CN105047811B - Piezoelectric material layer based on different-thickness stacks PZT (piezoelectric transducer) - Google Patents
Piezoelectric material layer based on different-thickness stacks PZT (piezoelectric transducer) Download PDFInfo
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Abstract
The present invention relates to a kind of PZT (piezoelectric transducer) that stacks of piezoelectric material layer based on different-thickness, piezoelectric material layer preferably uses piezo-electricity composite material, such as 13 type piezo-electricity composite materials, or the conventional piezoelectric materials such as piezoelectric ceramics, piezoelectric monocrystal.The piezoelectric oscillator stacked of the present invention, since the thickness of each piezoelectric material layer is different, the resonant frequency of each piezoelectric material layer is different so that there are the i.e. multiple resonant frequencies of multiple modalities for the piezoelectric oscillator stacked.By the thickness for rationally designing each piezoelectric material layer, make the resonant frequency of each piezoelectric material layer in piezoelectric vibrator close to each other and couple, worked at the same time in wider frequency range, the response of its combination frequency can be made not produce interruption and too deep trench, compound multimode vibration will be formed in this frequency band, the bandwidth of operation of transducer can be effectively expanded, high frequency is realized, receives and dispatches sound wave to broadband.
Description
Technical field
The invention belongs to Underwater Detection technical field, and in particular to a kind of piezoelectric different using thickness, which stacks, to be formed
Piezoelectric vibrator, be applied in transducer realize transmitting and receive underwater sound signal so as to fulfill hydrospace detection.
Background technology
Underwater acoustic transducer is the device for mutually being changed acoustic energy and electric energy, its status is similar in wireless device
Antenna, is the Primary Component for launching and receiving sound wave under water.Underwater detection, identification, communication, and marine environmental monitoring and
The exploitation of marine resources, all be unable to do without underwater acoustic transducer.Transducer can be divided into emission type, reception type and transceiver type.By electricity
Signal is converted into underwater sound signal, and into water radiative acoustic wave transducer, be known as transmitting transducer, transmitting transducer requirement has ratio
Larger output acoustic power and higher electro-acoustic conversion efficiency.For receiving underwater acoustic wave signal, electric signal is converted thereof into
Transducer for receive transducer, also commonly referred to as hydrophone, to receive transducer then require broadband and high sensitivity.Both can be with
Electric signal is converted acoustic signals into, and acoustical signal can be converted the electrical signal to.For receiving or launching the transducer of acoustical signal
Referred to as receive and dispatch transducer.
Piezoelectric vibrator is the core component of transducer, and the performance of oscillator decides the working performance of transducer, therefore, to
High performance underwater acoustic transducer is made, first has to improve the performance of piezoelectric vibrator.In the material for making piezoelectric vibrator, piezoelectricity is multiple
Condensation material is because its acoustic impedance is small, is widely used with the advantages that roomy, mechanical quality factor is high.Piezo-electricity composite material is by piezoelectricity
Material, polymer, metal etc. by a kind of heterogeneous material made of combination process, in composite material it is each mutually can with 0,1,
2 or 3-dimensional mode self connection.Current composite material has 1-3 types, 3-1 types, 3-2 types, 3-3 types, 0-3 types, 2-2 type composite woods
Material, and crescent moon and hat shape metal-piezo ceramic wafers, wherein 1-3 types piezo-electricity composite material are most widely used.Existing 1-
3 type composite material PZT (piezoelectric transducer)s are mainly the following：
1st, 1-3 types piezo-electricity composite material transducer
1-3 type piezo-electricity composite materials transducer (Chen Junbo, Wang Yuebing, Zhong Linjian, 1-3 type piezo-electricity composite material and common
PZT transducer performance comparative analyses, acoustics and electronic engineering, 2007, vol.87 (3):25-27) prepared by cutting-completion method
1-3 type piezo-electricity composite materials, and be respectively fabricated to the 1-3 types piezo-electricity composite material and PZT potsherds of the identical size of two panels
Piston-type transducer.The piezoelectric element of transducer selects thickness to be fixed for 9mm, the disk of a diameter of 42.7mm with decoupling material,
And in metal shell, radiating surface encapsulating polyurethane.Through measurement obtained two kinds of transducers in atmosphere with water
Mechanical admittance curves, transmitting voltage response, receiving sensitivity and Direction Curve in water.By comparative analysis, show that 1-3 type piezoelectricity is answered
Condensation material transducer has clear improvement than the transmitting-receiving performance of common PZT PZT (piezoelectric transducer)s.Due to 1-3 type transducer transverse couplings
It is small, therefore single thickness resonance is showed, bandwidth broadens.
2nd, 1-3 types piezo-electricity composite material broadband underwater acoustic transducer
1-3 type piezo-electricity composite materials broadband underwater acoustic transducer (Zhang Kai, Lan Yu, Li Qi, 1-3 type piezo-electricity composite materials broadband
Study of underwater acoustic transducer, acoustic journal, 2011, Vol.36 (6), 631-637) using thickness vibration mode theory, horizontal mode
Theoretical and finite element method studies 1-3 type piezo-electricity composite material transducers, and having for transducer is established using ANSYS softwares
Meta-model is limited, then carries out structure optimization, has finally made one using thickness vibration mode and single order transverse direction mode mode
1-3 type piezo-electricity composite material wide-band transducers.Its bandwidth of operation is 190-390kHz.Result of study shows, utilizes thickness vibration
Mode and single order transverse direction mode can expand the bandwidth of 1-3 type piezo-electricity composite material transducers.
3rd, monocrystalline composite material wide-band transducer
In document (S.Cochran, M.Parker, and P.Marin-Franch, Ultrabroadband single
Crystal composite transducers for underwater ultrasound, IEEE Ultrasonics
Symposium, 2005,231-234) in, British scholar S.Cochran et al. makes composite material using PMN-PT monocrystalline, and
Matching layer is added on the composite makes monocrystalline composite material wide-band transducer.Manufactured monocrystalline composite material transducer -3dB
Relative bandwidth is 125%, close with the 135% of theoretical calculation.Monocrystalline composite material transducer and traditional ceramic composite
Transducer is compared, and bandwidth adds nearly four times.
To sum up, in the method for expanding transducer bandwidth, the first irrigates polymer in conventional piezoelectric materials and can open up
Bandwidth is opened up, but the ability of its expansion bandwidth is limited；Bandwidth can also be increased by being coupled using thickness vibration with oscillation crosswise for second, but
It is that the size of oscillator is not easily controlled, makes more difficult.The third adds matching layer, bandwidth energy on piezo-electricity composite material
Enough significantly increase, but the performance of matching layer can change with the change of time, so that transducer performance is unstable.
The content of the invention
It is an object of the invention in view of the above-mentioned problems, providing a kind of pressure stacked by the piezoelectric of different-thickness
Electric transducer, to expand the broadband of high-frequency transducer.
To achieve the above object, the present invention adopts the following technical scheme that：
A kind of PZT (piezoelectric transducer), including the piezoelectric material layer with different-thickness stacked, the resonance of each piezoelectric material layer
Frequency is close to each other and couples.
Further, the piezoelectric that the piezoelectric material layer uses is preferably piezo-electricity composite material, can also be in addition
The conventional piezoelectric materials such as piezoelectric ceramics, piezoelectric monocrystal.
Further, the piezo-electricity composite material is 1-3 type piezo-electricity composite materials, 2-2 type composite materials, and 0-3 types are compound
Material etc., in piezo-electricity composite material, piezoelectric phase material is piezoelectric ceramics or piezoelectric monocrystal, and polymer phase material is asphalt mixtures modified by epoxy resin
Fat, polyurethane, silicon rubber etc..
Further, the upper and lower surface covering electrodes layer of the piezoelectric material layer, the material of the electrode are gold, silver, lead
Electric glue etc..
Further, the piezoelectric material layer with different-thickness stacked is by two panels or the piezoelectricity of multi-disc different-thickness
Material layer bonding forms.
Further, the piezoelectric material layer with different-thickness stacked stacked by the piezoelectric of flat shape and
Into, or stacked and formed by the piezoelectric of curve form (such as arc-shaped).
Further, the thickness t of the piezoelectric material layer is 2~10mm, the thickness difference Δ t of each piezoelectric material layer for 0~
1mm。
The present invention's stacks piezoelectric oscillator, since the thickness of each piezoelectric material layer is different, each piezoelectric material layer it is humorous
Vibration frequency is different so that there are multiple modalities (multiple resonant frequencies) for the piezoelectric oscillator stacked.By rationally designing each pressure
The thickness of material layer, makes the resonant frequency of each piezoelectric material layer in piezoelectric vibrator close to each other and couples, in wider frequency
In the range of work at the same time, the response of its combination frequency can be made not produce interruption and too deep trench, will be formed in this frequency band
Compound multimode vibration, can effectively expand the bandwidth of operation of transducer, realize high frequency, receive and dispatch sound wave to broadband.
Brief description of the drawings
Fig. 1 is the structure diagram of transducer in embodiment.
Fig. 2 is the structure diagram of 1-3 type composite materials in embodiment.
Fig. 3 is the schematic diagram of 1-3 type piezo-electricity composite material production processes in embodiment.
Fig. 4 is the schematic diagram that the piezo-electricity composite material of two panels different-thickness in embodiment stacks.
Fig. 5 is the schematic diagram (double-layer structure) of piezoelectric vibrator side in embodiment.
Fig. 6 is that the resonant frequency of different-thickness piezo-electricity composite material in embodiment couples schematic diagram.
Fig. 7 is that two panels stacks the aerial resonant frequency of composite material piezoelectric vibrator and bandwidth performance signal in embodiment
Figure.
Fig. 8 is the transmitting voltage response curve map of the transducer that I piezoelectric vibrators are fabricated in embodiment.
Fig. 9 is the schematic diagram that three pieces different-thickness composite material stacks in embodiment.
Figure 10 is the schematic diagram (three-decker) of piezoelectric vibrator side in embodiment.
Figure 11 is that three pieces stack the aerial resonant frequency of composite material piezoelectric vibrator in embodiment and bandwidth performance shows
It is intended to.
Figure 12 is the conductance plots figure that two panels different-thickness potsherd stacks in embodiment.
Figure 13 is the conductance plots figure that two panels different-thickness single-chip stacks in embodiment.
Figure 14 is the arc-shaped piezoelectric stacked structure schematic diagram of different-thickness in embodiment.
Symbol description in figure：1. piezoelectric phase；2. polymer phase；3. piezoelectric substrate；4. adhesive linkage；5. electrode；t1、t2、For piezo-electricity composite material thickness.
Embodiment
Below by specific embodiment and coordinate attached drawing, the present invention is described in detail.
Embodiment 1：The composite material of two panels different-thickness stacks
Fig. 1 is the structure diagram that two panels composite material stacks transducer in the present embodiment.As shown in the drawing, the transducer
1-3 type piezo-electricity composite materials including two panels different-thickness, i.e., composite material 1 and composite material 2 in figure；Two layers of composite material
Between be adhesive linkage, composite material upper and lower surface covering electrodes, from electrode outgoing cable；1 top of composite material is equipped with absorbent treatment,
For absorbing unnecessary sound wave, prevent sound wave from reflecting；The most external of the transducer is the water-proof sound-transmitting layer (such as polyurethane) of glue envelope.
Fig. 2 is the structure diagram for the 1-3 type composite materials that the present embodiment makes piezoelectric vibrator.As shown in the drawing, this is multiple
Condensation material includes piezoelectric phase 1, polymer phase 2 and piezoelectric substrate 3.
Fig. 3 is 1-3 type piezo-electricity composite material production process figures in the present embodiment.Cut piezoelectric phase 1 in the x-direction first, so
Cut piezoelectric phase 1 in the y-direction afterwards, then irrigate polymer phase 2, finally make electrode 5.Composite material upper and lower surface is coated to electricity
Pole, through-thickness, that is, z direction polarizations.Electrode can be made by sintering silver, sputtering gold (or silver) or brushing conducting resinl etc..
Fig. 4 is the schematic diagram that the piezo-electricity composite material of two panels different-thickness stacks.The two panels made is of varying thickness
Piezo-electricity composite material is bonded by tack coat 4, is made and is stacked piezoelectric vibrator, and two panels composite material polarization direction is on the contrary, and in electricity
It is in parallel on.If two panels composite material polarization direction is identical, one layer insulating of addition, insulation are needed between two panels composite material
Layer can use the insulating materials such as insulating cement, plastics, and thickness of insulating layer is as far as possible small.Adhesive linkage generally use polyurethane, asphalt mixtures modified by epoxy resin
Fat and silicon rubber etc., its thickness is between 0.2mm-0.5mm.
Fig. 5 stacks the schematic diagram of piezoelectric vibrator side, wherein t for two layers of composite material1、t2For two panels piezo-electricity composite material
Thickness.Structures of piezoelectric composite size distribution ranges are preferably：Thickness t is 2mm~10mm, each thickness of composite material difference Δ
T is 0mm~1mm.The material of the piezoelectric phase of composite material can select piezoelectric ceramics, piezoelectric monocrystal etc., and polymer phase can select
With epoxy resin, polyurethane etc..
Since the thickness of two panels composite material differs, the resonant frequency of each composite material is different, i.e. oscillator vibration system is deposited
In multiple modalities (multiple resonant frequencies).The thickness of each composite material is rationally designed, by polyurethane adhesive layer, makes piezoelectric vibrator
The resonant frequency of each composite material is close to each other and couples (see Fig. 6), is worked at the same time in wider frequency range, makes its group
Close frequency response and do not produce interruption and too deep trench, then compound multimode vibration will be formed in this frequency band, can be effectively
Expand the bandwidth of operation of oscillator.Multi-disc is also such.
An instantiation is provided below.This example makes pressure using two panels 1-3 types piezo-electricity composite material of varying thickness
Electric tachometer indicator, as shown in figure 4, the structural parameters of each component of oscillator are shown in Table 1.
The structural parameters of 1. piezoelectric vibrator embodiment component of table
By in I~V groups in table, structure is stacked as shown in Figure 3 for No. 1 of every group and No. 2 composite materials, therebetween with poly- ammonia
Ester is bonded, and holding thickness of adhibited layer is 0.2mm~0.5mm, and piezoelectric vibrator is made after urethane cures.Use electric impedance analyzer
The resonant frequency and bandwidth of oscillator are measured, as a result as shown in table 2 and Fig. 7.
2. piezoelectric vibrator examples measure result of table
It can be seen that from table 2 and Fig. 7 in the range of certain thickness difference, stack piezoelectric vibrator bandwidth and be far longer than monolithic
Composite material bandwidth.When two panels thickness of composite material difference is excessive, the conductance plots of each composite material will no longer coupling at -3dB
Close.
By I piezoelectric vibrators construction packages as shown in Figure 1, transducer is made, its transmitting voltage response is tested in water, obtains
Change curve to transmitting voltage response as shown in Figure 8 with frequency.Can be seen that its bandwidth of operation from the curve map is about
60KHz, dramatically increases compared with institute's measuring tape is wide in air.Illustrate that structure of the present invention is remarkably improved the bandwidth of oscillator, achieve into
The technique effect of step.
Embodiment 2：Three pieces different-thickness composite material stacks
Fig. 9 stacks oscillator structure schematic diagram for three layers of different-thickness piezo-electricity composite material.The oscillator is by three pieces different-thickness
Piezo-electricity composite material stack and form by adhesive linkage bonding.In three pieces piezo-electricity composite material, adjacent two panels Piezoelectric anisotropy material
Expect that polarization direction is opposite.Such as adjacent two panels piezo-electricity composite material polarization direction is identical, then needs to add between two panels piezo-electricity composite material
Add a layer insulating, insulating layer can use the insulating materials such as insulating cement, plastics, and thickness of insulating layer is as far as possible small.
Transducer is stacked for three pieces piezo-electricity composite material, structure is identical with Fig. 1.Difference is, three pieces Piezoelectric anisotropy
Compared to Figure 1 material stacks transducer, composite material will increase a piece of, and structure by three pieces composite material as shown in figure 9, passed through viscous
Layer bonding is connect to form.In addition the present invention can also be stacked more than 3-layer composite material, n-layer composite transducers then by
The composite material of n piece different-thickness is formed, and so on.
Figure 10 stacks oscillator sectional drawing for three layers of different-thickness composite material.Structures of piezoelectric composite size distribution ranges
It is consistent with double-layer structure noted earlier.
Figure 11 is respectively 4.8mm for 3-layer composite material thickness, in the case of 4.6mm, 5mm, piezoelectric vibrator and composite wood
The conductance plots figure of material.As seen from the figure, the bandwidth of operation of piezoelectric vibrator is much larger than the bandwidth of each composite material, illustrates multilayer
Stacked structure can significantly heighten oscillator bandwidth.
The piezo-electricity composite material of different-thickness described in the present invention program is not limited to 1-3 type piezo-electricity composite materials, can be by
The conventional piezoelectric materials such as other composite materials (such as 2-2 types composite material, 0-3 type composite materials etc.) and piezoelectric ceramics, monocrystalline
Instead of.Figure 12 stacks for the potsherd that two panels thickness is respectively 5mm and 4.7mm, potsherd and its piezoelectric vibrator stacked
Conductance plots figure.As seen from the figure, piezoelectric vibrator bandwidth is about 40KHz, and the bandwidth compared with layered ceramic dramatically increases.Figure
13 stack for the single-chip that two panels thickness is respectively 5mm and 4.7mm, and the conductance of single-chip and its piezoelectric vibrator stacked is bent
Line chart.As seen from the figure, the bandwidth of piezoelectric vibrator is also dramatically increased compared with the bandwidth of monolithic monocrystalline.
The piezoelectric that the structure of the present invention program is not limited to planar structure stacks, also arc-shaped comprising different-thickness
Piezoelectric stacked structure, as shown in figure 14.
The above embodiments are merely illustrative of the technical solutions of the present invention rather than is limited, the ordinary skill of this area
Personnel can be to technical scheme technical scheme is modified or replaced equivalently, without departing from the spirit and scope of the present invention, sheet
The protection domain of invention should be subject to described in claim.
Claims (9)
1. a kind of PZT (piezoelectric transducer), it is characterised in that including the piezoelectric material layer with different-thickness stacked, each piezoelectric
Layer through-thickness stacks, and each piezoelectric material layer is in plane stacked structure, and the different-thickness of each piezoelectric material layer causes each piezoelectricity
The resonant frequency of material layer is close to each other and couples；In the piezoelectric material layer with different-thickness stacked, adjacent two
The polarization direction of a piezoelectric material layer is identical or different, adds between two different adjacent piezoelectric material layers of polarization direction
Add an adhesive linkage, an insulating layer is added between two identical adjacent piezoelectric material layers of polarization direction.
2. PZT (piezoelectric transducer) as claimed in claim 1, it is characterised in that the piezoelectric that the piezoelectric material layer uses is pressure
Composite, piezoelectric ceramics or piezoelectric monocrystal.
3. PZT (piezoelectric transducer) as claimed in claim 2, it is characterised in that the piezo-electricity composite material is 1-3 type Piezoelectric anisotropies
Material, 2-2 types composite material or 0-3 type composite materials, the piezoelectric phase in the piezo-electricity composite material is piezoelectric ceramics or pressure
Electric monocrystalline, polymer phase are epoxy resin, polyurethane or silicon rubber.
4. PZT (piezoelectric transducer) as claimed in claim 1, it is characterised in that the piezoelectric with different-thickness stacked
Layer is formed by the piezoelectric material layer of two panels or multi-disc different-thickness bonding.
5. PZT (piezoelectric transducer) as claimed in claim 4, it is characterised in that using polyurethane, epoxy resin or silicon rubber into
The row bonding, the thickness of adhesive linkage is 0.2mm~0.5mm.
6. PZT (piezoelectric transducer) as claimed in claim 1, it is characterised in that the upper and lower surface covering electrodes of the piezoelectric material layer
Layer, the material of the electrode layer is gold, silver or conducting resinl.
7. PZT (piezoelectric transducer) as claimed in claim 1, it is characterised in that the thickness t of the piezoelectric material layer is 2~10mm,
The thickness difference Δ t of each piezoelectric material layer is 0~1mm.
8. the PZT (piezoelectric transducer) as any one of claim 1 to 7, it is characterised in that further include and the tool stacked
There is the absorbent treatment of the piezoelectric material layer adjoining of different-thickness, and glue is encapsulated in outermost water-proof sound-transmitting layer.
9. a kind of method for preparing composite material PZT (piezoelectric transducer), which stacks including through-thickness
The 1-3 type piezo-electricity composite materials with different-thickness, each 1-3 types piezo-electricity composite material layer is in plane stacked structure, each 1-3 types
The different-thickness of piezo-electricity composite material layer make it that the resonant frequency of each 1-3 types piezo-electricity composite material layer is close to each other and couples；Should
Method includes the following steps：
1) piezoelectric phase is cut in the x-direction, then cuts the piezoelectric phase in the y-direction；
2) polymer phase is irrigated in the gap to be formed is cut with y directions in the x-direction, 1-3 type piezo-electricity composite materials are formed, in 1-
The upper and lower surface covering electrodes of 3 type piezo-electricity composite materials；
3) the 1-3 types piezo-electricity composite material of different-thickness is bonded by tack coat, is made along 1-3 type piezo-electricity composite materials
The piezoelectric vibrator that stacks of thickness direction, then cable is set and glue seals to form composite material PZT (piezoelectric transducer).
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| CN105388640B (en) * | 2015-12-29 | 2019-08-02 | 中国电子科技集团公司第二十六研究所 | Rhombic transducer device for acousto-optic turnable filter |
| CN106903037A (en) * | 2017-01-23 | 2017-06-30 | 中国科学院苏州生物医学工程技术研究所 | Ultrasonic transducer, ultrasonic array probe and ultrasonic image-forming system |
| CN106876576B (en) * | 2017-02-13 | 2019-05-21 | 北京信息科技大学 | A kind of piezo-electricity composite material and preparation method thereof based on scissoring vibration |
| US10965271B2 (en) * | 2017-05-30 | 2021-03-30 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method for fabricating the same |
| US11418168B2 (en) | 2017-05-30 | 2022-08-16 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method for manufacturing the same |
| CN110277485B (en) * | 2019-02-21 | 2023-07-25 | 北京信息科技大学 | Composite material laminated bending vibration element and preparation method thereof |
| CN110721890A (en) * | 2019-10-25 | 2020-01-24 | 海鹰企业集团有限责任公司 | Light and thin medium-high frequency broadband transduction element |
| CN111048660B (en) * | 2020-03-12 | 2020-07-28 | 共达电声股份有限公司 | Piezoelectric transducer, method of manufacturing piezoelectric transducer, and electronic apparatus |
| CN111865138A (en) * | 2020-08-18 | 2020-10-30 | 上海隐冠半导体技术有限公司 | Long-stroke piezoelectric ceramic actuator and processing method thereof |
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