CN104950355B - A kind of fire polishing auxiliary induction coupled plasma job operation - Google Patents
A kind of fire polishing auxiliary induction coupled plasma job operation Download PDFInfo
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- CN104950355B CN104950355B CN201510389611.4A CN201510389611A CN104950355B CN 104950355 B CN104950355 B CN 104950355B CN 201510389611 A CN201510389611 A CN 201510389611A CN 104950355 B CN104950355 B CN 104950355B
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- coupled plasma
- induction coupled
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/006—Other surface treatment of glass not in the form of fibres or filaments by irradiation by plasma or corona discharge
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- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
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- Arc Welding In General (AREA)
Abstract
A kind of fire polishing auxiliary induction coupled plasma job operation, it belongs to the technical field of precision optics part processing.Its step one: start processing induction coupled plasma torch and fire polishing induction coupled plasma torch; Step 2: make the fire polishing induction coupled plasma torch active region of fire polishing induction coupled plasma torch be positioned on front side of the processing induction coupled plasma torch active region direction of motion of processing induction coupled plasma torch; Step 3: the upper surface work piece heat absorption of work piece, micro-crack occurs to melt repair; Then process induction coupled plasma torch and removal processing is carried out to fire polishing induction coupled plasma torch active region.The present invention is adding man-hour to optical mirror slip, use the pre-service of fire polishing induction coupled plasma torch, waviness error condition lower part can not be produced and repair micro-crack, and then use atmosphere plasma processing, avoid plasma process and damage the effect opened, achieve high-quality optical manufacturing.
Description
Technical field
The invention belongs to the technical field of precision optics part processing.
Background technology
In traditional optical processing, there is damaged surface layer in surface, there is a large amount of micro-crack.Inductively coupled plasma processing optical eyeglass, removes speed high, does not produce damaged surface layer, is a kind of without subsurface stratum damage job operation.Because optical mirror slip last process to be processed is grinding or additive method, there is metamorphic layer in surface.Inductively coupled plasma adds can make these micro-cracks progressively open man-hour, causes lens surface quality degradation.
Summary of the invention
The object of this invention is to provide a kind of fire polishing auxiliary induction coupled plasma job operation, be add man-hour to solve existing inductively coupled plasma, crizzle is progressively opened, the problem of lens surface quality degradation.
Described object is realized by following scheme: described a kind of fire polishing auxiliary induction coupled plasma job operation, and its method step is:
Step one: start the processing induction coupled plasma torch 1 on two torch coupling assembling 3 and fire polishing induction coupled plasma torch 2, the working gas that passes into of processing induction coupled plasma torch 1 is fluoro-gas, and the gas that fire polishing induction coupled plasma torch 2 passes into is not fluoro-gas;
Step 2: the processing induction coupled plasma torch active region 1-1 of the fire polishing induction coupled plasma torch active region 2-1 of fire polishing induction coupled plasma torch 2 and processing induction coupled plasma torch 1 is on the upper surface of work piece 4, and make the fire polishing induction coupled plasma torch active region 2-1 of fire polishing induction coupled plasma torch 2 be positioned on front side of the processing induction coupled plasma torch active region 1-1 direction of motion of processing induction coupled plasma torch 1;
Step 3: start to process the upper surface of work piece 4, the upper surface of work piece 4 is when fire polishing induction coupled plasma torch 2, the fluorine-free plasma of high temperature is ejected into the upper surface of work piece 4, work piece 4 absorbs heat, micro-crack occurs to melt repair, forms fire polishing induction coupled plasma torch active region 2-1; Work piece 4 continues motion, and processing induction coupled plasma torch 1 couple of fire polishing induction coupled plasma torch active region 2-1 carries out removal processing, realizes high-quality processing.
The present invention is adding man-hour to optical mirror slip, uses the pre-service of fire polishing induction coupled plasma torch, can not produce waviness error, part repairs micro-crack, and then use atmosphere plasma processing, avoid plasma process and damage the effect opened, achieve high-quality optical manufacturing.
The present invention is compared with the accurate work method of existing optical element, and advantage is:
1, method of the present invention is based on inductively coupled plasma job operation, is a kind of contactless chemical processes, can not introduce subsurface stratum damage; And efficiency comparatively traditional optical Precision Machining is high;
2, the method introduces the repair of inductively coupled plasma fire polishing to optical element surface damage, and in conjunction with plasma process feature, compensate for the shortcoming that atmospheric plasma processing expands micro-crack, realize high-quality processing;
3, the processing induction coupled plasma torch in the method is identical with the structure of fire polishing induction coupled plasma torch, passes into gas difference; Simplify the structure design, reduces cost.
Accompanying drawing explanation
Fig. 1 is the one-piece construction schematic diagram of the device that the inventive method relates to.
Embodiment
Embodiment one: shown in composition graphs 1, its method step is:
Step one: start the processing induction coupled plasma torch 1 on two torch coupling assembling 3 and fire polishing induction coupled plasma torch 2, the working gas that passes into of processing induction coupled plasma torch 1 is fluoro-gas, and the gas that fire polishing induction coupled plasma torch 2 passes into is not fluoro-gas;
Step 2: the processing induction coupled plasma torch active region 1-1 of the fire polishing induction coupled plasma torch active region 2-1 of fire polishing induction coupled plasma torch 2 and processing induction coupled plasma torch 1 is on the upper surface of work piece 4, and make the fire polishing induction coupled plasma torch active region 2-1 of fire polishing induction coupled plasma torch 2 be positioned on front side of the processing induction coupled plasma torch active region 1-1 direction of motion of processing induction coupled plasma torch 1;
Step 3: start to process the upper surface of work piece 4, the upper surface of work piece 4 is when fire polishing induction coupled plasma torch 2, the fluorine-free plasma of high temperature is ejected into the upper surface of work piece 4, work piece 4 absorbs heat, micro-crack occurs to melt repair, forms fire polishing induction coupled plasma torch active region 2-1; Work piece 4 continues motion, and processing induction coupled plasma torch 1 couple of fire polishing induction coupled plasma torch active region 2-1 carries out removal processing, realizes high-quality processing.
Described fire polishing induction coupled plasma torch 2 passes into working gas and is only high-purity argon gas, applies the power of 900W ~ 1500W.
Claims (2)
1. a fire polishing auxiliary induction coupled plasma job operation, is characterized in that its method step is:
Step one: start the processing induction coupled plasma torch (1) on two torch coupling assembling (3) and fire polishing induction coupled plasma torch (2), processing induction coupled plasma torch (1) working gas that passes into is fluoro-gas, and the gas that fire polishing induction coupled plasma torch (2) passes into is not fluoro-gas;
Step 2: the processing induction coupled plasma torch active region (1-1) of the fire polishing induction coupled plasma torch active region (2-1) of fire polishing induction coupled plasma torch (2) and processing induction coupled plasma torch (1) is all on the upper surface of work piece (4), and make the fire polishing induction coupled plasma torch active region (2-1) of fire polishing induction coupled plasma torch (2) be positioned on front side of processing induction coupled plasma torch active region (1-1) direction of motion of processing induction coupled plasma torch (1);
Step 3: start to process the upper surface of work piece (4), the upper surface of work piece (4) is when fire polishing induction coupled plasma torch (2), the fluorine-free plasma of high temperature is ejected into the upper surface of work piece (4), work piece (4) absorbs heat, micro-crack occurs to melt repair, forms fire polishing induction coupled plasma torch active region (2-1); Work piece (4) continues motion, and processing induction coupled plasma torch (1) carries out removal processing to fire polishing induction coupled plasma torch active region (2-1), realizes high-quality processing.
2. a kind of fire polishing auxiliary induction coupled plasma job operation according to claim 1, is characterized in that described fire polishing induction coupled plasma torch (2) passes into working gas and is only high-purity argon gas, applies the power of 900W ~ 1500W.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510389611.4A CN104950355B (en) | 2015-07-06 | 2015-07-06 | A kind of fire polishing auxiliary induction coupled plasma job operation |
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| CN201510389611.4A CN104950355B (en) | 2015-07-06 | 2015-07-06 | A kind of fire polishing auxiliary induction coupled plasma job operation |
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| CN104950355B true CN104950355B (en) | 2016-04-27 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107200464A (en) * | 2017-06-27 | 2017-09-26 | 中国工程物理研究院激光聚变研究中心 | Crackle fuser and its method |
| CN108911532B (en) * | 2018-09-29 | 2021-06-11 | 中国工程物理研究院激光聚变研究中心 | Workpiece surface damage repairing method and system |
| CN114900942A (en) * | 2022-04-12 | 2022-08-12 | 南方科技大学 | Device and method for repairing surface damage of element |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102291922B (en) * | 2011-07-22 | 2013-03-20 | 中国科学院空间科学与应用研究中心 | Ion generating device |
| CN103237402B (en) * | 2013-05-14 | 2015-10-21 | 哈尔滨工业大学 | Atmosphere plasma processing unit (plant) |
| CN103237405B (en) * | 2013-05-14 | 2015-05-06 | 哈尔滨工业大学 | Integrated plasma generation device |
| CN104386922B (en) * | 2014-09-28 | 2016-12-07 | 中国科学院长春光学精密机械与物理研究所 | Heavy caliber high steepness space optics non-spherical reflector vertical type method for processing and device |
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