CN104999180B - Based on the ceramic microstructures 3D Method of printing that nanosecond-psec-femtosecond laser is compound - Google Patents
Based on the ceramic microstructures 3D Method of printing that nanosecond-psec-femtosecond laser is compound Download PDFInfo
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- CN104999180B CN104999180B CN201510407472.3A CN201510407472A CN104999180B CN 104999180 B CN104999180 B CN 104999180B CN 201510407472 A CN201510407472 A CN 201510407472A CN 104999180 B CN104999180 B CN 104999180B
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Abstract
The invention discloses a kind of ceramic microstructures 3D print system compound based on nanosecond psec femtosecond laser, including multi-wavelength integrated optical fibre laser, real-time monitoring system, drop coating device, workbench, three-dimensional mobile platform and control centre, workbench is placed in three-dimensional mobile platform, and multi-wavelength integrated optical fibre laser, real-time monitoring system, spray equipment, three-dimensional mobile platform are all connected with control centre signal；Wherein: drop coating device is used for pottery arogel mixture drop coating to the print area being placed in workbench upper substrate；Multi-wavelength integrated optical fibre laser is used for providing picosecond laser, nanosecond laser and femtosecond laser；Real-time monitoring system is used for monitoring in real time one or more in the size of current ceramic layer, surface topography, crystal phase structure, chemical composition；It is three-dimensional mobile that three-dimensional mobile platform is used for making workbench carry out.The present invention have low cost, high efficiency, in high precision, can the advantage of processed complex micro structure, it is adaptable to manufacture ceramic microstructures on a large scale.
Description
Technical field
The invention belongs to 3D ceramic microstructures preparing technical field, be specifically related to a kind of based on nanosecond-psec-femtosecond laser
Compound ceramic microstructures 3D Method of printing.
Background technology
Along with the development of MEMS (MEMS) technology, need to be formed chip lab (L on microsize matrix
Ab-on-a-chip) and chip factory (Factory-on-a-chip), and on microsize matrix integrated reaction, distribution and
The functions such as transport.For realizing complicated multifunction structure, need on microsize matrix, make substantial amounts of, small groove
Road and cavity body structure.
Due in processing simplicity, chip lab and chip factory owner silicon to be made in, metal and polymeric matrix material.
But pyroreaction and the chip lab of corrosive liquid and chip factory, traditional silicon, metal and polymerization are contained for some
Thing matrix material cannot be suitable for.Ceramic matrix material becomes high temperature resistance and etch-proof desired matrix material.
Micro structure based on ceramic matrix material (being hereinafter " ceramic microstructures ") makes general employing mould sintering process,
Mould sintering process has a following deficiency: (1) due to chip lab and the small lot of chip factory, many structure changes specific,
Use mould sintering process manufacturing cost the highest；(2) machining accuracy is limited；(3) it is difficult to meet chip lab and core
The complex micro structure processing request of sheet factory.
Summary of the invention
The deficiency existed for prior art, the invention provides a kind of pottery compound based on nanosecond-psec-femtosecond laser
Micro structure 3D Method of printing, the method have low cost, high efficiency, in high precision, can the advantage of processed complex micro structure.
For solving above-mentioned technical problem, the present invention adopts the following technical scheme that:
The ceramic microstructures 3D print system being combined based on nanosecond-psec-femtosecond laser, including:
Multi-wavelength integrated optical fibre laser, real-time monitoring system, drop coating device, workbench, three-dimensional mobile platform and control
Center processed, workbench is placed in three-dimensional mobile platform, multi-wavelength integrated optical fibre laser, real-time monitoring system, drop coating
Device, three-dimensional mobile platform are all connected with control centre signal；Wherein:
Drop coating device is used for pottery arogel mixture drop coating to the print area being placed in workbench upper substrate；
Multi-wavelength integrated optical fibre laser is used for providing picosecond laser, nanosecond laser and femtosecond laser, picosecond laser and receiving
Second laser is used for sintering pottery arogel mixture, and femtosecond laser is used for the ceramic layer sintered is carried out micro Process；
Real-time monitoring system is used for monitoring in the size of current ceramic layer, surface topography, crystal phase structure, chemical composition in real time
One or more；
It is three-dimensional mobile that three-dimensional mobile platform is used for making workbench carry out.
Above-mentioned multi-wavelength integrated optical fibre laser includes laser controller, nanosecond laser probe, picosecond laser probe and flies
Second laser probe, nanosecond laser probe, picosecond laser probe are all connected with laser controller with femtosecond laser probe.
Above-mentioned real-time monitoring system includes controlling drive system and detecting instrument, and detecting instrument is connected with controlling drive system,
Detecting instrument includes in size detection instrument, surface profile measurement instrument, crystal phase structure detecting instrument, composition detection instrument
One or more.
Above-mentioned detecting instrument includes one or more in scanning electron microscope, x-ray instrument, thermal infrared imager, mass spectrograph.
Above-mentioned drop coating device realizes based on screw pump fashion of extrusion.
Two, based on the ceramic microstructures 3D print system that nanosecond-psec-femtosecond laser is compound, by the ceramic microstructures of design
Successively perform following steps:
(1) ceramic powders and colloid are by (0.01～0.6): the mass ratio of 1 is mixed to form pottery arogel mixture, by pottery
Arogel mixture adds drop coating device；
(2), under vacuum environment, use drop coating device by ceramics colloid admixture drop coating to being placed in beating of workbench upper substrate
Print region, and preheat；
(3) multi-wavelength integrated optical fibre laser provides nanosecond laser and picosecond laser to heat print area simultaneously, enters
Row ceramic post sintering, meanwhile, real-time monitoring system is to the size of print area current layer, surface topography, crystal phase structure, change
One or more in studying point are monitored, and monitoring result is fed back to control centre；
(4) control centre compares according to monitoring result and the geometrical morphology of design, surface roughness, it is thus achieved that geometric form
Looks or the surface roughness specific region that not up to design requires；
(5) multi-wavelength integrated optical fibre laser provides femtosecond laser that the specific region sintering current layer is carried out micro-adding
Work, is i.e. polished the micro structure and surface sintering current layer specific region.
Above-mentioned ceramic powders is aluminium oxide, zirconium oxide or silicon dioxide.
The operation principle of present system is as follows:
Use drop coating device by pottery arogel mixture with drops drop coating workbench substantially, use nanosecond laser and skin
Second laser sintered pottery arogel mixture, it is thus achieved that ceramic microstructures.Use femtosecond laser that ceramic microstructures is carried out micro Process,
Form ganoid high-precision ceramic micro structure.
Compared to the prior art, the invention have the advantages that and beneficial effect:
Low cost, high efficiency, in high precision, can processed complex micro structure, it is adaptable to manufacture ceramic microstructures on a large scale.
Accompanying drawing explanation
In order to be illustrated more clearly that the inventive method, in describing embodiment below, the required accompanying drawing used is made simply
Introduce, it should be apparent that, the accompanying drawing in describing below is only the embodiment of the present invention, comes for those of ordinary skill in the art
Say, on the premise of not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is traditional ceramics micro structure processing technology schematic diagram；
Fig. 2 is ceramic microstructures 3D print system of the present invention；
Fig. 3 is that ceramic microstructures 3D of the present invention prints flow chart.
In figure, 0010-drop coating device, 0020-pottery arogel mixture, 0030-nanosecond laser probe, 0040-picosecond laser
Probe, 0050-femtosecond laser probe, 0060-scanning electron microscope, 0070-X alpha cellulose a gage, 0080-thermal infrared imager, 0090-
Mass spectrograph, 0001-ceramic microstructures, 0011-workbench, 0012-three-dimensional mobile platform, 0013-mould, 0014-core rod,
0015-supporting pillar, 0016-micro structure.
Detailed description of the invention
Below in conjunction with accompanying drawing, technical solution of the present invention is described further.
Fig. 1 is traditional ceramics method for processing microstructure, first pottery arogel mixture (0020) is placed in mould (0013)
In, pottery arogel mixture (0020) is placed the core rod (0014) for making micro structure, will be equipped with pottery arogel
The mould (0013) of mixture (0020) carries out high temperature sintering in being placed in a large mold.Finally, by Mechanical Method or
Chemical corrosion method removes core rod (0014), thus obtains ceramic microstructures.
Seeing Fig. 2, apparatus of the present invention mainly include multi-wavelength integrated optical fibre laser, real-time monitoring system, drop coating device
(0010), workbench (0011), three-dimensional mobile platform (0012) and control centre's (drawing the most in the drawings), workbench
(0011) be placed in three-dimensional mobile platform (0012), multi-wavelength integrated optical fibre laser, real-time monitoring system, drip
Coating device (0010), three-dimensional mobile platform (0012) are all connected with control centre signal.
Multi-wavelength integrated optical fibre laser include laser controller (drawing the most in the drawings), nanosecond laser probe (0030),
Picosecond laser probe (0040) and femtosecond laser probe (0050), nanosecond laser probe (0030), picosecond laser probe
(0040) all it is connected with laser controller with femtosecond laser probe (0050).Multi-wavelength integrated fiber laser of the present invention
Device can provide that I machining feature size is within 1um, precision laser within 100nm, and its full accuracy can
Reach 0.1nm.
Real-time monitoring system includes controlling drive system (drawing the most in the drawings) and detecting instrument, and detecting instrument drives with control
Dynamic system is connected, and detecting instrument includes size detection instrument, surface profile measurement instrument, crystal phase structure detecting instrument, one-tenth
One or more in sorting-detecting instrument device, can select detecting instrument according to the actual requirements.In being embodied as, detecting instrument bag
Include scanning electron microscope (0060), x-ray instrument (0070), thermal infrared imager (0080) and mass spectrograph (0090).
Drop coating device (0010) realizes the drop coating of pottery arogel mixture (0020) based on screw pump fashion of extrusion.Control
Center is used for controlling multi-wavelength integrated optical fibre laser, real-time monitoring system, drop coating device and three-dimensional mobile platform work,
And receive the Monitoring Data of real-time monitoring system feedback.
Fig. 3 is the inventive method process chart, and the present invention successively performs following steps by the ceramic microstructures of design:
(1) ceramic powders and colloid are by (0.01～0.6): the mass ratio of 1 is mixed to form pottery arogel mixture, by pottery
Arogel mixture adds drop coating device (0010).Ceramic powders can be aluminium oxide, zirconium oxide or silicon dioxide.
(2), under vacuum environment, use drop coating device (0010) by ceramics colloid admixture drop coating to being placed in workbench
(0011) print area of upper substrate, and preheat.
(3) multi-wavelength integrated optical fibre laser provides nanosecond laser and picosecond laser to heat print area simultaneously,
In combustion ceramic powder colloid admixture colloid and complete sintering；Meanwhile, the real-time monitoring system chi to print area current layer
One or more in very little, surface topography, crystal phase structure, chemical composition are monitored, and monitoring result feeds back to control
Center processed.
(4) control centre compares according to monitoring result and the geometrical morphology of design, surface roughness, it is thus achieved that geometric form
Looks or the surface roughness specific region that not up to design requires.This step can be completed by manual operation.
(5) multi-wavelength integrated optical fibre laser provides femtosecond laser that the specific region sintering current layer is carried out micro-adding
Work, is i.e. polished the micro structure and surface sintering current layer specific region.
Repetition step (1)～(5) is to complete the molding of next layer, thus obtains ceramic microstructures.
The above is presently preferred embodiments of the present invention, but the present invention should not be limited to this embodiment and accompanying drawing institute is public
The content opened.So every without departing from the equivalence completed under spirit disclosed in this invention or amendment, both fall within the present invention and protect
The scope protected.
Claims (7)
1. based on the ceramic microstructures 3D print system that nanosecond-psec-femtosecond laser is compound, it is characterised in that including:
Multi-wavelength integrated optical fibre laser, real-time monitoring system, drop coating device, workbench, three-dimensional mobile platform and control
Center processed, workbench is placed in three-dimensional mobile platform, multi-wavelength integrated optical fibre laser, real-time monitoring system, drop coating
Device, three-dimensional mobile platform are all connected with control centre signal；Wherein:
Drop coating device is used for pottery arogel mixture drop coating to the print area being placed in workbench upper substrate；
Multi-wavelength integrated optical fibre laser is used for providing picosecond laser, nanosecond laser and femtosecond laser, picosecond laser and receiving
Second laser is used for sintering pottery arogel mixture, and femtosecond laser is used for the ceramic layer sintered is carried out micro Process；
Real-time monitoring system is used for monitoring in the size of current ceramic layer, surface topography, crystal phase structure, chemical composition in real time
One or more；
It is three-dimensional mobile that three-dimensional mobile platform is used for making workbench carry out.
2. as claimed in claim 1 based on the ceramic microstructures 3D print system that nanosecond-psec-femtosecond laser is compound,
It is characterized in that:
Described multi-wavelength integrated optical fibre laser include laser controller, nanosecond laser probe, picosecond laser probe and
Femtosecond laser is popped one's head in, and nanosecond laser probe, picosecond laser probe are all connected with laser controller with femtosecond laser probe.
3. as claimed in claim 1 based on the ceramic microstructures 3D print system that nanosecond-psec-femtosecond laser is compound,
It is characterized in that:
Described real-time monitoring system includes controlling drive system and detecting instrument, detecting instrument and control drive system phase
Even, detecting instrument includes size detection instrument, surface profile measurement instrument, crystal phase structure detecting instrument, composition detection instrument
One or more in device.
4. as claimed in claim 3 based on the ceramic microstructures 3D print system that nanosecond-psec-femtosecond laser is compound,
It is characterized in that:
Described detecting instrument includes one or more in scanning electron microscope, x-ray instrument, thermal infrared imager, mass spectrograph.
5. as claimed in claim 1 based on the ceramic microstructures 3D print system that nanosecond-psec-femtosecond laser is compound,
It is characterized in that:
Described drop coating device realizes based on screw pump fashion of extrusion.
6. beating of the ceramic microstructures 3D print system being combined based on the nanosecond described in claim 1-psec-femtosecond laser
Impression method, it is characterised in that:
Following steps are successively performed by the ceramic microstructures of design:
(1) ceramic powders and colloid are by (0.01～0.6): the mass ratio of 1 is mixed to form pottery arogel mixture, by pottery
Arogel mixture adds drop coating device；
(2), under vacuum environment, use drop coating device by ceramics colloid admixture drop coating to being placed in beating of workbench upper substrate
Print region, and preheat；
(3) multi-wavelength integrated optical fibre laser provides nanosecond laser and picosecond laser to heat print area simultaneously, enters
Row ceramic post sintering, meanwhile, real-time monitoring system is to the size of print area current layer, surface topography, crystal phase structure, change
One or more in studying point are monitored, and monitoring result is fed back to control centre；
(4) control centre compares according to monitoring result and the geometrical morphology of design, surface roughness, it is thus achieved that geometric form
Looks or the surface roughness specific region that not up to design requires；
(5) multi-wavelength integrated optical fibre laser provides femtosecond laser that the specific region sintering current layer is carried out micro-adding
Work, is i.e. polished the micro structure and surface sintering current layer specific region.
Method of printing the most as claimed in claim 6, it is characterised in that:
Described ceramic powders is aluminium oxide, zirconium oxide or silicon dioxide.
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| WO2019148213A1 (en) * | 2018-01-29 | 2019-08-01 | Massachusetts Institute Of Technology | Systems, devices, and methods for fabricating colloidal solids |
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| US11241849B2 (en) | 2016-07-01 | 2022-02-08 | Signify Holding B.V. | 3D printed reflector and method for its manufacture |
| JP6824652B2 (en) * | 2016-07-08 | 2021-02-03 | キヤノン株式会社 | 3D modeling method and 3D model manufacturing equipment |
| CN108788152B (en) * | 2018-06-29 | 2019-08-20 | 武汉大学 | Have the increasing material system of processing and method of environment composition on-line checking function |
| CN109079314A (en) * | 2018-09-18 | 2018-12-25 | 广东工业大学 | A kind of array micro-nano structure processing method of ultrafast laser assembled pulse sequence |
| CN115179388B (en) * | 2022-06-30 | 2023-08-04 | 中国科学院长春光学精密机械与物理研究所 | Base application method of ceramic package substrate for 3D printing |
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| DE102004042492A1 (en) * | 2004-08-31 | 2006-03-09 | WINKLER + DüNNEBIER AG | Method and device for producing a cutting or embossing roll by means of laser deposition welding |
| US9991090B2 (en) * | 2012-11-15 | 2018-06-05 | Fei Company | Dual laser beam system used with an electron microscope and FIB |
| CN104669401A (en) * | 2013-11-28 | 2015-06-03 | 西安中科麦特电子技术设备有限公司 | 3D printer using ceramic as raw material |
| CN103962557B (en) * | 2014-05-05 | 2016-08-17 | 上海电气（集团）总公司 | A kind of separable constituency quickly shaping device |
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