CN104952977A - Manufacturing method of inorganic thin film solar cell - Google Patents
Manufacturing method of inorganic thin film solar cell Download PDFInfo
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- CN104952977A CN104952977A CN201510247924.6A CN201510247924A CN104952977A CN 104952977 A CN104952977 A CN 104952977A CN 201510247924 A CN201510247924 A CN 201510247924A CN 104952977 A CN104952977 A CN 104952977A
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- thin film
- solar cell
- tellurium
- cadmium
- preparation
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- 239000010409 thin film Substances 0.000 title claims abstract description 56
- 238000004519 manufacturing process Methods 0.000 title abstract description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 34
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910052714 tellurium Inorganic materials 0.000 claims abstract description 27
- 239000011787 zinc oxide Substances 0.000 claims abstract description 17
- 239000011521 glass Substances 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 11
- 239000002159 nanocrystal Substances 0.000 claims abstract description 11
- 229910052793 cadmium Inorganic materials 0.000 claims abstract description 10
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims abstract description 10
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000006243 chemical reaction Methods 0.000 claims abstract description 7
- 238000002207 thermal evaporation Methods 0.000 claims abstract description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 27
- 239000010408 film Substances 0.000 claims description 16
- 238000002360 preparation method Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 14
- 229960001296 zinc oxide Drugs 0.000 claims description 13
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 9
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 claims description 8
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 6
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 claims description 6
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 238000000137 annealing Methods 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 238000000859 sublimation Methods 0.000 claims description 4
- 230000008022 sublimation Effects 0.000 claims description 4
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 claims description 3
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 claims description 3
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 claims description 3
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000005642 Oleic acid Substances 0.000 claims description 3
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 claims description 3
- 238000000637 aluminium metallisation Methods 0.000 claims description 3
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 claims description 3
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 claims description 3
- 239000002105 nanoparticle Substances 0.000 claims description 3
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 claims description 3
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 238000005092 sublimation method Methods 0.000 claims description 3
- RMZAYIKUYWXQPB-UHFFFAOYSA-N trioctylphosphane Chemical compound CCCCCCCCP(CCCCCCCC)CCCCCCCC RMZAYIKUYWXQPB-UHFFFAOYSA-N 0.000 claims description 3
- ZMBHCYHQLYEYDV-UHFFFAOYSA-N trioctylphosphine oxide Chemical compound CCCCCCCCP(=O)(CCCCCCCC)CCCCCCCC ZMBHCYHQLYEYDV-UHFFFAOYSA-N 0.000 claims description 3
- 239000004246 zinc acetate Substances 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract 3
- 229910052725 zinc Inorganic materials 0.000 abstract 3
- 239000011701 zinc Substances 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 239000002243 precursor Substances 0.000 abstract 2
- 238000002202 sandwich sublimation Methods 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 abstract 1
- 239000003446 ligand Substances 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- VEUACKUBDLVUAC-UHFFFAOYSA-N [Na].[Ca] Chemical compound [Na].[Ca] VEUACKUBDLVUAC-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- CJOBVZJTOIVNNF-UHFFFAOYSA-N cadmium sulfide Chemical compound [Cd]=S CJOBVZJTOIVNNF-UHFFFAOYSA-N 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/543—Solar cells from Group II-VI materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention relates to a manufacturing method of an inorganic thin film solar cell. The manufacturing method specifically includes: manufacturing a cadmium telluride thin film, namely in the process of manufacturing a precursor of tellurium and a cadmium precursor, reflowing at temperature of 110 DEG C for ligand replacement to obtain a cadmium telluride nanocrystal solution, and rotate-coating the cadmium telluride nanocrystal solution on ITO (indium tin oxide) glass to obtain the cadmium telluride thin film; manufacturing a tellurium, zinc and cadmium thin film, namely adopting a close space sublimation method for thin film growing in a close space sublimation to obtain the tellurium, zinc and cadmium thin film; manufacturing a zinc oxide thin film, namely preparing a zinc oxide nanocrystal solution, rotate-coating the zinc oxide nanocrystal solution on the ITO glass to obtain the zinc oxide thin film; adopting a thermal evaporation method to evaporate-plate an aluminum electrode to obtain the inorganic thin film solar cell. The manufacturing method has the advantages that the solar cell is high in conversion efficiency, and the cadmium telluride thin film and the tellurium, zinc and cadmium thin film are excellent in surface appearance and structure.
Description
Technical field
The present invention relates to a kind of preparation method of inorganic thin film solar cell, belong to new energy field.
Background technology
Along with the growth of world today's demographic and economic, energy resources day by day deficient, environment go from bad to worse and the demand of people to electric energy increasing, the development and utilization of solar energy has started upsurge in the world, this is very beneficial for the sustainable development of biological environment, therefore the whole nation, the world competitively investment research exploitation solar cell, therefore thin-film solar cells just deepens continuously in the research of people.
But, current people's Study of Thin film solar cell is mainly for organic thin film solar cell, less to the research of inorganic solar film battery, what existing existing inorganic thin film solar cell adopted is make to obtain Cadimium telluride thin film and cadmium sulphide membrane by thermal decomposition method, and the conversion efficiency of solar cell is low.
Summary of the invention
The technical problem that the present invention solves is to provide the preparation method of the high inorganic thin film solar cell of a kind of conversion efficiency.
For solving the problems of the technologies described above, technical scheme of the present invention is: a kind of preparation method of inorganic thin film solar cell, and its innovative point is: described preparation method is specific as follows:
(1) Cadimium telluride thin film is prepared: cadmium oxide, oleic acid and the trioctyl phosphine oxide ratio in 1:6:5 mixed, be heated to the presoma that clear forms cadmium, tri octyl phosphine and tellurium powder are mixed and made into the presoma of tellurium in the ratio of 5:1, tellurium presoma is injected rapidly cadmium presoma, 5min is reacted at the temperature of 260 DEG C, obtain cadmium telluride nanocrystal, then wash, add a certain amount of pyridine 110 DEG C next time stream carry out ligand-displacement and obtain solution, obtain Cadimium telluride thin film in ITO spin-on-glass;
(2) tellurium zincium vestalium thin-film is prepared: adopt close spaced sublimation method, substrate prepares tellurium zincium vestalium thin-film, and the source of employing is
, keep certain distance between source and substrate, then equipment put into close spaced sublimation stove, regulate source temperature and underlayer temperature, carry out film growth, make tellurium zincium vestalium thin-film;
(3) zinc-oxide film is prepared: be dropwise added to by the methanol solution of potassium hydroxide in the methanol solution of the zinc acetate of 60 DEG C, under constantly stirring, maintain 60 DEG C of reactions generate Zinc oxide nanoparticle, then with being dispersed in n-butanol after methanol wash, obtain zinc oxide nano-crystal solution, obtain zinc-oxide film in ITO spin-on-glass;
(4) adopt the method AM aluminum metallization electrode of thermal evaporation, obtain inorganic thin film solar cell.
Further, the distance coming from substrate in described step (2) is 20mm ~ 30mm.
Further, in described step (2), source temperature and underlayer temperature are set to 640 DEG C and 550 DEG C respectively.
Further, in described step (2), film growth set of time is 70min.
Further, growth is made make tellurium zincium vestalium thin-film and carry out annealing in process in described step (2).
Further, the substrate described in described step (2) adopts sapphire crystal.
Further, described step (1) and the ITO glass described in step (3) scribble PEDOT/PSS.
The invention has the advantages that:
(1) the present invention adopts the tellurium zincium vestalium thin-film by close spaced sublimation legal system is standby to manufacture solar cell, and conversion efficiency of solar cell is high;
(2) the present invention is when preparing tellurium zincium vestalium thin-film, and the distance of source and substrate, temperature and film growth time controling are good, effectively ensures the quality of the tellurium zincium vestalium thin-film of preparation;
(3) the present invention is after having prepared tellurium zincium vestalium thin-film, carries out annealing modification to it, ensure tellurium zincium vestalium thin-film surface topography and structure excellent;
(4) substrate that the present invention adopts when preparing tellurium zincium vestalium thin-film is sapphire crystal, has good photoelectricity and mechanical performance.
(5) the present invention is when preparing Cadimium telluride thin film and zinc-oxide film, ITO glass used scribbles PEDOT/PSS, the environmental stability had, and under dopant states transparent shape.
Embodiment
The invention discloses a kind of preparation method of inorganic thin film solar cell, described preparation method is specific as follows:
(1) Cadimium telluride thin film is prepared: cadmium oxide, oleic acid and the trioctyl phosphine oxide ratio in 1:6:5 mixed, be heated to the presoma that clear forms cadmium, tri octyl phosphine and tellurium powder are mixed and made into the presoma of tellurium in the ratio of 5:1, tellurium presoma is injected rapidly cadmium presoma, 5min is reacted at the temperature of 260 DEG C, obtain cadmium telluride nanocrystal, then wash, add a certain amount of pyridine 110 DEG C next time stream carry out ligand-displacement and obtain cadmium telluride nanocrystal solution, obtain Cadimium telluride thin film in the ITO spin-on-glass scribbling PEDOT/PSS; Wherein PEDOT/PSS is polystyrolsulfon acid, is dark blue liquid, and ito glass is on the basis of sodium calcium base or silicon boryl substrate glass, plates the glass that indium oxide layer tin film processes.
(2) tellurium zincium vestalium thin-film is prepared: adopt close spaced sublimation method, substrate prepares tellurium zincium vestalium thin-film, and the source of employing is
,
for a kind of wide bandgap compound semiconductor crystal, substrate selects sapphire crystal, the distance of 20mm ~ 30mm is kept between source and substrate, then equipment is put into close spaced sublimation stove, regulate source temperature and underlayer temperature, source temperature and underlayer temperature are set to 640 DEG C and 550 DEG C respectively, then film growth 70min, make tellurium zincium vestalium thin-film, will make film carries out annealing in process;
(3) zinc-oxide film is prepared: be dropwise added to by the methanol solution of potassium hydroxide in the methanol solution of the zinc acetate of 60 DEG C, under constantly stirring, maintain 60 DEG C of reactions generate Zinc oxide nanoparticle, then with being dispersed in n-butanol after methanol wash, obtain zinc oxide nano-crystal solution, obtain zinc-oxide film in the ITO spin-on-glass scribbling PEDOT/PSS;
(4) adopt the method AM aluminum metallization electrode of thermal evaporation, obtain inorganic thin film solar cell.
More than show and describe general principle of the present invention and principal character.The technical staff of the industry should understand; the present invention is not restricted to the described embodiments; what describe in above-described embodiment and specification just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.Application claims protection range is defined by appending claims and equivalent thereof.
Claims (7)
1. a preparation method for inorganic thin film solar cell, described preparation method is specific as follows:
(1) Cadimium telluride thin film is prepared: cadmium oxide, oleic acid and the trioctyl phosphine oxide ratio in 1:6:5 mixed, be heated to the presoma that clear forms cadmium, tri octyl phosphine and tellurium powder are mixed and made into the presoma of tellurium in the ratio of 5:1, tellurium presoma is injected rapidly cadmium presoma, 5min is reacted at the temperature of 260 DEG C, obtain cadmium telluride nanocrystal, then wash, add a certain amount of pyridine 110 DEG C next time stream carry out ligand-displacement and obtain solution, obtain Cadimium telluride thin film in ITO spin-on-glass;
(2) tellurium zincium vestalium thin-film is prepared: adopt close spaced sublimation method, substrate prepares tellurium zincium vestalium thin-film, and the source of employing is, keep certain distance between source and substrate, then equipment is put into close spaced sublimation stove, regulate source temperature and underlayer temperature, carry out film growth, make tellurium zincium vestalium thin-film;
(3) zinc-oxide film is prepared: be dropwise added to by the methanol solution of potassium hydroxide in the methanol solution of the zinc acetate of 60 DEG C, under constantly stirring, maintain 60 DEG C of reactions generate Zinc oxide nanoparticle, then with being dispersed in n-butanol after methanol wash, obtain zinc oxide nano-crystal solution, obtain zinc-oxide film in ITO spin-on-glass;
(4) adopt the method AM aluminum metallization electrode of thermal evaporation, obtain inorganic thin film solar cell.
2. the preparation method of inorganic thin film solar cell according to claim 1, is characterized in that: the distance coming from substrate in described step (2) is 20mm ~ 30mm.
3. the preparation method of inorganic thin film solar cell according to claim 1, is characterized in that: in described step (2), source temperature and underlayer temperature are set to 640 DEG C and 550 DEG C respectively.
4. the preparation method of inorganic thin film solar cell according to claim 1, is characterized in that: in described step (2), film growth set of time is 70min.
5. the preparation method of inorganic thin film solar cell according to claim 1, is characterized in that: growth is made make tellurium zincium vestalium thin-film and carry out annealing in process in described step (2).
6. the preparation method of inorganic thin film solar cell according to claim 1, is characterized in that: the substrate described in described step (2) adopts sapphire crystal.
7. the preparation method of inorganic thin film solar cell according to claim 1, is characterized in that: described step (1) and the ITO glass described in step (3) scribble PEDOT/PSS.
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---|---|---|---|---|
CN1631793A (en) * | 2004-11-05 | 2005-06-29 | 中国科学院长春应用化学研究所 | Synthesis method for cadmium selenide and cadmium telluride quantum dot |
CN102544230A (en) * | 2012-02-22 | 2012-07-04 | 上海大学 | Method for growing variable forbidden bandwidth cadmium (Cd1)-x zinc (Zn) x tellurium (Te) film |
CN102629645A (en) * | 2012-04-26 | 2012-08-08 | 上海大学 | Method for producing novel CdS-CdZnTe thin-film solar cell |
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US8298856B2 (en) * | 2008-07-17 | 2012-10-30 | Uriel Solar, Inc. | Polycrystalline CDTE thin film semiconductor photovoltaic cell structures for use in solar electricity generation |
CN102810595A (en) * | 2011-06-03 | 2012-12-05 | 中国科学院半导体研究所 | Organic process based preparation method for inorganic thin-film solar cells |
CN104409637A (en) * | 2014-11-20 | 2015-03-11 | 中国科学院半导体研究所 | Solar cell structure based on trapezoidal aluminum nano-gate type electrode and manufacturing method thereof |
-
2015
- 2015-05-15 CN CN201510247924.6A patent/CN104952977A/en active Pending
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