CN105067159B - A kind of capacitance pressure transducer, and preparation method thereof - Google Patents
A kind of capacitance pressure transducer, and preparation method thereof Download PDFInfo
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- CN105067159B CN105067159B CN201510434068.5A CN201510434068A CN105067159B CN 105067159 B CN105067159 B CN 105067159B CN 201510434068 A CN201510434068 A CN 201510434068A CN 105067159 B CN105067159 B CN 105067159B
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Abstract
The invention discloses a kind of capacitance pressure transducer, and preparation method thereof, the substrate that the capacitance pressure transducer, includes electrode by insulating barrier and two panels forms, and for the insulating barrier between two layers of electrode, the insulating barrier is porous elastic film.The insulating barrier of the present invention uses porous elastic film, makes sensitiveness increase of the capacitance pressure transducer, to pressure, while add the pressure limit of the capacitance pressure transducer, hypersensitivity；Material price is low used by porous elastic film, and processing technology is simple, reduces the cost of capacitance pressure transducer,.
Description
Technical field
The present invention relates to a kind of electronic device, and in particular to a kind of based on the condenser type that porous elastic film is insulating barrier
Pressure sensor and preparation method thereof, belong to electronic technology field.
Background technology
Capacitance pressure transducer, is using capacitance sensitive elements by tested pressure conversion into therewith into the electricity of certain relation
The pressure sensor of output, it is characterized in simple in construction, power is small, and dynamic response is fast.Its non-sensitive part is exactly with variable
The capacitor of parameter, its most common form is made up of two parallel poles, interpolar folder is with the capacitor of insulation film.When thin
When film is experienced pressure and deformed, the capacitance formed between film and fixed electrode changes, can be defeated by measuring circuit
Go out the electric signal into certain relation with voltage, the sensitivity of the electric signal it is substantially directly proportional to the area and pressure of film and with it is thin
The distance of tension force and film to the fixed electrode of film is inversely proportional.
With the development of wearable device, to proposing higher want as the pressure sensor of its important composition part
Ask, including flexible, high sensitivity, quick response and the compatibility with human body.To meet these requirements, use and human body
Insulating barrier of the compatible elastic insulating material as capacitor.However, simply use elastic film as insulating layer material its
Elastic performance is limited, it is impossible to obtains high sensitivity.Therefore, how to increase the elastic performance of insulating barrier turned into one it is important
Research direction.Current technology be the silicon chip for using micro-structural for template, the method peeled off again obtains after forming film on silicon chip
There is the elastic insulating layer of micro-structural to surface, so as to improve the sensitivity of sensor.But there is following drawback in this method：
(1) use of template adds the cost of technique；(2) the extremely easy deformation of the micro-structural that film surface is formed is compacted, Zhi Neng
There is higher sensitivity in small pressure limit.Meanwhile how to ensure the micro-structural of film surface being bonded with electrode and
A problem will also be turned into by being not compressed when device and integrated circuit.Therefore, the deformability of these elastomeric materials how is increased
Have great importance in the sensitivity of enhancing capacitance pressure transducer, and the pressure limit of increase high sensitivity.
The content of the invention
It is an object of the present invention to provide a kind of capacitance pressure transducer, and preparation method thereof, solves capacitive pressure and passes
Sensor elastic non-conductive layer be stressed effect when deformation quantity it is small the problem of, increase elastic insulating layer be stressed effect when deformation,
So as to improve the sensitiveness of capacitance pressure transducer,.
The present invention is achieved by the following technical solutions：
A kind of capacitance pressure transducer, the substrate for including electrode by insulating barrier and two panels form, and the insulating barrier is located at
Between two layers of electrode, it is characterised in that the insulating barrier is porous elastic film.
According to capacitance pressure transducer, provided by the present invention, it is characterised in that the poroelasticity film is polymerization
Thing foamed plastics or by being formed after heat cure elastomeric material and expanded material mixing after being heating and curing.
According to capacitance pressure transducer, provided by the present invention, it is characterised in that the polymer foam includes
Neoprene (CR), nitrile rubber (NBR), polyethylene (PE), polyvinyl chloride (PVC), polyethylene vinyl acetate (EVA), chemistry
Crosslinked polyethylene (XPE) and amino resins (Melamine).
According to capacitance pressure transducer, provided by the present invention, it is characterised in that the heat cure elastomeric material includes
Dimethyl silicone polymer (PDMS), polyurethane (PU) and platinum catalysis silica gel (Ecoflex).
According to capacitance pressure transducer, provided by the present invention, it is characterised in that the expanded material includes azo two
Isobutyronitrile, ABVN, toluene sulfonyl hydrazide, bis oxide (benzene sulphur is cruel) rib, sodium acid carbonate, ammonium hydrogen carbonate.
According to capacitance pressure transducer, provided by the present invention, it is characterised in that the heat cure elastomeric material and hair
Foam material mixed proportion is 10:1-10:Between 3.
According to capacitance pressure transducer, provided by the present invention, it is characterised in that the electrode includes graphene, stone
Ink, carbon black, single wall and multi-walled carbon nanotube, metal, metal oxide, metal nanometer line, metal and metal oxide nano
Grain, the metal include gold, silver, copper, al and ni, and the metal oxide includes tin indium oxide (ITO) and Fluorin doped tin aoxidizes
Thing (FTO).
According to capacitance pressure transducer, provided by the present invention, it is characterised in that the substrate includes glass, be poly- to benzene
Naphthalate (PET), PEN (PEN), polyimides (PI), dimethyl silicone polymer (PDMS)
With polyurethanes (PU).
Another technical scheme of the present invention is as follows：
A kind of preparation method of capacitance pressure transducer, it comprises the following steps：
1) substrate is cleaned by ultrasonic using ethanol solution, acetone soln and deionized water, dried after cleaning, using oxygen
Plasma or UV/ozone handle the substrate surface；
2) electricity is prepared on substrate by the way of vacuum evaporation, magnetron sputtering, spin coating, spraying, blade coating or intaglio printing
Pole；
3) substrate attaching that two panels is included into electrode obtains to the both sides up and down of the porous elastic film as insulating barrier
Required capacitance pressure transducer,；Wherein, porous elastic film is polymer foam or by heat cure elasticity material
Formed after material and expanded material mixing after being heating and curing, electrode and porous elastic film are in contact, and substrate is in outermost.
According to the preparation method of capacitance pressure transducer, provided by the present invention, it is characterised in that described by heat cure
The preparation method of the porous elastic film formed after elastomeric material and expanded material mixing after being heating and curing includes following step
Suddenly：
1) heat cure elastomeric material and expanded material are weighed respectively and be well mixed both, mixed proportion 10:1-10:
3；
2) PET film is positioned on smooth bottom plate, PET film both sides set highly consistent pad, will uniformly mix
The heat cure elastomeric material and expanded material of conjunction fall in PET film；
3) another PET film is covered on the heat cure elastomeric material and expanded material of mixing, with glass bar or gold
Belong to rod in PET film surface scrolls or promotion, material is uniformly distributed in two layers of PET film；
4) covered with the cover plate of surfacing on PET film on top, the relative position between fixed bottom plate and cover plate
Put and highly, then will be heated in its global transfer to warm table, expanded material produces gas simultaneously with heat in heating process
Cured elastomeric materials solidify, and form loose structure.
5) after heat cure elastomeric material is fully cured, bottom plate, cover plate and two PET films are removed, are obtained required porous
Property elastic film.
The beneficial effects of the present invention are：Porous elastic film is capacitive insulating layer, due to the presence of film Hole,
Make to increase the capacitance variation amount of capacitor with bigger thickness deformation quantity when film is stressed effect, make sensor
Sensitiveness increase to pressure, just can be compacted porous elastic film simultaneously because need to apply big pressure, add pressure
The pressure limit of force snesor hypersensitivity；Material price is low used by film, and processing technology is simple, reduces pressure sensing
The cost of device.
Brief description of the drawings
Fig. 1 is the structural representation of the capacitance pressure transducer, of the present invention.
Fig. 2 is response of the capacitance pressure transducer, to pressure of the embodiment of the present invention 2.
Wherein, 1 substrate, 2 electrodes, 3 insulating barriers.
Embodiment
Embodiments of the invention are elaborated below in conjunction with the accompanying drawings, the embodiment is premised on technical solution of the present invention
Detailed embodiment and specific operating process are given, but protection scope of the present invention is not limited to following embodiments.
As shown in figure 1, capacitance pressure transducer, of the present invention, the substrate of electrode 2 is included by insulating barrier 3 and two panels
1 composition；The electrode 2 is located on transparent substrate 1, and positioned at the both sides up and down of the insulating barrier 3, the insulating barrier 3
Between two layers of electrode 2, the insulating barrier 3 is porous elastic film.
The poroelasticity film is polymer foam, and the polymer foam includes neoprene (CR), fourth
Nitrile rubber (NBR), polyethylene (PE), polyvinyl chloride (PVC), polyethylene vinyl acetate (EVA), processes for chemically crosslinked polyethylene (XPE)
With amino resins (Melamine).
The poroelasticity film or by being formed after heat cure elastomeric material and expanded material mixing after being heating and curing.
The heat cure elastomeric material includes dimethyl silicone polymer (PDMS), polyurethane (PU) and platinum catalysis silica gel (Ecoflex).Institute
State expanded material include azodiisobutyronitrile, ABVN, toluene sulfonyl hydrazide, bis oxide (benzene sulphur is cruel) rib, sodium acid carbonate,
Ammonium hydrogen carbonate.The mixed proportion of the heat cure elastomeric material and expanded material is 10:1-10:Between 3.
The electrode 2 includes graphene, graphite, carbon black, single wall and multi-walled carbon nanotube, metal, metal oxide, metal
Nano wire, metal and metal oxide nanoparticles, the metal include gold, silver, copper, al and ni, the metal oxide bag
Include tin indium oxide (ITO) and Fluorin doped tin-oxide (FTO).
The substrate 1 include glass, polyethylene terephthalate (PET), PEN (PEN),
Polyimides (PI), dimethyl silicone polymer (PDMS) and polyurethanes (PU).
The preparation method of capacitance pressure transducer, of the present invention comprises the following steps：
1) substrate 1 is cleaned by ultrasonic using ethanol solution, acetone soln and deionized water, dried after cleaning, used
Oxygen plasma or UV/ozone handle the surface of substrate 1.
2) electricity is prepared on substrate 1 by the way of vacuum evaporation, magnetron sputtering, spin coating, spraying, blade coating or intaglio printing
Pole 2.
3) substrate 1 that two panels is included into electrode 2 fits to the both sides up and down of the porous elastic film as insulating barrier 3,
Obtain required capacitance pressure transducer,；Wherein electrode 2 and porous elastic film is in contact, and substrate 1 is in outermost.
The porous elastic film by being formed after heat cure elastomeric material and expanded material mixing after being heating and curing
Preparation method comprise the following steps：
1) heat cure elastomeric material and expanded material are weighed respectively and be well mixed both, mixed proportion 10:1-10:
3；
2) PET film is positioned on smooth bottom plate, PET film both sides set highly consistent pad, will uniformly mix
The heat cure elastomeric material and expanded material of conjunction fall in PET film；
3) another PET film is covered on the heat cure elastomeric material and expanded material of mixing, with glass bar or gold
Belong to rod in PET film surface scrolls or promotion, material is uniformly distributed in two layers of PET film；
4) covered with the cover plate of surfacing on PET film on top, the relative position between fixed bottom plate and cover plate
Put and highly, then will be heated in its global transfer to warm table, expanded material produces gas simultaneously with heat in heating process
Cured elastomeric materials solidify, and form loose structure；
5) after heat cure elastomeric material is fully cured, bottom plate, cover plate and two PET films are removed, are obtained required porous
Property elastic film.
Illustrate the preparation method of the capacitance pressure transducer, below by way of specific embodiment.
Embodiment 1
The present embodiment uses the porous bullet by being formed after heat cure elastomeric material and expanded material mixing after being heating and curing
Property film.The heat cure elastomeric material is dimethyl silicone polymer (PDMS), and the expanded material is azodiisobutyronitrile.Institute
The mixed proportion for stating heat cure elastomeric material and expanded material is 10:1.The preparation method of the porous elastic film as above institute
State.
The preparation of the capacitance pressure transducer, is completed by following specific steps：
(1) it is saturating to the flexibility of polyethylene terephthalate (PET) using ethanol solution, acetone soln and deionized water
Bright substrate 1 is cleaned, and is dried up after cleaning with drying nitrogen, and using oxygen plasma or UV/ozone processing substrate table
Face；
(2) nano silver wire electrode is prepared on substrate 1 by the way of spin coating；
(3) PET substrate that two panels includes nano silver wire electrode is fitted into both sides above and below porous elastic film, obtains institute
The capacitance pressure transducer, needed.Wherein nano silver wire electrode and porous elastic film contacts, PET substrate is in outermost.
Embodiment 2
The present embodiment uses the porous bullet by being formed after heat cure elastomeric material and expanded material mixing after being heating and curing
Property film.The heat cure elastomeric material is polyurethane (PU), and the expanded material is toluene sulfonyl hydrazide.The heat cure elasticity
The mixed proportion of material and expanded material is 10:2.The preparation method of the porous elastic film is as described above.
The preparation of the capacitance pressure transducer, is completed by following specific steps：
(1) flexible and transparent using ethanol solution, acetone soln and deionized water to PEN (PEN)
Substrate 1 is cleaned, and is dried up after cleaning with drying nitrogen, and using oxygen plasma or UV/ozone processing substrate surface；
(2) single pipe electrode is prepared on substrate by the way of spin coating；
(3) the PEN substrate attachings that two panels is included into single pipe electrode obtain to both sides above and below porous elastic film
To required capacitance pressure transducer,.Wherein single pipe electrode and porous elastic film contacts, PEN substrates are most
Outside.
Fig. 2 is response of the capacitance pressure transducer, of embodiment 2 to pressure.
Embodiment 3
The present embodiment uses the porous bullet by being formed after heat cure elastomeric material and expanded material mixing after being heating and curing
Property film.The heat cure elastomeric material is platinum catalysis silica gel (Ecoflex), and the expanded material is sodium acid carbonate.The heat
Cured elastomeric materials and the mixed proportion of expanded material are 10:3.The preparation method of the porous elastic film is as described above.
The preparation of the capacitance pressure transducer, is completed by following specific steps：
(1) flexible transparent substrate 1 of polyimides (PI) is carried out clearly using ethanol solution, acetone soln and deionized water
Wash, dried up after cleaning with drying nitrogen, and using oxygen plasma or UV/ozone processing substrate surface；
(2) graphite electrode is prepared on substrate 1 by the way of spin coating；
(3) the PI substrate attachings that two panels is included into graphite electrode obtain required to both sides above and below porous elastic film
Capacitance pressure transducer,.Wherein graphite electrode and porous elastic film contacts, PI substrates are in outermost.
Embodiment 4
For the present embodiment using polymer foam as poroelasticity film, the polymer foam is polyethylene
(PE)。
The preparation of the capacitance pressure transducer, is completed by following specific steps：
(1) flexible and transparent of dimethyl silicone polymer (PDMS) is served as a contrast using ethanol solution, acetone soln and deionized water
Bottom 1 is cleaned, and is dried up after cleaning with drying nitrogen, and using oxygen plasma or UV/ozone processing substrate surface；
(2) gold electrode is prepared on substrate 1 by the way of spin coating；
(3) by dimethyl silicone polymer (PDMS) substrate attaching of the two panels comprising gold electrode to polyethylene (PE) foamed plastics
Upper and lower both sides, obtain required capacitance pressure transducer,.Wherein gold electrode and polyethylene (PE) porous elastic film contacts,
Dimethyl silicone polymer (PDMS) substrate is in outermost.
Embodiment 5
For the present embodiment using polymer foam as poroelasticity film, the polymer foam is amino resins
(Melamine)。
The preparation of the capacitance pressure transducer, is completed by following specific steps：
(1) flexible transparent substrate 1 of polyurethanes (PU) is entered using ethanol solution, acetone soln and deionized water
Row cleaning, is dried up after cleaning with drying nitrogen, and using oxygen plasma or UV/ozone processing substrate surface；
(2) tin indium oxide (ITO) electrode is prepared on substrate 1 by the way of spin coating；
(3) by polyurethanes (PU) substrate attaching of the two panels comprising tin indium oxide (ITO) electrode to amino resins
(Melamine) both sides above and below foamed plastics, obtain required capacitance pressure transducer,.Wherein tin indium oxide (ITO) electrode and
Amino resins (Melamine) porous elastic film contacts, polyurethanes (PU) substrate is in outermost.
Claims (7)
1. a kind of capacitance pressure transducer, the substrate for including electrode by insulating barrier and two panels forms, and the insulating barrier is located at two
Between layer electrode, it is characterised in that the insulating barrier is porous elastic film, and the porous elastic film is poly dimethyl silicon
Formed after oxygen alkane, polyurethane or platinum catalysis silica gel and expanded material mixing after being heating and curing.
2. capacitance pressure transducer, according to claim 1, it is characterised in that the expanded material is the isobutyl of azo two
Nitrile, ABVN, toluene sulfonyl hydrazide, bis oxide rib, sodium acid carbonate or ammonium hydrogen carbonate.
3. capacitance pressure transducer, according to claim 1, it is characterised in that the dimethyl silicone polymer, poly- ammonia
Ester or the mixed proportion of platinum catalysis silica gel and expanded material are 10:1-10:Between 3.
4. capacitance pressure transducer, according to claim 1, it is characterised in that the electrode is graphene, graphite, charcoal
Black, single wall and multi-walled carbon nanotube, metal, metal oxide, metal nanometer line or metal and metal oxide nanoparticles, institute
It is gold, silver, copper, aluminium or nickel to state metal, and the metal oxide is tin indium oxide or Fluorin doped tin-oxide.
5. capacitance pressure transducer, according to claim 1, it is characterised in that the substrate is glass, gathered to benzene two
Formic acid glycol ester, PEN, polyimides, dimethyl silicone polymer or polyurethanes.
6. the preparation method of the capacitance pressure transducer, described in a kind of claim 1, it is characterised in that comprise the following steps：
1) substrate is cleaned by ultrasonic using ethanol solution, acetone soln and deionized water, after cleaning dry, using oxygen etc. from
Daughter or UV/ozone handle the substrate surface；
2) electrode is prepared on substrate by the way of vacuum evaporation, magnetron sputtering, spin coating, spraying, blade coating or intaglio printing；
3) substrate attaching that two panels is included into electrode obtains required to the both sides up and down of the porous elastic film as insulating barrier
Capacitance pressure transducer,；Wherein electrode and porous elastic film is in contact, and substrate is in outermost.
7. the preparation method of capacitance pressure transducer, according to claim 6, it is characterised in that the porous elastic
The preparation method of film comprises the following steps：
1) dimethyl silicone polymer, polyurethane or platinum catalysis silica gel and expanded material are weighed respectively and is well mixed both, are mixed
Composition and division in a proportion example is 10:1-10:3；
2) PET film is positioned on smooth bottom plate, PET film both sides set highly consistent pad, will be mixed uniformly
Dimethyl silicone polymer, polyurethane or platinum catalysis silica gel and expanded material fall in PET film；
3) another PET film is covered to the dimethyl silicone polymer, polyurethane or platinum catalysis silica gel and expanded material of mixing
On, with glass bar or metal bar in PET film surface scrolls or promotion, material is uniformly distributed in two layers of PET film；
4) with the cover plate of surfacing covering PET film on top, relative position between fixed bottom plate and cover plate and
Highly, then will be heated in its global transfer to warm table, expanded material produces gas simultaneously with heat cure in heating process
Elastomeric material solidifies, and forms the porous elastic film of loose structure.
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| CN110387061B (en) * | 2019-07-26 | 2020-07-31 | 北京化工大学 | MXene-PDMS composite foam with hollow structure and preparation method and application thereof |
| CN110346078B (en) * | 2019-07-30 | 2021-02-19 | 天津大学 | Capacitive flexible pressure sensor and preparation method and application thereof |
| CN112255280A (en) * | 2020-10-09 | 2021-01-22 | 海南大学 | Preparation method of flexible and air-permeable sensor |
| CN112781757B (en) * | 2020-12-26 | 2023-10-31 | 重庆华知光环保科技有限责任公司 | Flexible capacitive pressure sensor based on graphene and preparation method thereof |
| CN113218543B (en) * | 2021-05-07 | 2023-04-28 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible pressure sensor, dielectric layer thereof and preparation method of dielectric layer |
| CN113588140B (en) * | 2021-07-08 | 2022-12-09 | 上海交通大学 | Pressure sensor, pressure sensing array and preparation method thereof |
| CN114034416A (en) * | 2021-10-19 | 2022-02-11 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Flexible capacitive sensor and preparation method thereof |
| CN114323369B (en) * | 2021-12-22 | 2024-03-26 | 北京石墨烯技术研究院有限公司 | Flexible pressure sensor, manufacturing method thereof and wearable device |
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