CN105067160B - Pliable pressure sensor based on graphene oxide sponge - Google Patents
Pliable pressure sensor based on graphene oxide sponge Download PDFInfo
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- CN105067160B CN105067160B CN201510439412.XA CN201510439412A CN105067160B CN 105067160 B CN105067160 B CN 105067160B CN 201510439412 A CN201510439412 A CN 201510439412A CN 105067160 B CN105067160 B CN 105067160B
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Abstract
The invention discloses a kind of pliable pressure sensor based on graphene oxide sponge and preparation method thereof, it includes flexible substrates, Graphene electrodes, graphene oxide sponge dielectric layer, the Graphene electrodes are deposited on the lateral surface of the flexible substrates by way of spraying, pass through mask formation strip electrod-array；The flexible substrates are two panels, and the graphene oxide sponge dielectric layer is arranged between the medial surface of two panels flexible substrates.The pliable pressure sensor based on graphene oxide sponge of the present invention has flexible, sensitivity height, and the response time, spatial resolving power was high, the good advantage of stability soon.
Description
Technical field
Passed the invention belongs to flexible electronic device field, more particularly to a kind of pliable pressure based on graphene oxide sponge
Sensor and preparation method thereof.
Background technology
In recent years, the development of microelectronic starts to focus in flexible electronic field, and numerous flexible electronic devices are applied
Wireless health monitors (Mannoor, M.S.et al.Graphene-based wireless bacteria detection on
tooth enamel.Nat.Commun.3:763doi:10.1038/ncomms1767), sensor network (Zeng, W.et
al.Fiber-based wearable electronics:A review of materials,fabrication,
Devices, and applications.Adv. Mater.26,5310-5336), electronic skin (Kim, D.H.et
Al.Epidermal Electronics. Science 333,838-843), artificial-muscle (Hu, W.L., Niu, X.F.,
Zhao,R.&Pei,Q.B. Elastomeric transparent capacitive sensors based on an
interpenetrating composite of silver nanowires and
The field such as polyurethane.Appl.Phys.Lett.102,083303).In such applications, electronic skin will can be permitted
The physical quantity that many natural skins can be experienced, such as pressure, temperature, humidity etc. are converted to electric signal, therefore electronic skin is universal
Think with great application potential and cause great research enthusiasm.In numerous parameters that electronic skin can be perceived, pressure
Power is an extremely important physical quantity.And based on capacitive pressure sensor, it is low in energy consumption because it is simple to manufacture, turn into
Realize a pressure sensing significant design direction.And the dielectric layer in capacitance type sensor is the key for realizing sensing capabilities
Position.Graphene oxide is due to its high dielectric coefficient (104, 0.1~70Hz, Liu, J.Galpaya, D.Notarianni,
M.Yan,C.&Motta,N. Graphene-based thin film supercapacitor with graphene oxide
As dielectric spacer.Appl.Phys.Lett.103,063108), and the graphene oxide sponge of foam-like has ratio
Relatively low Young's modulus, this just causes the sensor based on graphene oxide sponge, even if under tangible smaller ambient pressure,
Also the corresponding of the considerable electric capacity of comparison is had.Graphene oxide sponge is enabled to turn into a kind of flexible capacitance type based on these characteristics
The dielectric layer of sensor.Therefore the pliable pressure sensor based on graphene oxide sponge, just can possess excellent sensitivities
Energy.
The content of the invention
It is an object of the invention to provide a kind of pliable pressure sensor based on graphene oxide sponge, the pliable pressure is passed
Sensor is flexible, and sensitivity is high, and the response time is fast, and spatial resolving power is high, and stability is high.
To achieve the above object, the present invention uses following technical scheme：
A kind of pliable pressure sensor based on graphene oxide sponge, including flexible substrates, Graphene electrodes, oxidation stone
Black alkene sponge dielectric layer, the Graphene electrodes are deposited on the lateral surface of the flexible substrates by way of spraying, by covering
Film formation strip electrod-array；The flexible substrates are two panels, and it is soft that the graphene oxide sponge dielectric layer is arranged on two panels
Between the medial surface of property substrate.
It is preferred that, the material of the flexible substrates is polyethylene terephthalate, dimethyl silicone polymer, polyamides Asia
One of amine, Parylene.
It is preferred that, the thickness of the Graphene electrodes is 10~60 μm.
It is preferred that, the width of the Graphene electrodes is 6~10mm.
It is preferred that, the spacing of the two neighboring Graphene electrodes is 6~10mm.
It is a further object to provide a kind of above-mentioned pliable pressure sensor based on graphene oxide sponge
Preparation method, its technical scheme is as follows：
A kind of preparation method of the pliable pressure sensor based on graphene oxide sponge, comprises the following steps：
S1, configuration graphene oxide alcohol dispersion liquid；
S2, the graphene oxide alcohol dispersion liquid is sprayed in the flexible substrates of strip shaped electric poles mask plate bar is made
Shape graphene oxide electrode；
S3, the graphene oxide electrode prepared by step S2 reduced with aqueous solution of hydrogen iodide；
S4, configuration graphene oxide water solution, and graphene oxide water solution is covered in flexible stone with the mode of drop coating
On black alkene electrode, freezing is then freeze-dried, and graphene oxide sponge dielectric layer is made；
S5, obtained graphene oxide sponge dielectric layer is clipped in two panels have strip Graphene electrodes flexible substrates it
Between, and be packaged with PDMS in surrounding.
It is preferred that, in step S1, the concentration of the graphene oxide alcohol dispersion liquid is 0.5mg/ml.
It is preferred that, in step S3, the mass fraction of the aqueous solution of hydrogen iodide is 35%, and the recovery time is 1~3h.
It is preferred that, in step S4, the graphene oxide water solution concentration is 1~10mg/ml.
It is preferred that, in step S4, the cryogenic temperature is -40 DEG C~-70 DEG C.
The beneficial effects of the invention are as follows：
The present invention compared with prior art, with advantages below：
Pliable pressure sensor prepared by the present invention, there is higher sensitivity than traditional polymer sensor, can feel
By the static pressure smaller than in former device.The present invention is using graphene oxide as dielectric layer, and its dielectric coefficient is higher than
The dielectric coefficient of conventional polymeric materials, can be by adjusting the graphene oxide sponge as dielectric layer in preparation process
Density, so as to adjust the Young's modulus of dielectric layer so that this pliable pressure sensor can perceive small static pressure, simultaneously
Pliable pressure sensor prepared by the present invention also has the response time fast, and spatial resolving power is high, the good advantage of stability.
Brief description of the drawings
Fig. 1 is the schematic diagram of graphene oxide sponge pliable pressure sensor.
Fig. 2 is the SEM figures of graphene oxide sponge dielectric layer.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings.
It is as shown in Figure 1 the pliable pressure sensor based on graphene oxide sponge, including flexible substrates, graphene electricity
Pole, graphene oxide sponge dielectric layer, Graphene electrodes are deposited on the lateral surface of flexible substrates by way of spraying, by covering
Film formation strip electrod-array；Flexible substrates are two panels, and graphene oxide sponge dielectric layer is arranged on two panels flexible substrates
Between medial surface.
The material of flexible substrates is polyethylene terephthalate (PET), dimethyl silicone polymer (PDMS), polyamides
One of imines (PI), Parylene (PA).
The thickness of Graphene electrodes is 10~60 μm, and width is 6~10mm；Between between the two neighboring Graphene electrodes
Away from for 6~10mm.
The method that the present invention prepares mm-scale graphene ball, comprises the following steps：
1g graphite oxide powder is added in 100ml deionized waters first, ultrasonic machine ultrasound of the power for 40w is used
It is dispersed into 10mg/ml sticky dispersion liquid.Various concentrations can be made by the proportioning for adjusting graphite oxide and deionized water
Dispersion liquid (1mg/ml, 2mg/ml, 3mg/ml, 4mg/ml, 5mg/ml, 6mg/ml, 7mg/ml, 8mg/ml, 9mg/ml).Simultaneously
Configure 0.5mg/ml graphene oxide alcohol dispersion liquid；
The alcohol dispersion liquid is sprayed in the flexible substrates of strip shaped electric poles mask plate again strip graphite oxide is made
Alkene electrode.
Above-mentioned prepared graphene oxide electrode is reduced with the aqueous solution of hydrogen iodide of mass fraction 35%, during reduction
Between 1~3h；
Then by the graphene oxide water solution configured, it is covered in the way of drop coating on Flexible graphene electrode ,-
Freezed, be then freeze-dried at 40 DEG C~-70 DEG C, graphene oxide sponge dielectric layer is made.
Finally obtained graphene oxide sponge holder is used in combination between two panels there are strip Graphene electrodes flexible substrates
PDMS is packaged in surrounding.
The present invention is further elaborated with below by embodiment.
Embodiment 1
The first step, takes 0.5mg/ml graphene oxide alcohol dispersion liquid 100ml, by these dispersion liquid spray guns in covering
Sprayed on the PET for strip mask plate, prepare graphene oxide strip shaped electric poles.
Second step, the strip graphene oxide electrode of above-mentioned preparation is carried out with mass fraction for 35% iodate hydrogen solution
Reduction, the recovery time is 1~3h, and conductive Graphene electrodes are made.
3rd step, then by the graphene oxide water solution configured, drop coating is on Flexible graphene electrode, at -40 DEG C
It is lower to be freezed, then it is freeze-dried, graphene oxide sponge dielectric layer is made.
4th step, obtained graphene oxide sponge dielectric layer is clipped in into two panels the PET substrate of strip Graphene electrodes
Between, and be packaged with PDMS in surrounding.
Embodiment 2
The basic be the same as Example 1 of preparation method, difference is：Using 9mg/ml dispersion liquid, obtained graphite oxide
The surface texture of alkene sponge is similar to Fig. 2.
Embodiment 3
The basic be the same as Example 1 of preparation method, difference is：The concentration of dispersion liquid is used for 8mg/ml, obtained oxygen
The surface texture of graphite alkene sponge is similar to Fig. 2.
Embodiment 4
The basic be the same as Example 1 of preparation method, difference is：The concentration of dispersion liquid is used for 7mg/ml, obtained oxygen
The surface texture of graphite alkene sponge is similar to Fig. 2.
Embodiment 5
The basic be the same as Example 1 of preparation method, difference is：The concentration of dispersion liquid is used for 6mg/ml, obtained oxygen
The surface texture of graphite alkene sponge is similar to Fig. 2.
Embodiment 6
The basic be the same as Example 1 of preparation method, difference is：The concentration of dispersion liquid is used for 5mg/ml, obtained oxygen
The surface texture of graphite alkene sponge is similar to Fig. 2.
Embodiment 7
The basic be the same as Example 1 of preparation method, difference is：The concentration of dispersion liquid is used for 4mg/ml, obtained oxygen
The surface texture of graphite alkene sponge is similar to Fig. 2.
Embodiment 8
The basic be the same as Example 1 of preparation method, difference is：The concentration of dispersion liquid is used for 3mg/ml, obtained oxygen
The surface texture of graphite alkene sponge is similar to Fig. 2.
Embodiment 9
The basic be the same as Example 1 of preparation method, difference is：The concentration of dispersion liquid is used for 2mg/ml, obtained oxygen
The surface texture of graphite alkene sponge is similar to Fig. 2.
Embodiment 10
The basic be the same as Example 1 of preparation method, difference is：The concentration of dispersion liquid is used for 1mg/ml, obtained oxygen
The surface texture of graphite alkene sponge is similar to Fig. 2.
Embodiment 11
The basic be the same as Example 1 of preparation method, difference is：Cryogenic temperature used is -50 DEG C, obtained oxidation stone
The microscopic surface texture of black alkene sponge is similar to Fig. 2.
Embodiment 12
The basic be the same as Example 1 of preparation method, difference is：Cryogenic temperature used is -60 DEG C, obtained oxidation stone
The microscopic surface texture of black alkene sponge is similar to Fig. 2.
Embodiment 13
The basic be the same as Example 1 of preparation method, difference is：Cryogenic temperature used is -70 DEG C, obtained oxidation stone
The microscopic surface texture of black alkene sponge is similar to Fig. 2.
Embodiment 14
The basic be the same as Example 1 of preparation method, difference is：The flexible substrates used are PDMS.
Embodiment 15
The basic be the same as Example 1 of preparation method, difference is：The flexible substrates used are PI.
Embodiment 16
The basic be the same as Example 1 of preparation method, difference is：The flexible substrates used are PA.
Described above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (5)
1. a kind of pliable pressure sensor based on graphene oxide sponge, it is characterised in that：Including flexible substrates, graphene electricity
Pole, graphene oxide sponge dielectric layer, the Graphene electrodes are deposited on the outside of the flexible substrates by way of spraying
Face, passes through mask formation strip electrod-array；The flexible substrates are two panels, and the graphene oxide sponge dielectric layer is set
Between the medial surface of two panels flexible substrates.
2. the pliable pressure sensor as claimed in claim 1 based on graphene oxide sponge, it is characterised in that：The flexibility
The material of substrate be polyethylene terephthalate, dimethyl silicone polymer, polyimides, Parylene wherein it
One.
3. the pliable pressure sensor as claimed in claim 1 based on graphene oxide sponge, it is characterised in that：The graphite
The thickness of alkene electrode is 10~60 μm.
4. the pliable pressure sensor based on graphene oxide sponge as described in claim 1 or 3, it is characterised in that：It is described
The width of Graphene electrodes is 6~10mm.
5. the pliable pressure sensor as claimed in claim 1 based on graphene oxide sponge, it is characterised in that：It is two neighboring
The spacing of the Graphene electrodes is 6~10mm.
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| EP1211633B1 (en) * | 2000-11-28 | 2004-06-09 | STMicroelectronics S.r.l. | Texile-like capacitive pressure sensor and method of mapping the pressure exerted at points of a surface of a flexible and pliable object, particularly of a sail |
| JP4143653B2 (en) * | 2006-05-24 | 2008-09-03 | オムロン株式会社 | Array type capacitive sensor |
| JP5432207B2 (en) * | 2011-04-19 | 2014-03-05 | 東海ゴム工業株式会社 | Capacitive sensor device |
| CN102998035A (en) * | 2012-11-21 | 2013-03-27 | 东北大学 | Sensitive element based on pressure volume effect of graphene filled silicone rubber composite material and production method thereof |
| CN103065813B (en) * | 2012-12-20 | 2016-03-30 | 中国科学技术大学 | The preparation method of electrode of super capacitor and application thereof |
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