CN105005010B - A kind of low-power consumption magnetoresistive transducer based on LTCC technology and preparation method thereof - Google Patents
A kind of low-power consumption magnetoresistive transducer based on LTCC technology and preparation method thereof Download PDFInfo
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Abstract
The invention provides a kind of low-power consumption magnetoresistive transducer based on LTCC technology and preparation method thereof, belong to magnetic material and component technical field.Including substrate, the bottom coil for being sequentially located at substrate, the first green material strip layer, top layer coil, the second green material strip layer, four end Wheatstone bridge formula anisotropic magnetoresistive sensing unit layers；The bottom coil is connected with top layer coil by metal throuth hole, and bottom coil is consistent with direction of current flow in top layer coil, can strengthen magnetic field.Magnetoresistive transducer of the present invention is prepared using the set/reset coil layer for optimizing structure and using LTCC technology, so that there is provided the magnetic field for meeting application demand on the basis of any magnetic auxiliary layer is not added, and reduction set/reset operates brought energy consumption simultaneously, and technique is simple, it is easy to accomplish.
Description
Technical field
The invention belongs to magnetic material and component technical field, and in particular to one kind is using LTCC (Low
Temperature Co-fired Ceramics) technology realizes the preparation method of low-power consumption magnetoresistive transducer.
Background technology
Anisotropic magnetoresistive sensor is to utilize magnetic material, such as NiFe, CoFe, Co, under different magnetic fields
Different resistance values is presented to realize the detection of external magnetic field；Wherein, the size R of anisotropic magnetoresistance is met：R=R0+Δ
Rcos2θ(R0：Resistance value under zero magnetic field；ΔR：Anisotropic magnetoresistive maximum changing value；θ：The sense of current and magnetic layer side
To angle).Such current sensor is widely used to the fields such as magnetic resistance encoder, displacement transducer, electronic compass.And it is beautiful
Honeywell companies of state are the leading providers of such sensor.At present, the magnetoresistive transducer that the said firm provides is based primarily upon half
Conductor technology combination vacuum film deposition technology is made, and it is constituted such as " SET/RESET Function for Magnetic substantially
Sensors",Application note AN213,Honeywell Sensor Products,Solid State
In Electronics Center, www.magneticsensors.com, December, 2002 shown in Figure 3.From the figure
In the magnetoresistive transducer that provides of visible Honeywell companies using Si substrates as base material, and whole sensor main will be by
Offset line ring layer, set/reset coil layer and four end Wheatstone bridge formula anisotropic magnetoresistive sensing unit layers are (by with larger
The material of anisotropic magneto-resistive effect, such as NiFe, CoFe, Co are made) three parts composition.Wherein offset line ring layer is mainly used in
Eliminate bridge offset of the four end Wheatstone bridge formula anisotropic magnetoresistive sensing unit layers in null field, electric bridge during due to null field
The depolarized of biasing can also be realized by set/reset coil layer, thus can be omitted in preparation process.
For a reliable anisotropic magnetoresistive sensor, set/reset coil layer is vital, and it is mainly played
Ensure the effect of anisotropic magnetoresistive sensor precision and reliability.The function of set/reset coil layer is as follows：When four end favours this
After the completion of prepared by energization bridge-type anisotropic magnetoresistive sensing unit layer, the magnetic moment that it is used in the magnetosphere of magnetic sensing is initially by edge
Parallel to long axis direction orientation, and its short-axis direction is then detection direction.According to the expression formula R=R of anisotropic magnetoresistance0+
ΔRcos2θ is understood, on the premise of the test sense of current is certain, and the size of anisotropic magnetoresistance depends on magnetospheric magnetic
Change direction, and the magnetospheric direction of magnetization is jointly true by the magnetic moment orientation in magnetosphere before the external magnetic field of required detection and detection
It is fixed.Because magnetic moment orientation can be deviateed initially due to the influence in previous test magnetic field and external interference magnetic field in magnetosphere before detection
Along the orientation parallel to long axis direction, thus to ensure accuracy and reliability to detection of magnetic field, utilizing anisotropic magnetic
Electric resistance sensor is required to being magnetized into magnetospheric magnetic moment into the orientation parallel to long axis direction before being detected.And set/multiple
Bit line ring layer be exactly utilize in set/reset coil produced by the electric current that passes through along magnetosphere long axis direction and sufficiently large magnetic
(generally coercitive 5 times of magnetic sensing unit magnetosphere) is realized all magnetic in anisotropic magnetoresistive sensor magnetosphere
Square is oriented in parallel long axis direction.By taking conventional anisotropic magnetoresistive sensing material NiFe as an example, it generally requires set/reset
Coil layer produces the magnetic field more than 20Oe to realize the magnetosphere in magnetic sensing layer in anisotropic magnetoresistive sensor magnetosphere
Magnetic moment is orientated along major axis.But, due to set/reset coil layer and four end Wheatstone bridge formula anisotropic magnetoresistive sensing units
Layer is made by metal material, thus industrial quarters typically uses the SiO of 1-5 μm of vacuum moulding machine between these two layers there2Layer is realized
This two layers insulation, and the addition of insulating barrier improves to produce in anisotropic magnetoresistive sensor magnetosphere and is more than 20Oe magnetic fields
Difficulty.In order to solve this problem, such sensor provider by representative of Honeywell Corp. USA is main to use
Increase by one layer of magnetic auxiliary layer on set/reset coil to play a part of aggregation magnetic line of force increase magnetic field, and set/reset
The electric current for passing to 0.5A sizes is needed to can be only achieved the magnetic field (U.S.Patent of required 20Oe sizes in coil
US6717403B2).But, this way causes photoetching, coating times increase, increases the difficulty of sensor preparation；In addition,
Set/reset operation can be carried out before each test, when it is applied to intensive, big data quantity and uninterrupted test,
Set/reset operation will bring larger energy consumption.By taking the HMC1021 type magnetoresistive transducers of Honeywell Corp. USA as an example, its
The instantaneous energy consumption that set/reset operation is brought is 1.75W.Therefore, if going out from set/reset coil layer structure optimization design
Hair, there is provided the magnetic field for meeting application demand on the basis of any magnetic auxiliary layer is not added, and reduces set/reset simultaneously
The brought energy consumption of operation, and the preparation of such sensor can be realized on the basis of technology difficulty is not increased or decreased, this will
Substantially reduce the cost of such sensor and prepare difficulty, contribute to the development of magnetic sensory field.
The content of the invention
A kind of defect that the present invention exists for background technology, it is proposed that low-power consumption magnetoresistive transducer based on LTCC technology
And preparation method thereof.Magnetoresistive transducer of the present invention is prepared using the set/reset coil layer for optimizing structure and using LTCC technology,
So that there is provided the magnetic field for meeting application demand on the basis of any magnetic auxiliary layer is not added, and set/reset is reduced simultaneously
The brought energy consumption of operation, and technique is simple, it is easy to accomplish.
Technical scheme is as follows：
A kind of low-power consumption magnetoresistive transducer based on LTCC technology, including substrate, the bottom line for being sequentially located at substrate
Circle, the first green material strip layer, top layer coil, the second green material strip layer, four end Wheatstone bridge formula anisotropic magnetoresistive sensings are single
First layer；The bottom coil is connected with top layer coil by metal throuth hole, and bottom coil and electric current flowing side in top layer coil
To consistent, magnetic field can be strengthened.
Further, the substrate, bottom coil, the first green material strip layer, top layer coil, the second green material strip layer, four
The electric bridge extraction wire part of Wheatstone bridge formula anisotropic magnetoresistive sensing unit layer is held to be prepared using LTCC technology, described four
The magnetic transducing unit in Wheatstone bridge formula anisotropic magnetoresistive sensing unit layer is held to be prepared using vacuum coating technology.
Further, the bottom coil and the thickness of top layer coil are 1~5 μm, the first green material strip layer and the
The thickness of two green material strip layers is 10~50 μm.
Further, the bottom coil is identical with the line spacing in top layer coil, and line width is corresponding.
A kind of preparation method of the low-power consumption magnetoresistive transducer based on LTCC technology, comprises the following steps：
Step 1：From nonmagnetic LTCC dielectric materials as curtain coating baseplate material, substrate is made using LTCC technology；
Step 2：Bottom coil is prepared on the substrate that step 1 is obtained；Then one layer of green material is prepared on bottom coil
Band diaphragm, obtains the first green material strip layer；
Step 3：Top layer coil is prepared on the first green material strip layer that step 2 is obtained, is then prepared in top layer coil
One layer or two layers of green material strip diaphragm, are used as the second green material strip layer；The top layer coil passes through metal throuth hole with bottom coil
Connection；
Step 4：Four end Wheatstone bridge formula anisotropic magnetoresistives are prepared on the second green material strip layer that step 3 is obtained to pass
Feel the electric bridge extraction wire part of elementary layer, then carry out the common burning of green material strip diaphragm and metallic conductor；Finally use vacuum
Vapour deposition method deposition of magnetic material, obtains the magnetic transducing list in four end Wheatstone bridge formula anisotropic magnetoresistive sensing unit layers
Member, so as to complete the preparation process of magnetoresistive transducer of the present invention.
Further, the preparation of bottom coil described in step 2 uses silver paste, is prepared using the method for silk-screen printing；
The preparation of top layer coil described in step 3 uses silver paste, is prepared using the method for silk-screen printing；Used in the metal throuth hole
Silver paste filling perforation, realizes connecting for bottom coil and top layer coil.
Further, the part of electric bridge extraction wire described in step 4 is prepared using silver paste, using method for printing screen.
Further, the thickness of the green material strip diaphragm is 10~50 μm, the thickness of the bottom coil and top layer coil
Spend for 1~5 μm.
Further, the bottom coil is identical with the line spacing in top layer coil, and line width is corresponding.
Beneficial effects of the present invention are：
1st, the double-deck coupling type coil that the present invention is constituted using bottom coil and top layer coil is used as set/reset coil
Layer, is greatly improved magnetic field so that there is provided the magnetic field for meeting application demand on the basis of any magnetic auxiliary layer is not added；
Calculated by theoretical simulation, be long L≤3000 μm and wide W≤3000 μm model in area shared by fixed set/reset coil layer
In enclosing (with reference to current Honeywell companies HMC102X series of products set/reset coil layer size), fixing line spacing dg is
20 μm, from different line width and coil turn in the case of, be 10-20 μm away from set/reset coil layer (1-2 layers of green material
Tape thickness) four end Wheatstone bridge formula anisotropic magnetoresistive sensing units layers the magnetic field of 20Oe sizes, its instantaneous power consumption are provided
Only between 0.189W-0.368W, as shown in table 1, relatively the instantaneous power consumption of commercialized similar magnetoresistive transducer has 500% at present
Decline above.
2nd, LTCC technology is introduced into the preparation of magnetoresistive transducer by the present invention, can conveniently realize the preparation of double-layer coil, letter
Preparation technology is changed, it is easy to extensive to realize；Simultaneously as the green material strip diaphragm in LTCC technology insulate in itself, it is not necessary to
Insulating barrier is coated with addition, is simplified the preparation technology of magnetoresistive transducer, is reduced cost.
Brief description of the drawings
Bottom coil and top layer coil group in the low-power consumption magnetoresistive transducer based on LTCC technology that Fig. 1 provides for the present invention
Into set/reset coil layer structural representation, wherein, 1 is bottom coil, and 2 be top layer coil, and 3 be metal throuth hole；
The schematic diagram of top layer coil in the low-power consumption magnetoresistive transducer based on LTCC technology that Fig. 2 provides for the present invention；
The schematic diagram of bottom coil in the low-power consumption magnetoresistive transducer based on LTCC technology that Fig. 3 provides for the present invention；
The reserved four ends favour stone electricity of top layer in the low-power consumption magnetoresistive transducer based on LTCC technology that Fig. 4 provides for the present invention
Bridge bridge arm magnetic transducing unit style preparation area domain and lithography alignment mark schematic diagram, wherein, 4 be magnetic on four end Wheatstone bridge bridge arms
Property sensing unit be coated with position, 5 be lithography alignment mark；
The effect of the low-power consumption magnetoresistive transducer set/reset coil circuit based on LTCC technology that Fig. 5 provides for the present invention
Front and rear sensor response curve comparison diagram.
Embodiment
The present invention is done with reference to the accompanying drawings and examples and further introduced.
As shown in figure 1, the structural representation of the set/reset coil layer in the magnetoresistive transducer provided for the present invention；Institute
State set/reset coil layer and couple type coil, including bottom coil 1 and top layer coil 2, the bottom coil and top layer to be double-deck
Coil is connected by metal throuth hole 3, and bottom coil is consistent with direction of current flow in top layer coil, can strengthen magnetic field.
Further, the bottom coil is identical with the line spacing in top layer coil, and line width is corresponding.
The schematic diagram of top layer coil in the low-power consumption magnetoresistive transducer based on LTCC technology that Fig. 2 provides for the present invention；It is long
While being L, broadside is W, and different sizes is used around line width, and conductor width is set to dw2, region I in the I of region in wherein Fig. 2
Area conductor width is set to dw1 in addition, generally dw1>Dw2, and line spacing uses identical size dg.
The schematic diagram of bottom coil in the low-power consumption magnetoresistive transducer based on LTCC technology that Fig. 3 provides for the present invention；It is long
While being L, broadside is W, and different sizes is used around line width, and conductor width is set to dw2, region in region II in wherein Fig. 3
Area conductor width is set to dw1 beyond II, generally dw1>Dw2, and line spacing uses identical size dg.
A kind of preparation method for low-power consumption magnetoresistive transducer based on LTCC technology that the present invention is provided, is specifically included following
Step：
Step 1：From nonmagnetic LTCC microwave dielectric materials as curtain coating baseplate material, using LTCC technology, n is made
Layer green material strip diaphragm, is used as substrate；
Step 2：Bottom coil, Ran Hou are prepared with the method for silk-screen printing on the substrate that step 1 is obtained using silver paste
One layer of green material strip diaphragm is prepared on bottom coil again, the first green material strip layer is used as；
Step 3：Silver paste silk-screen printing top layer coil is used on the first green material strip layer that step 2 is obtained, and passes through line
Top layer coil is connected and (uses silver paste) by the metal throuth hole in circle center with top layer coil, forms the set/reset line of double-deck coupling
Ring layer, as shown in Figure 1；
Step 4：1~2 layer of green material strip diaphragm is prepared using LTCC technology in the top layer coil that step 3 is obtained, as
Second green material strip layer；Then the end Wheatstone bridge formula anisotropy of silver paste silk-screen printing four is used again on the second green material strip layer
The electric bridge extraction wire part of magneto-resistive transducing elementary layer, reserves magnetic transducing unit on four end Wheatstone bridge bridge arms and is coated with position
And default lithography alignment mark, as shown in Figure 4；
Step 5：The common burning of green material strip diaphragm and metallic conductor is realized at 900 DEG C, is then existed using photoetching process
LTCC modules top layer exposes magnetic transducing unit figure on four end Wheatstone bridge bridge arms, is had using technique for vacuum coating deposition
The magnetic material of large anisotropy change rate of magnetic reluctance, completes the preparation of the magnetoresistive transducer.
Further, the bottom coil and top layer coil be as shown in Fig. 3 and Fig. 2, wherein to make double-deck coupling set/multiple
The overall dimension of two layers of coil of bit line circle is limited in the range of long side L≤3000 μm and broadside W≤3000 μm (with reference at present
Honeywell companies HMC102X series of products set/reset coil layers size), used around line width in different sizes, Fig. 2
The conductor width of region II is set to dw2 in region I and Fig. 3, and other area conductor width are dw1, generally dw1>
Dw2, and line spacing uses identical size dg.
Embodiment
A kind of preparation method of the low-power consumption magnetoresistive transducer based on LTCC technology, specifically includes following steps：
Step 1：From Al2O3The LTCC materials being combined with glass, using LTCC technology, are first folded as curtain coating baseplate material
About 400 μm of green material strip diaphragm, obtains substrate；
Step 2：Bottom coil is obtained using silver paste silk-screen printing on the substrate that step 1 is obtained, then in bottom coil
On to fold a layer thickness again be about 10 μm of green material strip diaphragm, be used as the first green material strip layer；
Step 3：On the first green material strip layer that step 2 is obtained, using silver paste silk-screen printing top layer coil, and pass through line
Top layer coil is connected and (uses silver paste) by the metal throuth hole in circle center with top layer coil, forms the set/reset line of double-deck coupling
Ring layer, wherein, top layer and bottom coil size are：Dw1=60 μm, dw2=20 μm, number of turn N=18, dg=20 μm of line spacing；
Step 4：One layer of green material strip diaphragm is prepared using LTCC technology in the top layer coil that step 3 is obtained, the is used as
Two green material strip layers；Then the end Wheatstone bridge formula anisotropic magnetic of silver paste silk-screen printing four is used again on the second green material strip layer
The electric bridge extraction wire part of sensing unit layer is hindered, and reserves magnetic transducing unit on four end Wheatstone bridge bridge arms and is coated with position
And default lithography alignment mark, as shown in Figure 4；
Step 5：The common burning of green material strip diaphragm and metallic conductor is realized at 900 DEG C, is then existed using photoetching process
LTCC modules top layer exposes magnetic transducing unit figure on four end Wheatstone bridge bridge arms, and 20nm is deposited using technique for vacuum coating
NiFe films as the sensing unit on four end favour stone list bridge four bridge legs, complete the preparation of the magnetoresistive transducer.
The output that the magnetoresistive transducer that the embodiment of the present invention is prepared is tested before and after set/reset circuit function is bent
Line, wherein set/reset circuit drives electric current are set to 0.2A, and first short along sensing unit before set/reset circuit function
Direction of principal axis applies the interference magnetic field of a 100Oe, tests obtained curve as shown in Figure 5.As shown in Figure 5, when with one interference magnetic field
After effect, not by the sensor of set/reset circuit operation, with the change of external magnetic field its output voltage not with external magnetic field
Change and change, it is impossible to realize the purpose to magnetic field sensing；And after 2 μ s of set or the reset pulse function of current are employed, nothing
By from negative fluxfield test to positive flux field or positive flux field test to negative fluxfield, the curve of output of sensor is with the change of external magnetic field
And change, linear relationship is presented, the detection of external magnetic field can be achieved；Show the double-layer coil that the present invention is prepared using LTCC techniques
The set/reset coil layer of composition has good set, reset function.In addition, after tested, the set of sample bilayer coupled mode/
Reset line ring layer resistance is 10.5 Ω, and the instantaneous power of its set/reset coil is only 0.42W, is passed with Honeywell same types
The set/reset coil 1.75W of sensor instantaneous power compares, and has about 400% decline, effectively reduces power consumption.
Table 1 is test data of the magnetoresistive transducer of the present invention under different coil dimensions and the number of turn, wherein：dw1、dw2
For bottom coil and top layer coil wire line width, unit for μm；T is that set/reset coil layer is each away from four end Wheatstone bridge formulas
Anisotropy magneto-resistive transducing elementary layer distance, unit for μm；N is coil turn；R is double-deck coupling coil resistance, and unit is Ω；I
For set/reset coil layer driving current, unit is A；P is set/reset coil layer instantaneous power, and unit is W.Can by table 1
Know, the magnetoresistive transducer that the present invention is provided can effectively reduce set/reset and operate brought energy consumption.
Test data under the different coil dimension of table 1 and the number of turn
| Emulate size | N | R | I | P |
| Dw1=60, dw2=20, t=10 | 18 | 9.21 | 0.15 | 0.207 |
| Dw1=76, dw2=30, t=10 | 15 | 5.67 | 0.19 | 0.204 |
| Dw1=100, dw2=40, t=10 | 12 | 3.39 | 0.24 | 0.195 |
| Dw1=140, dw2=50, t=10 | 9 | 1.97 | 0.31 | 0.189 |
| Dw1=60, dw2=20, t=20 | 18 | 9.21 | 0.21 | 0.368 |
| Dw1=76, dw2=30, t=20 | 15 | 5.67 | 0.25 | 0.354 |
| Dw1=100, dw2=40, t=20 | 12 | 3.39 | 0.28 | 0.265 |
| Dw1=140, dw2=50, t=20 | 9 | 1.97 | 0.35 | 0.241 |
The double-layer coil that the present invention is constituted using bottom coil and top layer coil, can be significantly as set/reset coil layer
Improve magnetic field so that there is provided the magnetic field for meeting application demand and reduce power consumption on the basis of any magnetic auxiliary layer is not added.
The present invention is combined to prepare anisotropic magnetoresistive sensor using LTCC technology and vacuum coating technology, wherein, except four end favours
Magnetic transducing unit in stone bridge type anisotropic magnetoresistive sensing unit layer prepares outer, sensor using vacuum coating technology
Remainder realized using LTCC technology, can conveniently realize the preparation of double-layer coil, simplify preparation technology, it is easy to big rule
Mould is realized；Simultaneously as the green material strip diaphragm in LTCC technology has good insulating properties, it can be achieved with putting simultaneously
Insulation between position/reset line ring layer and four end Wheatstone bridge formula anisotropic magnetoresistive sensing units layer, as insulating barrier, no
With insulating barrier is coated with addition, the preparation technology difficulty and processing step of magnetoresistive transducer are enormously simplify, cost is reduced.
Claims (7)
1. a kind of low-power consumption magnetoresistive transducer based on LTCC technology, including substrate, be sequentially located at substrate bottom coil,
First green material strip layer, top layer coil, the second green material strip layer, four end Wheatstone bridge formula anisotropic magnetoresistive sensing units
Layer；The bottom coil is connected with top layer coil by metal throuth hole, and bottom coil and direction of current flow in top layer coil
Unanimously, magnetic field can be strengthened.
2. the low-power consumption magnetoresistive transducer according to claim 1 based on LTCC technology, it is characterised in that the substrate,
Bottom coil, the first green material strip layer, top layer coil, the second green material strip layer, four end Wheatstone bridge formula anisotropic magnetoresistives
The electric bridge extraction wire part of sensing unit layer is prepared using LTCC technology, the four ends Wheatstone bridge formula anisotropic magnetoresistive
Magnetic transducing unit in sensing unit layer is prepared using vacuum coating technology.
3. the low-power consumption magnetoresistive transducer according to claim 1 based on LTCC technology, it is characterised in that the bottom line
Circle and the thickness of top layer coil are 1~5 μm, and the thickness of the first green material strip layer and the second green material strip layer is 10~50 μ
m。
4. the low-power consumption magnetoresistive transducer according to claim 1 based on LTCC technology, it is characterised in that the bottom line
Circle is identical with the line spacing in top layer coil, and line width is corresponding.
5. a kind of preparation method of the low-power consumption magnetoresistive transducer based on LTCC technology, comprises the following steps：
Step 1：From nonmagnetic LTCC dielectric materials as curtain coating baseplate material, substrate is made using LTCC technology；
Step 2：Bottom coil is prepared on the substrate that step 1 is obtained；Then one layer of green material strip film is prepared on bottom coil
Piece, obtains the first green material strip layer；
Step 3：Top layer coil is prepared on the first green material strip layer that step 2 is obtained, one layer is then prepared in top layer coil
Or two layers of green material strip diaphragm, it is used as the second green material strip layer；The top layer coil is connected with bottom coil by metal throuth hole；
Step 4：Four end Wheatstone bridge formula anisotropic magnetoresistive sensings are prepared on the second green material strip layer that step 3 is obtained single
The electric bridge extraction wire part of first layer, then carries out the common burning of green material strip diaphragm and metallic conductor；Finally use vacuum evaporation
Method deposition of magnetic material, obtains the magnetic transducing unit in four end Wheatstone bridge formula anisotropic magnetoresistive sensing unit layers, from
And complete the preparation of the magnetoresistive transducer.
6. the preparation method of the low-power consumption magnetoresistive transducer according to claim 5 based on LTCC technology, it is characterised in that
The preparation of bottom coil described in step 2 uses silver paste, is prepared using the method for silk-screen printing；Top layer coil described in step 3
Preparation use silver paste, prepared using the method for silk-screen printing；Silver paste filling perforation is used in the metal throuth hole, bottom is realized
Coil is connected with top layer coil.
7. the preparation method of the low-power consumption magnetoresistive transducer according to claim 5 based on LTCC technology, it is characterised in that
The part of electric bridge extraction wire described in step 4 is prepared using silver paste, using method for printing screen.
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| CN105572610B (en) * | 2015-12-23 | 2018-03-20 | 中国人民解放军国防科学技术大学 | MEMS lattice coils and preparation method thereof |
| CN108931745A (en) * | 2018-05-18 | 2018-12-04 | 上海华虹宏力半导体制造有限公司 | Anisotropic magnetoresistance sensor and its set/reset circuit and manufacturing method |
| CN109752675A (en) * | 2019-01-10 | 2019-05-14 | 东南大学 | A kind of octagon thin-film magnetoresistive sensor |
| CN110780243A (en) * | 2019-11-19 | 2020-02-11 | 中国电子科技集团公司第四十九研究所 | High-sensitivity micro magnetic sensing unit for underwater navigation, sensor comprising same and preparation method of sensing unit |
| CN111856355B (en) * | 2020-07-16 | 2023-04-14 | 北京控制工程研究所 | System and method for keeping optimal sensitivity of magnetometer |
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| WO2008120118A2 (en) * | 2007-03-30 | 2008-10-09 | Nxp B.V. | Magneto-resistive sensor |
| CN101510630B (en) * | 2009-03-30 | 2012-08-08 | 电子科技大学 | LTCC lamination microstrip patch antenna |
| CN101714543B (en) * | 2009-11-12 | 2011-10-05 | 美新半导体（无锡）有限公司 | Ceramic substrate for three-dimensional packaging of multi-chip system and packaging method thereof |
| DE102011112826B4 (en) * | 2011-05-23 | 2020-06-18 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Sensor and method for manufacturing the sensor |
| CN102910903B (en) * | 2012-11-08 | 2015-03-25 | 中国科学院上海硅酸盐研究所 | Low-temperature cofiring method of zirconia-based sensor |
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| 基于LTCC技术的耦合电感;王来利 等;《电工技术学报》;20120430;第27卷(第4期);第94-100页 * |
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