CN105097632A - Support element for supporting substrate and support device - Google Patents
Support element for supporting substrate and support device Download PDFInfo
- Publication number
- CN105097632A CN105097632A CN201510349825.9A CN201510349825A CN105097632A CN 105097632 A CN105097632 A CN 105097632A CN 201510349825 A CN201510349825 A CN 201510349825A CN 105097632 A CN105097632 A CN 105097632A
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- CN
- China
- Prior art keywords
- strutting piece
- temperature sensor
- heater block
- temperature
- wire
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
Abstract
The invention discloses a support element for supporting a substrate and a support device, and aims at solving the problem that when the support element and the substrate, which are different in temperature, contact with each other, Mura is generated at the contact part, so that a finished liquid crystal display is uneven in display. The support element for supporting the substrate comprises a body with a hollow structure, a temperature sensor, a heating component, a heat-conducting liquid, a first lead and a second lead, wherein the temperature sensor, the heating component and the heat-conducting liquid are arranged in the hollow structure of the body; the first lead is connected to the temperature sensor; the second lead is connected to the heating component; the temperature sensor is attached to the inner wall of the body and is used for sensing the temperature data of the body; the heating component is used for providing heat energy for the heat-conducting liquid; the heating component and the heat-conducting liquid are insulated with each other; the heat-conducting liquid is used for transferring the heat energy provided by the heating component to the body; the first lead and the second lead extend outside the body from the hollow structure of the body; the first lead is used for transmitting the temperature data sensed by the temperature sensor; and the second lead is used for supplying electricity to the heating component.
Description
Technical field
The present invention relates to substrate preparing technical field, particularly relate to a kind of strutting piece and bracing or strutting arrangement of supporting substrate.
Background technology
In liquid crystal display (LiquidCrystalDisplay, LCD) preparation is produced, have multiple technique techniques such as (such as anneal) bakings and substrate is heated up or temperature control, with good filming or eliminate stress.In this this technique, need substrate to be placed on strutting piece to be supported substrate by strutting piece.
Substrate support used on current production line is that the uncontrollable solid material of temperature is made, when strutting piece and substrate contacts, the temperature of strutting piece is usually less than the temperature of substrate, therefore strutting piece can by the heat in heat trnasfer absorptive substrate, thus cause the film quality of the contact position of substrate and strutting piece poor, there is Mura phenomenon, thus cause the liquid crystal display after finished product to show uneven problem.
Summary of the invention
The object of this invention is to provide a kind of strutting piece and bracing or strutting arrangement of supporting substrate, when contacting with the strutting piece and substrate that solve the difference with temperature, produce Mura in contact position, thus cause the liquid crystal display after finished product to show uneven problem.
The object of the invention is to be achieved through the following technical solutions:
The embodiment of the present invention provides a kind of strutting piece of supporting substrate, comprise the body of hollow structure, temperature sensor, heater block and the heat-conducting liquid be arranged in the hollow structure of described body, and the first wire be connected with described temperature sensor and the second wire be connected with described heater block;
Described temperature sensor is attached at the inwall of described body, for responding to the temperature data of described body;
Described heater block is surrounded by described heat-conducting liquid, for providing heat energy to described heat-conducting liquid; Wherein, described heater block and described heat-conducting liquid insulated from each other;
The thermal energy conduction that described heat-conducting liquid is used for described heater block to provide is to described body;
Described first wire and described second wire, extend in hollow structure by described body outside described body, the temperature data that described first wire senses for transmitting described temperature sensor, described second wire is used for powering for described heater block, makes described heater block provide heat energy.
In the present embodiment, by arranging heater block and temperature sensor in strutting piece inside, enable strutting piece detect environment temperature and realize temperature to regulate, the temperature of strutting piece is enable to reach consistent with the temperature of substrate, thus avoid the temperature contrast of the local of the contact position due to substrate and strutting piece to make contact position produce Mura phenomenon, liquid crystal display after finished product is shown evenly, improves yields.
Preferably, described body is column, and the top of column is circular cone, part sphere or polygonal pyramid.In the present embodiment, top and the substrate contacts area of described body are less, can reduce the impact on substrate.
Preferably, described temperature sensor is at least two, is positioned at the top end of hollow structure near described strutting piece of described body.Originally execute in example, at least two described temperature sensor detected temperatures, can improve the accuracy of detection.
Preferably, temperature sensor described in each on the inwall of described body with the axis of described body for symmetry axis is symmetrical, and temperature sensor described in each is positioned on the same cross section of described body.
Preferably, described temperature sensor is thermistor or temperature probe.
Preferably, described heater block is arranged at the interior end near described strutting piece of hollow structure of described body.
Preferably, described heat-conducting liquid is conduction oil or water.
Preferably, the material of described body is ceramic material or metal material.
Embodiment of the present invention beneficial effect is as follows: by arranging heater block and temperature sensor in strutting piece inside, enable strutting piece detect environment temperature and realize temperature to regulate, the temperature of strutting piece is enable to reach consistent with the temperature of substrate, thus avoid the temperature contrast of the local of the contact position due to substrate and strutting piece to make contact position produce Mura phenomenon, liquid crystal display after finished product is shown evenly, improves rate of finished products.
The embodiment of the present invention also provides a kind of bracing or strutting arrangement of supporting substrate, comprises the strutting piece that multiple as above embodiment provides; Also comprise control chip, described first wire and described second wire of strutting piece described in each are all electrically connected with described control chip;
Described control chip is used for the temperature data being obtained the detection of described temperature sensor by described first wire, and when the temperature value that described temperature data characterizes is less than defined threshold, be that described heater block is powered by described second wire, control described heater block and heat energy is provided.
Embodiment of the present invention beneficial effect is as follows: by arranging heater block and temperature sensor in strutting piece inside, enable strutting piece detect environment temperature and realize temperature to regulate, the temperature of strutting piece is enable to reach consistent with the temperature of substrate, thus avoid the temperature contrast of the local of the contact position due to substrate and strutting piece to make contact position produce Mura phenomenon, liquid crystal display after finished product is shown evenly, improves rate of finished products.
Accompanying drawing explanation
Fig. 1 is the structural representation of the first strutting piece that the embodiment of the present invention provides;
Fig. 2 is the structural representation of the second strutting piece that the embodiment of the present invention provides;
Fig. 3 is the structural representation of the bracing or strutting arrangement that the embodiment of the present invention provides.
Embodiment
Be described in detail below in conjunction with the implementation procedure of Figure of description to the embodiment of the present invention.It should be noted that same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Being exemplary below by the embodiment be described with reference to the drawings, only for explaining the present invention, and can not limitation of the present invention being interpreted as.Simultaneously, in describing the invention, orientation or the position relationship of the instruction such as term " top ", " bottom " " top ", " below " are based on orientation shown in the drawings or position relationship, be only the present invention for convenience of description instead of require that the present invention with specific azimuth configuration and operation, therefore must can not be interpreted as limitation of the present invention.
As shown in Figure 1, the embodiment of the present invention provides a kind of strutting piece 10 of supporting substrate, comprise the body 1 of hollow structure, the temperature sensor 2 be arranged in the hollow structure of body 1, heater block 3 and heat-conducting liquid 4, and the second wire 6 being connected the first wire 5 with temperature sensor 2 and being connected with heater block 3;
Temperature sensor 2 is attached at the inwall of body 1, for responding to the temperature data of body 1;
Heater block 3 is surrounded by heat-conducting liquid 4, for providing heat energy to heat-conducting liquid 4; Wherein, heater block 3 and heat-conducting liquid 4 insulated from each other;
Heat-conducting liquid 4 for thermal energy conduction that heater block 3 is provided to body 1.
First wire 5 and the second wire 6, extends to outside body 1, the temperature data that the first wire 5 senses for transmitting temperature sensor 2 in the hollow structure by body 1, the second wire 6, for powering for heater block 3, makes heater block 3 provide heat energy.
In the present embodiment, by arranging heater block 3 and temperature sensor 2 in strutting piece 10 inside, make strutting piece 10 detect environment temperature and realize temperature to regulate, the temperature of strutting piece 10 is enable to reach consistent with the temperature of substrate, thus avoid the temperature contrast of the local of the contact position due to substrate and strutting piece 10 to make contact position produce Mura phenomenon, liquid crystal display after finished product is shown evenly, improves yields.
When supporting to make strutting piece 10 pairs of substrates, reducing the impact on substrate, the contact area of the top of the body 1 of strutting piece 10 and substrate can be made as far as possible less, therefore, preferably, body 1 is column, and the top of column is circular cone, part sphere or polygonal pyramid.In the present embodiment, top and the substrate contacts area of body 1 are less, can reduce the impact on substrate.
Certainly, the top of body 1 can slightly larger than its column, such as, shown in Fig. 1.Or the upright projection that the top of body 1 is passable will be thinner than within the scope of the upright projection of column completely, and as shown in Figure 2, the Reference numeral in Fig. 2 is identical with Fig. 1 implication, does not repeat them here.
Can arrange an one, two, three or more temperature sensor 2 in the hollow structure of body 1, in order to make the temperature of detection more accurate, preferably, temperature sensor 2 is at least two.Meanwhile, the hollow structure that temperature sensor 2 can be made to be positioned at body 1 near the top end of strutting piece 10, to make the temperature that detects closer to the temperature for the position with substrate contacts place of strutting piece 10.Certainly, due to the individual difference of each temperature sensor 2, the temperature that each temperature sensor 2 possible detects has less difference, can average in follow-up process or adopt other algorithm to be optimized, make temperature around the result that obtains and actual strutting piece 10 closer to, concrete does not repeat them here the process of the temperature that each temperature sensor 2 detects.
Same based on making detected temperatures thought more accurately, each temperature sensor 2 can on the inwall of body 1 with the axis of body 1 for symmetry axis is symmetrical, and each temperature sensor 2 is positioned on the same cross section of body 1, this also means that each temperature sensor 2 all detects the temperature of the different parts of body 1, avoids multiple temperature sensor 2 to concentrate on a position and makes the inaccurate problem of testing result.
Temperature sensor 2 can be polytype, and such as, temperature sensor 2 is thermistor; Again such as, temperature sensor 2 is temperature probe.
Slightly different with the position set by temperature sensor 2, heater block 3 is preferably disposed on the interior end near strutting piece 10 of hollow structure of body 1.There is following consideration the end that heater block 3 is arranged at strutting piece 10: first, and heater block 3 is easy to arrange, and is easy to draw wire; Secondly, if temperature sensor 2 and heater block 3 are too near, the temperature that temperature sensor 2 can be made to detect is inaccurate, and therefore, heater block 3 separates with temperature sensor 2, avoids temperature sensor 2 by the impact of heater block 3.Meanwhile, also comprise the second wire 6, second wire 6 be electrically connected with heater block 3 and extend to outside body 1.
Heat-conducting liquid 4 selects conduction oil or water usually, and heat-conducting liquid 4 needs to surround heater block 3 completely simultaneously, and the heat energy produced to enable heater block 3 is fully conducted.Body 1 can adopt ceramic material or metal material preparation, and preferably with stainless steel preparation, stainless steel material has good intensity and corrosion resistance.
Embodiment of the present invention beneficial effect is as follows: by arranging heater block and temperature sensor in strutting piece inside, enable strutting piece detect environment temperature and realize temperature to regulate, the temperature of strutting piece is enable to reach consistent with the temperature of substrate, thus avoid the temperature contrast of the local of the contact position due to substrate and strutting piece to make contact position produce Mura phenomenon, liquid crystal display after finished product is shown evenly, improves rate of finished products.
See Fig. 3, the embodiment of the present invention also provides a kind of bracing or strutting arrangement 20 of supporting substrate, comprises the strutting piece 10 that multiple as above embodiment provides, and each strutting piece 10 is arranged on platform 21; Also comprise control chip 11, the first wire 5 of each strutting piece 10 and the second wire 6 are all electrically connected with control chip 11;
The temperature data that control chip 11 is detected for being obtained temperature sensor 2 by the first wire 5, and when the temperature value that temperature data characterizes is less than defined threshold, powered for heater block 3 by the second wire 6, control heater block 3 and provide heat energy, temperature sensor 2 and heater block 3 please refer to shown in Fig. 1 and Fig. 2.
Substrate 30 is positioned on each strutting piece 10, because the temperature sensor 2 in strutting piece 10 can detect the temperature around strutting piece, and the temperature detected by control chip 11 pairs of temperature sensors 2 processes, control chip 11 controls heater block 3 again to carry out heating or not heating, and makes the temperature of the body 1 of strutting piece 10 suitable with substrate 30 temperature.
Embodiment of the present invention beneficial effect is as follows: by arranging heater block and temperature sensor in strutting piece inside, enable strutting piece detect environment temperature and realize temperature to regulate, the temperature of strutting piece is enable to reach consistent with the temperature of substrate, thus avoid the temperature contrast of the local of the contact position due to substrate and strutting piece to make contact position produce Mura phenomenon, liquid crystal display after finished product is shown evenly, improves rate of finished products.
Obviously, those skilled in the art can carry out various change and modification to the present invention and not depart from the spirit and scope of the present invention.Like this, if these amendments of the present invention and modification belong within the scope of the claims in the present invention and equivalent technologies thereof, then the present invention is also intended to comprise these change and modification.
Claims (9)
1. the strutting piece of a supporting substrate, it is characterized in that, comprise the body of hollow structure, temperature sensor, heater block and the heat-conducting liquid be arranged in the hollow structure of described body, and the first wire be connected with described temperature sensor and the second wire be connected with described heater block;
Described temperature sensor is attached at the inwall of described body, for responding to the temperature data of described body;
Described heater block is surrounded by described heat-conducting liquid, for providing heat energy to described heat-conducting liquid; Wherein, described heater block and described heat-conducting liquid insulated from each other;
The thermal energy conduction that described heat-conducting liquid is used for described heater block to provide is to described body;
Described first wire and described second wire, extend in hollow structure by described body outside described body, the temperature data that described first wire senses for transmitting described temperature sensor, described second wire is used for powering for described heater block, makes described heater block provide heat energy.
2. strutting piece as claimed in claim 1, it is characterized in that, described body is column, and the top of column is circular cone, part sphere or polygonal pyramid.
3. strutting piece as claimed in claim 2, it is characterized in that, described temperature sensor is at least two, is positioned at the top end of hollow structure near described strutting piece of described body.
4. strutting piece as claimed in claim 3, is characterized in that, temperature sensor described in each on the inwall of described body with the axis of described body for symmetry axis is symmetrical, and temperature sensor described in each is positioned on the same cross section of described body.
5. strutting piece as claimed in claim 3, it is characterized in that, described temperature sensor is thermistor or temperature probe.
6. the strutting piece as described in any one of claim 1 to 5, is characterized in that, described heater block is arranged at the interior end near described strutting piece of hollow structure of described body.
7. the strutting piece as described in any one of claim 1 to 5, is characterized in that, described heat-conducting liquid is conduction oil or water.
8. the strutting piece as described in any one of claim 1 to 5, is characterized in that, the material of described body is ceramic material or metal material.
9. a bracing or strutting arrangement for supporting substrate, is characterized in that, comprises multiple strutting piece as described in any one of claim 1 to 8; Also comprise control chip, described first wire and described second wire of strutting piece described in each are all electrically connected with described control chip;
Described control chip is used for the temperature data being obtained the detection of described temperature sensor by described first wire, and when the temperature value that described temperature data characterizes is less than defined threshold, be that described heater block is powered by described second wire, control described heater block and heat energy is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510349825.9A CN105097632B (en) | 2015-06-23 | 2015-06-23 | A kind of support element and support device of supporting substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510349825.9A CN105097632B (en) | 2015-06-23 | 2015-06-23 | A kind of support element and support device of supporting substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105097632A true CN105097632A (en) | 2015-11-25 |
| CN105097632B CN105097632B (en) | 2018-07-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510349825.9A Expired - Fee Related CN105097632B (en) | 2015-06-23 | 2015-06-23 | A kind of support element and support device of supporting substrate |
Country Status (1)
| Country | Link |
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| CN (1) | CN105097632B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106643160A (en) * | 2016-12-26 | 2017-05-10 | 广东长盈精密技术有限公司 | Heating device and heating jig thereof |
| CN114454628A (en) * | 2022-01-28 | 2022-05-10 | Tcl华星光电技术有限公司 | Vacuum drying device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101207945A (en) * | 2006-12-15 | 2008-06-25 | 日本碍子株式会社 | Heating device |
| CN201208442Y (en) * | 2008-04-24 | 2009-03-18 | 安徽医学高等专科学校 | Multifunctional transfusion box |
| WO2012169688A1 (en) * | 2011-06-07 | 2012-12-13 | 주식회사 고산 | Heat exchanger also used as vaporizer/condenser |
| CN202870433U (en) * | 2012-11-12 | 2013-04-10 | 京东方科技集团股份有限公司 | Base plate support structure |
| CN103309090A (en) * | 2013-06-20 | 2013-09-18 | 深圳市华星光电技术有限公司 | Device and method for supporting substrate in ultraviolet curing |
-
2015
- 2015-06-23 CN CN201510349825.9A patent/CN105097632B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101207945A (en) * | 2006-12-15 | 2008-06-25 | 日本碍子株式会社 | Heating device |
| CN201208442Y (en) * | 2008-04-24 | 2009-03-18 | 安徽医学高等专科学校 | Multifunctional transfusion box |
| WO2012169688A1 (en) * | 2011-06-07 | 2012-12-13 | 주식회사 고산 | Heat exchanger also used as vaporizer/condenser |
| CN202870433U (en) * | 2012-11-12 | 2013-04-10 | 京东方科技集团股份有限公司 | Base plate support structure |
| CN103309090A (en) * | 2013-06-20 | 2013-09-18 | 深圳市华星光电技术有限公司 | Device and method for supporting substrate in ultraviolet curing |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106643160A (en) * | 2016-12-26 | 2017-05-10 | 广东长盈精密技术有限公司 | Heating device and heating jig thereof |
| CN106643160B (en) * | 2016-12-26 | 2024-01-19 | 常州金品精密技术有限公司 | Heating device and heating jig thereof |
| CN114454628A (en) * | 2022-01-28 | 2022-05-10 | Tcl华星光电技术有限公司 | Vacuum drying device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105097632B (en) | 2018-07-17 |
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Granted publication date: 20180717 |