CN104977735B - A kind of method that electrostrictive polymer optical chip is integrated with microwave termination circuit - Google Patents
A kind of method that electrostrictive polymer optical chip is integrated with microwave termination circuit Download PDFInfo
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- CN104977735B CN104977735B CN201410136421.7A CN201410136421A CN104977735B CN 104977735 B CN104977735 B CN 104977735B CN 201410136421 A CN201410136421 A CN 201410136421A CN 104977735 B CN104977735 B CN 104977735B
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- Prior art keywords
- microwave
- transmission circuit
- circuit
- microwave transmission
- integrated
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material
Abstract
The invention belongs to microwave circuit matched load technical fields, and in particular to a kind of method that electrostrictive polymer optical chip is integrated with microwave termination circuit.The method that is integrated with microwave termination circuit of electrostrictive polymer optical chip of the present invention is：Increasing by one section after eq effect area in microwave transmission circuit in electrostrictive polymer optical chip has the function of extended microwave transmission circuit as or the adjoining dimensions identical with the size of the microwave transmission circuit in the eq effect area of microwave termination, make to consume by the microwave signal in the extended microwave transmission circuit, realization electrostrictive polymer optical chip is integrated with microwave termination circuit.
Description
Technical field
The invention belongs to microwave circuit matched load technical fields, and in particular to a kind of electrostrictive polymer optical chip and microwave
The method integrated with load circuit.
Background technology
With the fast development of microwave photon technology, electrooptic modulator, electrooptical switching, optical phase shifter, optical analog to digital conversion device
Electro-optical devices is waited to be widely studied and applied.Microwave termination circuit is indispensable heavy in microwave photon system
Component is wanted, is directly related to the stability of system and the safety of microwave source.Such as Electro-optical Modulation is used in microwave photon system
During device, no microwave termination circuit will make microwave that can not be effectively passed to eq effect area, thus can seriously affect electricity
The efficiency of light conversion, can not work normally microwave photon system.It is therefore, necessary in microwave photon system that there are one suitable
Microwave termination circuit falls extra microwave absorption, ensures the safety normal work of system.
At present, there are three types of the modes that microwave termination circuit is realized in traditional microwave photon system：1. by
The mode of the external microwave termination circuit of output terminal of microwave transmission circuit consumes extra microwave energy, but need volume
Outer connector and matched load device thereby increase the cost, volume and complexity of microwave photon system.And microwave transmission electricity
The assembly technology of the output end connector on road can also influence the Microwave reflectometer of the input terminal of microwave transmission circuit, at some to micro-
In the stringent microwave photon system of wave reflection coefficient requirements, additional difficulty can be brought.2. use the microwave matching being fabricated separately
Load circuit, and it is with technologies such as spun gold pressure weldings that the microwave transmission of the microwave termination circuit being fabricated separately and electric light chip is electric
The output terminal connection on road, but this mode needs additional installation step, and needs the microwave transmission circuit of electric light chip
The edge of electric light chip is drawn out to, increases the difficulty of design.3. using the technique of sputtering and photoetching micro- on electric light chip
The output terminal of wave transmission circuit makes thin film resistance and consumes extra microwave energy, increases process complexity and difficulty
Degree.For electrostrictive polymer optical chip, since polymer as electro-optical material is poor to process-tolerant, the realization difficulty of this mode is more
Greatly.It is current to be badly in need of a kind of compact-sized, volume since requirement of the microwave photon technology on safety and reliability is higher and higher
The microwave termination circuit small, light-weight, reliability is high.
Invention content
The purpose of the present invention is be directed in traditional microwave photon system to realize that the mode of microwave termination circuit is deposited
The defects of, so as to provide a kind of method that electrostrictive polymer optical chip and microwave termination circuit integrate.
The method that is integrated with microwave termination circuit of electrostrictive polymer optical chip of the present invention is：In electrostrictive polymer optical chip
In microwave transmission circuit in eq effect area after increase by one section have the function of it is microwave termination with described electric light
The size of microwave transmission circuit in active region is identical or adjoining dimensions as extended microwave transmission circuit, make by described
Microwave signal in extended microwave transmission circuit consumes, and realizes the collection of electrostrictive polymer optical chip and microwave termination circuit
Into.
The adjoining dimensions seemingly refer to the size of the extended microwave transmission circuit with it is micro- in eq effect area
The difference of the size of wave transmission circuit is within ± 20%.
Described makes to consume by the microwave signal in the extended microwave transmission circuit, refers to extended microwave
Transmission circuit can be by more than the microwave signature attenuation 5dB by transmitting out in eq effect area.
The microwave signature attenuation is 5dB~20dB.
The electrostrictive polymer optical chip of the present invention is not only applicable to microwave transmission with the method that microwave termination circuit integrates
Circuit is the polymer electrooptical modulator chip using micro-strip electrode structure, and it is using coplanar etc. to be also applied for microwave transmission circuit
The polymer electrooptical modulator chip of other electrode structures.
The method that the electrostrictive polymer optical chip of the present invention is integrated with microwave termination circuit, it is only necessary to make electrostrictive polymer
During the lay photoetching mask plate of the microwave transmission circuit in optical chip, the microwave transmission circuit in lay photoetching mask plate figure is passed through into electric light
The figure of the latter linked matched load circuit part of active region is substituted for the figure of the extended microwave transmission circuit i.e.
Can, it is not required to other additional making or installation steps.With reliability is high, service life is long and compact-sized, it is small,
It is light-weight, adapt to high vacuum environment the features such as.
Description of the drawings
Microwave transmission circuit in Fig. 1 present invention is the integrated micro matched load circuit using micro-strip electrode structure
The structure diagram of polymer electrooptical modulator chip.
Fig. 2 are the schematic diagrames of Section A-A in Fig. 1.
The microwave signal input port S of Fig. 3 embodiment of the present invention 111The test result of parameter.
The microwave signal input port S of Fig. 4 embodiment of the present invention 211The test result of parameter.
Reference numeral
1. the input port of microwave signal
2. realize the changeover portion of coplanar electrodes-micro-strip electrode conversion function
3. the microwave transmission circuit in eq effect area（Micro-strip electrode structure）
4. extended microwave transmission circuit
5. the input port of optical waveguide
6. the output port of optical waveguide
7. substrate
8. the ground electrode of the microwave transmission circuit of micro-strip electrode structure
9. polymer optical wave guide layer
10. optical waveguide
11. the signal electrode of the microwave transmission circuit of the micro-strip electrode structure in eq effect area
12. the signal electrode of extended microwave transmission circuit
13. the signal electrode width of the microwave transmission circuit of the micro-strip electrode structure in eq effect area
14. the signal electrode width of extended microwave transmission circuit
The present invention will be further described below in conjunction with the accompanying drawings.
Specific embodiment
Embodiment 1
As depicted in figs. 1 and 2, typical microwave transmission circuit is negative using the integrated micro matching of micro-strip electrode structure
Carry the polymer electrooptical modulator chip of circuit（The polymer electrooptical modulator chip can be any used in this field
Polymer electrooptical modulator chip）, the mistake including microwave signal input port 1, realization coplanar electrodes-micro-strip electrode conversion function
Cross microwave transmission circuit 3 in section 2, eq effect area, extended microwave transmission circuit 4, substrate 7（Original copolymer Electro-optical Modulation
The substrate of device chip）, the ground electrode 8 of microwave transmission circuit of micro-strip electrode structure and polymer optical wave guide layer 9.
As shown in Figure 1, when microwave signal is entered by microwave signal input port 1 on electrostrictive polymer optical chip, by reality
After the changeover portion 2 of existing coplanar electrodes-micro-strip electrode conversion function, pass through the microwave in eq effect area along microwave transmission circuit
Transmission circuit 3 and then identical with the microwave transmission circuit size in eq effect area extended by one section of 10cm long
4 part of microwave transmission circuit, microwave signal the microwave transmission circuit part of the elongated segment lossy microwave in working frequency range
10GHz~30GHz reaches more than 10dB, in the S of microwave signal input port11Parameter is less than -20dB, realizes polymer electric light
The function of chip and microwave termination.
To the sample of above-mentioned making, the S of microwave signal input port is tested11Parameter, typical test result are shown in Fig. 3,
The function of electrostrictive polymer optical chip and microwave termination is realized well.
Microwave transmission circuit is the electrostrictive polymer light modulation using the integrated micro matched load circuit of micro-strip electrode structure
The preparation process of device chip is：Substrate 7 is cleaned up, using micro-strip electrode structure integrated wave matched load circuit polymerization
The ground electrode 8 of the microwave transmission circuit of the ground electrode template construct micro-strip electrode structure of object electrooptic modulator chip, making include
The polymer optical wave guide layer 9 of optical waveguide 10, using micro-strip electrode structure integrated wave matched load circuit polymer electric light tune
The signal electrode of the microwave transmission circuit of micro-strip electrode structure in the signal electrode template construct eq effect area of device chip processed
11.In the lay photoetching mask plate for making ground electrode and signal electrode, by microwave transmission circuit being followed by by eq effect area
Extended microwave in, transmission direction identical with the size of the microwave transmission circuit in eq effect area is substituted for loading section to pass
Transmission of electricity road 4, it is thus only necessary to be changed when drawing reticle figure, the preparation process of electrostrictive polymer optical chip is not with collecting
Preparation process into the electrostrictive polymer optical chip of microwave termination circuit is identical.
Embodiment 2
As depicted in figs. 1 and 2, typical microwave transmission circuit is negative using the integrated micro matching of micro-strip electrode structure
Carry the polymer electrooptical modulator chip of circuit（The polymer electrooptical modulator chip can be any used in this field
Polymer electrooptical modulator chip）, the mistake including microwave signal input port 1, realization coplanar electrodes-micro-strip electrode conversion function
Cross microwave transmission circuit 3 in section 2, eq effect area, extended microwave transmission circuit 4, substrate 7（Original copolymer Electro-optical Modulation
The substrate of device chip）, the ground electrode 8 of microwave transmission circuit of micro-strip electrode structure and polymer optical wave guide layer 9.
As shown in Figure 1, when microwave signal is entered by microwave signal input port 1 on electrostrictive polymer optical chip, by reality
After the changeover portion 2 of existing coplanar electrodes-micro-strip electrode conversion function, pass through the microwave in eq effect area along microwave transmission circuit
Transmission circuit 3 and then identical with the microwave transmission circuit size in eq effect area extended by one section of 12cm long
4 part of microwave transmission circuit, microwave signal the microwave transmission circuit part of the elongated segment lossy microwave in working frequency range
10GHz~30GHz reaches more than 10dB, in the S of microwave signal input port11Parameter is less than -20dB, realizes polymer electric light
The function of chip and microwave termination.
To the sample of above-mentioned making, the S of microwave signal input port is tested11Parameter, typical test result are shown in Fig. 4,
The function of electrostrictive polymer optical chip and microwave termination is realized well.
Microwave transmission circuit is the electrostrictive polymer light modulation using the integrated micro matched load circuit of micro-strip electrode structure
The preparation process of device chip is：Substrate 7 is cleaned up, using micro-strip electrode structure integrated wave matched load circuit polymerization
The ground electrode 8 of the microwave transmission circuit of the ground electrode template construct micro-strip electrode structure of object electrooptic modulator chip, making include
The polymer optical wave guide layer 9 of optical waveguide 10, using micro-strip electrode structure integrated wave matched load circuit polymer electric light tune
The signal electrode of the microwave transmission circuit of micro-strip electrode structure in the signal electrode template construct eq effect area of device chip processed
11.In the lay photoetching mask plate for making ground electrode and signal electrode, by microwave transmission circuit being followed by by eq effect area
It is substituted for loading section and is passed with microwave extended in the adjoining dimensions of the microwave transmission circuit in eq effect area, transmission direction
Transmission of electricity road 4, the adjoining dimensions refer to the extended microwave transmission of the signal electrode 12 of extended microwave transmission circuit
The signal electrode width 14 of circuit is only than the signal electrode of the microwave transmission circuit of the micro-strip electrode structure in eq effect area
Width 13 increases 10%, other all to be the same size.It is only necessary to be changed when drawing reticle figure, polymer electric light
The preparation process of chip is identical with the preparation process of the electrostrictive polymer optical chip of non-integrated micro matched load circuit.
Above example is not the present invention limitation in any form, every technology according to the present invention, to more than
Any simple modification, equivalent variations and the modification that embodiment is made, still fall in the scope of the present invention.
Claims (3)
1. a kind of method that electrostrictive polymer optical chip is integrated with microwave termination circuit, it is characterized in that：In polymer electric light core
Increase after eq effect area in microwave transmission circuit in piece one section have the function of it is microwave termination with described electricity
The size of microwave transmission circuit in light action area is identical or adjoining dimensions as extended microwave transmission circuit, make by described
Extended microwave transmission circuit in microwave signal consume, realize electrostrictive polymer optical chip and microwave termination circuit
It is integrated；
The microwave transmission circuit is the polymer electric light tune using the integrated micro matched load circuit of micro-strip electrode structure
Device chip processed；
The adjoining dimensions seemingly refer to that the size of the extended microwave transmission circuit and the microwave in eq effect area pass
The difference of the size on transmission of electricity road is within ± 20%.
2. according to the method described in claim 1, it is characterized in that：Described makes by the extended microwave transmission circuit
Microwave signal consume, refer to that extended microwave transmission circuit can will be declined by the microwave signal for transmitting out in eq effect area
Subtract more than 5dB.
3. according to the method described in claim 2, it is characterized in that：The microwave signature attenuation is 5dB~20dB.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410136421.7A CN104977735B (en) | 2014-04-04 | 2014-04-04 | A kind of method that electrostrictive polymer optical chip is integrated with microwave termination circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410136421.7A CN104977735B (en) | 2014-04-04 | 2014-04-04 | A kind of method that electrostrictive polymer optical chip is integrated with microwave termination circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104977735A CN104977735A (en) | 2015-10-14 |
| CN104977735B true CN104977735B (en) | 2018-06-15 |
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| CN201410136421.7A Expired - Fee Related CN104977735B (en) | 2014-04-04 | 2014-04-04 | A kind of method that electrostrictive polymer optical chip is integrated with microwave termination circuit |
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Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU4264300A (en) * | 1999-07-02 | 2001-01-11 | Corning O.T.I. S.P.A. | Electro-optic modulators with internal impedance matching |
| FR2816719B1 (en) * | 2000-11-16 | 2003-03-28 | Centre Nat Rech Scient | BROADBAND ELECTRO-OPTICAL MODULATORS |
| US7027668B2 (en) * | 2002-05-02 | 2006-04-11 | Covega Corporation | Optical modulators with coplanar-waveguide-to-coplanar-strip electrode transitions |
| US6711312B1 (en) * | 2002-12-20 | 2004-03-23 | General Electric Company | Integrated optoelectronic circuit and method of fabricating the same |
| CN2828856Y (en) * | 2005-11-14 | 2006-10-18 | 浙江大学 | Polarization unrelated light switch based on electro-optic polymer material |
| CA2654977A1 (en) * | 2006-06-14 | 2007-12-21 | Anritsu Corporation | Optical modulator |
| JP5104805B2 (en) * | 2009-03-31 | 2012-12-19 | 住友大阪セメント株式会社 | Light control device |
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Granted publication date: 20180615 Termination date: 20210404 |