CN105043604B - A kind of microminiature tactile sensing element and preparation method thereof - Google Patents
A kind of microminiature tactile sensing element and preparation method thereof Download PDFInfo
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- CN105043604B CN105043604B CN201510385801.9A CN201510385801A CN105043604B CN 105043604 B CN105043604 B CN 105043604B CN 201510385801 A CN201510385801 A CN 201510385801A CN 105043604 B CN105043604 B CN 105043604B
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Abstract
The present invention proposes a kind of microminiature tactile sensing element and preparation method thereof, it is therefore intended that provide electric property tactile sensing element solution good, sensitive, reforms sexual development at robot skin contour sensitivity Application in Sensing field band.The microminiature tactile sensing element of the present invention, including main body, this main body is the complex that matrix resin and a respin roll up micro-carbon spring, and a described respin rolls up micro-carbon spring orientations in matrix resin, and along its spring shaft with certain spring diameter and pitch circumvolution regularly；Pair of electrodes, with described bulk cured one.A respin after application-oriented of the present invention rolls up the complex capacitor as tactile sensing element of carbon Microspring and matrix resin, the touch sensor sensitivity using tactile sensing element of the present invention is big, light weight, mechanically and electrically function admirable, is particularly well-suited to the most advanced and sophisticated medical instruments fields such as interior invasive procedures.
Description
Technical field
The present invention relates to a kind of microminiature tactile sensing element and preparation method thereof, this tactile sensing element is mainly used in the technical field of robot sense of touch skin.
Background technology
Along with in scientific and technological progress and commercial production stepping up robot sense of touch requirement, robot skin technology is developed rapidly.
The touch sensor pressing detection that JP 2002-236059 is described, is coil and the LC resonance circuit of capacitor series connection.Coil is pressed when, the inductance L of coil changes, and the resonant frequency of LC series loop the most just changes, and the resonant frequency of LCR series loop here can be detected device and detect, and becomes the basis of characterization that sense of touch judges.
But, this kind of touch sensor not only constructs relative complex, and variation of resonant frequency only just can be caused when the inductance L of coil changes, and for being applied to that touch sensor is faint the in the case of of pressing, the inductance L of coil has almost no change, the corresponding significant change that the most just cannot cause resonant frequency, so there is the inherent shortcoming that check-up inducing degree is low in this kind of touch sensor.
Sensing element described in JP 2005-49331 uses double circumvolution micro-carbon spring, the touch sensor pressing detection is LCR resonance circuit, but owing to constituting two carbon filament closely circumvolutions of double circumvolution micro-carbon spring together, almost as the micro-tubulose of circle, the physical property such as their retractility are the most limited, sufficiently deformation can not be produced for pressing of being applied the when of constituting tactile sensing element, also result in sensitivity inadequate；And the when of double circumvolution micro-carbon spring and matrix resin mixing, first dispersion is abundant not, it two is to remain bubble inside cylindric coil, therefore the problem that there is also mechanically and electrically limited performance.Additionally, also have a kind of elastomeric double circumvolution micro-carbon spring, although its two carbon filaments are with bigger pitch circumvolution, but form is the most regular, so signal stabilization is limited, inapplicable have high request to signal stabilization in the case of.
Summary of the invention
For problem mentioned in background technology, the present invention proposes a kind of microminiature tactile sensing element and preparation method thereof, purpose is to provide electric property tactile sensing element solution good, sensitive, brings innovative to develop in robot skin contour sensitivity Application in Sensing field.
The microminiature tactile sensing element of the present invention, including
Main body, this main body is the complex that matrix resin and a respin roll up micro-carbon spring, and a described respin rolls up micro-carbon spring orientations in matrix resin, and along its spring shaft with certain spring diameter and pitch circumvolution regularly；
Pair of electrodes, with described bulk cured one.
In the middle of one or more embodiments of the invention, a described respin rolls up carbon filament a diameter of 0.05-2 micron of micro-carbon spring, and spiral shell footpath is 0.1-50 micron, and pitch is 0.1-50 micron.
In the middle of one or more embodiments of the invention, a described respin rolls up carbon filament a diameter of 0.2-1.5 micron of micro-carbon spring, and spiral shell footpath is 1-10 micron, and pitch is 0.25-5 micron.
In the middle of one or more embodiments of the invention, the addition that a described respin rolls up micro-carbon spring accounts for the 0.1-10% of main body gross mass.
In the middle of one or more embodiments of the invention, the pair of electrode runs parallel is placed, and a described respin rolls up micro-carbon spring is oriented to the direction perpendicular with the pair of electrode, or there is the direction less than or equal to 15 degree of angles for the direction perpendicular with the pair of electrode.
The preparation method of the microminiature tactile sensing element of the present invention, comprises the following steps:
Step a, cultivating growth one respin roll up micro-carbon spring on graphite substrate, and meet carbon filament a diameter of 0.05-2 micron, spiral shell footpath is 0.1-50 micron, and pitch is 0.1-50 micron；
Described one respin roll up micro-carbon spring growth course: by containing ferrum, stannum, sulfur mineral loaded to porous catalyst carrier, in a nitrogen environment control reaction temperature at 600～900 DEG C, be passed through Hydrocarbon and hydrogen form micro-nano carbon source, growth forms；
Step b, molding casting moulds in be embedded with pair of electrodes in advance, the respin cut down on graphite substrate is rolled up micro-carbon spring be contained on this casting moulds, and by fixing for respin volume micro-carbon spring two ends vertically stretching, its length that a described respin rolls up micro-carbon spring takes 0.05-2 millimeter；
Step c, adding matrix resin and sclerosing agent in casting moulds, modulation is placed 5-8 hour, and curing molding prepares finished product.
In the middle of one or more embodiments of the invention, the addition that a described respin rolls up micro-carbon spring accounts for the 0.1-10% of main body gross mass.
In the middle of one or more embodiments of the invention, the JISA hardness requirement of described matrix resin is in the scope of 15-50.
In the middle of one or more embodiments of the invention, described matrix resin can use silicones, polyurethane or epoxy resin.
In the middle of one or more embodiments of the invention, described casting moulds is metal injection, and its specification is 10mm*10mm*3mm.
The present invention is compared with prior art, its advantageous exists: the respin after application-oriented rolls up the complex capacitor as tactile sensing element of carbon Microspring and matrix resin, the touch sensor using tactile sensing element of the present invention can be made small size and keep high sensitivity, signal stabilization, light weight, mechanically and electrically function admirable, be particularly well-suited to the most advanced and sophisticated medical instruments fields such as interior invasive procedures and bio-robot field.
Accompanying drawing explanation
Fig. 1 is the scanning electron microscopy that one of present invention respin rolls up micro-carbon spring.
Fig. 2 is the structural representation of the microminiature tactile sensing element of the present invention.
Fig. 3 is the rectified signal legend that a respin rolls up under micro-carbon spring orientations.
Fig. 4 is the rectified signal legend that a respin rolls up under the arrangement of micro-carbon spring non-oriented.
Detailed description of the invention
Below in conjunction with accompanying drawing, the application scheme is further described:
As shown in Figure 1-2, a kind of microminiature tactile sensing element, including
Main body 1, this main body 1 rolled up the complex of micro-carbon spring 12 by matrix resin 11 and a respin, described respin volume micro-carbon spring 12 orientations in matrix resin 1, and along its spring shaft with certain spring diameter and pitch circumvolution regularly；
Pair of electrodes 2, with described main body 1 solidification one.
Wherein, described micro-carbon spring can in following preferably in the range of implement:
Carbon filament a diameter of 0.2-1.5 micron of described micro-carbon spring, spiral shell footpath is 1-10 micron, and pitch is 0.25-5 micron.
The addition that a described respin rolls up micro-carbon spring 12 accounts for the 0.1-10% of main body 1 gross mass.
The pair of electrode 2 is placed in parallel, and a described respin rolls up micro-carbon spring 12 is oriented to the direction perpendicular with the pair of electrode 2, or has the direction less than or equal to 15 degree of angles for the direction perpendicular with the pair of electrode 2.
In such scheme, the matrix resin 11 of indication is a kind of electrolyte, has direct capacitance, plays the effect of capacitor.Matrix resin 11 can be silicones, polyurethane, epoxy resin, such as polystyrene and the copolymer of thermoplastic elastomer (TPE), styrene copolymer resin and thermoplastic elastomer (TPE), the Septon resin of Kuraray company, the liquid epoxies EXA-5850-150 etc. of big Japanese ink chemistry (strain).
And select one respin roll up micro-carbon spring bigger than tight double circumvolution micro-carbon spring pitch, small pressing can produce deformation, which no matter from direction came to be deformed, the thus change of L, C, R, Z, the θ in generation LCR resonance circuit, the electric parameter change maximum produced especially along the deformation in the direction of spring shaft such that it is able to detection deformation quantity.Under equal conditions, the sensitivity of the touch sensor that a respin rolls up micro-carbon spring is 1.5～200 times of the touch sensor of double circumvolution micro-carbon spring.And, the minimum detection value of the touch sensor of a respin micro-carbon spring of use orientation is 1.2～1000 times of the touch sensor of double circumvolution micro-carbon spring.
The preparation method of a kind of microminiature tactile sensing element, comprises the following steps:
Step a, cultivating growth one respin roll up micro-carbon spring 12 on graphite substrate, and meet carbon filament a diameter of 0.05-2 micron, spiral shell footpath is 0.1-50 micron, and pitch is 0.1-50 micron；
A described respin rolls up micro-carbon spring 12 growth course: using containing ferrum, stannum, sulfur mineral loaded on porous catalyst carrier (graphite substrate) as catalyst and accelerator, control reaction temperature in a nitrogen environment at 600～900 DEG C, being passed through Hydrocarbon and hydrogen forms micro-nano carbon source, growth forms；Wherein, in described mineral, tin element and copper sulfur account for less than the 50% of mineral gross weight, and ferrum element accounts for more than the 10% of mineral gross weight.
Step b, molding casting moulds in be embedded with pair of electrodes 2 in advance, the respin cut down on graphite substrate is rolled up micro-carbon spring 12 be contained on this casting moulds, and by fixing for respin volume micro-carbon spring 12 two ends vertically stretching, its length that a described respin rolls up micro-carbon spring 12 takes 0.05-2 millimeter；
Step c, adding matrix resin 11 and sclerosing agent in casting moulds, modulation is placed 5-8 hour, and curing molding prepares finished product.Above-mentioned standing time is that the addition of the characteristic by matrix resin 11 and sclerosing agent determines, is typically preferred at 5-8 hour, and in experiment, major part matrix resin is placed 7 hours and just realized solidification；Certainly, indivedual matrix resins are placed 3-4 hour and also can be realized solidification.
The addition that a described respin rolls up micro-carbon spring 12 accounts for the 0.1-10% of main body gross mass, and preferred value is 5% and 7%.One respin rolls up the dilatation of micro-carbon spring 12, and the change of length causes the inductance L in LCR loop, electric capacity C, and resistance R, impedance Z and the change of position phase θ.One respin roll up the addition of micro-carbon spring 12 very little when, electric capacity C composition plays a major role, and sense of touch sensitivity declines, and affects mouldability when of too many；The Main Function that resistance R embodies is when addition is suitable when, and LCR resonant interaction reaches intensity values.
The JISA hardness requirement of described matrix resin 11 is in the scope of 15-50, if hardness is the lowest, resin matrix is too soft, and detection noise is big, and signal to noise ratio is the least；On the contrary, if hardness is too big, resin matrix is too hard, and stress spread is poor, and sensitivity declines.
Described matrix resin 11 can use silicones, polyurethane or epoxy resin, and other the most also can be used according to demand to close other base resin material of symbol hardness standard.
Described casting moulds is metal injection, and its molding specification is: long 10mm, wide 10mm, thickness 3mm.
Structure based on above-mentioned sensing element, it is also possible to cut the sensing element (long 10mm, wide 10mm, thickness 3mm) of molding, is divided into some micro components that size is the least；The size range of these some micro components is (50-500 micron) * (50-500 micron) * (50-500 micron).
It is embodied as and experiment method:
Rolling up micro-carbon spring by a respin of precomputation 5% weight ratio to cut off from graphite substrate, be contained on the casting of metals mould (long 10mm, wide 10mm, thickness 3mm) being embedded with electrode, during cutting, facet is parallel with graphite substrate；
One respin is rolled up the stretching of micro-carbon spring axial two ends fixing, it is then injected into the matrix resin (silicones of SHIN-ETSU HANTOTAI chemistry KE103, its JISA hardness is 16) and sclerosing agent, after modulation is placed 7 hours, constitute a respin after solidification and roll up the tactile sensing element of micro-carbon spring.
On electrode, apply the voltage of 0.5V, 200KHz, and the most progressively apply loading (load of key value is respectively 1gf, 2gf, 10gf, 20gf) in a respin micro-carbon spring of volume, measure corresponding electric parameter.
We are typically converted into D/C voltage by aobvious ripple device Agilent-54621A to the absolute value output signal of LC and R and are measured.Specifically, by electrode, the alternating current of two groups of 0.5V, 200KHz being put on sensing element, one of which alternating current has the phase shift of 90 degree relative to another group；Two groups of alternating currents are overlapped mutually counteracting, to obtain a mild signal output.
When some stress is applied to sensor component, LC and the R parameter of a respin micro-carbon spring of volume will change, thus modulating action exports to produce corresponding signal in above-mentioned flattened signal.
As it is shown on figure 3, be the detection gained signal after a respin rolls up micro-carbon spring orientations, can see that the signal waveform forming degree of orientations is good, highly sensitive, it is simple to detect and respond.
Meanwhile, as a comparison case, we introduce a respin as shown in Figure 4 and roll up the detection gained signal of micro-carbon spring non-oriented arrangement.It can be seen that the signal waveform amplitude fluctuations that the signal waveform of orientations arranges than non-oriented becomes apparent under comparing, improve the precision of loading identification.
Above-mentioned preferred implementation should be regarded as the illustration of the application scheme embodiment, and all, approximations identical with the application scheme or the technology made based on this are deduced, replaced, improvement etc., are regarded as the protection domain of this patent.
Claims (10)
1. a microminiature tactile sensing element, it is characterised in that: include
Main body, this main body is the complex that matrix resin and a respin roll up micro-carbon spring, and a described respin volume is micro-
Carbon spring orientations in matrix resin, and along its spring shaft with certain spring diameter and pitch rule
Ground circumvolution；
Pair of electrodes, with described bulk cured one.
A kind of microminiature tactile sensing element the most according to claim 1, it is characterised in that: described
One respin rolls up carbon filament a diameter of 0.05-2 micron of micro-carbon spring, and spiral shell footpath is 0.1-50 micron, and pitch is
0.1-50 micron.
A kind of microminiature tactile sensing element the most according to claim 2, it is characterised in that: described
One respin rolls up carbon filament a diameter of 0.2-1.5 micron of micro-carbon spring, and spiral shell footpath is 1-10 micron, and pitch is
0.25-5 micron.
A kind of microminiature tactile sensing element the most according to claim 1, it is characterised in that: described
The addition of the one respin micro-carbon spring of volume accounts for the 0.1-10% of main body gross mass.
A kind of microminiature tactile sensing element the most according to claim 1, it is characterised in that: described
Pair of electrodes is placed in parallel, and being oriented to of a described respin micro-carbon spring of volume is perpendicular with the pair of electrode
Direction, or have the direction less than or equal to 15 degree of angles for the direction perpendicular with the pair of electrode.
6. the preparation method of a microminiature tactile sensing element, it is characterised in that this microminiature sense of touch passes
Sensing unit is as claimed in claim 1, and preparation method comprises the following steps:
Step a, cultivating growth one respin roll up micro-carbon spring on graphite substrate, and it is a diameter of to meet carbon filament
0.05-2 micron, spiral shell footpath is 0.1-50 micron, and pitch is 0.1-50 micron；
A described respin rolls up micro-carbon spring growth course: will urge to porous containing ferrum, stannum, the mineral loaded of sulfur
On agent carrier, in a nitrogen environment control reaction temperature at 600～900 DEG C, be passed through Hydrocarbon and
Hydrogen forms micro-nano carbon source, and growth forms；
Step b, molding casting moulds in be embedded with pair of electrodes in advance, will cut down from graphite substrate
One respin roll up micro-carbon spring be contained on this casting moulds, and by one respin roll up micro-carbon spring two ends vertically stretching
Fixing, its length that a described respin rolls up micro-carbon spring takes 0.05-2 millimeter；
Step c, addition matrix resin and sclerosing agent, modulation placement 5-8 hour in casting moulds, be solidified into
Type prepares finished product.
The preparation method of a kind of microminiature tactile sensing element the most according to claim 6, its feature
It is: the addition that a described respin rolls up micro-carbon spring accounts for the 0.1-10% of main body gross mass.
The preparation method of a kind of microminiature tactile sensing element the most according to claim 6, its feature
It is: the JISA hardness requirement of described matrix resin is in the scope of 15-50.
The preparation method of a kind of microminiature tactile sensing element the most according to claim 6, its feature
It is: described matrix resin can use silicones, polyurethane or epoxy resin.
The preparation method of a kind of microminiature tactile sensing element the most according to claim 6, its feature
Being: described casting moulds is metal injection, its specification is 10mm*10mm*3mm.
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| CN107290082B (en) * | 2016-04-11 | 2019-12-20 | 刘垚 | Capacitive touch sensor |
| CN111586945B (en) * | 2020-05-29 | 2023-04-21 | 福建星宏新材料科技有限公司 | Single-key touch-press light-adjusting switch |
| CN112146793B (en) * | 2020-11-26 | 2021-04-02 | 南京高华科技股份有限公司 | LC composite MEMS tactile pressure sensor and preparation method thereof |
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| JP2005049331A (en) * | 2003-07-11 | 2005-02-24 | Seiji Motojima | Sensor |
| CN101915629A (en) * | 2010-07-09 | 2010-12-15 | 济南大学 | Freezing resistant cement based stress sensor element |
| CN103616097A (en) * | 2013-10-22 | 2014-03-05 | 中国石油大学(华东) | Flexible film tactile sensor and production method thereof |
| CN205015106U (en) * | 2015-07-03 | 2016-02-03 | 广东双虹新材料科技有限公司 | Microminiature touch sensing component |
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| KR20110110388A (en) * | 2010-04-01 | 2011-10-07 | 한국표준과학연구원 | Method of manufacturing pressure sensitive device, pressure sensitive device manufactured by the same method and pressure measurement method using the same device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005049331A (en) * | 2003-07-11 | 2005-02-24 | Seiji Motojima | Sensor |
| CN101915629A (en) * | 2010-07-09 | 2010-12-15 | 济南大学 | Freezing resistant cement based stress sensor element |
| CN103616097A (en) * | 2013-10-22 | 2014-03-05 | 中国石油大学(华东) | Flexible film tactile sensor and production method thereof |
| CN205015106U (en) * | 2015-07-03 | 2016-02-03 | 广东双虹新材料科技有限公司 | Microminiature touch sensing component |
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Effective date of registration: 20180518 Address after: 518103 Guangdong Shenzhen Baoan District Fuyong street Great Ocean Road 90, COFCO (Fu'an) robotics Industrial Park 6 208 Patentee after: Shenzhen Fuxuan New Material Technology Co., Ltd. Address before: 528400 Zhongshan, Guangdong Torch Development Zone, 6 Xiang Hao Road, North Tower, 220 Trade Building Patentee before: Guangdong Shuan Hong new material Science and Technology Ltd. |