CN104977815A - Scanning table for direct-writing exposure system - Google Patents
Scanning table for direct-writing exposure system Download PDFInfo
- Publication number
- CN104977815A CN104977815A CN201510383235.8A CN201510383235A CN104977815A CN 104977815 A CN104977815 A CN 104977815A CN 201510383235 A CN201510383235 A CN 201510383235A CN 104977815 A CN104977815 A CN 104977815A
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- China
- Prior art keywords
- floor beam
- laminate floor
- panel
- lifting drive
- deck plate
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Abstract
The invention discloses a scanning table for a direct-writing exposure system. The table comprises a horizontally-arranged rectangular table panel, wherein two mutually parallel panel-pressing beams which are parallel to the table panel are arranged above the table panel; the two panel-pressing beams cross over the table panel; the side surface of the table panel is provided with mounting seats corresponding to each end part of the panel-pressing beams; the mounting seats are fixed relative to the table panel; each mounting seat is respectively provided with a lifting drive device; two ends of the panel-pressing beams are respectively connected with the lifting drive devices on the corresponding mounting seats; the lifting drive devices located at the two ends of a same panel-pressing beam synchronously drive the panel-pressing beam to move up and down. According to the invention, two panel-pressing beams are additionally arranged on a traditional scanning table panel, and the two panel-pressing beams or pressing panels installed on the panel-pressing beams are used to press warped edges of a soft exposure plate; thus, during exposure of the soft exposure plate, the problem of poor exposure quality due to the warped edges of the soft exposure plate is avoided.
Description
Technical field
The invention belongs to technical field of lithography, relate to the scan table in a kind of write-through exposure system.
Background technology
Scan table in traditional write-through exposure system is general all in order to expose hardboard, hardboard only just can stably be fixed on the deck plate of scan table by vacuum suction, but along with the development of wearable device, it is more and more that soft exposed plate does, become web-like to pack due to the soft exposed plate of part and store, there is the too large problem of limit warpage degree in the both sides that therefore the soft exposed plate of this part is relative, being used alone vacuum suction cannot make whole soft exposed plate entirely be fixed on deck plate, thus affects exposure quality.Therefore, the problem affecting exposure quality being necessary to provide a kind of device to solve soft exposure edges of boards warpage and bringing.
Summary of the invention
Technical matters to be solved by this invention is: provide the scan table in a kind of write-through exposure system, when the soft exposed plate of exposure, and the problem that the exposure quality that the limit warpage because of soft exposed plate can be avoided to cause is bad.
For solving the problems of the technologies described above, the technical solution used in the present invention is: the scan table in write-through exposure system, comprise horizontally disposed rectangular mesa plate, be provided with two above described deck plate to be parallel to each other and the laminate floor beam being parallel to deck plate, two laminate floor beam are all across deck plate, the side of described deck plate is provided with the mount pad corresponding with each end of laminate floor beam, this mount pad is relative with deck plate fixing, each mount pad is respectively arranged with a lifting drive, the two ends of described laminate floor beam are connected with the lifting drive on corresponding mount pad respectively, the lifting drive at same laminate floor beam two ends synchronously drives this laminate floor beam to move up and down.
Described laminate floor beam is perpendicular to the deck plate side corresponding with its two ends, described four mount pads are fixedly installed on deck plate and side, two laminate floor beam orthogonal both sides respectively, each mount pad is provided with the electric operator that lifting drive can be driven along this side, mount pad place transverse shifting, this electric operator comprises a sliding stand that can slide along the driving direction of electric operator, and described lifting drive is fixedly connected on sliding stand.
One piece of web joint is provided with between described lifting drive and slide block, position relative with web joint on described laminate floor beam is provided with a vertical through holes, web joint is vertically fixedly connected with a guide rod through through hole, guide rod is arranged with precompressed spring, offset bottom one end of spring and laminate floor beam, the other end and web joint upper surface offset.
Be provided with the linear bearing that an internal diameter and guide rod diameter compatible close in described through hole, described guide rod is located in linear bearing.
Described laminate floor beam is provided with the rubber pressing plate arranged along laminate floor beam length direction, the lower edge of rubber pressing plate lower than laminate floor beam lower edge and be parallel to the upper surface of deck plate.
Described lifting drive is band guide rod cylinder.
The invention has the beneficial effects as follows: on traditional scan table deck plate, add two laminate floor beam, utilize two laminate floor beam or soft exposed plate has the limit of warping phenomenon to push down by the pressing plate be arranged on laminate floor beam, like this when the soft exposed plate of exposure, the problem that the exposure quality that the limit warpage because of soft exposed plate just can be avoided to cause is bad.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the A portion enlarged drawing in Fig. 1;
Fig. 3 is the B-B sectional drawing in Fig. 1;
Fig. 4 is the C-C cut-open view in Fig. 2.
In Fig. 1 ~ Fig. 4: 1, deck plate, 2, laminate floor beam, 3, mount pad, 4, lifting drive, 5, electric operator, 6, sliding stand, 8, web joint, 9, through hole, 10, guide rod, 11, spring, 12, linear bearing, 13, rubber pressing plate.
Embodiment
Below in conjunction with accompanying drawing, describe specific embodiment of the invention scheme in detail.
Be illustrated in figure 1 the scan table in write-through exposure system of the present invention, comprise horizontally disposed rectangular mesa plate 1, be provided with two above described deck plate 1 to be parallel to each other and the laminate floor beam 2 being parallel to deck plate 1, two laminate floor beam 2 are all across deck plate 1, the side of described deck plate 1 is provided with the mount pad 3 corresponding with each end of laminate floor beam 2, this mount pad 3 is relative with deck plate 1 fixing, each mount pad 3 is respectively arranged with a lifting drive 4, the two ends of described laminate floor beam 2 are connected with the lifting drive 4 on corresponding mount pad 3 respectively, the lifting drive 4 at same laminate floor beam 2 two ends synchronously drives this laminate floor beam 2 to move up and down.
Be provided with the scan table 1 of laminate floor beam 2, when the soft exposed plate of exposure, laminate floor beam 2 can be utilized to be pressed in both sides that soft exposed plate has alice phenomenon, can be fixed on soft exposed plate tiling on the deck plate 1 of scan table so effectively, be exposed position can not affect by alice.
Composition graphs 1, Fig. 2, described laminate floor beam 2 is perpendicular to deck plate 1 side corresponding with its two ends, described four mount pads 3 are fixedly installed on deck plate 1 and two sides, laminate floor beam 2 orthogonal both sides respectively, each mount pad 3 is provided with the electric operator 5 that lifting drive 4 can be driven along this side, mount pad 3 place transverse shifting, this electric operator 5 comprises a sliding stand 6 that can slide along the driving direction of electric operator 5, and described lifting drive 4 is fixedly connected on sliding stand 6.
Each mount pad 3 arranges electric operator 5, to drive lifting drive 4 transverse shifting, so just can change spacing between two laminate floor beam 2 by lifting-transverse shifting drive unit 4, thus can be fixed the soft exposed plate of different size, expand the scope of application.
The concrete structure of electric operator 5 described in literary composition can with reference to the patent of invention of " electric operator " (application publication number is: CN103206500A) by name, but the lead screw transmission mode be not limited to described in this publication document, namely, in this technical field, the kind of drive such as linear electric motors, Timing Belt can also be used to replace the lead screw transmission mode in this patent document to carry out the real linear drives to sliding stand.
As shown in Figure 2 and Figure 4, one piece of web joint 8 is provided with between described lifting drive 4 and slide block 14, on described laminate floor beam 2, the position relative with web joint 8 is provided with a vertical through holes 9, web joint 8 is vertically fixedly connected with a guide rod 10 through through hole 9, guide rod 10 is arranged with precompressed spring 11, offset bottom one end of spring 11 and laminate floor beam 2, the other end and web joint 8 upper surface offset.
Guide rod 10 arranges precompressed spring 11, when lifting drive 4 drives laminate floor beam 2 to decline time, be subject to the reverse elastic force of spring 11, laminate floor beam 2 decline rate slows down, to reduce the impulsive force of laminate floor beam 2 to soft exposed plate, prevent soft exposed plate from sustaining damage, when lifting drive 4 rises, be subject to the forward elastic force of spring 11, laminate floor beam 2 ascending velocity is accelerated, can upspring fast, be beneficial to receive plate fast.
As shown in Figure 4, be provided with the linear bearing 12 that an internal diameter and guide rod 10 diameter compatible close in described through hole 9, described guide rod 10 is located in linear bearing 12.
Between guide rod 10 and through hole 9, increasing the linear bearing 12 that internal diameter and guide rod 10 diameter compatible close, the transversal displacement of laminate floor beam 2 when being elevated can being reduced further.
As shown in Figure 3, described laminate floor beam 2 is provided with the rubber pressing plate 13 arranged along laminate floor beam 2 length direction, the lower edge of rubber pressing plate 13 lower than laminate floor beam 2 lower edge and be parallel to the upper surface of deck plate 1.
Laminate floor beam 2 arranges the rubber pressing plate 13 of lower edge lower than laminate floor beam 2, soft exposed plate is fixed with rubber pressing plate 13, because rubber pressing plate 13 has certain elasticity, so, soft exposed plate can be fixed better, and soft exposed plate can not be made to sustain damage.
As shown in Figure 2, in order to reduce the transversal displacement of lifting drive 4 when driving laminate floor beam 2 to move up and down further, the present invention preferably uses band guide rod cylinder as lifting drive 4.
The course of work of the present invention is: be first placed on the deck plate 1 of scan table by soft exposed plate, and adjustment direction, soft exposed plate is made to have the both sides parallel platen crossbeam 2 of limit warping phenomenon, then start the electric operator 5 at laminate floor beam 2 two ends simultaneously, this laminate floor beam 2 is driven to move to one side of the soft exposed plate corresponding with this laminate floor beam 2 along the direction perpendicular to laminate floor beam 2, start the lifting drive 4 at these laminate floor beam 2 two ends more simultaneously, this laminate floor beam 2 is pressed down, laminate floor beam 2 is under the cooperation of guide rod 10 and linear bearing 12, and in conjunction with the reacting force of spring 11, move lentamente downwards, until the rubber pressing plate 13 on laminate floor beam 2 fits tightly with the upper surface of soft exposed plate, the driving process of another laminate floor beam 2 is consistent with previous, just do not repeating at this.When the rubber pressing plate 13 on two laminate floor beam 2 all fits tightly with the upper surface of soft exposed plate, described soft exposed plate has been fixed on deck plate 1 with being just flattened, and just can carry out exposure operation to soft exposed plate afterwards.By the above-mentioned process to soft exposed plate, the problem that the exposure quality that causes because of soft exposure edges of boards warpage is bad just can be avoided.
Claims (6)
1. the scan table in write-through exposure system, comprise horizontally disposed rectangular mesa plate (1), it is characterized in that, described deck plate (1) top is provided with two and is parallel to each other and the laminate floor beam (2) being parallel to deck plate (1), two laminate floor beam (2) are all across deck plate (1), the side of described deck plate (1) is provided with the mount pad (3) corresponding with each end of laminate floor beam (2), this mount pad (3) is relative fixing with deck plate (1), each mount pad (3) is respectively arranged with a lifting drive (4), the two ends of described laminate floor beam (2) are connected with the lifting drive (4) on corresponding mount pad (3) respectively, the lifting drive (4) at same laminate floor beam (2) two ends synchronously drives this laminate floor beam (2) to move up and down.
2. the scan table in write-through exposure system according to claim 1, it is characterized in that, described laminate floor beam (2) is perpendicular to deck plate (1) side corresponding with its two ends, described four mount pads (3) are fixedly installed on deck plate (1) and side, two laminate floor beam (2) orthogonal both sides respectively, each mount pad (3) is provided with the electric operator (5) that lifting drive (4) can be driven along this mount pad (3) side, place transverse shifting, this electric operator (5) comprises a sliding stand (6) that can slide along the driving direction of electric operator (5), described lifting drive (4) is fixedly connected on sliding stand (6).
3. the scan table in write-through exposure system according to claim 2, it is characterized in that, one piece of web joint (8) is provided with between described lifting drive (4) and slide block (14), the upper position relative with web joint (8) of described laminate floor beam (2) is provided with a vertical through holes (9), web joint (8) is vertically fixedly connected with a guide rod (10) through through hole (9), guide rod (10) is arranged with precompressed spring (11), one end of spring (11) and laminate floor beam (2) bottom offset, the other end and web joint (8) upper surface offset.
4. the scan table in write-through exposure system according to claim 3, it is characterized in that, be provided with the linear bearing (12) that an internal diameter and guide rod (10) diameter compatible close in described through hole (9), described guide rod (10) is located in linear bearing (12).
5. the scan table in write-through exposure system according to claim 4, it is characterized in that, described laminate floor beam (2) is provided with the rubber pressing plate (13) arranged along laminate floor beam (2) length direction, the lower edge of rubber pressing plate (13) lower than laminate floor beam (2) lower edge and be parallel to the upper surface of deck plate (1).
6. the scan table in write-through exposure system according to claim 5, is characterized in that, described lifting drive (4) is band guide rod cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510383235.8A CN104977815B (en) | 2015-07-03 | 2015-07-03 | Scan table in write-through exposure system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510383235.8A CN104977815B (en) | 2015-07-03 | 2015-07-03 | Scan table in write-through exposure system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104977815A true CN104977815A (en) | 2015-10-14 |
| CN104977815B CN104977815B (en) | 2018-02-23 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510383235.8A Active CN104977815B (en) | 2015-07-03 | 2015-07-03 | Scan table in write-through exposure system |
Country Status (1)
| Country | Link |
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| CN (1) | CN104977815B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112130423A (en) * | 2020-09-15 | 2020-12-25 | 合肥芯碁微电子装备股份有限公司 | Direct-writing type photoetching machine sucker pressing plate device and control method thereof |
| WO2023019725A1 (en) * | 2021-08-19 | 2023-02-23 | 杭州新诺微电子有限公司 | Movable board pressing structure, exposure machine having said structure, and board pressing method of exposure machine |
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| CN103008957A (en) * | 2012-12-27 | 2013-04-03 | 中国重汽集团柳州运力专用汽车有限公司 | Compressing device for carriage side plate of self-dumper |
| CN104084721A (en) * | 2014-06-27 | 2014-10-08 | 龙口丛林中德车体系统工程有限公司 | Anti-edge-warping IGM welding machine and welding method thereof |
| CN104377156A (en) * | 2014-09-26 | 2015-02-25 | 南通富士通微电子股份有限公司 | Fixing device |
| CN205121156U (en) * | 2015-07-03 | 2016-03-30 | 苏州微影光电科技有限公司 | Directly write scanning platform in formula exposure system |
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2015
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Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001109160A (en) * | 1999-10-08 | 2001-04-20 | Hitachi Electronics Eng Co Ltd | Mask deflection correction mechanism for base plate exposure device |
| US20050134829A1 (en) * | 2003-12-17 | 2005-06-23 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| CN101105640A (en) * | 2006-07-14 | 2008-01-16 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN101369523A (en) * | 2008-10-17 | 2009-02-18 | 格兰达技术（深圳）有限公司 | IC material strip laser mark printing machine and its operation mode |
| CN201593026U (en) * | 2009-06-24 | 2010-09-29 | 邹明刚 | Automatic detonator waist tag machine |
| CN102575342A (en) * | 2010-02-09 | 2012-07-11 | 富士电机株式会社 | Flexible substrate position control device |
| CN102222626A (en) * | 2010-04-15 | 2011-10-19 | 日月光半导体制造股份有限公司 | Machine bench for semiconductor technology |
| CN103008957A (en) * | 2012-12-27 | 2013-04-03 | 中国重汽集团柳州运力专用汽车有限公司 | Compressing device for carriage side plate of self-dumper |
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| CN205121156U (en) * | 2015-07-03 | 2016-03-30 | 苏州微影光电科技有限公司 | Directly write scanning platform in formula exposure system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112130423A (en) * | 2020-09-15 | 2020-12-25 | 合肥芯碁微电子装备股份有限公司 | Direct-writing type photoetching machine sucker pressing plate device and control method thereof |
| WO2023019725A1 (en) * | 2021-08-19 | 2023-02-23 | 杭州新诺微电子有限公司 | Movable board pressing structure, exposure machine having said structure, and board pressing method of exposure machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104977815B (en) | 2018-02-23 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 215636 Zhangjiagang City, Jiangsu Province, the new town of the sea dam road, Suzhou, micro shadow Photoelectric Technology Co., Ltd. Applicant after: SUZHOU WEIYING LASER TECHNOLOGY CO.,LTD. Address before: 215636 Zhangjiagang City, Jiangsu Province, the new town of the sea dam road, Suzhou, micro shadow Photoelectric Technology Co., Ltd. Applicant before: ADVANCED MICROLITHO INSTRUMENT, Inc. |
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| CB02 | Change of applicant information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Scanning stage in direct writing exposure system Effective date of registration: 20210128 Granted publication date: 20180223 Pledgee: Jiujiang Pohu new city investment and Construction Co.,Ltd. Pledgor: SUZHOU WEIYING LASER TECHNOLOGY Co.,Ltd. Registration number: Y2021980000823 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230508 Granted publication date: 20180223 Pledgee: Jiujiang Pohu new city investment and Construction Co.,Ltd. Pledgor: SUZHOU WEIYING LASER TECHNOLOGY CO.,LTD. Registration number: Y2021980000823 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right |