CN105043604A - Mini tactile sensor and manufacturing method thereof - Google Patents

Mini tactile sensor and manufacturing method thereof Download PDF

Info

Publication number
CN105043604A
CN105043604A CN201510385801.9A CN201510385801A CN105043604A CN 105043604 A CN105043604 A CN 105043604A CN 201510385801 A CN201510385801 A CN 201510385801A CN 105043604 A CN105043604 A CN 105043604A
Authority
CN
China
Prior art keywords
circumvolution
micro
carbon spring
carbon
sensing element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510385801.9A
Other languages
Chinese (zh)
Other versions
CN105043604B (en
Inventor
不公告发明人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Fuxuan New Material Technology Co., Ltd.
Original Assignee
Guangdong Shuan Hong New Material Science And Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Shuan Hong New Material Science And Technology Ltd filed Critical Guangdong Shuan Hong New Material Science And Technology Ltd
Priority to CN201510385801.9A priority Critical patent/CN105043604B/en
Publication of CN105043604A publication Critical patent/CN105043604A/en
Application granted granted Critical
Publication of CN105043604B publication Critical patent/CN105043604B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The invention discloses a mini tactile sensor and the manufacturing method thereof. The mini tactile sensor with excellent electrical performances and high sensitivity is provided, and the mini tactile sensor and the manufacturing method thereof are breakthrough in robot skin and highly sensitive sensing application field. The mini tactile sensor comprises a main body which is a compound of based resin and a heavily coiled micro-carbon spring, wherein the heavily coiled micro-carbon spring is arranged in an oriented manner in the based resin and regularly coiled along a spring shaft with certain spring diameter and pitch rules. The mini tactile sensor further comprises a pair of electrodes, which are integrated with a main body. The mini tactile sensor is applicable to a capacitor with the compound of an oriented heavily coiled micro-carbon spring and based resin as a tactile sensor. The tactile sensor is highly sensitive, light and has excellent mechanical and electrical performance and is especially suitable for the field of cutting-edge medical instruments, such as minimally invasive surgery instruments.

Description

A kind of microminiature tactile sensing element and preparation method thereof
Technical field
The present invention relates to a kind of microminiature tactile sensing element and preparation method thereof, this tactile sensing element is mainly used in the technical field of robot sense of touch skin.
Background technology
Along with in the progress of science and technology and commercial production to the progressively raising that robot sense of touch requires, robot skin technology is developed rapidly.
Pressing the touch sensor detected described in No. 2002-236059, JP, is the LC resonance circuit of coil and capacitor series connection.When coil is pressed, the inductance L of coil changes, and the resonant frequency of LC series loop also just changes, and the resonant frequency of LCR series loop here can be detected device and detect, and becomes the basis of characterization that sense of touch judges.
But, this kind of touch sensor not only constructs relative complex, and only have the Shi Caineng that changes of the inductance L when coil to cause variation of resonant frequency, and for being applied to the faint situation about pressing of touch sensor, the inductance L of coil has almost no change, the corresponding significant change that also just cannot cause resonant frequency, so there is the low inherent shortcoming of check-up inducing degree in this kind of touch sensor.
Sensing element described in JP 2005-49331 uses the micro-carbon spring of double circumvolution, pressing the touch sensor detected is LCR resonance circuit, but due to two carbon filaments forming the micro-carbon spring of double circumvolution, closely circumvolution is together, almost as the round microtubule shape, the physical property such as their retractility are very limited, sufficient distortion can not be produced for applied pressing when forming tactile sensing element, sensitivity also can be caused inadequate; And the micro-carbon spring of double circumvolution and matrix resin mixing time, first dispersion is abundant not, and it two is residual bubbles inside cylindric coil, therefore also there is machinery and the limited problem of electric property.In addition, also have the micro-carbon spring of a kind of elastomeric double circumvolution, although its two carbon filaments are with larger pitch circumvolution, form is regular not, so signal stabilization is limited, inapplicable when having a high request to signal stabilization.
Summary of the invention
For problem mentioned in background technology, the present invention proposes a kind of microminiature tactile sensing element and preparation method thereof, object is to provide electric property good, sensitive tactile sensing element solution, brings innovative to develop in robot skin contour sensitivity Application in Sensing field.
The microminiature tactile sensing element of the present invention, comprises
Main body, this main body is the compound of the heavy micro-carbon spring of circumvolution of matrix resin and, the described one heavy micro-carbon spring of circumvolution orientations in matrix resin, and along its spring shaft with certain spring diameter and pitch circumvolution regularly;
Pair of electrodes, with described bulk cured one.
In the middle of one or more embodiment of the present invention, the carbon filament diameter of the described one heavy micro-carbon spring of circumvolution is 0.05-2 micron, and spiral shell footpath is 0.1-50 micron, and pitch is 0.1-50 micron.
In the middle of one or more embodiment of the present invention, the carbon filament diameter of the described one heavy micro-carbon spring of circumvolution is 0.2-1.5 micron, and spiral shell footpath is 1-10 micron, and pitch is 0.25-5 micron.
In the middle of one or more embodiment of the present invention, the addition of the described one heavy micro-carbon spring of circumvolution accounts for the 0.1-10% of main body gross mass.
In the middle of one or more embodiment of the present invention, the parallel placement of described pair of electrodes, and described one heavily circumvolution micro-carbon spring be oriented to the direction perpendicular with described pair of electrodes, or have for the direction perpendicular with described pair of electrodes the direction being less than or equal to 15 degree of angles.
The preparation method of the microminiature tactile sensing element of the present invention, comprises the following steps:
Step a, on graphite substrate, cultivate the growth one heavily micro-carbon spring of circumvolution, and to meet carbon filament diameter be 0.05-2 micron, spiral shell footpath is 0.1-50 micron, and pitch is 0.1-50 micron;
Described one heavy circumvolution micro-carbon spring growth course: by containing iron, tin, sulphur mineral loaded on porous catalyst carrier, control temperature of reaction in a nitrogen environment at 600 ~ 900 DEG C, pass into hydrocarbon and hydrogen forms micro-nano carbon source, growth forms;
Pair of electrodes is embedded with in advance in step b, shaping casting moulds, by cut down from graphite substrate one heavily the micro-carbon spring of circumvolution be contained on this casting moulds, and by one heavily the micro-carbon spring of circumvolution stretch fixing in two ends vertically, its length of the described one heavy micro-carbon spring of circumvolution gets 0.05-2 millimeter;
Step c, in casting moulds, add matrix resin and rigidizer, 5-8 hour is placed in modulation, and curing molding obtains finished product.
In the middle of one or more embodiment of the present invention, the addition of the described one heavy micro-carbon spring of circumvolution accounts for the 0.1-10% of main body gross mass.
In the middle of one or more embodiment of the present invention, the JISA hardness requirement of described matrix resin is in the scope of 15-50.
In the middle of one or more embodiment of the present invention, described matrix resin can adopt silicones, polyurethane or epoxy resin.
In the middle of one or more embodiment of the present invention, described casting moulds is metal injection, and its specification is 10mm*10mm*3mm.
The present invention compared with prior art, its advantageous exists: the compound of one after application-oriented heavily circumvolution carbon Microspring and matrix resin is as the capacitor of tactile sensing element, use the touch sensor of tactile sensing element of the present invention can make small size and keep high sensitivity, signal stabilization, quality is light, machinery and excellent electrical properties, is specially adapted to the most advanced and sophisticated medical instruments fields such as interior invasive procedures and bio-robot field.
Accompanying drawing explanation
Fig. 1 is the scanning electron microscopy of the heavy micro-carbon spring of circumvolution of one of the present invention.
Fig. 2 is the structural representation of the microminiature tactile sensing element of the present invention.
Fig. 3 is a rectified signal legend heavily under circumvolution micro-carbon spring orientations.
Fig. 4 be one heavily circumvolution micro-carbon spring non-oriented arrangement under rectified signal legend.
Embodiment
As follows by reference to the accompanying drawings, the application's scheme is further described:
As shown in Figure 1-2, a kind of microminiature tactile sensing element, comprises
Main body 1, this main body 1 by the compound of the heavy micro-carbon spring 12 of circumvolution of matrix resin 11 and, the described one heavy micro-carbon spring 12 of circumvolution orientations in matrix resin 1, and along its spring shaft with certain spring diameter and pitch circumvolution regularly;
Pair of electrodes 2, solidifies one with described main body 1.
Wherein, described micro-carbon spring can be implemented in following preferable range:
The carbon filament diameter of described micro-carbon spring is 0.2-1.5 micron, and spiral shell footpath is 1-10 micron, and pitch is 0.25-5 micron.
The addition of the described one heavy micro-carbon spring 12 of circumvolution accounts for the 0.1-10% of main body 1 gross mass.
The parallel placement of described pair of electrodes 2, and described one heavily circumvolution micro-carbon spring 12 be oriented to the direction perpendicular with described pair of electrodes 2, or have for the direction perpendicular with described pair of electrodes 2 direction being less than or equal to 15 degree of angles.
In such scheme, the matrix resin 11 of indication is a kind of dielectric, has static capacity, plays capacitor.Matrix resin 11 can be silicones, polyurethane, epoxy resin, as the multipolymer of polystyrene and thermoplastic elastomer, styrene copolymer resin and thermoplastic elastomer, the Septon resin of Kuraray company, the liquid epoxies EXA-5850-150 etc. of large Japanese ink chemistry (strain).
And select one heavily circumvolution micro-carbon spring is larger than tight double circumvolution micro-carbon spring pitch, small pressing can produce deformation, the capital no matter from which direction come produces distortion, produce the change of L, C, R, Z, θ in LCR resonance circuit thus, the electric parameter particularly produced along the deformation in the direction of spring shaft changes maximum, thus can detect deformation quantity.Under equal conditions, the sensitivity of a heavy touch sensor for circumvolution micro-carbon spring is 1.5 ~ 200 times of the touch sensor of the micro-carbon spring of double circumvolution.And, use one of orientation heavily to revolve the minimum of the touch sensor of micro-carbon spring and detect 1.2 ~ 1000 times that value is the touch sensor of the micro-carbon spring of double circumvolution.
A preparation method for microminiature tactile sensing element, comprises the following steps:
Step a, on graphite substrate, cultivate the growth one heavily micro-carbon spring 12 of circumvolution, and to meet carbon filament diameter be 0.05-2 micron, spiral shell footpath is 0.1-50 micron, and pitch is 0.1-50 micron;
Described one heavy circumvolution micro-carbon spring 12 growth course: using containing iron, tin, sulphur mineral loaded to porous catalyst carrier (graphite substrate) as catalyzer and promoter, control temperature of reaction in a nitrogen environment at 600 ~ 900 DEG C, pass into hydrocarbon and hydrogen forms micro-nano carbon source, growth forms; Wherein, in described mineral, tin element and copper sulphur account for less than 50% of mineral general assembly (TW), and ferro element accounts for more than 10% of mineral general assembly (TW).
Pair of electrodes 2 is embedded with in advance in step b, shaping casting moulds, by cut down from graphite substrate one heavily the micro-carbon spring 12 of circumvolution be contained on this casting moulds, and by one heavily the micro-carbon spring 12 of circumvolution stretch fixing in two ends vertically, its length of the described one heavy micro-carbon spring 12 of circumvolution gets 0.05-2 millimeter;
Step c, in casting moulds, add matrix resin 11 and rigidizer, 5-8 hour is placed in modulation, and curing molding obtains finished product.Above-mentioned standing time is determined by the addition of the characteristic of matrix resin 11 and rigidizer, and be generally good at 5-8 hour, in experiment, most of matrix resin is placed and just realized solidification in 7 hours; Certainly, indivedual matrix resin is placed and within 3-4 hour, also can be realized solidification.
The addition of the described one heavy micro-carbon spring 12 of circumvolution accounts for the 0.1-10% of main body gross mass, and preferred value is 5% and 7%.The dilatation of the one heavy micro-carbon spring 12 of circumvolution, the change of length causes the inductance L in LCR loop, electric capacity C, and resistance R, the change of impedance Z and position phase θ.One heavily the micro-carbon spring 12 of circumvolution addition very little time, electric capacity C composition plays a major role, and sense of touch sensitivity declines, and affects mouldability time too many; The Main Function that resistance R embodies is when addition is suitable time, and LCR resonant interaction reaches most intensity values.
The JISA hardness requirement of described matrix resin 11 is in the scope of 15-50, if hardness is too low, resin matrix is too soft, and detect noise large, signal to noise ratio (S/N ratio) is too little; On the contrary, if hardness is too large, resin matrix is too hard, and stress spread is poor, and sensitivity declines.
Described matrix resin 11 can adopt silicones, polyurethane or epoxy resin, and other in addition also can be adopted according to demand to close other base resin material of symbol hardness standard.
Described casting moulds is metal injection, and its shaping specification is: long 10mm, wide 10mm, thickness 3mm.
Based on the structure of above-mentioned sensing element, shaping sensing element (long 10mm, wide 10mm, thickness 3mm) can also be cut, be divided into the large less some micro components of size; The range of size of this some micro component is (50-500 micron) * (50-500 micron) * (50-500 micron).
Concrete enforcement and experiment method:
By precomputation 5% weight ratio one heavily the micro-carbon spring of circumvolution cut off from graphite substrate, be contained in be embedded with electrode casting of metals mould (long 10mm, wide 10mm, thickness 3mm) on, during cutting, cut surface is parallel with graphite substrate;
By one, heavily the micro-carbon spring shaft of circumvolution is fixing to two ends stretching, then matrix resin (the silicones of SHIN-ETSU HANTOTAI chemistry KE103 is injected, its JISA hardness is 16) and rigidizer, modulation placement is after 7 hours, forms the tactile sensing element of a heavy micro-carbon spring of circumvolution after solidification.
On electrode, apply 0.5V, the voltage of 200KHz, and in one heavily the micro-carbon spring shaft of circumvolution to progressively applying loading (load of key value is respectively 1gf, 2gf, 10gf, 20gf), measure corresponding electric parameter.
We generally convert DC voltage to by the absolute value output signal of aobvious ripple device Agilent-54621A to LC and R and measure.Specifically, the alternating current of two groups of 0.5V, 200KHz is put on sensing element by electrode, wherein one group of alternating current has the phase shift of 90 degree relative to another group; Two groups of alternating currents superpose counteracting mutually, export to obtain a mild signal.
When some stress is applied to sensor component, LC and the R parameter of a heavy micro-carbon spring of circumvolution will change, thus modulating action exports in above-mentioned flattened signal to produce corresponding signal.
As shown in Figure 3, be a detection gained signal heavily after circumvolution micro-carbon spring orientations, can see that the signal waveform forming degree of orientations is good, highly sensitive, be convenient to detect and respond.
Meanwhile, as a comparison case, we introduce as shown in Figure 4 one heavily circumvolution micro-carbon spring non-oriented arrangement detection gained signal.Can find out under comparing, the signal waveform amplitude fluctuations that the signal waveform of orientations arranges than non-oriented is more obvious, improves the precision of loading identification.
Above-mentioned preferred implementation should be considered as illustrating of the application's scheme implementation mode, allly to duplicate with the application's scheme, technology that is approximate or that make based on this is deduced, replaces, improvement etc., all should be considered as the protection domain of this patent.

Claims (10)

1. a microminiature tactile sensing element, is characterized in that: comprise
Main body, this main body is the compound of the heavy micro-carbon spring of circumvolution of matrix resin and, the described one heavy micro-carbon spring of circumvolution orientations in matrix resin, and along its spring shaft with certain spring diameter and pitch circumvolution regularly;
Pair of electrodes, with described bulk cured one.
2. a kind of microminiature tactile sensing element according to claim 1, is characterized in that: the carbon filament diameter of the described one heavy micro-carbon spring of circumvolution is 0.05-2 micron, and spiral shell footpath is 0.1-50 micron, and pitch is 0.1-50 micron.
3. a kind of microminiature tactile sensing element according to claim 2, is characterized in that: the carbon filament diameter of the described one heavy micro-carbon spring of circumvolution is 0.2-1.5 micron, and spiral shell footpath is 1-10 micron, and pitch is 0.25-5 micron.
4. a kind of microminiature tactile sensing element according to claim 1, is characterized in that: the addition of the described one heavy micro-carbon spring of circumvolution accounts for the 0.1-10% of main body gross mass.
5. a kind of microminiature tactile sensing element according to claim 1, it is characterized in that: the parallel placement of described pair of electrodes, and described one heavily circumvolution micro-carbon spring be oriented to the direction perpendicular with described pair of electrodes, or have for the direction perpendicular with described pair of electrodes the direction being less than or equal to 15 degree of angles.
6. a preparation method for microminiature tactile sensing element, is characterized in that, comprises the following steps:
Step a, on graphite substrate, cultivate the growth one heavily micro-carbon spring of circumvolution, and to meet carbon filament diameter be 0.05-2 micron, spiral shell footpath is 0.1-50 micron, and pitch is 0.1-50 micron;
Described one heavy circumvolution micro-carbon spring growth course: by containing iron, tin, sulphur mineral loaded on porous catalyst carrier, control temperature of reaction in a nitrogen environment at 600 ~ 900 DEG C, pass into hydrocarbon and hydrogen forms micro-nano carbon source, growth forms;
Pair of electrodes is embedded with in advance in step b, shaping casting moulds, by cut down from graphite substrate one heavily the micro-carbon spring of circumvolution be contained on this casting moulds, and by one heavily the micro-carbon spring of circumvolution stretch fixing in two ends vertically, its length of the described one heavy micro-carbon spring of circumvolution gets 0.05-2 millimeter;
Step c, in casting moulds, add matrix resin and rigidizer, 5-8 hour is placed in modulation, and curing molding obtains finished product.
7. the preparation method of a kind of microminiature tactile sensing element according to claim 6, is characterized in that: the addition of the described one heavy micro-carbon spring of circumvolution accounts for the 0.1-10% of main body gross mass.
8. the preparation method of a kind of microminiature tactile sensing element according to claim 6, is characterized in that: the JISA hardness requirement of described matrix resin is in the scope of 15-50.
9. the preparation method of a kind of microminiature tactile sensing element according to claim 6, is characterized in that: described matrix resin can adopt silicones, polyurethane or epoxy resin.
10. the preparation method of a kind of microminiature tactile sensing element according to claim 4, it is characterized in that: described casting moulds is metal injection, its specification is 10mm*10mm*3mm.
CN201510385801.9A 2015-07-03 2015-07-03 A kind of microminiature tactile sensing element and preparation method thereof Active CN105043604B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510385801.9A CN105043604B (en) 2015-07-03 2015-07-03 A kind of microminiature tactile sensing element and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510385801.9A CN105043604B (en) 2015-07-03 2015-07-03 A kind of microminiature tactile sensing element and preparation method thereof

Publications (2)

Publication Number Publication Date
CN105043604A true CN105043604A (en) 2015-11-11
CN105043604B CN105043604B (en) 2016-09-28

Family

ID=54450325

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510385801.9A Active CN105043604B (en) 2015-07-03 2015-07-03 A kind of microminiature tactile sensing element and preparation method thereof

Country Status (1)

Country Link
CN (1) CN105043604B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107290082A (en) * 2016-04-11 2017-10-24 刘垚 A kind of capacitance type touch sensor
CN111586945A (en) * 2020-05-29 2020-08-25 福建星宏新材料科技有限公司 Single-key touch-press dimming switch and switch dimming method
CN112146793A (en) * 2020-11-26 2020-12-29 南京高华科技股份有限公司 LC composite MEMS tactile pressure sensor and preparation method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005049331A (en) * 2003-07-11 2005-02-24 Seiji Motojima Sensor
CN101915629A (en) * 2010-07-09 2010-12-15 济南大学 Freezing resistant cement based stress sensor element
KR20110110388A (en) * 2010-04-01 2011-10-07 한국표준과학연구원 Method of manufacturing pressure sensitive device, pressure sensitive device manufactured by the same method and pressure measurement method using the same device
CN103616097A (en) * 2013-10-22 2014-03-05 中国石油大学(华东) Flexible film tactile sensor and production method thereof
CN205015106U (en) * 2015-07-03 2016-02-03 广东双虹新材料科技有限公司 Microminiature touch sensing component

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005049331A (en) * 2003-07-11 2005-02-24 Seiji Motojima Sensor
KR20110110388A (en) * 2010-04-01 2011-10-07 한국표준과학연구원 Method of manufacturing pressure sensitive device, pressure sensitive device manufactured by the same method and pressure measurement method using the same device
CN101915629A (en) * 2010-07-09 2010-12-15 济南大学 Freezing resistant cement based stress sensor element
CN103616097A (en) * 2013-10-22 2014-03-05 中国石油大学(华东) Flexible film tactile sensor and production method thereof
CN205015106U (en) * 2015-07-03 2016-02-03 广东双虹新材料科技有限公司 Microminiature touch sensing component

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107290082A (en) * 2016-04-11 2017-10-24 刘垚 A kind of capacitance type touch sensor
CN107290082B (en) * 2016-04-11 2019-12-20 刘垚 Capacitive touch sensor
CN111586945A (en) * 2020-05-29 2020-08-25 福建星宏新材料科技有限公司 Single-key touch-press dimming switch and switch dimming method
CN112146793A (en) * 2020-11-26 2020-12-29 南京高华科技股份有限公司 LC composite MEMS tactile pressure sensor and preparation method thereof
CN112146793B (en) * 2020-11-26 2021-04-02 南京高华科技股份有限公司 LC composite MEMS tactile pressure sensor and preparation method thereof

Also Published As

Publication number Publication date
CN105043604B (en) 2016-09-28

Similar Documents

Publication Publication Date Title
Cai et al. Extraordinarily Stretchable All‐Carbon Collaborative Nanoarchitectures for Epidermal Sensors
CN105043604A (en) Mini tactile sensor and manufacturing method thereof
Giffney et al. Highly stretchable printed strain sensors using multi-walled carbon nanotube/silicone rubber composites
Wang et al. A highly sensitive and flexible pressure sensor with electrodes and elastomeric interlayer containing silver nanowires
KR101723804B1 (en) Capacitive force sensor and method for preparing the same
CN205015106U (en) Microminiature touch sensing component
EP2112192B1 (en) Composite elements with controlled electrical conduction
Prituja et al. Electromagnetically enhanced soft and flexible bend sensor: A quantitative analysis with different cores
Bica et al. Influence of magnetic field on dispersion and dissipation of electric field of low and medium frequencies in hybrid magnetorheological suspensions
Feng et al. Stretchable multifunctional dielectric nanocomposites based on polydimethylsiloxane mixed with metal nanoparticles
CN103140741A (en) Method and apparatus for sensing magnetic fields
Choi et al. Strain sensing characteristics of rubbery carbon nanotube composite for flexible sensors
Stassi et al. Impedance spectroscopy analysis of the tunnelling conduction mechanism in piezoresistive composites
Jiang et al. Electrical Breakdown‐Induced Tunable Piezoresistivity in Graphene/Polyimide Nanocomposites for Flexible Force Sensor Applications
Wu et al. Extraordinary electromechanical actuation of Ti2C MXene
KR102059546B1 (en) Strain sensor comprising insulation structure and method of manufacturing the same
Kar et al. A review on flexible sensors for soft robotics
JP2009229261A (en) High directivity sensor and its manufacturing method
JP2006337118A (en) Elastomer sensor and vibration detection method using same
JP4051043B2 (en) Pressure sensor
CN112729626B (en) Linear capacitive touch sensor and preparation method thereof
CN208026209U (en) A kind of elastoresistance foil gauge
KR101896158B1 (en) Sensor and manufacturing method of the same
Nguyen et al. Characterization and optimization of flexible dual mode sensor based on Carbon Micro Coils
KR102171318B1 (en) High Elasticity Polymer Composite Strain Sensor And Method for Manufacturing the Same

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20180518

Address after: 518103 Guangdong Shenzhen Baoan District Fuyong street Great Ocean Road 90, COFCO (Fu'an) robotics Industrial Park 6 208

Patentee after: Shenzhen Fuxuan New Material Technology Co., Ltd.

Address before: 528400 Zhongshan, Guangdong Torch Development Zone, 6 Xiang Hao Road, North Tower, 220 Trade Building

Patentee before: Guangdong Shuan Hong new material Science and Technology Ltd.