CN105115944B - A kind of auto focusing method and system for LIBS material composition detections - Google Patents

A kind of auto focusing method and system for LIBS material composition detections Download PDF

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CN105115944B
CN105115944B CN201510563980.0A CN201510563980A CN105115944B CN 105115944 B CN105115944 B CN 105115944B CN 201510563980 A CN201510563980 A CN 201510563980A CN 105115944 B CN105115944 B CN 105115944B
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focusing
condenser lens
range
distance
sample
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CN105115944A (en
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阳建宏
孟凡星
徐金梧
杨德斌
黎敏
李晓萌
曹康
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University of Science and Technology Beijing USTB
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University of Science and Technology Beijing USTB
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Abstract

The present invention provides a kind of auto focusing method and system for LIBS material composition detections, can obtain stabilization, the spectral signal of high quality.Methods described includes：Selection is thick to focus on reference planes, and sets the focusing range R, spectrum integral wave-length coverage RI, essence of essence focusing to focus on times N；Sample to be tested is loaded, the distance between the reference planes arrived according to displacement sensor and the first condenser lens, adjusts focal position, i.e. distance of the first condenser lens to sample to be tested surface；Times N is focused on according to the focusing range R of setting, spectrum integral scope RI, essence, change focal position according to default step pitch p and carry out spectra collection simultaneously, it is determined that the spectral quality evaluation index collected every time, and focal position corresponding to optimal spectral quality evaluation index is defined as best focus position, complete this automatic focusing.The present invention is applied to atom spectrum detection technique field.

Description

A kind of auto focusing method and system for LIBS material composition detections
Technical field
The present invention relates to atom spectrum detection technique field, particularly relates to a kind of for the automatic of LIBS material composition detections Focus method and system.
Background technology
LIBS (Laser-Induced Breakdown Spectroscopy, LIBS) technology refer to by High energy pulse Laser Focusing excites sample to produce plasma to sample to be tested surface, will during plasma disappearance The discrete spectral Lines for characterizing material composition are produced, the wavelengths representative of wherein spectral line the composition of element contained by material, the intensity of spectral line Represent the content of element contained by material；By analyzing above-mentioned spectrum, it is possible to achieve the detection of material composition and content.
In LIBS application fields, especially there is the prepare liquid of fluctuation to the solid sample to be measured of surface irregularity or surface During body sample (including molten metal) carries out composition detection, the change of laser focus position causes the ripple of spectral intensity It is dynamic, and then influence qualitative and quantitative analysis result.At present in general focus method, the focusing of manual adjustment method needs people Work participates in, and has a larger subjectivity, and real-time is bad；Active automatic focusing based on non-contact distance-measurement, passes through measurement Focusing distance automatically adjusts, and realizes the purpose that focuses on automatically, but its cost and precision influenceed by distance measuring sensor it is very big；Base In the automatic focusing of the passive type of imaging definition, using the definition of imaging as feeding back, focused on automatically, but this method Surface under low contrast, dim light, which is focused on, certain difficulty.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of auto focusing method for LIBS material composition detections and The new side of the two-step focusing of system, " thick to focus on " based on displacement transducer ranging and " essence focuses on " based on spectral quality evaluation Method, the fast automatic focusing of laser when realizing LIBS composition detections, so as to obtain the spectral signal of stabilization, high quality.
In order to solve the above technical problems, the embodiment of the present invention provides a kind of automatic focusing for LIBS material composition detections Method, including：
Selection is thick to focus on reference planes, and sets the focusing range R, spectrum integral wave-length coverage RI, essence of essence focusing to focus on Times N；
Loading sample to be tested, the distance between the reference planes arrived according to displacement sensor and the first condenser lens, Adjust focal position, i.e. distance of the first condenser lens to sample to be tested surface；
Times N is focused on according to the focusing range R of setting, spectrum integral scope RI, essence, changed according to default step pitch p poly- Burnt position carries out spectra collection simultaneously, it is determined that the spectral quality evaluation index collected every time, and optimal spectral quality is evaluated Focal position corresponding to index is defined as best focus position, completes this automatic focusing.
Alternatively, the reference planes and sample to be tested surface relative distance are constant；
Between the distance between the reference planes and the first condenser lens and sample to be tested surface and the first condenser lens It is closely located.
Alternatively, the focusing range R that the essence focuses on refers to the moving range of the first condenser lens in smart focusing；
The focusing range R that the essence focuses on is more than or equal to the precision M of displacement transducer and sample to be tested surface irregularity rises Lie prostrate the greater among height H, i.e. R >=MAX (M, H).
Alternatively, the distance between the reference planes arrived according to displacement sensor and the first condenser lens, adjust Whole focal position includes：
Obtain reference planes and the distance h on sample to be tested surface1；
The distance between the reference planes arrived according to displacement sensor and the first condenser lens H1, adjust H1Make first Distance H of the condenser lens to sample to be tested surface1-h1Equal to the focal length of the first condenser lens；
Wherein, the reference plane of displacement transducer is in same level with the first condenser lens.
Alternatively, spectra collection frequency n=R ÷ p × N.
Alternatively, when the spectrum integral wave-length coverage RI is a range of wavelengths, the spectral quality evaluation index K is integrated for the spectral intensity in the range of wavelengths：
Wherein, λ is wavelength；λ1、λ2For set spectrum integral wave-length coverage RI bound：RI=[λ1,λ2], T (λ) is the spectral intensity of af at wavelength lambda.
Alternatively, when the spectrum integral wave-length coverage RI is the union of multiple range of wavelengths, the spectral quality is commented Valency index integrates for the spectral intensity of multiple range of wavelengths plus and K1：
Wherein, λiRepresent wavelength, n be range of wavelengths quantity, λi1、λi2It is full for the wavelength bound of i-th of range of wavelengths Sufficient spectrum integral wave-length coverageT(λi) it is wavelength XiThe spectral intensity at place.
The embodiment of the present invention also provides a kind of autofocus system for LIBS material composition detections, including：
Initialization unit, for selecting slightly to focus on reference planes, and focusing range R, the spectrum integral ripple for setting essence to focus on Long scope RI, essence focus on times N；
Thick focusing unit, for loading sample to be tested, focused on according to the reference planes that displacement sensor arrives and first The distance between lens, adjust focal position, i.e. distance of the first condenser lens to sample to be tested surface；
Smart focusing unit, times N is focused on for the focusing range R according to setting, spectrum integral scope RI, essence, according to pre- If step pitch p change focal position and carry out spectra collection simultaneously, it is determined that the spectral quality evaluation index collected every time, and will most Focal position corresponding to excellent spectral quality evaluation index is defined as best focus position, completes this automatic focusing.
Alternatively, the thick focusing unit includes：
Acquisition module, for obtaining the distance h of reference planes and sample to be tested surface1；
Adjusting module, for the distance between the reference planes arrived according to displacement sensor and first condenser lens H1, adjust H1Make the first condenser lens to the distance H on sample to be tested surface1-h1Equal to the focal length of the first condenser lens；
Wherein, the reference plane of displacement transducer is in same level with the first condenser lens.
Alternatively, the smart focusing unit includes：
First spectral quality evaluation index determining module, for being a wavelength zone as the spectrum integral wave-length coverage RI Between when, the spectral quality evaluation index be the range of wavelengths in spectral intensity integrate K：
Wherein, λ is wavelength；λ1、λ2For set spectrum integral wave-length coverage RI bound：RI=[λ1,λ2], T (λ) is the spectral intensity of af at wavelength lambda；
Second spectral quality evaluation index determining module, for being multiple wavelength zones as the spectrum integral wave-length coverage RI Between union when, the spectral quality evaluation index for multiple range of wavelengths spectral intensity integrate plus and K1：
Wherein, λiRepresent wavelength, n be range of wavelengths quantity, λi1、λi2It is full for the wavelength bound of i-th of range of wavelengths Sufficient spectrum integral wave-length coverageT(λi) it is wavelength XiThe spectral intensity at place.
The above-mentioned technical proposal of the present invention has the beneficial effect that：
In such scheme, by loading sample to be tested；In the thick focusing based on displacement transducer ranging, according to position The distance between reference planes that displacement sensor measures and the first condenser lens, adjust focal position；Based on spectrum integral Smart focusing in, according to set focusing range R, spectrum integral scope RI, essence focus on times N, according to default step Change focal position away from p and carry out spectra collection simultaneously, it is determined that the spectral quality evaluation index collected every time, and by optimal spectrum Focal position corresponding to quality evaluation index is defined as best focus position, complete this it is automatic focus on, so as to realize LIBS into The fast automatic focusing of laser when go-on-go is surveyed, to obtain stable, high quality spectral signal.
Brief description of the drawings
Fig. 1 is the schematic diagram of the auto focusing method provided in an embodiment of the present invention for LIBS material composition detections；
Fig. 2 is the method flow of the auto focusing method provided in an embodiment of the present invention for LIBS material composition detections Figure；
Fig. 3 is the structural representation of the autofocus system provided in an embodiment of the present invention for LIBS material composition detections Figure.
Embodiment
To make the technical problem to be solved in the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing and tool Body embodiment is described in detail.
Embodiment one
The schematic diagram of the embodiment of the present invention is shown referring to Fig. 1, for example, sample to be tested can be high-temperature molten steel (liquid, table Face has certain fluctuation)；Displacement transducer can be laser displacement sensor, precision M=1mm；(first is poly- by condenser lens B Focus lens) focal length f=300mm；The high energy pulse laser sent by laser reflects through laser mirror, condenser lens B is saturating Sample to be tested (high-temperature molten steel) surface is focused on after penetrating, excites sample to be tested (high-temperature molten steel) to produce plasma, plasma Caused feature light wave line focus lens B, condenser lens A, collimation lens, optical fiber are received by spectrometer during disappearance, are completed The collection of spectral signal.
Referring to shown in Fig. 2, a kind of auto focusing method for LIBS material composition detections provided in an embodiment of the present invention, Including：
S1：Selection is thick to focus on reference planes, and sets the focusing range R, spectrum integral wave-length coverage RI, essence of essence focusing poly- Burnt times N；
S2：Load sample to be tested, between the reference planes arrived according to displacement sensor and the first condenser lens away from From, adjustment focal position, i.e. distance of the first condenser lens to sample to be tested surface；
S3：Times N is focused on according to the focusing range R of setting, spectrum integral scope RI, essence, changed according to default step pitch p Focal position carries out spectra collection simultaneously, it is determined that the spectral quality evaluation index collected every time, and optimal spectral quality is commented Focal position corresponding to valency index is defined as best focus position, completes this automatic focusing.
The auto focusing method for LIBS material composition detections described in the embodiment of the present invention, test sample is treated by loading This；It is poly- with first according to the reference planes that displacement sensor arrives in the thick focusing based on displacement transducer ranging The distance between focus lens, adjust focal position；In the smart focusing based on spectrum integral, according to the focusing model set Enclose R, spectrum integral scope RI, essence and focus on times N, change focal position according to default step pitch p carries out spectra collection simultaneously, really The fixed spectral quality evaluation index collected every time, and focal position corresponding to optimal spectral quality evaluation index is defined as most Excellent focal position, complete this it is automatic focus on, the fast automatic focusing of laser, steady to obtain during so as to realize LIBS composition detections The fixed, spectral signal of high quality.
In the embodiment of the present invention, the sample to be tested can be that the solid sample to be measured of surface irregularity or surface have fluctuation The testing liquid sample of property, can also be other tested samples, in following illustrate sample to be tested using high-temperature molten steel as Example.In automatic focusing, by driving high-precision motor (being not drawn into Fig. 1) adjustment condenser lens B and high-temperature steel in real time The distance on liquid surface so that laser focus position is optimal, so as to obtain the spectral signal of stabilization, high quality.
In the embodiment of the present invention, after completing this automatic focusing, next sample to be tested can be loaded, repeats S2~S3, Fast automatic focusing is carried out to next sample to be tested.
When the embodiment of the present invention is used in LIBS fields, particularly there is fluctuation to the solid sample of surface irregularity or surface Property fluid sample carry out composition detection when, the fluctuation of the spectral intensity caused by the change of laser focus position can be avoided, So as to influence qualitative and quantitative analysis result, accuracy of detection is improved.
The embodiment of the present invention in the application of LIBS material composition detection technologies, for example, molten metals Line detection, mineralogical composition detection, liquid sample composition detection etc., the application of the embodiment of the present invention can obtain more accurate thing Matter composition detection result, and detection efficiency is high, it is real-time.
It is flexibility of the embodiment of the present invention, portable strong, can ground be integrated into other LIBS by writing computer program In material composition detection system, the fast automatic focusing of laser when realizing LIBS composition detections.
It is alternatively, described in the embodiment of auto focusing method of LIBS material composition detections is previously used for Reference planes and sample to be tested surface relative distance are constant；
Between the distance between the reference planes and the first condenser lens and sample to be tested surface and the first condenser lens It is closely located.
In the embodiment of the present invention, institute's displacement sensors can be laser displacement sensor, the effects of reference planes be In the thick focusings of S2, the laser reflection face of laser, the reference planes and high-temperature steel are sent as laser displacement sensor Liquid liquid level relative distance is constant；Reference planes are away from the distance between condenser lens B and high-temperature molten steel liquid level away between condenser lens B It is closely located, objective table upper surface can be selected as a reference plane in the present embodiment, referring to shown in Fig. 1.
It is alternatively, described in the embodiment of auto focusing method of LIBS material composition detections is previously used for The focusing range R that essence focuses on refers to the moving range of the first condenser lens in smart focusing；
The focusing range R that the essence focuses on is more than or equal to the precision M of displacement transducer and sample to be tested surface irregularity rises Lie prostrate the greater among height H, i.e. R >=MAX (M, H).
In the embodiment of the present invention, focusing range R refers to the moving range of condenser lens B in smart focusing, focusing range R More than or equal to the greater among the precision M and high-temperature molten steel liquid fluctuating relief height H of displacement transducer, i.e. R >=MAX (M, H).For example, in the embodiment of the present invention, M=1mm, H ≈ 0.8mm, focusing range R=1mm can be taken；Spectrum integral scope RI takes The all band that spectrometer can be detected, spectrum integral scope RI scope can take [200nm, 980nm]；Essence focuses on times N can To take 1 time.
It is alternatively, described in the embodiment of auto focusing method of LIBS material composition detections is previously used for The distance between the reference planes arrived according to displacement sensor and the first condenser lens, adjustment focal position include：
Obtain reference planes and the distance h on sample to be tested surface1；
The distance between the reference planes arrived according to displacement sensor and the first condenser lens H1, adjust H1Make first Distance H of the condenser lens to sample to be tested surface1-h1Equal to the focal length of the first condenser lens；
Wherein, the reference plane of displacement transducer is in same level with the first condenser lens.
In the embodiment of the present invention, high-temperature molten steel sample is first loaded to objective table, it is thick poly- based on displacement transducer ranging Burnt detailed process includes：Reference planes and the distance h of high-temperature molten steel liquid level1, it is known that displacement transducer reference plane and condenser lens B In same level；By the displacement sensor reference planes and the distance between condenser lens B H1, driving High-precision motor adjusts H1So that distance (H of first condenser lens to sample to be tested surface1-h1) it is equal to condenser lens B Jiao Away from.
In the embodiment of auto focusing method of LIBS material composition detections is previously used for, alternatively, spectrum Times of collection n=R ÷ p × N.
In the embodiment of the present invention, the essence based on spectrum integral, which focuses on detailed process, to be included：According to the focusing model set in S1 Enclose R, spectrum integral scope RI, essence and focus on times N, moved with p=20 μm of motor of step pitch in focusing range R, changed poly- Burnt position；Often change a focal position and carry out a spectra collection, carry out spectra collection frequency n=R ÷ p × N altogether；It is it is determined that every The secondary spectral quality evaluation index collected, spectral quality evaluation index most the superior are considered the light that best focus station acquisition arrives Spectrum, so far this automatic focusing are completed.
In the embodiment of auto focusing method of LIBS material composition detections is previously used for, alternatively, work as institute When to state spectrum integral wave-length coverage RI be a range of wavelengths, the spectral quality evaluation index is the spectrum in the range of wavelengths Intensity integrates K：
Wherein, λ is wavelength；λ1、λ2For set spectrum integral wave-length coverage RI bound：RI=[λ1,λ2], T (λ) is the spectral intensity of af at wavelength lambda.
In the embodiment of the present invention, when spectrum integral wave-length coverage is RI=[200,980], spectral quality evaluation index is Spectral intensity integration K, K in wave-length coverage RI are expressed as formula (1)：
Formula (1)
In formula (1), λ1=200, λ2=980, T (λ) represent the spectral intensity of af at wavelength lambda.
In the embodiment of auto focusing method of LIBS material composition detections is previously used for, alternatively, work as institute When stating the union that spectrum integral wave-length coverage RI is multiple range of wavelengths, the spectral quality evaluation index is multiple range of wavelengths Spectral intensity integration plus and K1：
Wherein, λiRepresent wavelength, n be range of wavelengths quantity, λi1、λi2It is full for the wavelength bound of i-th of range of wavelengths Sufficient spectrum integral wave-length coverageT(λi) it is wavelength XiThe spectral intensity at place.
In the embodiment of the present invention, when the spectrum integral wave-length coverage RI is the union of multiple range of wavelengths, the light Compose quality evaluation index integrates for the spectral intensity of multiple range of wavelengths plus and K1, for example, when the member paid close attention in detection process Element is the nonmetalloid phosphorus in high-temperature molten steel, because nonmetalloid phosphorus characteristic spectrum intensity is weaker, spectrum integral wavelength model The RI all bands that reselection spectrometer not can be detected are enclosed, but select the wavelength model of the spectral peak covering of the characteristic spectral line of P elements Enclose for spectral intensity limit of integration.According to NIST databases, two atomic spectral lines of P elements are selected：λ1=253.56nm, λ2= 930.494nm, wave-length coverage respectively [250.5,256.5], [927.5,933.5] of the covering of its spectral peak, therefore RI=[250.5, 256.5] ∪ [927.5,933.5].
Embodiment two
The present invention also provides a kind of embodiment of the autofocus system for LIBS material composition detections, due to Provided by the present invention for LIBS material composition detections autofocus system and be previously used for LIBS material composition detections from The embodiment of dynamic focus method is corresponding, and the autofocus system for being used for LIBS material composition detections can be by holding Process step in row above method embodiment realizes the purpose of the present invention, therefore above-mentioned is used for LIBS material compositions Explanation in the auto focusing method embodiment of detection, be also applied for provided by the present invention for LIBS materials into The embodiment for the autofocus system that go-on-go is surveyed, it will not be described in great detail in the embodiment below the present invention.
Referring to shown in Fig. 3, the embodiment of the present invention also provides a kind of autofocus system for LIBS material composition detections, Including：
Initialization unit 101, for selecting slightly to focus on reference planes, and focusing range R, the spectrum integral for setting essence to focus on Wave-length coverage RI, essence focus on times N；
Thick focusing unit 102, it is poly- with first according to the reference planes that displacement sensor arrives for loading sample to be tested The distance between focus lens, adjust focal position, i.e. distance of the first condenser lens to sample to be tested surface；
Smart focusing unit 103, times N is focused on for the focusing range R according to setting, spectrum integral scope RI, essence, according to Default step pitch p changes focal position and carries out spectra collection simultaneously, it is determined that the spectral quality evaluation index collected every time, and will Focal position corresponding to optimal spectral quality evaluation index is defined as best focus position, completes this automatic focusing.
The autofocus system for LIBS material composition detections described in the embodiment of the present invention, test sample is treated by loading This；It is poly- with first according to the reference planes that displacement sensor arrives in the thick focusing based on displacement transducer ranging The distance between focus lens, adjust focal position；In the smart focusing based on spectrum integral, according to the focusing model set Enclose R, spectrum integral scope RI, essence and focus on times N, change focal position according to default step pitch p carries out spectra collection simultaneously, really The fixed spectral quality evaluation index collected every time, and focal position corresponding to optimal spectral quality evaluation index is defined as most Excellent focal position, complete this it is automatic focus on, the fast automatic focusing of laser, steady to obtain during so as to realize LIBS composition detections The fixed, spectral signal of high quality.
It is alternatively, described in the embodiment of autofocus system of LIBS material composition detections is previously used for Thick focusing unit includes：
Acquisition module, for obtaining the distance h of reference planes and sample to be tested surface1；
Adjusting module, for the distance between the reference planes arrived according to displacement sensor and first condenser lens H1, adjust H1Make the first condenser lens to the distance H on sample to be tested surface1-h1Equal to the focal length of the first condenser lens；
Wherein, the reference plane of displacement transducer is in same level with the first condenser lens.
It is alternatively, described in the embodiment of autofocus system of LIBS material composition detections is previously used for Smart focusing unit includes：
First spectral quality evaluation index determining module, for being a wavelength zone as the spectrum integral wave-length coverage RI Between when, the spectral quality evaluation index be the range of wavelengths in spectral intensity integrate K：
Wherein, λ is wavelength；λ1、λ2For set spectrum integral wave-length coverage RI bound：RI=[λ1,λ2], T (λ) is the spectral intensity of af at wavelength lambda；
Second spectral quality evaluation index determining module, for being multiple wavelength zones as the spectrum integral wave-length coverage RI Between union when, the spectral quality evaluation index for multiple range of wavelengths spectral intensity integrate plus and K1：
Wherein, λiRepresent wavelength, n be range of wavelengths quantity, λi1、λi2It is full for the wavelength bound of i-th of range of wavelengths Sufficient spectrum integral wave-length coverageT(λi) it is wavelength XiThe spectral intensity at place.
Described above is the preferred embodiment of the present invention, it is noted that for those skilled in the art For, on the premise of principle of the present invention is not departed from, some improvements and modifications can also be made, these improvements and modifications It should be regarded as protection scope of the present invention.

Claims (5)

  1. A kind of 1. auto focusing method for LIBS material composition detections, it is characterised in that including：
    Selection is thick to focus on reference planes, and sets the focusing range R, spectrum integral wave-length coverage RI, essence of essence focusing to focus on number N；
    Load sample to be tested, the distance between the reference planes arrived according to displacement sensor and the first condenser lens, adjustment Focal position, i.e. distance of the first condenser lens to sample to be tested surface；
    Times N is focused on according to the focusing range R of setting, spectrum integral scope RI, essence, changes according to default step pitch p and focuses on position Put while carry out spectra collection, it is determined that the spectral quality evaluation index collected every time, and by optimal spectral quality evaluation index Corresponding focal position is defined as best focus position, completes this automatic focusing；
    Wherein, the distance between the reference planes arrived according to displacement sensor and the first condenser lens, adjustment focus on Position includes：
    Obtain reference planes and the distance h on sample to be tested surface1；
    The distance between the reference planes arrived according to displacement sensor and the first condenser lens H1, adjust H1Make the first focusing Distance H of the lens to sample to be tested surface1-h1Equal to the focal length of the first condenser lens；
    Wherein, the reference plane of displacement transducer is in same level with the first condenser lens；
    Wherein, when the spectrum integral wave-length coverage RI is a range of wavelengths, the spectral quality evaluation index is the ripple Spectral intensity integration K in long section：
    Wherein, λ is wavelength；λ1、λ2For set spectrum integral wave-length coverage RI bound：RI=[λ1,λ2], T (λ) is ripple Spectral intensity at long λ；
    Wherein, when the spectrum integral wave-length coverage RI is the union of multiple range of wavelengths, the spectral quality evaluation index For the spectral intensity integration plus and K of multiple range of wavelengths1：
    Wherein, λiRepresent wavelength, n be range of wavelengths quantity, λi1、λi2For the wavelength bound of i-th of range of wavelengths, meet light Spectral integral wave-length coverageT(λi) it is wavelength XiThe spectral intensity at place.
  2. 2. according to the method for claim 1, it is characterised in that the reference planes and sample to be tested surface relative distance are not Become；
    Between the distance between the reference planes and the first condenser lens and sample to be tested surface and the first condenser lens away from From close.
  3. 3. according to the method for claim 1, it is characterised in that the focusing range R that the essence focuses on refers to smart focusing In the first condenser lens moving range；
    The focusing range R that the essence focuses on is more than or equal to the precision M and sample to be tested surface irregularity fluctuating height of displacement transducer The greater spent among H, i.e. R >=MAX (M, H).
  4. 4. according to the method for claim 1, it is characterised in that spectra collection frequency n=R ÷ p × N.
  5. A kind of 5. autofocus system for LIBS material composition detections, it is characterised in that including：
    Initialization unit, for selecting slightly to focus on reference planes, and focusing range R, the spectrum integral wavelength model for setting essence to focus on Enclose RI, essence focuses on times N；
    Thick focusing unit, for loading sample to be tested, according to the reference planes that displacement sensor arrives and the first condenser lens The distance between, adjust focal position, i.e. distance of the first condenser lens to sample to be tested surface；
    Smart focusing unit, times N is focused on for the focusing range R according to setting, spectrum integral scope RI, essence, according to default Step pitch p changes focal position and carries out spectra collection simultaneously, it is determined that the spectral quality evaluation index collected every time, and by optimal light Focal position corresponding to spectrum quality evaluation index is defined as best focus position, completes this automatic focusing；Wherein,
    The thick focusing unit includes：
    Acquisition module, for obtaining the distance h of reference planes and sample to be tested surface1；
    Adjusting module, for the distance between the reference planes arrived according to displacement sensor and the first condenser lens H1, adjustment H1Make the first condenser lens to the distance H on sample to be tested surface1-h1Equal to the focal length of the first condenser lens；
    Wherein, the reference plane of displacement transducer is in same level with the first condenser lens；
    Wherein, the smart focusing unit includes：
    First spectral quality evaluation index determining module, for being a range of wavelengths as the spectrum integral wave-length coverage RI When, the spectral quality evaluation index is that the spectral intensity in the range of wavelengths integrates K：
    Wherein, λ is wavelength；λ1、λ2For set spectrum integral wave-length coverage RI bound：RI=[λ1,λ2], T (λ) is ripple Spectral intensity at long λ；
    Second spectral quality evaluation index determining module, for being multiple range of wavelengths as the spectrum integral wave-length coverage RI During union, the spectral quality evaluation index integrates for the spectral intensity of multiple range of wavelengths plus and K1：
    Wherein, λiRepresent wavelength, n be range of wavelengths quantity, λi1、λi2For the wavelength bound of i-th of range of wavelengths, meet light Spectral integral wave-length coverageT(λi) it is wavelength XiThe spectral intensity at place.
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