent less than or equal to hkData point number;
Step A22, given threshold scope, by P (hk) 4% is equal to as minimum threshold, P (hk) 99% is equal to as maximum Threshold value, and will be greater than max-thresholds or less than minimum threshold data point as singular point,
Step A23, by the removal of all singular points,
Step A24, using two-dimensional linear interpolation method, completion is repaired by removed data point.
In present embodiment, but due to measurement in many uncontrollable factors, measure obtain primary signal in adulterate Some unusual point datas and noise point data, so there are many lofty spikes in the three-dimensional appearance of initial data reconstruct And low ebb, referring specifically to Fig. 2.Need to carry out primary signal two step data treatment, accurate emery wheel microscopic three-dimensional could be obtained Pattern.
Confidence declaration rule according to statistical distribution, often by P<0.05 as small probability event criterion.Consider Minimum singular point is less than to the maximum singular point in three-dimensional appearance data, therefore, by P (hk)=0.4 and P (hk)=0.99 When hkIt is worth as the minimum and maximum threshold value for judging singular point, because the data point total accounting outside the two threshold values is proper It is well 5%, it is believed that be singular point caused by small probability event, the emery wheel three-dimensional appearance figure after removal singular point, specific ginseng See Fig. 3.Removed data point is repaired into completion, referring specifically to Fig. 4.
Specific embodiment five:Present embodiment and the wheel face microscopic three-dimensional pattern described in specific embodiment three The difference of on-machine measurement method is that the microscopic three-dimensional pattern to the wheel face after removal singular point described in step A3 enters Row removal noise point data detailed process be:
Step A31, for repair singular point after emery wheel microscopic three-dimensional topographic data, calculate each measurement point data and its 8 neighbouring mean differences of measurement pointComputing formula is as follows:
And as i=m, j ≠ n,
Wherein:hzmlnM rows, the measurement point data at the n-th row in data matrix are represented, m and n are positive integer,
hzilj8 measurement point datas being close to the data point are represented,
All measurement points are calculated by step A32Statistical distribution analysis is carried out, cumulative distribution has been taken and is reached At 95%As noise threshold △threshold,
Step A33, each measurement point is calculatedWith noise threshold △thresholdCompare, judge the measurement Whether point is noise spot, and Rule of judgment is as follows:
And will determine that all of noise point data in result is removed,
All removed noise data points, using two-dimensional linear interpolating function, are repaired completion by step A34, and it is right to realize The measurement of the tested full surface pattern of emery wheel 2.
In present embodiment, the three-dimensional appearance after removal noise spot, referring specifically to Fig. 5.
Again by two-dimensional linear interpolation method, those removed data points are repaired into completion, obtain repairing noise spot Surface topography afterwards, referring specifically to Fig. 6.The microscopic three-dimensional pattern of measuring method reconstruct, the position of abrasive particle can be found from Fig. 6 Distribution is just the same with truth, and with clearly abrasive particle marginal texture, abrasive particle shape and true shape very close to, it was demonstrated that The validity and accuracy of the measuring method.

Claims (2)

1. the on-machine measurement method of wheel face microscopic three-dimensional pattern, the detailed process of the measuring method is:
Step one, one-dimensional laser displacement sensor (1) is placed on immediately below tested emery wheel (2) so that one-dimensional laser displacement is passed Sensor (1) output laser beam direction of illumination it is vertical with the circumferential surface of tested emery wheel (2), and with the main shaft of tested emery wheel (2) Vertical and intersectant centerline;
Step 2, is tested emery wheel (2) and is rotated with the speed of 100rpm, while one-dimensional laser displacement sensor (1) is in tested emery wheel (2) it is axially translated with the speed of 0.8mm/min between two axial end faces, it is ensured that one-dimensional laser displacement sensor (1) hair The laser beam for going out is beaten on the circumferential surface of tested emery wheel (2) all the time,
Under two kinds of superpositions of motion, the laser beam that one-dimensional laser displacement sensor (1) sends is in tested emery wheel (2) circumferential surface On movement locus for spiral yarn shaped, so as to scan the circumferential surface of whole tested emery wheel (2), one-dimensional laser displacement sensor (1) data message of collection is passed sequentially through into laser micrometer controller (3) and data collecting card (4) delivers to industrial computer in real time (5), industrial computer (5) is processed the data-signal for receiving, so as to realize the survey to being tested emery wheel (2) full surface pattern Amount;
In described step two, data collecting card (4) uses the sample frequency of 50kHz;
In step 2, described industrial computer (5) is to the detailed process that the data-signal for receiving is processed:
Step A1, industrial computer (5) reconstructs the microscopic three-dimensional pattern of wheel face using the raw measurement data for receiving,
Step A2, the microscopic three-dimensional pattern of the wheel face to reconstructing removes unusual point data, and the data click-through to removing Row repairs completion;
Step A3, the microscopic three-dimensional pattern to the wheel face after removal singular point is removed noise point data;
Characterized in that, the microscopic three-dimensional pattern to the wheel face after removal singular point described in step A3 is removed and makes an uproar The detailed process of sound point data is:
Step A31, for repairing the emery wheel microscopic three-dimensional topographic data after singular point, calculates each measurement point data adjacent 8 mean differences of measurement pointComputing formula is as follows:
&Delta; z m l n = &Sigma; &lsqb; | h z m l n - h z i l j | &rsqb; 8 , ( i = m - 1 , m , m + 1 ; j = n - 1 , n , n + 1 ) - - - ( 2 ) ,
And as i=m, j ≠ n,
Wherein:M rows, the measurement point data at the n-th row in data matrix are represented, m and n are positive integer,
8 measurement point datas being close to the data point are represented,
All measurement points are calculated by step A32Statistical distribution analysis is carried out, cumulative distribution has been taken and is reached at 95% 'sAs noise threshold △threshold,
Step A33, each measurement point is calculatedWith noise threshold △thresholdCompare, judge that the measurement point is No is noise spot, and Rule of judgment is as follows:
And will determine that all of noise point data in result is removed,
Step A34, using two-dimensional linear interpolating function, completion is repaired by removed all of noise point data, is realized to quilt Survey the measurement of emery wheel (2) full surface pattern.
2. the on-machine measurement method of wheel face microscopic three-dimensional pattern according to claim 1, it is characterised in that step A2 Described in remove unusual point data to the microscopic three-dimensional pattern of wheel face that reconstructs, and data point to removing is repaiied The detailed process of completion is again:
Step A21, industrial computer (5) carries out statistical distribution analysis to the raw measurement data for receiving, and obtains cumulative distribution accounting letter Number P (hk),
P ( h k ) = N ( h &le; h k ) N , ( h min &le; h k &le; h m a x ) - - - ( 1 ) ,
Wherein, h represents any one measurement point data;
hmaxAnd hminThe maximum and minimum value in all original measurement point datas are represented respectively;
hkIt is in hmaxAnd hminIn the range of arbitrary integer;
N represents the total number of all original measurement point datas,
N(h≤hk) represent less than or equal to hkData point number;
Step A22, given threshold scope, by P (hk) 4% is equal to as minimum threshold, P (hk) 99% is equal to as max-thresholds, And will be greater than max-thresholds or less than minimum threshold data point as singular point,
Step A23, by the removal of all singular points,
Step A24, using two-dimensional linear interpolation method, completion is repaired by removed data point.
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CN106926134B (en) * 2017-03-24 2019-12-17 中国工程物理研究院激光聚变研究中心 in-situ precision measurement method for three-dimensional shape error of aspheric grinding arc diamond grinding wheel
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